Post on 03-Feb-2022
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid-metal-jet-anode x-ray source
Performance
Applications
Summary
Agenda
2
Bruker user meeting, 2010-09-22
About Excillum
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• Founded in 2007
• Spin-off from research project started at KTH (Royal Institute of Technology) in 2000.
• Mix of private venture capital and government agency research funding
• Commercializing a new x-ray source technology
• 4 prototype sources deployed with customers
• Exclusive partnership with Bruker for diffraction market
• First joint end customer installations planned for 2011
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid-metal-jet-anode x-ray source
Performance
Applications
Summary
Agenda
4
Bruker user meeting, 2010-09-22
Historic Source Development
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1904
Thermionic cathode
1990s
Synchrotrons
1920s
Line focusing and rotating anodes 2010s - Free-electron lasers
1895
Discovery
2010 - Present
• Continuous drive for high brilliance sources
• Research focus on large scale facilities
• Compact sources have seen minimal improvement since the 1970s
• Always a need for better homelab systems
Bruker user meeting, 2010-09-22
Conventional Source Technology
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• 99.5% of electron-beam power becomes heat
• Solid target close to melting
• Few 10 kW/mm2 e-beam power density defines the technology limit
• Edge speed at mechanical limits
• Cooling technology has been perfected
• Reached its maximum potential with little or no room for improvements
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid-metal-jet-anode x-ray source
Performance
Applications
Summary
Agenda
7
Bruker user meeting, 2010-09-22
The Excillum Breakthrough
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• High-speed liquid-metal-jet anode
• Anode is regenerative
• No longer limited by melting
• >1000 kW/mm2 e-beam power density!
• Higher brightness source given more power per area
5 mm
Bruker user meeting, 2010-09-22
Prototype Installation
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Shutter
Montel Mirror
e- optic
Prototype installation in a D8 Discover cabinet
Bruker user meeting, 2010-09-22
MJX Source Details
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• Closed loop recycling system
• Magnetic focusing optics
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid metal jet anode x-ray source
Performance
Applications
Summary
Agenda
12
Bruker user meeting, 2010-09-22
Spot Size & Quality
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20 µm10 µm5 µm
• Variable spot size: 5-20 µm (@ 50-200 W)
• “good” spot shape and high spatial stability
Bruker user meeting, 2010-09-22
Source Spectrum and Brightness
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GalliumKα
Kβ
InKα
Kβ
Spot size
[µm, FWHM]
Voltage
[kV]
Power
[W]
Ga Kα Flux
[Photons/(s×mrad2×line]
Ga Kα Brightness
[Photons/(s×mm2×mrad2×line]
5 60 50 3.0×106 1.5×1011
10 60 100 6.0×106 7.6×1010
20 60 200 1.2×107 3.8×1010
10 20 30 40 50 600
200
400
600
800
1000
Photon Energy (keV)
Bri
gh
tne
ss (
a.u
.)
Ga Kα: 9.25 keV (Cu replacement)
Bruker user meeting, 2010-09-22
Reliability & Serviceability
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• Although a new target concept, it is intrinsically a simple system
• Main components are proven technology and solutions
• Electron gun and focusing:
- Standard HV supply and existing HV insulator used
- Cathode and optics design “borrowed” from accelerator technology
- More in common with microfocus tubes and SEM :s than rotating anodes
• Liquid-jet anode
- Modified reliable industrial process pump used
- Nozzle design “borrowed” from water jet cutting technology
- Closed loop recycling system, no dynamic vacuum seals
• Interaction chamber:
- Only 200 W of beam-power need to be dissipated
- Self-cleaning x-ray output window not deteriorated by vapor deposition
- Standard vacuum pumping solutions used
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid-metal-jet-anode x-ray source
Performance
Applications
Summary
Agenda
16
Bruker user meeting, 2010-09-22
Phase Contrast Imaging
dkeII 2
0
dk
Absorption
Phase shift
>> for low Z elements
and high photon energies
phase contrast
Δd
Β
δ
I0F
I
Δ F
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Bruker user meeting, 2010-09-22
Phase Contrast Tomography
z1=20 mm, z2=100 mm
M=6 3.4 micron effective pixel size
50 x 0.2s @ 40.8 W
Sealed tubeExcillum MJXS
Matthias Bartels, Tim Salditt, Institut für Röntgenphysik, University Göttingen, Germany
Sample: Egg of Peruphasma schultei (Samtschnecke)
1
21
Z
ZZM
18
Bruker user meeting, 2010-09-22
X-Ray Diffraction
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Mirror Specifications
Type Incoatec E43
Divergence 7.45 mrad
Magnification 3.8 ×
Source Performance
Target Alloy77 (95% Ga)
Power 200 W
Spot 20 µm
Flux 1.2×107 photons/(s∙mrad2)
Brightness 3.8×1010 photons/(s∙mm2∙mrad2)
Focus
Spot ~ 100 µm FWHM
Intensity > 5×1011 photons/(s∙mm2)
Bruker user meeting, 2010-09-22
Estimated System Performance
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Comparison of flux through a 0.1mm aperture
Beam FWHM @
sample, μm
66
11
78
16
0
60
0
0 100 200 300 400 500 600 700
Intensity x 109 (X-rays/sec/mm
2)
Classic 5 kW RAG/multilayer optics
IuS - Quazar
IuS - Quazar MX
EXCILLUM MJXS
MICROSTAR-H
MICROSTAR-MX
300
240
110
260
160
~100>5.0 x 1011 ph/mm2/s
Bruker user meeting, 2010-09-22
Future development
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Intensity• Increased jet speed for higher load capacity
• Line focus for increased load capacity
Power• Power (not only intensity) important for certain applications
Energy• High temperature alloys to access essentially pure In / Sn / Pb / Bi
• Kα lines at 24, 25, 75 and 77 keV
Bruker user meeting, 2010-09-22
Introduction
History and development of X-ray source
Excillum’s liquid-metal-jet-anode x-ray source
Performance
Applications
Summary
Agenda
22
Bruker user meeting, 2010-09-22
• Breakthrough in x-ray source technology
• Liquid-metal-jet x-ray sources are ready for industrial use
• Brightness an order of magnitude higher than conventional technology
• Exceptional beam quality
• Variable spot size attractive for certain applications
• Expected performance when combined with focusing Montel mirrors:
~ 100 µm diameter
> 5∙1011 photons/s/mm2
• Very attractive for
- Biological Crystallography
- Small angle X-Ray Scattering (BioSAXS)
- High Resolution X-Ray Diffraction
Summary
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