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Transcript of INF5490 RF MEMS - Universitetet i oslo INF5490 RF MEMS • MEMS (Micro ... MEMS • RF...

  • 1

    INF5490 RF MEMS

    LN01: Introduction. MEMS in RF

    Spring 2012, Oddvar Søråsen Department of informatics, UoO

  • 2

    Today’s lecture

    • Background for the course INF5490/9490 • Course plan spring 2012

    • Introduction

    – MEMS in general – RF systems – MEMS in RF systems

  • 3

    INF5490 RF MEMS • MEMS (Micro Electro Mechanical Systems)

    – Extending the VLSI design research activities of the NANO group

    • Basic NANO competence: Design of mico/nano- electronic systems: modeling, analysis and implementation of analog and digital VLSI circuits and systems

    • Activity inspired by: – National focus on micro- and nano-technology

    • The Research Council of Norway – MiNaLab (Micro Nano Technology-lab), next-door

    • SINTEF lab • UiO lab

  • 4

    Why MEMS in the Nano-group? • New possibilities to

    implement composite, integrated, miniaturized systems – Electronic systems with

    MEMS give a new degree of freedom for designers

    • A. Sensors and actuators Mechanical components integrated in the systems: ”eyes, ears, hands”

    • B. MEMS – components need interfacing/driving electronics!

    MEMS

    Electronics

  • 5

    Interfacing to the ”real world” • Enhancing ”More Moore” by

    ”non-classical” electronic components

    • Achieve “Ambient Intelligence” by “More than Moore”

    [Ref. A.M. Ionescu]

  • 1970

    1980

    1980

    2000

    2010

    Technology trends Computational Infrastructure

    • Stationary/backend • Wired • High end computing

    Mobile access devices • Human interaction • Portable • Mostly wireless • Battery

    Sensory swarm • Miniature • Wireless • Autonomous/self-contained • Controlling and sensing natural processes

    1

    10

    >100

    Driven by Moore’s Law

    Beyond Moore [TSL]

  • Personal competence

    Background • Physics •  modeling and design of VLSI (ASIC) •  system design •  computer architecture/multiprocessors

    •  RF MEMS, CMOS-MEMS co-integration

    • Sabattical at SINTEF MiNaLab 03/04

    • Supervising students i relevant fields (Master, Ph.D.)

    • Research activities

    Input • Seminars

    – RF MEMS-seminar by A.M. Ionescu, EPFL, at KTH H04

    • Arr: FSRM, Swiss Foundation for Research in Microtechnology

    – RF MEMS tutorial: G.M. Rebeiz, UCSD, in Tønsberg H05

    • Arr: IMAPS Nordic Cenference – Workshop on MEMS, IMEC, Leuven, H07

    • Arr: Europractice/STIMESI – Course on Cofabrication of MEMS and

    CMOS, IMEC, Leuven, H08 – Tutorials and conference: Eurosensors XXIII,

    Lausanne, H09

    • Visiting UC Berkeley and Carnegie Mellon University, H06

    • C.T.-C. Nguyen, G.K. Fedder ++

    • Literature studies

    • Using the simulation package CoventorWare

    7

  • 8

    Selecting a focus  RF MEMS

    • MEMS is a broad field of research – A focus is needed

    •  RF MEMS •  Cofabrication of MEMS and CMOS

    • ”RF MEMS refers to the design and fabrication of

    dedicated MEMS for RF (integrated) circuits”

    – 1a) Components operate micromechanical and/or

    – 1b) Components fabricated using micromachining

    – 2) Components are used in RF systems

  • 9

    Course topic: RF MEMS

    • Observe: 2 disciplines involved: RF and MEMS

    • RF – ”Radio frequency” – High frequencies: MHz, GHz – Used in wireless transmission – Many characteristic, special properties related to

    high frequency designs • Course, Fall (Svein-Erik Hamran), recommended!

    – INF5481 RF-circuits, theory and design • However, basic/ “needed” RF topics for INF5490/9490 are

    covered in our course!

  • Why RF MEMS in the NANO group?

    • Challenging, promising and exciting field!

    • Close connection to the basic NANO competence in circuit technology

    • The course fits well into the NANO Master/PhD education

    • Actual theme – Increasing interest

    internationally for using MEMS in RF systems

    • Growing commercial attention • Basis for establishing new

    enterprises

    • Large market: wireless communication – Tele communication, mobile

    business – Wireless Sensor Networks

    (WSNs) – Distributed intelligence

    (observation, actuation) – Environmental surveillance, –

    sensor nodes – Ambient Intelligence: - units

    everywhere! – Patient surveillance, - medical

    implants – ”Internet of things”

    10

  • 11

    International activity • RF MEMS is in focus on leading international

    conferences • ISSCC, IEDM (Int. Electron Devices Meeting), Eurosensors • MEMS-conferences and journals

    – See NANO web-page!

    • Europractice and CMP offer MPW (Multi Project Wafer)

    • Increased industry attention and support of RF MEMS – Great potential

    • Miniaturization, increased performance, volume production

    – BUT MEMS in general is not yet a big hit! • A few successes: airbag sensor, video projector

  • 12

    MEMS in RF-systems • RF MEMS development started in the 90s

    – 1990: the first MEMS microwave switch better than GaAs (Hughes Res Lab)

    – 1995: RF MEMS switches from Rockwell Science & TI

    – From 1998: some universities do research in RF MEMS • Univ of Michigan, Univ of Calif Berkeley, Northeastern Univ, MIT,

    Columbia Univ, CMU (Carnegie Mellon), etc. – Some relevant companies:

    • Analog Devices, Motorola, Samsung, ST Microelectronics – Research institutes

    • Sandia, Fraunhofer, IMEC, LETI, SINTEF

  • 13 [A.M. Ionescu]

  • 14

    Today’s lecture

    • Background for course INF5490 • Course plan spring 2012

    • Introduction

    – MEMS in general – RF-systems – MEMS in RF-systems

  • 15

    Information about course INF5490

    • Course homepage: – http://www.uio.no/studier/emner/matnat/ifi/INF5490/v12/

    – Messages posted there! CHECK regularly!

    • Weekly lectures: Oddvar Søråsen – Thursday 10:15 – 12, in OJD 3437 (seminarrom C) – Detailed lectureplan on web

    • Lecture notes will be posted on web before lecture (pdf)

    • Language: English (if requested by someone from the audience, - else Norwegian)

    http://www.uio.no/studier/emner/matnat/ifi/INF5490/v12/�

  • 16

    Group assignments

    • Class assignments: Srinivasa Reddy Kuppi Reddi – ”Felles gruppe” – consult web for weekly plan! – Tuesday 14:15 – 16 in Java 2423

    • First time 24/1

    – Present plan and topics for ”obliger” – Present supporting literature – Work through week assignments

    • Posted a week before

    – Practical aspects – Questions, discussion

  • 17

    Obliger

    • 2 “obliger” have to be done – Must hand in 2 reports at specified dates (see web)

    • General guidelines available on web! – Approval required for taking the exam! – Each group consists of 2 students that collaborate

    • Topics: micromechanical resonators and filters – Simulations using CoventorWare

    • 3-dim modeling, FEM-analysis (Finite-Element-Method) • High-level modeling, ARCHITECT

  • 18

    CoventorWare: features

    • “State-of-the-art” tool for FEM analysis – ”Finite-Element-Method”

    • “Bottom-up” procedure:

    – 1) Build a 3D -model • Multiple layers: structural and sacrificial layers • Etching pattern, remove sacrificial layer

    – 2) Meshing • Tetrahedral, “Manhatten bricks”

    – 3) Solvers • Electrical/ mechanical/ coupled • Iterate!

  • 19

    Process-description • Specify a process file compatible with the relevant

    “foundry” -process – Reduce complexity, idealization – Realistic: characteristic process features should be kept

  • 20

    Layout

    O-P Arhaug

  • 21

    Building a 3-D model

    O-P Arhaug

  • 22

    Meshed 3D -model for FEM analysis

    O-P Arhaug

  • 23

    Filter-function: 2 identical resonators

    In phase Out of phase

  • 24 CoventorWare simulations for 6 resonating modes (O-P Arhaug)

  • 25

    Harmonic response for specific dampings

    O-P Arhaug

  • 26

    Exam

    • Oral exam (45 min) – Option II: 3 hours written exam

    • Depending on the number of students

    • Relevant exam questions will be posted on web

    later on • Lists for 2010/2011 questions are available now!

  • 27

    Themes covered in the course • RF MEMS is a multi disciplinary fie