Post on 04-Feb-2018
© 2013
75 Cours Emile Zola, F-69100 Villeurbanne - Lyon, France
Tel: +33 472 83 01 80 - Fax: +33 472 83 01 83
Web: http://www.yole.fr
RF-MEMS:
From Technology Push to Market Pull?
Microwave & RF 2013 – Conférence RF MEMS
10 Avril 2013
© 2013• 2
Outline
• Presentation of Yole Developpement
• Status of MEMS industry in 2013
• The boom of RF-MEMS for cell phone tuning
• High-added value application segments
© 2013• 3
Fields of Research Activity
Founded in 1998, Yole Developpement is a global market, technology and strategy consulting company involved in :
Our research is performed by in-house personnel conducting open-ended discussions based on interviews.
32 full time analysts with technical and marketing degrees
Primary research including over 3,500 interviews per year
Wafers and substrates
MEMS &
image sensors
Photovoltaics
Advanced
Packaging
Microfluidic
& Medical
Technologies
Power
Electronics
HB LED, LED & LD
© 2013• 4
Yole Développement Services
1. Strategy & Technology Consulting Services
• Market research and marketing analysis
• Strategy analysis
• Technology evaluation
• Reverse costing
• Financial services with Yole Finance
2. Publication of Market & Technology Reports
• >30 reports per year
3. Custom Workshops
• Get data and information on any of Yole’s expertise: MEMS, Compound
Semiconductors, Advanced Packaging, Photovoltaic …
4. Yole Media & Communication Support
• Micronews magazine and website
• Technology magazines: MEMS Trends…
© 2013• 5
$ 0M
$5 000M
$10 000M
$15 000M
$20 000M
$25 000M
2012 2013 2014 2015 2016 2017 2018
MEMS market forecast 2012-2018 value (in M$)
Others
Oscillators
RF MEMS
Microdispensers (microfluidics)
Microfluidics for IVD
Microfluidics for research
Other optical MEMS
Projection systems
Micro displays
PIR & thermopiles
Microbolometers
Inertial combos
Digital compass
Gyroscopes
Accelerometers
Microphones
Pressure sensors
InkJet heads
Continued Strong Growth2012-2018 Forecast (in US$M)
Yole Developpement © March 2013
© 2013• 6
2012 MEMS players ranking Top 30
$ 0
$ 200
$ 400
$ 600
$ 800
$1 000
$1 200
MEM
S R
eve
nu
e (
US$
M)
TOP 30 MEMS Players Ranking 2012
Yole Developpement © March 2013
© 2013• 7
Global RF-MEMS market update
• Moderate market opportunities in ATE market
– RF MEMS used in niche applications, not compete with the mainstream part (solid state switches). This market is
conservative
– Offering becomes broader
– Trend is to handle higher frequencies
• Switches for aerospace & defense are already in production, but with limited volume
• Mobile phone market started
– Strong demand for tuner devices, but strong competition from alternative technologies
– Yole has revised upwards his forecast for MEMS in ASM with >100M dies expected in 2016
0
50
100
150
200
250
300
350
400
450
500
2012 2013 2014 2015 2016 2017 2018
Mar
ket
($M
)
2012-2018 RF MEMS Switch / Variable Capacitor Market ($M)
Aerospace & defense
Industrial
Telecom infrastructure
Mobile devices
Yole développement © Apr. 2013
© 2013• 8
Applications for tunable modules in the
radio handset
Tunable modules will be integrated in three handset locations:
Tunable
ModulePA
Base-
bandFilter
SM
AR
T A
NT
EN
NA
SY
ST
EM
Command (for open-loop)
Tunable
Module
PA Filter
TU
NA
BLE
PA
MO
DU
LE
Tunable
Module
PA Filter
TU
NA
BLE
FIL
TE
R
MO
DU
LE
Command
(for open-
loop)
Command
(for open-
loop)
Antenna
Switch
Module
Base-
band
Base-
band
Antenna
Switch
Module
Filter LNA
Antenna
Switch
Module
Antenna tuning
Tunable PA
Tunable filter / duplexer
Source Epcos
• A tunable module is
built from:
– a switch
multiplexer
connected to
capacitors
– and inductors
© 2013• 9
Drivers for RF tuners… and MEMS value proposition
Increasing
number of
bands and
antennas
LTECarrier
aggregation
Smaller
antennas for
smaller phones
Operators demand for
more users per BST
+ more data per user
• Very high Q
• Excellent linearity over wide frequency range
• Low loss
• High capacitor range
• Digital control, that can be integrated
• Low power consumption (electrostatic actuation)
MEMS value
proposition
Drivers for RF
tuners
© 2013• 10
Wispry reverse engineering
Wispry RF MEMS
Underfill
ASIC
MEMS Interconnect
MEMS Beam
Package
MEMS Lid/Cap
Package Top view
Package side view
4.2mm
1m
m
3.6
mm
Extract from the reverse costing report “Wispry RF MEMS Antenna Tuner”
(published in Jan. 2012)
© 2013• 11
Die SEM
view
Die SEM
view
Die
Bump
Polyimide
layer
Beam
Holes
Wispry reverse engineeringDie – SEM View
Extract from the reverse costing report “Wispry RF MEMS Antenna Tuner”
(published in Jan. 2012)
© 2013• 12
Proliferation of RF tunersFirst Epcos close loop tuner on the market!
© 2013• 13
Proliferation of RF tuners2 antenna tuners in iPhone 5!
RFMD RF1101 and RF1102 tuners for 2 applications in iPhone 5:
Diversity antenna for low band LTE
Main cellular antenna
(source Chipworks)
In Orange: 3 BST ICs used for
impedance matching in Blackberry Z10!
(source Chipworks)
© 2013• 14
Cellphone RF tuners for cell phonesPosition of MEMS today
Price
Size
PerformancedB improvement
Q factor
Number of capacitors
Wispry15mm² 5mm² today (WLCSP) 4mm²
EpcosOpen loop
On Semi, STM, Blackberry
Peregrine
RFMD
Qualcomm…
CavendishWLCSP - 2mm² (only MEMS part)
$1 75 cents 50 cents
GaAs MEMS BST SOI - SOS
RFMD71%
Paratek / RIM10%
Epcos3%
Peregrine2%
Wispry1%
Others13%
2012 cellphone impedance matching module market share in value
- Total = $54.9M -
Yole développement © Feb. 2013
© 2013• 15
Cellphone RF tuners for cell phonesTomorrow expectations
Price
Size
PerformancedB improvement
Q factor
Number of capacitors
Wispry15mm² 5mm² today (WLCSP) 4mm²
EpcosOpen loop
On Semi, STM, Blackberry
Peregrine
RFMD
Qualcomm…
CavendishWLCSP - 2mm² (only MEMS part)
$1 75 cents 50 cents
Development of close loop solutions
Diversification: tunable filters…
Lower cost product
lines (less capacitors)
Package and die shrink
New players
GaAs MEMS BST SOI - SOS
© 2013• 16
RF switches: another MEMS opportunity
Multiband Multimode FEM
Baseband(Multiband)
Multibandtransceiver PA + Duplexer
Antenna
Switch
Module
(ASM)
Main
AntennaPA + Duplexer
Duplexer
PA
ModuleFilter
bank
PA
T/R antenna switch
Dual band
PA die
SPDT
SP12T
switch
PA module
PA die
PA die
PA die
Band switchingSPDT SP5T
PA receiver side
/ Converged PASPDT SP5T
Diversity
antenna
/ LTE
antennaASM
Many opportunities for switches:
© 2013• 17
RF switches: another MEMS opportunity
Multiband Multimode FEM
Baseband(Multiband)
Multibandtransceiver PA + Duplexer
Antenna
Switch
Module
(ASM)
Main
AntennaPA + Duplexer
Duplexer
PA
Module
Filter
bank
PA
T/R antenna switch
Dual band
PA die
SPDT
SP12T
switch
PA module
PA die
PA die
PA die
Band switchingSPDT SP5T
PA receiver side
/ Converged PASPDT SP5T
Diversity
antenna
/ LTE
antennaASM
1. GaAs substrate
2. HR-SOI substrate
3. SOS substrate
4. CMOS (Infineon)
5. MEMS (emerging)
Different technology candidates:
Source DelfMEMS
© 2013• 18
High added value applications for RF-
MEMS switches/varicaps
• The use of MEMS switches in high-end markets depend on 5 key parameters:
– Configuration: a fonction is requested, not a single switch/varicap
– Frequency range
– Switching time
– Power handling
– Cycling
• RF MEMS switches/varicaps value proposition:
– Low loss and high isolation, enabling new architectures
– Less power consumption (than EM relay)
– Potential for low cost and high level of integration
– Can enable a decrease of size / weight of the system
30 GHz MEMS Phase Shifter from Raytheon
© 2013• 19
High added value applications for RF-
MEMS switches / varicaps
Military radars
Electronically scanned array
Circulator in TR modules
Adaptative antennas
Others: receiver protection
devices…
Communication
RF-MEMS switches
/ varicaps
Space
Redundancy matrix
Commutation matrix
Space radars &
communication: reflect
array antenna, PESA…
Commutation between filters
Adaptative filters
TR modules
Steering antennas
© 2013• 20
High added value application segmentsCircuit configurations and market potential
Matrix
Phase shifters
Adaptative
filters
SPxt (SP4T…)
SPDT
Tunable
filters
Filter
commutati
on
TR
modules
TR
modules
circulator
s
Radar &
communi
cation
Missiles
Seekers
PESA,
Reflect
array
antennas
Steering
antennas
COMMUNICATION field
RADARS field
SPACE field
Redundan
cy /
commutat
ion matrix
$50M
$5M
Market potential at
maturity
© 2013• 21
Recent activity in RF MEMS for aerospace
& defense applicationsMarket trends
• The market is still not mature
– Limited availability of MEMS products
– Still limited adoption of MEMS technology : MEMS is still a R&D topic
• Market is still dominated by development contracts
– E.g. European projects involving ESA for Space, or on packaging of RF MEMS (with Ommic…)
– Large integrators such as Thales, Raytheon… are often part of such programs
• The number of RF MEMS initiatives is still high, and leads to more and more
commercial companies
– AirMEMS, RFuTech, Proton Microtechnik…
– Technology evolutions: focus on higher reliability, and lower actuation voltage
– Many developments focus on product platforms that customers can customize for each application (e.g.
Proton Microtechnik)
© 2013• 22
Summary
• MEMS industry is big and growing
• Strong market pull observed for RF tuners in cell phones
• Still techno push for industrial and high-end markets
© 2013• 23
For more information:
Merci pour votre attention!Questions
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