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EnablingAutonomousSensorNodes:

TunableCarbon

Nanotube

Electro

MechanicalResonators(CabTuRes)

C.Hierold/C.Roman

W.Andreoni,A.Magrez/L.Forr,O.Grning,A.Ionescu,

M.Kayal,

B.

Nelson,

D.

Poulikakos,

D.

Briand

/N.

de

Rooij

30.05.2013

NanoTera.ch AnnualPlenaryMeeting,Bern,May30,2013

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Overview

CabTuRes proposesaSiP solutiontointegrateCNTresonators(NEMS)withreadout

electronics(CMOSIC)withinapackageadaptedtoapplication(capwafer)

CabTuRes isaninterdisciplinaryengineeringresearchprojectatthecrossroadsbetween

basicscienceandengineeringwithgreatinnovationpotential.

30.05.2013

5mm

2

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Rationale:massbalance

Yes,itisminiatureanditrequiresultralowpower toexcite/readoutananoresonator

UnprecedentedmassresolutionincomparisontonanowiresandQCMs(~1cm

size)inUHVandlowtemperaturedemonstratedinliterature

SNRandQforSWNTresonatorsatambientconditionsmustbeinvestigated

UnprecedentedmechanicaltuningrangeofSWNTs(yieldstrainupto

510%)allowsforaverylargemeasurementrangeinclosedloopoperation.

Highsensitivityformass

balance

because

of

low

m andhigh

0

Goal:ultralowpowerandsmallsize&weightisconditionalforautonomous

sensorsystems

30.05.2013

Miniaturizationperseisnotthe

motivationbutallthebenefitscoming

withminiaturization.

4

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Potentialapplications

thefirstdemonstrationofmassspectrometrybasedonsingle

biologicalmoleculedetectionwitha[NEMS][Naik etal,Nature

Nano4,445(2009)]

achemical

sensor

technology

based

on

resonant

NEMSmassdetectors that[performed]

chromatographicanalysis of13chemicals

withina5stimewindow.[Lietal,NanoLett.10,3899

(2010)]

Portablemicroanalytical systems Singlemoleculemassspectrometry

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TheCabTuResTeam

T5:CMOSIC

&sys.model

T3:MEMS

withCNTs

T4:CNTmech.

interfaces

T1:CNTgrowth

&integration

T2:SWNTfund.

propertiesT6:System

inPackage

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HighlightsofResearchAchievements

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CNTNEMSresonators

12

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NottheworstCNTresonatortechnology

13

Competition:ebeam litho,

DCgatestraining

[Lassagne08]

[Sazonova04]

[Witkamp06]

[Peng06]

CabTuRes:photolitho,

MEMSactuatorstraining

[ShihWeiLee]

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30.05.2013

FeaturesofCNTNEMStechnology

14

ShihWeiLeeShihWeiLeeShihWeiLee MatthiasMuothMatthiasMuothMatthiasMuoth

Lowvoltage,largestroke

(0.5m/V)thermalactuators

SilicononInsulator

decoupledactuationRFsignalpaths

Leeet

al,

to be submitted

to Sens and Actuators A

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SOIprocessflow

Si SiO2 Catalyst Al2O3 Cr/Au

(a)

(b)

(c)

(d)

(f)

(e)

30.05.2013 15

Leeetal,IEEE NEMS2011,p.37

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FeaturesofCNTNEMStechnology

16

ShihWeiLeeShihWeiLeeShihWeiLee MatthiasMuothMatthiasMuothMatthiasMuoth

*measurementsdonotnecessarilycorrespondtothedisplayedCNFETSEM

stableelectricalcontacts

smallgatehysteresis

Leeetal,to be submitted to

Nanotechnology

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30.05.2013

Resonatorresults

17

ShihWeiLeeShihWeiLeeShihWeiLee

*measurementsdonotnecessarilycorrespondtothedisplayedCNFETSEM

StuartTruaxStuartTruaxStuartTruax

DCtunable,

CNTresonators

Leeetal,submitted to APL

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30.05.2013

AnotherpromisingCNTNEMSprocess

20

piezoresistive,ultraclean,

suspendedCNFETs

MatthiasMuothMatthiasMuothMatthiasMuoth

Muothet

al,

MEMS

2013,

p.

496

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30.05.2013

SecondCNTNEMSprocess

31

JiCaoJiCaoJiCao highresonator

density(106/cm2)

preciseCNT

alignment

hysteresis

freeCNFETs

Wladek GrabinskiWladek GrabinskiWladek Grabinski SebastianBartschSebastianBartschSebastianBartsch

Caoetal,IEDM2012

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[Cao12]

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SecondCNTNEMSprocess

32

L=750 nm CNTresonators

@RT

DCtunable

resonance

L=1 m

higherQ

@77K

JiCaoJiCaoJiCao Wladek GrabinskiWladek GrabinskiWladek Grabinski SebastianBartschSebastianBartschSebastianBartsch

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CNTsynthesis,integrationandproperties

37

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Growingcarbonnanotubes

38

preciselylocatedCo

catalystnanoparticles

ArnaudMagrezArnaudMagrezArnaudMagrezMassimoSpinaMassimoSpinaMassimoSpina

narrowdiameter

distribution

highyield

CNTgrowth

narrowdiameterdistribution

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Growingcarbonnanotubes

39

localizedCNTgrowth

nanoparticledepositiononMEMS

flowalignedCNTgrowth

T:1000C,Ethanol,

laminarflowofAr (10ln/h)+H2 (20ln/h),10min

ArnaudMagrezArnaudMagrezArnaudMagrezMassimoSpinaMassimoSpinaMassimoSpina

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processformech.clampingstudies

30.05.2013

Clampingandtribologyatcontacts

48

inSEM

manipulation

inTEM

manipulation

LateralForce

Microscopy

ManishK.TiwariManishK.TiwariManishK.TiwariSimoneSchrleSimoneSchrleSimoneSchrle

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Clampingandtribologyatcontacts

49

unclampedCNTs

CNTsclampedwEBIDPt

~150nmdefl.

~4.4%strain

~85nmdefl.

~1.4%strain

(L ~1m)

ManishK.TiwariManishK.TiwariManishK.TiwariSimoneSchrleSimoneSchrleSimoneSchrle

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STM/STSofOonCNT

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ChemisorptiononCNTs

60

FabioPietrucciFabioPietrucciFabioPietrucciJaap KroesJaap KroesJaap Kroes

O.GrningO.GrningO.GrningW.AndreoniW.AndreoniW.Andreoni

ab initioDFT

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Interfaceelectroniccircuits

72

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SystemTopology&Implementation

30.05.2013 73

ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface

circuit

topology

frontend

electronics

gain noise

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SystemTopology&Implementation

30.05.2013 74

ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface

circuit

topology

feedbackIC

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SystemTopology&Implementation

30.05.2013 75

ChristianKauthChristianKauthChristianKauth MarcPastreMarcPastreMarcPastre interface

circuit

topology

actuator

drive

09.04.2013

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Systemassembly

89

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systemintegration concept

ThroughSiliconVias

30.05.2013 90

DanickBriandDanickBriandDanickBriand RokhayaGueyeRokhayaGueyeRokhayaGueyeTeru AkiyamaTeru AkiyamaTeru Akiyama

highTresistant

Ta/Pt TSVs

ohmiccontacts RFTSVs

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systemintegration concept

Capwaferandstudconnections

30.05.2013 91

DanickBriandDanickBriandDanickBriand RokhayaGueyeRokhayaGueyeRokhayaGueyeTeru AkiyamaTeru AkiyamaTeru Akiyama

encapsulation

process

Eutecticbonding,

T=415C,P=1100mbar,

t=30min

CMOS NEMS

assembly

StudbumpstechnologybyHybridS.A

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Additionalinformationandtechnicaldetails

For

more

information

please

consult

any

of

the

7

CabTuRes

posters

30.05.201310

9

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TheCabTuResteamthanksyou!

30.05.2013

Grouppictureon14.10.2009atETHZurich

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