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18 July 2001 Work in Progress – Not for Publication 1 ITRS Factory Integration Technology Working Group (FITWG) Industry Presentation 18 July 2001 Michio.
2002 Factory Integration Scope Includes Wafer, Chip and Product Manufacturing Wafer Mfg Chip Mfg Product Mfg Distribution The Factory FEOL BEOL Probe/Test.
ITRS Conference July 2007, San Francisco, CA1 2007 ITRS DRAFT DO NOT PUBLISH ITRS Factory Integration (FI) Update Mani Janakiram July 2007 San Francisco,
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Accelerating Manufacturing Productivity Copyright ©2009 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International.
09/04/03 1 ITRS 2003 Factory Integration Chapter Material Handling Backup Section Details and Assumptions for Technology Requirements and Potential Solutions.
1 2003 ITRS Factory Integration Factory Information & Control Systems (FICS) Backup Foils.
