WE ARE SILICON WE OFFER - Pure Wafer
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2240 RINGWOOD AVENUE, SAN JOSE, CA 95131 p (408) 945-8112 f (408) 945-0765 wrsmaterials.com SOI WAFERS In addition to SEMI Standard silicon wafers, we offer a broad range of specialty products that include: thick silicon wafers for LED makers; thick thermal oxide for telecommunications applications; bonded SOI wafers for MEMS devices; high resistivity wafers for RF applications; attractively priced “filler” wafers for CVD deposition processes; and most recently full support for the emerging 450mm silicon market. WRS Materials is a silicon supplier and service company that supports large and small users of silicon products. With our extensive manufacturing capabilities at three U.S. facilities, we constantly engage in new and challenging projects with our customers, many of whom are pursuing emerging technologies. WE OFFER Silicon Wafers SEMI Standard silicon wafers with diameters from 2” to 450mm Silicon wafers with customized diameter, thickness & surface finish Ultra thin & thick silicon wafers SOI bonded wafers Reclaim Services Silicon Wafers Specialty Substrates Other Semiconductor Materials Germanium, SiC, Sapphire, Glass, & Quartz Value Added Service Full Inventory Access Online Consignment Program Wafer Management System Shopping Cart Special Services Thermal (Dry & Wet) Oxide PECVD Oxide Silicon Nitrides Polysilicon BPSG Black Diamond Silicon Carbide Photoresist Coatings Photolithography Polyimide Coatings Copper Electroplating Epitaxial Silicon (Si on Si & Si on Sapphire) Sputtered Metals Ti, Ta, Cu, Al, Al/Cu, Al/Si, TiN, Ti/W, W, W/Si, Cr Pt, Au NEWSLETTER 2014 A Silicon on Insulator (SOI) wafer is a stack comprising a top device layer of silicon, a thin layer of buried oxide and a thick handle silicon wafer. This structure, which isolates the active layer from the substrate, is a primary choice for manufacturing applications such as MEMS sensors, high voltage power switching devices, and radio frequency (RF) components. WRS has manufactured SOI for several years. Our direct bonding and SOI manufacturing process is similar to that being used by several other SOI manufacturers, however WRS has developed its own edge treatment process with precise control of edge terrace shape, width and thickness. Thanks to our strategic partnerships with major silicon suppliers, we offer custom design SOI wafers with a variety of materials including low defect or high resistivity crystals. We also offer direct bonding of silicon to silicon wafers. Schematic diagram of bonded SOI wafer with cross section of wafer edge after processing using new WRS edge shaping process Front side image of the wafer edge – near notch with the new edge shaping process. WE SPECIALIZE IN · Wafer Diameters – 100mm to 300mm · Device Layers – 2µm to >300µm · Oxide Layers – 400Å to 2µm · Handle Wafers – 400µm to 1 mm In addition to the above specifications, our engineering team is open to work with our customers on other variations of these parameters. WE ARE SILICON SEMI STANDARD WAFERS IN STOCK & AVAILABLE AT OUR ONLINE STORE shopping.netsuite.com/ wrsmaterials I S O 9 0 0 1 : 2008 REGISTERED
Transcript of WE ARE SILICON WE OFFER - Pure Wafer
2240 RINGWOOD AVENUE, SAN JOSE, CA 95131p (408) 945-8112 f (408) 945-0765 wrsmaterials.com
SOI WAFERS
In addition to SEMI Standard silicon wafers, we offer a broad range of specialty products that include: thick silicon wafers for LED makers; thick thermal oxide for telecommunications applications; bonded SOI wafers for MEMS devices; high resistivity wafers for RF applications; attractively priced “filler” wafers for CVD deposition processes; and most recently full support for the emerging 450mm silicon market.
WRS Materials is a silicon supplier and service company that supports large and small users of silicon products. With our extensive manufacturing capabilities at three U.S. facilities, we constantly engage in new and challenging projects with our customers, many of whom are pursuing emerging technologies.
WE OFFER
Silicon Wafers SEMI Standard silicon wafers with diameters from 2” to 450mm
Silicon wafers with customized diameter, thickness & surface finish
Ultra thin & thick silicon wafers
SOI bonded wafers
Reclaim ServicesSilicon Wafers
Specialty Substrates
Other Semiconductor MaterialsGermanium, SiC, Sapphire,
Glass, & Quartz
Value Added ServiceFull Inventory Access Online
Consignment Program
Wafer Management System
Shopping Cart
Special ServicesThermal (Dry & Wet) Oxide
PECVD Oxide
Silicon Nitrides
Polysilicon
BPSG
Black Diamond
Silicon Carbide
Photoresist Coatings
Photolithography
Polyimide Coatings
Copper Electroplating
Epitaxial Silicon
(Si on Si & Si on Sapphire)
Sputtered Metals Ti, Ta, Cu, Al, Al/Cu, Al/Si, TiN,
Ti/W, W, W/Si, Cr Pt, Au
N E W S L E T T E R 2014
A Silicon on Insulator (SOI) wafer is a stack comprising a top device layer of silicon, a thin layer of buried oxide and a thick handle silicon wafer. This structure, which isolates the active layer from the substrate, is a primary choice for manufacturing applications such as MEMS sensors, high voltage power switching devices, and radio frequency (RF) components.
WRS has manufactured SOI for several years. Our direct bonding and SOI manufacturing process is similar to that being used by several other SOI manufacturers, however WRS has developed its own edge treatment process with precise control of edge terrace shape, width and thickness.
Thanks to our strategic partnerships with major silicon suppliers, we offer custom design SOI wafers with a variety of materials including low defect or high resistivity crystals. We also offer direct bonding of silicon to silicon wafers.
Schematic diagram of bonded SOI wafer with cross section of wafer edge after processing using new WRS edge shaping process
Front side image of the wafer edge – near notch with the new edge shaping process.
WE SPECIALIZE IN
· Wafer Diameters – 100mm to 300mm
· Device Layers – 2µm to >300µm
· Oxide Layers – 400Å to 2µm
· Handle Wafers – 400µm to 1 mm
In addition to the above specifications, our engineering team is open to work with our customers on other variations of these parameters.
WE ARE SILICON
SEMI STANDARD WAFERS IN STOCK & AVAILABLE AT OUR ONLINE STORE
shopping.netsuite.com/wrsmaterials
I SO 9001:2008R E G I S T E R E D
ISO 9001:2008
ISO 9001:2008R E G I S T E R E D
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Important Facts
wrsmaterials.com
2240 RINGWOOD AVENUE, SAN JOSE, CA 95131p (408) 945-8112 f (408) 945-0765 wrsmaterials.com
We are a manufacturing and service company offering a wide range of products and value added services.
Our primary focus is on silicon products, however we do support other microelectronics materials as well.
Our goal is to provide one stop shopping for all your material related needs.
We support our customers’ needs through multiple exclusive and non-exclusive partnerships with material vendors & service providers.
We offer full service before, during, and after each sale.
We offer same day delivery service to local customers.
We offer consignment inventory to help our customers control their cost.
Through our multiple locations we can offer very efficient, in-per-son support for our customers.
Customers can search available inventory through our online shopping cart for wafers that ship within 24 hours.
2240 RINGWOOD AVENUE, SAN JOSE, CA 95131p (408) 945-8112 f (408) 945-0765 wrsmaterials.com
N E W S L E T T E R 2014
LAP | GRIND | POLISH | CLEAN
Such services can be applied to customer-supplied wafers including wafers with CMOS structures to be bonded to a different substrate for MEMS applications. We also offer thick silicon wafers up to 2mm in thickness, while still maintaining very tight TTV specs. For example, such wafers with <111> orientation are often used as a substrate for GaN epitaxy.
WRS offers a polishing process to restore the surface of thinned wafers to a mirror finish. We furnish lapping, grinding, polishing, and cleaning services for wafers of all diameters and many custom shaped wafers. We deliver wafers that are flatter and cleaner than conventional processes produce because we use high-quality slurry and a multi-step cleaning process. Our Class 10-100 cleanrooms and 100 percent inspection of final products ensure purity and quality.
WRS Materials produces silicon wafers, a key component in the fabrication of integrated circuits and other micro-devices. In addition, WRS Materials specializes in precision thinning services on wafers of 100mm to 300mm diameters, offering single-side or double-side grinding. The wafers can subsequently then be single-side or double-side polished down to 50μm thickness.
THICK THERMAL OXIDES + MOREWRS Materials has taken the necessary steps to improve our oxide department’s capacity and capabilities over the past year.
We now offer thermal oxides with thicknesses of up to 15µm and standard uniformity of <±5% for wafer diameters ranging from 2” to 450mm.
Our standard metrology is based on 9-point measurements, however with our new F50-450 Filmetrics tool we also offer advanced wafer mapping using thousand-point measurements.
In addition, we offer oxides with tighter uniformity down to <±2%, combinations of dry and wet oxides in which high dielectric strength is expected for thick oxide, as well as thermal annealing in nitrogen ambient up to 1100°C. Testing F50-450 Filmetrics Tool
