Review of Basic Semiconductor Physics - Cornell University · Review of Basic Semiconductor Physics...
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Review of Basic Semiconductor Physics
In this lecture you will learn:
• Review of electronic states and energy band in solids• Structure of semiconductors• Semiconductor alloys • Electron and hole statistics in semiconductors• Doped semiconductors• Transport in semiconductors and band diagrams in real space
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
InP
850 nm
980 nm
1300 nm1550 nm
Semiconductors and their Alloys
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Group IV Cubic Semiconductors
Periodic Table:
Silicon Lattice (Diamond lattice):
=
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Group III-V Cubic Semiconductors
GaAs Lattice (Zinc Blend Lattice): FCC Lattice Structure
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Group III-V Hexagonal Semiconductors
GaN Lattice (Wurtzite Lattice):
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Electrons in Solids
rErrVm
2
22
Wavefunctions and energies of electrons in solids are obtained by solving the Schrodinger equation:
Periodic potential of the atoms
Solution can be written in terms of the Bloch functions:
ruerr knrki
kn ,,
Bloch functions have the following property:
reRr knRki
kn ,,
ruRru knkn ,,
Follow from the periodicity of the atomic potential
rkErrVm knnkn ,,
22
2
Bloch functions satisfy the Schrodinger equation:
Energy of the Bloch functions
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Electrons in Solids
The First Brillouin Zone (FBZ):
The wavevectors are restricted to the first brillouin zone:
ruerr knrki
kn ,,
k
FBZ of the FCC lattice
Two labeling items:i) The wavevectorii) The band index “n”
k
Energy Bands:
The band index “n” stands for different energy bands
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Energy Bands in Semiconductors
Germanium Silicon GaAs
Ev
Ec
Ev
Ec
cce
cc KkKkm
EkE 2
2
vvh
vv KkKkm
EkE 2
2
Parabolic expansion of energy band dispersion:
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Energy Bands in SemiconductorsMore generally:
ceccc KkMKkEkE 12
2
Ev
Ec
zzzyzx
yzyyyx
xzxyxx
e
mmm
mmm
mmm
M
vhvvv KkMKkEkE 12
2
Parabolas in 3D can be anisotropic!
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Counting Electronic States in Solids
kEr nkn
,
No two electrons can occupy the same quantum state (Pauli’s exclusion principle)
So how many states are there in the FBZ?
In a solid of volume V, the number of energy levels in one energy band in volume of the FBZ is:kd
3
33
22
kd
V
Two possible spin states of electrons
FBZ3
3
2
kd
Vk
Summations over electron state in FBZ can be written as integrals:
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Counting Electronic States in Solids
How many electron states per energy band in the entire FBZ?
FBZ of volume
2
2
222
33
3
FBZ
Vkd
VFBZk
But:
cell unit primitive the of volume
2FBZ of volume
3
crystal the in cells primitive of number 2
cell primitive the of volume2
V
How many electron states per energy band in the entire FBZ?
Each primitive cell contributes two states or energy levels to each band
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Counting Electronic States in Solids
Ev
Ec
Case of Silicon:
Each primitive unit cell contains 2 Si atoms Each Si atom contributes 4 electrons to the crystal
Therefore, each primitive cell contributes 8 electrons to the crystal
Each energy band has twice as many states as the number of primitive cells in the crystals
Therefore, 4 lowest energy bands will be full of electrons and the remaining ones will be empty!
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Semiconductor AlloysElemental Semiconductors:
Example: Si, Ge, and C
Binary Alloys:
Example: Si(1-x)Gex
Alloy of two elemental semiconductors Consists of (x) fraction of Ge and (1-x) fraction of Si
Ternary Alloys:
Example: AlxGa(1-x)As
Alloy of two compund semiconductors Consists of (x) fraction of AlAs and (1-x) fraction of GaAs
Quarternary Alloys:
GaAsGaP1InP11InAs1PAsGaIn -1-1 xyyxyxyxyyxx
GaAs1AlAs xx
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Semiconductor Alloys: Vegard’s Law
Vegard’s law says the lattice constant of an alloy is a weighted sum of the lattice constants of each of its constituents, and the weight assigned to each constituent is equal to its fraction in the alloy.
Examples:
Ge1Si GeSi 1 axaxa xx
GaAs1AlAs AsGaAl 1 axaxa xx
GaAs GaP1
In11InAs1AsGaIn 11
axyayx
PayxaYxPa yyxx
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Properties of Semiconductor Alloys
What about other material parameter like dielectric constants, effective masses, band gaps, etc?
If you don’t know any better, the linear rule law can be a good first approximation. But it does not always work very well for quantities other than the lattice constant.
For example, the band gap of AlxGa(1-x)As at the -point is given more accurately by:
2xxg xcbxaE AsGaAl 1
eV 42.1
300K at eV 0.438
eV 087.1
a
c
b
21 AsIn Ga cxbxaE xxg
The band gap of GaxIn(1-x)As at the -point is given by:
eV 324.0
300K at eV 0.4
eV 7.0
a
c
b
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Properties of Semiconductor Alloys
Direct to indirect bandgap transitions in alloys:
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
InP
850 nm
980 nm
1300 nm1550 nm
Semiconductors and their Alloys
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Electron Statistics: GaAs Conduction Band
Consider the conduction band of GaAs near the band bottom at the -point:
e
e
e
m
m
m
M
100
010
0011
This implies the energy dispersion relation near the band bottom is:
e
ce
zyxcc m
kE
m
kkkEkE
22
222222
Suppose we want to find the total number of electrons in the conduction band:
We can write the following summation:
FBZin
2k
c kfN
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
The Fermi-Dirac Distribution
A fermion (such as an electron) at temperature T occupies a quantum state with energy E with a probability f(E-Ef) given by the Fermi-Dirac distribution function:
TKEEffe
EEf
1
1
Ef = chemical potential or the Fermi level K = Boltzmann constant = 1.38 X 10-23 Joules/Kelvin
fEEf
E0
1
fE
T = 0K
E0
1
fE
T > 0K
E0
1
fE
T >> 0K
~2KT
~2KT
0.5
0.5 The Fermi level Ef is determined by invoking some physical argument …(as we shall see)
fEEf
fEEf
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
fc
KTEkEc EkEfkf
fc
exp1
1
Where the Fermi-Dirac distribution function is:
We convert the summation into an integral:
KTEkE
kdVkfN
fckc
exp1
1
222
FBZ3
3
FBZ in
Then we convert the k-space integral into an integral over energy:
?
?FBZ3
3
exp1
1
22 fc
fc
EEfEgdEV
KT
EkE
kdVN
We need to find the density of states function gc(E) for the conduction band and need to find the limits of integration
FBZin
2k
c kfN
Another way of writing itEf
Electron Statistics: GaAs Conduction Band
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
?
?FBZ3
3
exp1
1
22 fc
fc
EEfEgdEV
KT
EkE
kdVN
e
ce
zyxcc m
kE
m
kkkEkE
22
222222
Energy dispersion near the band bottom is:
Electrons will only be present near the band bottom
(parabolic and isotropic)
Since the electrons are likely present near the band bottom, we can limit the integral over the entire FBZ to an integral in a spherical region right close to the -point:
point3
2
point-3
3
FBZ3
3
8
42
22
22
fc
cc
EkEfdkk
V
kfkd
Vkfkd
VN
Ef
Electron Statistics: GaAs Conduction Band
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
point
3
2
8
42 fc EkEfdk
kVN
Since the Fermi-Dirac distribution will be non-zero only for small values of k, one can safely extend the upper limit of the integration to infinity:
03
2
8
42 fc EkEfdk
kVN
emdkk
dkdE 2
ce EE
mk 2
2
and
We have finally:
e
ce
zyxcc m
kE
m
kkkEkE
22
222222
cEfcfc EEfEgdEVEkEfdk
kVN
03
2
8
42
We know that:
Ef
Electron Statistics: GaAs Conduction Band
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
We have finally:
Where the conduction band density of states function is:
ce
c EEm
Eg
23
222
2
1
cEfcfc EEfEgdEVEkEfdk
kVN
03
2
8
42
E
Egc
cE
The density of states is the number of states available per unit energy per unit volume of the crystal
Ef
Electron Statistics: GaAs Conduction Band
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
ce
c EEm
Eg
23
222
2
1
cEfc EEfEgdEn
fEEf
EfE
Egc Ef
KTfEE
eEEf f
If then one may approximate the Fermi-Dirac function as an exponential:
KTEE fc
KTEE
KTEE
EEf f
ff exp
exp1
1
KTEE
NEEfEgdEn fcc
Efc
c
exp
cE
Where:
23
222
KTm
N ec
Maxwell-Boltzman approximation
Effective density of states (units: #/cm3)
Electron Statistics: GaAs Conduction Band
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Ef
Valence Band in GaAs: Heavy Hole Band and Light Hole Band
Light Hole Band
Heavy Hole BandSplit-off band
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Valence Band and Holes
Ef
• At zero temperature, the valence band is completely filled and the conduction band is completely empty
• At any finite temperature, some electrons near the top of the valence band will get thermally excited from the valence band and occupy the conduction band and their density will be given by:
• The question we ask here is how many empty states are left in the valence band as a result of the electrons being thermally excited. The answer is (assuming the heavy-hole valence band):
• We call this the number of “holes” left behind in the valence band and the number of these holes is P:
KTEE
Nn fcc exp
FBZ in
12k
fhh EkEf
fhhk
fhh EkEfkd
VEkEfP
12
212FBZ
3
3
FBZ in
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Hole Statistics: GaAs Heavy Hole Band
parabolic approx.
fhh EkEf
kdVP
12
2FBZ
3
3
hh
vhh
zyxhh m
kE
m
kkkEvkE
22
222222
Energy dispersion near the top of the valence band is:
Holes will only be present near the top of the valence band
Since the holes are likely present near the band maximum, we can limit the integral over the entire FBZ to an integral in a spherical region right close to the -point:
point
3
2
18
42 fhh EkEfdk
kVP
Ef
fhh EkEf
kdVP
12
2point-
3
3
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
03
2
18
42 fhh EkEfdk
kVP
Since the Fermi-Dirac distribution will be non-zero only for small values of k, one can safely extend the upper limit of the integration to infinity:
point
3
2
18
42 fhh EkEfdk
kVP
hh
vhh
zyxhh m
kE
m
kkkEvkE
22
222222
We know that:
hhmdkk
dkdE 2
EEm
k vhh 2
2
and
We have finally:
vE
fhh
fhh
EEfEgdEV
EkEfdkk
VP
1
18
42
03
2
Ef
Hole Statistics: GaAs Heavy Hole Band
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Where the heavy hole band density of states function is:
EEm
Eg vhh
hh
23
222
2
1
E
Eghh
vE
We have finally:
vE
fhh
fhh
EEfEgdEV
EkEfdkk
VP
1
18
42
03
2
Ef
Hole Statistics: GaAs Heavy Hole Band
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
EEm
Eg vhh
hh
23
222
2
1
vE
fhh EEfEgdEp 1
fEEf
EfE
Egc
Ef
If then one may approximate the Fermi-Dirac function as an exponential:
KTEE vf
KTEE
KTEE
EEf f
ff exp
exp1
11
KTEE
NEEfEgdEp vfhh
E
fhh
vexp1
cE
Where:
23
222
KTm
N hhhh
Maxwell-Boltzman approximation for holes
vE
Eghh
Effective density of states (units: #/cm3)
Hole Statistics: GaAs Heavy Hole Band
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
In most semiconductors, the light-hole band is degenerate with the heavy hole band at the -point. So one always needs to include the holes in the light-hole valence band as well:
Ef
fEEf
EfE
Egc
cEvE
Eghh Eg h
v
v
vv
E
fv
E
fhhh
E
fh
E
fhh
EEfEgdE
EEfEgEgdE
EEfEgdEEEfEgdEp
1
1
11
KTEE
Np vfv exp
Where:
23
222
KTm
N hv
and 322323hhhh mmm
EEm
EgEgEg
vh
hhhv
23
222
2
1
Density of states effective mass
Hole Statistics: GaAs Heavy Hole and Light Hole Bands
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Example: Electron Statistics in GaAs – Electrons and Holes
Ef
At any temperature, the total number of electrons and holes (including both heavy and light holes) must be equal:
c
vvcf
vcf
c
v
fcc
vfv
NNKTEE
E
KTEEE
NN
KTEE
NKT
EEN
np
log22
2exp
expexp
Because the effective density of states for electrons and holes are not the same (i.e. Nv ≠ Nc), the Fermi level at any finite temperature is not right in the middle of the bandgap.
But at zero temperature, the Fermi-level is exactly in the middle of the bandgap
fEEf E
fE
Egc
cEvE
Egv
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Example: Electron Statistics in GaAs – Electrons and Holes
Ef
At any temperature, the total number of electrons and holes (including both heavy and light holes) must be equal:
where ni is called the intrinsic electron (or hole) densityinnp
Note that the smaller the bandgap the larger than intrinsic electron (or hole) density
KT
ENNn
nKT
EENN
nKT
EEN
KTEE
N
nnp
nnp
gcvi
ivc
cv
ifc
cvf
v
i
i
2exp
exp
expexp
2
2
2
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Electron and Hole Pockets in GaAs
Ef
• At any non-zero temperature, electrons occupy states in k-space that are located in a spherically symmetric distribution around the -point
• This distrbution is referred to as the “electron pocket” at the -point
• At any non-zero temperature, the holes (heavy and light) also occupy states in k-space that are located in a spherically symmetric distribution around the -point
• This distribution is referred to as the “hole pocket” at the -point
Hole pocket
Electron pocket
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Electron and Hole Statistics in Degenerate Semiconductors
cEfc EEfEgdEn
23
221
23
2
22
2
1
1
π
kTmN
kT
EEF
π N
eEE
m2dEn
ec
cfc
KTEEce
E fc
fEEf
E
fE Egc
cEvE
Eghh
fEEf
E
fE
Egc
cEvE
Eghh
vE
fhh EEfEgdEp 1
2
3
221
2
3
2
22
2
12
π
kTmN
kTEE
Fπ
N
Ef EEm
π dEp
hv
fvv
vh
Ev
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Donor Impurities in Semiconductors
Consider a semiconductor (say GaAs) in which one Ga atom site is occupied by a Si atom, as shown:
• Silicon has one more electron in the outermost shell compared to Ga (4 in Si compared to 3 in Ga)
• Since only 3 electrons are needed to form co-valent bonds with the nearby As atoms, the extra electron does not participate in bonding and can drift away leaving behind a positively charged Si atom
Ga As
As
Ga As
As
Si As
As
Ga As
As
Ga As
As
Ga As
As
Ga As
As
Ga As
As
Ga As
As
+
-
Ga
Ga
Ga
Ga
Ga
Ga
Ga
Ga
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Donor Impurities in Semiconductors: N-Type DopingEnergy
k
5.9 meV
• At very low temperatures the electron resides in the donor energy level and the donor atom is neutral
• At room temperature, the electron in the donor energy level can acquire enough energy to jump to the conduction band
When this happens the donor is said to have ionized
• Once in the conduction band the electron can move around and is no longer localized at the donor atom
• Donor impurities can therefore be used to dope semiconductors n-type
Donor ionization
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Acceptor Impurities in Semiconductors: P-Type Doping
Consider a semiconductor (say GaAs) in which one As atom site is occupied by a carbon atom, as shown:
Ga As
As
Ga As
As
Ga As
C
Ga As
As
Ga
As
Ga
As
AsAs As
_Ga
Ga
Ga
Ga
Ga
Ga
Ga As
As
Ga As
As
Ga As
C
Ga As
As
Ga
As
Ga
As
AsAs As
_Ga
Ga
Ga
Ga
Ga
Ga• C has one less electron in the outermost shell compared to As (4 in C compared to 5 in As)
• Since 4 electrons are needed to form covalent bonds with the nearby Ga atoms, the required electron is taken from the valence band resulting in a negatively charged C atom and a hole in the valence band
+
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Acceptor Impurities in Semiconductors: P-Type Doping
Energy
k
Acceptor ionization
• Acceptor atom gives rise to hydrogenic energy levels near the valence band maximum
• At very low temperatures the hole resides in the acceptor energy level and the acceptor atom location is overall neutral
• At room temperature, the hole in the acceptor energy level can acquire enough energy to jump to the valence bandWhen this happens the acceptor is said to have ionized
• Once in the valence band the hole can move around and is no longer localized at the acceptor atom
• Acceptor impurities can therefore be used to dope semiconductors p-type
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Donor Ionization StatisticsEnergy
k
EdDonor ionization
Ef
In the grand canonical ensemble the probability of a system to have total particles N and total energy E is:
KTNEE feAENP ,
The donor level can have the following possible states:
1) No electrons present
2) One spin-up electron present
3) One spin-down electron present
4) Two or more electrons present
AENP 0,0
KTEEd
fdeAEENP ,1
KTEEd
fdeAEENP ,1
0,1 ENP
KTEEKTEE
fdfd
eAeA
21
1121
Sum of all probabilities should equal unity:
Coulomb repulsion does not allow it
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Donor Ionization StatisticsEnergy
k
EdDonor ionization
Ef
Probability that the donor level is ionized
Probability that the donor level has no electrons
A
ENP
0,0
KTEE fde
21
1
If the total donor impurity concentration is Nd then the concentration of ionized donors N+
d is equal to:
KTEEd
dfde
NN
21
For acceptors we have a similar relation:
KTEEa
afae
NN
21
EaAcceptor ionization
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Carrier Statistics in Doped Semiconductors
Energy
k
Acceptor ionization
Donor ionization
Consider a semiconductor that is doped with both donor and acceptor impurity atoms
• The total charge must be zero:
The above equation can be used to find the position of the equilibrium Fermi level since every term depends on the Fermi level position (one equation in one unknown)
0 npNN ad
KTEEd
dfde
NN
21
KTEEa
afae
NN
21
22
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Carrier Transport in Semiconductors
Electron current density (units: Amps/cm2) can be written as:
rnDqrErqnrJ eee
Diffusion componentDrift component
KTq
De
e
Einstein relation:
Hole current density (units: Amps/cm2) can be written as:
Diffusion componentDrift component
KTq
Dh
h
Einstein relation:
rpDqrErpqrJ hhh
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Carrier Number Conservation Equations
rRrGrJqt
rneee
1
rRrGrJqt
rphhn
1
Electron-hole generationrate
Electron-hole recombination rate
Electron-hole generationrate
Electron-hole recombination rate
rGrG eh
rRrR eh
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Poisson Equation
rNrNrnrpqrEr ad
rNrNrnrpqrEr
rRrGrJqt
rp
rRrGrJqt
rn
rpDqrErpqrJ
rnDqrErnqrJ
ad
hhh
eee
hhh
eee
1
1
The Five Shockley Equations
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Minority Carriers and Recombination Rates
In a p-type semiconductor, electrons are the minority carriers and holes are the majority carriers: pn
In a n-type semiconductor, holes are the minority carriers and electrons are the majority carriers: np
We consider a non-equilibrium situation in a p-type semiconductor in which the electron and hole concentrations are slightly perturbed from their equilibrium values
Equilibrium values: onop
e
oee
nnGR
Net recombination rate:Minority carrier lifetime
We consider a non-equilibrium situation in a n-type semiconductor in which the electron and hole concentrations are slightly perturbed from their equilibrium values
Equilibrium values: onop
h
ohh
ppGR
Net recombination rate: Minority carrier lifetime
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Band Diagrams in Real Space - I
For devices, it is useful to draw the conduction and valence band edges in real space:
cE
vE
fE
x
cE
vEfE
x
N-type semiconductor
Energy
k
fE
cE
vE
Energy
k
fEcE
vE
P-type semiconductor
KTEEc
fceNn
KTEEv
vfeNp
ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Band Diagrams in Real Space - II
Electrostatic potential and electric field:
cE
vE
fE
xN-type semiconductor
An electrostatic potential (and an electric field) can be present in a crystal:
The total energy of an electron in a crystal is then given not just by the energy band dispersion but also includes the potential energy coming from the potential:
Therefore, the conduction and valence band edges also become position dependent:
rrEr
and
kEn
rekEkE nn
reEEreEE vvcc
Example: Uniform x-directed electric field
xeExExE
xExr
xErE
xcc
x
x
0
0
ˆ
xErE x ˆ
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ECE 407 – Spring 2009 – Farhan Rana – Cornell University
Non-Equilibrium Situations and Current Flow
rnDqrErqnrJ eee
rEq
rE c
1
rErEKT
rnrn
eNrn
fc
KTrErEc
fc
rErn
rErErnrErn
rErEKT
rnDqrErnrJ
fe
fcece
fcecee
Non-uniform Fermi level implies current flow
Similarly:
rErp
rErErprErn
rErEKT
rpDqrErprJ
fh
fvhvh
fvevhh
Non-uniform Fermi level implies current flow