L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter...

33
L01 Aug 25 1 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter [email protected] http://www.uta.edu/ronc

Transcript of L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter...

Page 1: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 1

EE 5340Semiconductor Device TheoryLecture 1 - Fall 2009

Professor Ronald L. [email protected]

http://www.uta.edu/ronc

Page 2: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 2

Web Pages

* Review the following• R. L. Carter’s web page

– www.uta.edu/ronc/

• EE 5340 web page and syllabus– www.uta.edu/ronc/5340/syllabus.htm

• University and College Ethics Policies– http://www.uta.edu/studentaffairs/conduct/– http://www.uta.edu/ee/COE%20Ethics%20Statement%20Fall%2007.pdf

Page 3: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 3

First Assignment

• Send e-mail to [email protected]– On the subject line, put “5340 e-mail”– In the body of message include

• email address: ______________________• Your Name*: _______________________• Last four digits of your Student ID: _____

* Your name as it appears in the UTA Record - no more, no less

Page 4: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 4

EE 5340/001 and 051 - Semiconductor Device Theory - Fall 2009 (draft)

(Click Syllabus to download AdobeAcrobat file) Instructor: Professor Ronald L. Carter, [email protected], http://www.uta.edu/ronc, 532 Nedderman Hall, (office hours: 10:30 to 11:30 AM M/W and 11:00 to 12:00 Tu/Th), 817/272-3466, fax 817/272-2253Course Learning Goals and Objectives: Beginning with an introduction to solid state physics, the physics of semiconductor devices will be developed. Device physics will be applied to diodes, bipolar junction transistors and MOS transistors. Silicon and III-V device physics and technology will be considered.Class Meetings: Tu/Th: Section 001 - 8:00 AM to 9:20 AM, 106 NH; Section 051 - 9:30 to 11:00 AM, 109 NH.

Page 5: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 5

Teaching Assistant: Ardasheir Rahman [email protected]. (Office: 206 ELB. Office hours: 10 to 12 Tu/Th, and 8 to 12 Friday.)Attendance Policy: Attendance at every class session for the entire 80-minute period is strongly advised. Lectures will be posted at http://www.uta.edu/ronc/5340/lectures by 4 PM the day before class. Bring a copy to class. In order to validate your attendance, Assignment 1 given in the first lecture must be submitted. If not, you will be dropped from class for non-attendance.Text: RDevice Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. ISBN: 0-471-59398-2.

Page 6: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 6

Reference Texts: (Books on reserve in the Science and Engineering Library are marked R.)RDevices for Integrated Circuits: Silicon and III-V Compound Semiconductors, by H. Craig Casey, Jr., John Wiley & Sons, New York, 1999.RSemiconductor Physics and Devices, by Donald A. Neamen, Irwin, Chicago, 1997.RDevice Electronics for Integrated Circuits, 2nd ed., by Muller and Kamins, Wiley, New York, 1986. RFundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. RSemiconductor Physical Electronics, by Sheng S. Li, Plenum Press, New York, 1993. RPhysics of Semiconductor Devices, by S. M. Sze, Wiley-Interscience, New York, 1981.

Page 7: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 7

Spice References: (Books on reserve in the Science and Engineering Library are markedR.)RMicroSim PSpice for Windows, 2nd ed, by Goody, Prentice-Hall, Upper Saddle River, N.J., ©1998.RComputer-Aided Circuit Analysis Using PSpice by Walter Banzhaf, Regents/Prentice Hall, Englewood Cliffs, NJ, ©1992RSPICE: A Guide to Circuit Simulation and Analysis Using PSpice, 3rd ed., by Paul W. Tuinenga, Prentice Hall, Englewood Cliffs, NJ, ©1995. RSchematic Capture with MicroSim Pspice: for Windows 3.1, 4th Ed., by Herniter, ©2000, Prentice-HallPSpiceTM information to be determined

Page 8: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 8

Use of e-mail: Updates of class information are sent by e-mail. For this reason e-mail addresses are collected through Assignment 1. Questions should be sent to [email protected]. Always include the course number, EE5340, in the Subject line of e-mail messages to me. Answers will be sent to the EE5340 list if they are of general interest to the class. EE students should also subscribe to EE_GRADS at SUSCRIBE_EE_GRADS to receive EE Department information.Problems: The problem assignments to be given in the syllabus have been selected for your study, but will not be collected or graded. The study of the problems assigned will be helpful in preparing for the tests and final.

Page 9: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 9

Tests: Sample tests are posted at http://www.uta.edu/ronc/5340/tests/. Tests will be on the following dates: 9/24, 10/29, and the Final Exam on 12/8.Grade Calculation: Grade = (Test1 + Test2 + Project + Final)/4. Note that there are ONLY four components in the grade calculation.Grading Scale: A = 90 and aboveB = 75 to 89C = 60 to 74 D = 50 to 59 F = 49 and belowProject Assignment: See http://www.uta.edu/ronc/5340/project. Click to download Project AssignmentStudent Evaluation of Teaching: Students will complete evaluation forms at the end of the semester.

Page 10: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 10

CL DATE DAY ASSIGNMENTS Important Dates

1 25-Aug-09 Tu Ch. 1 - Semiconductor Electronics, P1:1,3,4,6,8,182 27-Aug-09 Th Appendix 1A - Electric Fields …3 01-Sep-09 Tu

4 03-Sep-09 Th Ch. 2 - Silicon Technology, P2:15,18,19,20 Labor Day Holiday 9/75 08-Sep-09 Tu Ch. 3 - Metal-Semiconductor Contacts, P3:2,3,4,5,7,16

6 10-Sep-09 Th

7 15-Sep-09 Tu Project Assigned

8 17-Sep-09 Th Ch. 4 - pn Junctions, P4:1,2,5,6,9,14

9 22-Sep-09 Tu

10 24-Sep-09 Th Test 1

11 29-Sep-09 Tu Ch. 4 - pn Junctions, continued

12 01-Oct-09 Th

13 06-Oct-09 Tu Ch. 5 Currents in pn Junctions - P5:1,2,3,6,9,11,19,21

14 08-Oct-09 Th

15 13-Oct-09 Tu

16 15-Oct-09 Th Ch. 6 - Bipolar Transistors I, P6:1,5,8,9,12,13,16,17

17 20-Oct-09 Tu

18 22-Oct-09 Th

19 27-Oct-09 Tu

20 29-Oct-09 Th Test 2

21 03-Nov-09 Tu Ch. 7 - Bipolar Transistors II, P7:1,2,7,9,11,23,29

22 05-Nov-09 Th

23 10-Nov-09 Tu Ch. 8 - Properties of the MOS System, P8:1,2,4,7,12,15

24 12-Nov-09 Th Project Due

25 17-Nov-09 Tu

26 19-Nov-09 Th Ch. 9 - MOSFETs I, P9:1,3,5,7,14,21,

27 24-Nov-09 Tu 11/26-29 - Thanksgiving Holiday

28 01-Dec-09 Tu Ch. 10 - MOSFETs II, P10:1,2,4,8

29 03-Dec-09 Th Last Class

30 08-Dec-09 Tu

Lecture, Assignment, Quiz and Test Schedule(Lectures at http://www.uta.edu/ronc/5340/lectures by 4 PM

the day before class. Bring a copy to class.)

Page 11: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 11

CL DATE DAY ASSIGNMENTS Important Dates

1 25-Aug-09 Tu Ch. 1 - Semiconductor Electronics, P1:1,3,4,6,8,182 27-Aug-09 Th Appendix 1A - Electric Fields …3 01-Sep-09 Tu

4 03-Sep-09 Th

5 08-Sep-09 Tu Ch. 3 - Metal-Semiconductor Contacts, P3:2,3,4,5,7,16

6 10-Sep-09 Th

7 15-Sep-09 Tu Project Assigned

8 17-Sep-09 Th

9 22-Sep-09 Tu

10 24-Sep-09 Th Test 1

11 29-Sep-09 Tu

12 01-Oct-09 Th

13 06-Oct-09 Tu Ch. 5 Currents in pn Junctions - P5:1,2,3,6,9,11,19,21

14 08-Oct-09 Th

15 13-Oct-09 Tu

16 15-Oct-09 Th Ch. 6 - Bipolar Transistors I, P6:1,5,8,9,12,13,16,17

17 20-Oct-09 Tu

18 22-Oct-09 Th

19 27-Oct-09 Tu

20 29-Oct-09 Th Test 2

21 03-Nov-09 Tu Ch. 7 - Bipolar Transistors II, P7:1,2,7,9,11,23,29

22 05-Nov-09 Th

23 10-Nov-09 Tu Ch. 8 - Properties of the MOS System, P8:1,2,4,7,12,15

24 12-Nov-09 Th Project Due

25 17-Nov-09 Tu

26 19-Nov-09 Th Ch. 9 - MOSFETs I, P9:1,3,5,7,14,21,

27 24-Nov-09 Tu 11/26-29 - Thanksgiving Holiday

28 01-Dec-09 Tu Ch. 10 - MOSFETs II, P10:1,2,4,8

29 03-Dec-09 Th Last Class

30 08-Dec-09 Tu Final 8-10:30 AM

Page 12: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 12

Notes:1.This syllabus may be changed by the instructor as needed for good adademic practice. Use the "refresh" or "reload" function on your browser.2.Quizzes and tests are open book (must have a legally obtained copy-no Xerox copies) OR one handwritten page of notes. Calculator allowed.3.There will be no make-up, or early exams given. Attendance is required for all tests.4.Americans with Disabilities Act: The University of Texas at Arlington is on record as being committed to both the spirit and letter of federal equal opportunity legislation; reference Public Law 92-112 - The Rehabilitation Act of 1973 as amended. With the passage of federal legislation entitled Americans with

Page 13: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 13

Disabilities Act (ADA), pursuant to section 504 of the Rehabilitation Act, there is renewed focus on providing this population with the same opportunities enjoyed by all citizens. As a faculty member, I am required by law to provide "reasonable accommodations" to students with disabilities, so as not to discriminate on the basis of that disability. Student responsibility primarily rests with informing faculty of their need for accommodation and in providing authorized documentation through designated administrative channels. Information regarding specific diagnostic criteria and policies for obtaining academic accommodations can be found at www.uta.edu/disability. Also, you may visit the Office for Students with Disabilities in room 102 of University Hall or call them at (817) 272-3364.

Page 14: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 14

5. Academic Integrity: It is the philosophy of The University of Texas at Arlington that academic dishonesty is a completely unacceptable mode of conduct and will not be tolerated in any form. All persons involved in academic dishonesty will be disciplined in accordance with University regulations and procedures. Discipline may include suspension or expulsion from the University. "Scholastic dishonesty includes but is not limited to cheating, plagiarism, collusion, the submission for credit of any work or materials that are attributable in whole or in part to another person, taking an examination for another person, any act designed to give unfair advantage to a student or the attempt to commit such acts." (Regents’ Rules and Regulations, Series 50101, Section 2.2). See http://www.uta.edu/studentaffairs/conduct/.

Page 15: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 15

6. Submit a signed copy of http://www.uta.edu/ee/COE%20Ethics%20Statement%20Fall%2007.pdf (the COE Ethics policy). Review the contents of this page and the website referenced in 5 above.

7. If identical material is submitted for grade by different students, the grade earned will be divided among all identical submissions.

8. A paper submitted for regrading will be compared to a copy of the original paper. If the paper does not agree with the original, points will be deducted.

9. Student Support Services Available: The University of Texas at Arlington supports a variety of student success programs to help you connect with the University and achieve academic success. These

Page 16: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 16

programs include learning assistance, developmental education, advising and mentoring, admission and transition, and federally funded programs. Students requiring assistance academically, personally, or socially should contact the Office of Student Success Programs at 817-272-6107 for more information and appropriate referrals.

10. Final Review Week: A period of five class days prior to the first day of final examinations in the long sessions shall be designated as Final Review Week. The purpose of this week is to allow students sufficient time to prepare for final examinations. During this week, there shall be no scheduled activities such as required field trips or performances; and no instructor shall assign any themes, research problems or exercises of similar

Page 17: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 17

scope that have a completion date during or following this week unless specified in the class syllabus. During Final Review Week, an instructor shall not give any examinations constituting 10% or more of the final grade, except makeup tests and laboratory examinations. In addition, no instructor shall give any portion of the final examination during Final Review Week. Classes are held as scheduled during this week and lectures and presentations may be given.

11. Librarian to Contact: See http://library.uta.edu/sel/ and http://libguides.uta.edu/content.php?pid=3545

12. Electronic Communication Policy: A UTA listserv is being established for EE 2303. All class communication will be conducted via this list. To sign up, go to https://listserv.uta.edu/archives/EE5340.html, click on the link "Join or Leave EE5340", or send e-mail to

Page 18: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 18

[email protected] with the command "subscribe EE5340 your_name" (without the quotes) in the body of the message. You may receive communication from this listserv at any email address you choose. If you have questions, send email to [email protected]. In addition, the University of Texas at Arlington has adopted the University “MavMail” address as the sole official means of communication with students. MavMail is used to remind students of important deadlines, advertise events and activities, and permit the University to conduct official transactions exclusively by electronic means. For example, important information concerning registration, financial aid, payment of bills, and graduation are now sent to students through the MavMail system. All students are assigned a MavMail account. Students are responsible for checking

Page 19: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 19

MavMail regularly. Information about activating and using MavMail is available at http://www.uta.edu/oit/email/. There is no additional charge to students for using this account, and it remains active even after they graduate from UT Arlington.

13. Grade Grievance Policy: Forms to report a grade grievance are available in the EE Office.

Page 20: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 20

Quantum Concepts

• Bohr Atom

• Light Quanta (particle-like waves)

• Wave-like properties of particles

• Wave-Particle Duality

Page 21: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 21

Bohr model forHydrogen atom• Electron (-q) rev.

around proton (+q)• Coulomb force,

F = q2/4or2, q = 1.6E-19 Coul, o=8.854E-14Fd/cm

• Quantization L = mvr = nh/2, h =6.625E-34J-sec

Page 22: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 22

Bohr model for the H atom (cont.)• En= -(mq4)/[8o

2h2n2] ~ -13.6 eV/n2

• rn= [n2oh2]/[mq2] ~ 0.05 nm = 1/2 Ao

for n=1, ground state

Page 23: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 23

Bohr model for the H atom (cont.)En= - (mq4)/[8o

2h2n2] ~ -13.6 eV/n2 *

rn= [n2oh2]/[mq2] ~ 0.05 nm = 1/2 Ao

*

*for n=1, ground state

Page 24: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 24

Energy Quanta for Light

• Photoelectric Effect:

• Tmax is the energy of the electron emitted from a material surface when light of frequency f is incident.

• fo, frequency for zero KE, mat’l spec.

• h is Planck’s (a universal) constanth = 6.625E-34 J-sec

stopomax qVffhmvT 2

21

Page 25: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 25

Photon: A particle-like wave• E = hf, the quantum of energy for

light. (PE effect & black body rad.)• f = c/, c = 3E8m/sec, =

wavelength• From Poynting’s theorem (em

waves), momentum density = energy density/c

• Postulate a Photon “momentum” p = h/= hk, h =

h/2 wavenumber, k =2/

Page 26: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 26

Wave-particle duality

• Compton showed p = hkinitial - hkfinal, so an photon (wave) is particle-like

Page 27: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 27

Wave-particle duality

• DeBroglie hypothesized a particle could be wave-like, = h/p

Page 28: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 28

Wave-particle duality

• Davisson and Germer demonstrated wave-like interference phenomena for electrons to complete the duality model

Page 29: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 29

Newtonian Mechanics

• Kinetic energy, KE = mv2/2 = p2/2m Conservation of Energy Theorem

• Momentum, p = mvConservation of

Momentum Thm• Newton’s second Law

F = ma = m dv/dt = m d2x/dt2

Page 30: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 30

Quantum Mechanics

• Schrodinger’s wave equation developed to maintain consistence with wave-particle duality and other “quantum” effects

• Position, mass, etc. of a particle replaced by a “wave function”, (x,t)

• Prob. density = |(x,t)• (x,t)|

Page 31: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 31

Schrodinger Equation

• Separation of variables gives(x,t) = (x)• (t)

• The time-independent part of the Schrodinger equation for a single particle with Total E = E and PE = V. The Kinetic Energy, KE = E - V

2

2

280

x

x

mE V x x

h2 ( )

Page 32: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

©L02 Aug 28 32

Solutions for the Schrodinger Equation• Solutions of the form of (x) =

A exp(jKx) + B exp (-jKx) K = [82m(E-V)/h2]1/2

• Subj. to boundary conds. and norm.(x) is finite, single-valued, conts.d(x)/dx is finite, s-v, and conts.

1dxxx

Page 33: L01 Aug 251 EE 5340 Semiconductor Device Theory Lecture 1 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu .

L01 Aug 25 33

References

*Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989.

**Semiconductor Physics & Devices, by Donald A. Neamen, 2nd ed., Irwin, Chicago.