Micro Electro Mechanical Systems (MEMS) Class Materials - Lecture 01
Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS Sensor) of Faculty... ·...
Transcript of Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS Sensor) of Faculty... ·...
Faculty Development Program
on Micro-Electro-Mechanical
Systems (MEMS Sensor) Report
MEMS sensors have been dominating the consumer products such as mobile phones, music players and
other portable devices. With India planning for Smart Cities, sensors and their design would be very
important for data acquisition and monitoring. Designing sensors has become ubiquitous with any small
electronic gadget. IntelliSuite is the industry-leading tool set for MEMS layout design, advanced process
simulation, FEA, parametric analysis, system simulation, packaging analysis.
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About GTU
Gujarat Technological University (International Innovative University), commonly
referred as GTU, is a state wide institution affiliating many engineering, pharmacy, and
management colleges and varsities across the western Indian districts of Gujarat. GTU
has been working jointly with industries through GTU Innovation Sankuls (Every
college is a member of the Sankuls in its area). It has been working with the students
through the GTU Innovation Clubs, Open Source Technology Clubs, IPR, CiC3, and
S4 Extension Centers etc. To foster innovative ideas and to explore new horizons in
the field of Engineering, Community Innovation & Co-Creation Centre organizes
various workshops, hackathon’s, challenges and Faculty Development Programs.
The Programme
Community Innovation and Co-Creation Centre (CiC3) has announced Faculty
Development Program on Design and Simulation of MEMS Sensor (Micromirror,
Accelerometer & Microphone).
MEMS sensors have been dominating the consumer products such as mobile phones,
music players and other portable devices. With India planning for Smart Cities, sensors
and their design would be very important for data acquisition and monitoring.
Designing sensors has become ubiquitous with any small electronic gadget. IntelliSuite
is the industry-leading tool set for MEMS layout design, advanced process simulation,
FEA, parametric analysis, system simulation, packaging analysis.
With users in over 30 countries, IntelliSense is the largest MEMS software vendor with
its own in-house fabrication facility. IntelliSense also provides a global One Stop
MEMS Solution for universities, blue-chip companies and start-ups with its custom
design, consulting and fabrication services.
The 3 day workshop was for students and faculty in the departments of Electronics and
Communication Engineering, Instrumentation Engineering, Telecommunication
Engineering, Mechanical Engineering, Electrical and Electronics Engineering,
Biomedical Engineering and allied branches.
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Introduction
Microelectromechanical systems (MEMS) integrate mechanical and electrical
components and have feature sizes ranging from micrometers to millimeters. They may
be fabricated using methods similar to those used to construct integrated circuits and
they have the potential of providing significant cost advantages when batch fabricated.
Their size also makes it possible to integrate them into a wide range of systems. Feature
sizes may be made with size on the order of the wavelength of light, thus making them
attractive for many optical applications. Microsensors (e.g., accelerometers for
automobile crash detection and pressure sensors for biomedical applications) and micro
actuators (e.g., for moving arrays of micro mirrors in projection systems) are examples
of commercial applications of MEMS.
Microelectromechanical systems (MEMS) are micrometer-scale devices that integrate
electrical and mechanical elements. They have been used in diverse applications, from
display technologies to sensor systems to optical networks. MEMS are attractive for
many applications because of their small size and weight, which allow systems to be
miniaturized.
The sensors in MEMS gather information from the environment through measuring
mechanical, thermal, biological, chemical, optical, and magnetic phenomena. The
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electronics then process the information derived from the sensors and through some
decision making capability direct the actuators to respond by moving, positioning,
regulating, pumping, and filtering, thereby controlling the environment for some
desired outcome or purpose. The advantages of semiconductor IC manufacturing such
as low cost mass production, reliability are also integral to MEMS devices.
The size of MEMS sub-components is in the range of 1 to 100 micrometers and the
size of MEMS device itself measure in the range of 20 micrometers to a millimeter.
The event was commenced with the welcome note by Dr. Apurv Raval Deputy director
GTU. The dignitaries of the FDP were included Dr. Geetha Prakash, Mr. Sripadaraja
K.. Mr. Mitesh Solanki, Ms. Tosha Shukla, Ms. Rutika Ghariya Assistant Professor
Gujarat Technological University. The workshop was started right after the inaugural
address by Dr. Apurv Raval, Deputy Director of Gujarat Technological University. All
the dignitaries expressed their views while explaining the importance of the FDP and
MEMS sensor.
Day 1, Dr. Geetha Prakash explained about importance of Micro Electro-Mechanical
Systems, why need MEMS sensor, Application of MEMS sensor in different domain:
Automotive domain, Consumer domain, Industrial domain, Military, Biomedical,
Some of the advantages of MEMS devices.
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This vision of MEMS whereby microsensors, microactuators and microelectronics and
other technologies, can be integrated onto a single microchip is expected to be one of
the most important technological breakthroughs of the future. This will enable the
development of smart products by augmenting the computational ability of
microelectronics with the perception and control capabilities of microsensors and
microactuators. Microelectronic integrated circuits can be thought of as the "brains" of
a system and MEMS augments this decision-making capability with "eyes" and "arms",
to allow microsystems to sense and control the environment. Sensors gather
information from the environment through measuring mechanical, thermal, biological,
chemical, optical, and magnetic phenomena.
The electronics then process the information derived from the sensors and through
some decision making capability direct the actuators to respond by moving,
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positioning, regulating, pumping, and filtering, thereby controlling the environment for
some desired outcome or purpose. Furthermore, because MEMS devices are
manufactured using batch fabrication techniques, similar to ICs, unprecedented levels
of functionality, reliability, and sophistication can be placed on a small silicon chip at
a relatively low cost. MEMS technology is extremely diverse and fertile, both in its
expected application areas, as well as in how the devices are designed and
manufactured. Already, MEMS is revolutionizing many product categories by enabling
complete systems-on-a-chip to be realized.
Mr. Sripadaraja K explained about design of a capacitive accelerometer from initial
system-level design exploration, through fabrication processing and device-level
analysis. He also explained analyze the accelerometer, developed and discuss the
benefits of IntelliSuite when it comes to MEMS-based accelerometer design. Begin the
design exploration in SYNPLE, the schematic-based simulator. Analyses can be
performed very quickly in this tool, making it ideal for the initial design stages. From
the mask layout automatically generate a 3D meshed model to be used for finite
element analysis.
Day 2, Dr. Geetha Prakash explained about importance of Optical Sensors. Optics and
photonics are among these research fields impacted by MEMS techniques. Optical
MEMS has created a new fabrication paradigm for optical devices and systems.
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These micro optical devices and systems are inherently suited for cost effective wafer
scale manufacturing as the processes are derived from the semiconductor industry. The
ability to steer or direct light is one of the key requirements in optical MEMS. The
displays were the main driving force for the development of micromirror arrays.
Portable digital displays are common places and head mount displays are now
commercially available.
Mr. Sripadaraja K explained about design and fabrication technology like surface
micromachining, bulk micromachining, and molding, Micromodel Extraction,
Simulation in SYNPLE and Micro Mirror array Simulation and Visualization.
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He also explained on-chip actuation of microsystems has been a particularly
challenging aspect of MEMS development. Common macro-level actuation
approaches, such as hydraulics, pneumatics, electric motors, internal combustion
engines and turbines, are either too difficult to fabricate at the micro level or do not
work well at that scale. Electrostatic attraction is one approach that has been widely
used for actuation of microsystems. While electrostatic actuation is suitable for many
applications, some systems require either lower voltages or higher output forces.
Electrostatic and thermal actuation approaches are described in more detail.
Day 3, Dr. Geetha Prakash explained about importance of Optical Sensor microphone.
The application of MEMS (Micro Electro-Mechanical Systems) technology to
microphones has led to the development of small microphones with very high
performance. MEMS microphones offer high SNR, low power consumption, good
sensitivity, and are available in very small packages that are fully compatible with
surface mount assembly processes. MEMS microphones exhibit almost no change in
performance after reflow soldering and have excellent temperature characteristics.
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She also explained MEMS microphones use acoustic sensors that are fabricated on
semiconductor production lines using silicon wafers and highly automated
processes. Layers of different materials are deposited on top of a silicon wafer and
then the unwanted material is then etched away, creating a moveable membrane and a
fixed backplate over a cavity in the base wafer. The sensor backplate is a stiff
perforated structure that allows air to move easily through it, while the membrane is a
thin solid structure that flexes in response to the change in air pressure caused by sound
waves.
Mr. Sripadaraja K explained about design and fabrication process, Process flow sheet
in IntelliFab, Material properties, Boundary Conditions, sensitivity and Measurement
of capacitance.
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Valedictory Session
Valedictory session of the program was graced by the presence of Dr. Mihir Shah
(Professor, LD College of Engineering, Ahmedabad). He took eager interest in the
MEMS sensor designed & developed by students and faculty members during the
workshop and appreciated their dedication & effort. He also motivated students to keep
looking for opportunities where they can utilize their learning and can get chance to
implement what is demonstrated during the three days of workshop.
Reported By
Mitesh Solanki
Assistant Professor
GTU Sensor Lab, CiC3, GTU