Selfsys, Nano-Tera 2013, Bern

7/28/2019 Selfsys, Nano-Tera 2013, Bern

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SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems!


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Rational: Assembly challenge of N/MEMS!

Today!

Many different kinds of micro/nano devices, MEMS, S&A,CMOS, OLED, etc!

The challenge of tomorrow!

Finding a way to assemble thebricks into functional micro/nano-systems!

2


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OlgacErgenemann

(ETHZ)

ChristianPeters(ETHZ)

FelixSchill(EPFL)

GillesCherix(ICARE)

NicolasSpencer(ETHZ)

LaurentSciboz(ICARE)

BradleyNelson(ETHZ)

AlcherioMartinoli

(EPFL)

JuergenBrugger(EPFL)

MaurizioGullo(EPFL)

VenkyNagaiyanallur

(ETHZ)

GrgoryMermoud(EPFL)

LoicJacot-Descombes(EPFL)

MassimoMastrangeli(EPFL)

JonasGoldowsky

(CSEM)

ChristopherHierold(ETHZ)

HelmutKnapp(CSEM)

CathreinHckstdt

(ETHZ)


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Assembling techniques & case studies!

5SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems!


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Outline!

SELFSYS objectives!

Methodology and team!

MEMS fabrication!

Inkjet printing, magnetic microcapsules, surfacefunctionalization!

Fluid-mediated parallel assembly, yield!

Control system, modeling & automation!

Liquid encapsulation & release! Target applications!


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Microcapsules made by SU-8 photolithography!

Bi-color cylinders!

Half-capsules!

!

!

!

!

!

!

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Hydrophilic

HydrophobicHydrophobic Hydrophilic

Si wafer, surface activation!

Blue SU-8! Transparent SU-8!

Exposure and bake!

SU-8 development!

Surface functionalization!

Release!

Hollow part!

PhDthesis2013Jacot-Descombes


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SU-8 hemispheres by inkjet printing!

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900hemispheres

Angle:902

Yieldabove98%

SEM images

Shape prediction and experimental results!

Inkjet printing process!

Jacot-Descombesetal.JMM2012


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Hollow hemispheres!

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300m

SEM image

SEM image

50m

1mm

Optical image

100m

Silicon confinement platforms

and central pillars! Inkjet printed half-capsules!

Jacot-Descombes,IEEENEMS2013


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Fabrication of magnetic half capsules!

Super-paramagnetic nanoparticlesembedded in uncured polymer matrix!

Inkjet printing of the magnetic composite!

Alignment of nanoparticles by applyingmagnetic fields!

Thermal curing for fabrication of features

beyond exposable resist thickness!

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Ink-Jet Printing of MPC Particle Alignment

Support

H

Thermal Curing

160C

Support Support

100m 100m 100m

H

Ergenemannetal(inprep)


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Fabrication of magnetic half capsules!

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D=200m

30 mT appliedParallel to the alignment

30 degrees to thealignmentFIB cuts

No magnetic field appliedNo change with direction

Good dispersion

2m

Ergenemannetal(inprep)


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Polyacrylicacid(PAA)coupledto

ssDNAthroughEDCchemistry.

PAAMW:1080000g/mol

PAA-g-ssSNA

100m

Fluorescencemicroscopicimageofa

paernoflabeledDNAonSU8

UsingDNAhybridizaonasa

meanstoself-assembly

SU-8 surface functionalized with DNA!

Nagaiyanalluretal(inprep)


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Outline!

SELFSYS objectives!


MEMS fabrication! Inkjet printing, magnetic microcapsules, surface

functionalization!





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Self-assembled pairs of SU-8 micro-cylinders!

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Diameter

100micrometers


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Fluid-mediated self-assembly!

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Opticalimages Release in IPA

J-Descombes,Marnetal(inprep)

Study with hundreds of bicolor cylinders (100 m):!

Micro-capsules with liquid encapsulation:!


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Microcapsules with improved sealing!

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Immiscible liquid energy minimization (ILEM) polymer deposition

J-Descombesetal.MNE2012


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Studying the assembly dynamics ...!

Funconalised

SU8testMEMS

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...bymul$pleopcaltraps

Gulloetal,IEEEMEMS2013


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Hydrophobic Attraction!

20pNaracveforcefor10mdisksurface

20Gulloetal,IEEEMEMS2013


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Outline!

SELFSYS objectives!



functionalization!





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Assembly -plant!


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Feeding of microcapsules!

Transfer of MEMS to

functional fluid (blue)! Control concentration

of MEMS in liquid!

Carrier liquid &!MEMS inlet!

Carrier liquid!outlet!

Functional fluid &!MEMS outlet!

Functional fluid inlet!

g

Goldowskyetal,(submiedtoJMM)


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Assembly and sorting!

Focusing electrode!

Sorting !electrode!

Goldowskyetal.(inprep)

O li


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Outline!

SELFSYS objectives! Methodology and team!


functionalization!




A t t d d li f lf bli t


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Automated modeling of self-assembling systems!

Fundamental assumptionAll behavioral changes can be

interpreted as the result of an

interaction

x3x1

x2

Con;nuousstate

(e.g.,poseinspace)

Discretestate

(statemachine)

Input: spatial trajectories

TheM3framework

Mermoud,Mastrangelietal,(inprep)

Model and control of the SELFSYS microchamber


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10 mm

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Model and control of the SELFSYS microchamber!

FEMEigenfrequencies

1st:42.4KHz

Controlspace


Model and control of the SELFSYS microchamber


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SELFSYS - Fluid-mediated self-assembly for hybrid functional micro/nanosystems! 28

Model and control of the SELFSYS microchamber!

Air

sockets

water

CFDsimula;ons

Laminarflow(Re~100)

2-phaseflow(water/air) Acouscactuaon(45KHz)

Parcletracking

5 mm



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HOW CAN WE WATCH THE

MICRO PARTS MOVING ANDCONTROL THE SYSTEM WITH A

FEEDBACK LOOP?!

The Lily platform: centimetric fluidic self-assembly


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The Lily platform: centimetric fluidic self-assembly!

Blocks

Floang,passive,self-aligning Magneclatching

Parasicfluidicpropulsion

Arena

4remotely-controlledinlets 2mainagitaonmodes

forbang/bangcontrol

Real-;metracking Overheadcamera

DataaquisionbySwisTrack

M3computaonalframewor

Mermoudetal.ICRA2012

SELFSYS platform: micrometric fluidic self-assembly


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SELFSYS platform: micrometric fluidic self-assembly!

2 cm

Monitoring the micrometric fluidic self-assembly


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Monitoring the micrometric fluidic self-assembly!

High speed video of self-

assembling microcapsules

200 m 200 m

Tracking of self-assembling

microcapsules

Mastrangelietal,(inprep)

Magnetically Guided Self-Assembly


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Magnetically Guided Self-Assembly!

Half capsules with magneticnanoparticles!

Programming easy axis by

aligning nanoparticles!

Parts align with an applied

magnetic field!

They attract each other due tomagnetic forces !

Selective binding for self assembly!H

Ergenemann,Petersetal.MEMS2013

Parallel manipulation of magnetic capsules


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Parallel manipulation of magnetic capsules!

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Forming chains of magnetic parts when in-plane magnetic fieldsare applied (left)

Separating parts by applying out-of-plane magnetic fields (right)

Ergenemannetal.(inprep)

Envisioned applications

2 industrial partners interested


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Envisioned applications!

36SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems!

Drug delivery!

Triggered, local, timedrelease!

PAT (process analyticaltechnologies)!

Use capsules as distributedsensors!

Remote readout!

Bioreactor process monitor!

Food quality control!!

!

2industrialpartnersinterested

Liquid released upon external (self)trigger


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Release in IPAOther options:

- Heat- Valve

- Otherchemical

reaction

- Bio-degradation

Liquid released upon external (self)trigger!

PhDthesisL.Jacot-Descombes

Summary


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Summary!


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Liquidfilledmicro-capsules.

Readytomeasure.

Readytorelease.

Selfsys, Nano-Tera 2013, Bern

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