4 December 2002, ITRS 2002 Update Conference 2002 ITRS Factory Integration ITWG Michio Honma, NEC Jeff Pettinato, Intel.
9/11/2001 1 2001 ITRS Factory Integration ITWG Jeff Pettinato, Intel.
ITRS Winter Conference 2006 The Ambassador Hotel Hsinchu Taiwan 1 ITRS Factory Integration Presentation Mani Janakiram December 2006 Hsinchu, Taiwan Global.
18 July 2001 Work in Progress – Not for Publication 1 ITRS Factory Integration Technology Working Group (FITWG) Industry Presentation 18 July 2001 Michio.
2002 Factory Integration Scope Includes Wafer, Chip and Product Manufacturing Wafer Mfg Chip Mfg Product Mfg Distribution The Factory FEOL BEOL Probe/Test.