Additional Lithography 1

download Additional Lithography 1

of 6

Transcript of Additional Lithography 1

  • 8/8/2019 Additional Lithography 1

    1/6

  • 8/8/2019 Additional Lithography 1

    2/6

  • 8/8/2019 Additional Lithography 1

    3/6

  • 8/8/2019 Additional Lithography 1

    4/6

  • 8/8/2019 Additional Lithography 1

    5/6

  • 8/8/2019 Additional Lithography 1

    6/6


IMPRINT LITHOGRAPHY

IMPRINT LITHOGRAPHY

Photo lithography

Photo lithography

Lithography c

Lithography c

1 Photo Lithography Mn It

1 Photo Lithography Mn It

SOFT LITHOGRAPHY - Harvard University · Table 1 Comparison between photolithography and soft lithography Photolithography Soft lithography Definition of patterns …

SOFT LITHOGRAPHY - Harvard University · Table 1 Comparison between photolithography and soft lithography Photolithography Soft lithography Definition of patterns …

ADVANCED LITHOGRAPHY ION-BEAM LITHOGRAPHY

ADVANCED LITHOGRAPHY ION-BEAM LITHOGRAPHY

Spacer Lithography

Spacer Lithography

Lithography Ia

Lithography Ia

Lithography. MAIN TYPES OF LITHOGRAPHY: * Photolithography * Electron beam lithography –X-ray lithography –Focused ion beam lithography –Neutral atomic.

Lithography. MAIN TYPES OF LITHOGRAPHY: * Photolithography * Electron beam lithography –X-ray lithography –Focused ion beam lithography –Neutral atomic.

MFA1M Lithography 1

MFA1M Lithography 1

Lecture 4: Lithography 2 - Mechanical Engineeringgandhi/me645/05L4_Lithography2oxdn_etchV1.pdf · 3 Today’s Class E-beam lithography X-ray lithography Ion beam lithography Oxidation

Lecture 4: Lithography 2 - Mechanical Engineeringgandhi/me645/05L4_Lithography2oxdn_etchV1.pdf · 3 Today’s Class E-beam lithography X-ray lithography Ion beam lithography Oxidation

Advanced Lithography Soft lithography Imprint lithography SPM lithography 3D lithography.

Advanced Lithography Soft lithography Imprint lithography SPM lithography 3D lithography.

2006Optical Lithography

2006Optical Lithography

6. Lithography

6. Lithography

Imprint Lithography - SUSS MicroTec€¦ · SCIL Substrate Conformal Imprint Lithography UV-NIL UV Nanoimprint Lithography SMILE SUSS MicroTec Imprint Lithography Equipment LED, photovoltaics,

Imprint Lithography - SUSS MicroTec€¦ · SCIL Substrate Conformal Imprint Lithography UV-NIL UV Nanoimprint Lithography SMILE SUSS MicroTec Imprint Lithography Equipment LED, photovoltaics,

Lecture 4 - e-Beam Lithography 2003chem.ch.huji.ac.il/~porath/NST2/Lecture 4/Lecture 4 - e-Beam... · Outline e-Beam Lithography: 1.Examples, links and homework 2.Lithography: e-Beam,

Lecture 4 - e-Beam Lithography 2003chem.ch.huji.ac.il/~porath/NST2/Lecture 4/Lecture 4 - e-Beam... · Outline e-Beam Lithography: 1.Examples, links and homework 2.Lithography: e-Beam,

Extreme Ultraviolet Lithography(1)

Extreme Ultraviolet Lithography(1)

Standard Photo-lithography and e-beam lithography …

Standard Photo-lithography and e-beam lithography …

14 Lithography

14 Lithography

2 LASER INTERFERENCE LITHOGRAPHY - uni-halle.de · 2 LASER INTERFERENCE LITHOGRAPHY (LIL) 9 2 LASER INTERFERENCE LITHOGRAPHY (LIL) Laser interference lithography [3~22] (LIL) is a

2 LASER INTERFERENCE LITHOGRAPHY - uni-halle.de · 2 LASER INTERFERENCE LITHOGRAPHY (LIL) 9 2 LASER INTERFERENCE LITHOGRAPHY (LIL) Laser interference lithography [3~22] (LIL) is a