Wafer probing in Legnaro/PadovaWafer probing in Legnaro/Padova

E. FiorettoE. FiorettoLaboratori Nazionali di LegnaroLaboratori Nazionali di Legnaro

for the for the LNL-Padova SPD Test GroupLNL-Padova SPD Test Group

04/02/2003

E. Fioretto

INFN - LNLSPD Meeting

Wafer prober locationWafer prober location

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

LAE LAE buildingbuilding

Clean Clean roomroom

Probe Probe stationstation

… … already donealready done

July 2002July 2002

Transfer of the probe station from Padua to Transfer of the probe station from Padua to

LegnaroLegnaro

August 2002August 2002

Chuck upgrade Chuck upgrade → PA150 → PA150 → PA200→ PA200

September 2002September 2002

Tests with the reference chipTests with the reference chip

October 2002October 2002

Contact tests with the Contact tests with the 3 probe card 3 probe card

November 2002November 2002

Contact tests with the ALICE probe cardContact tests with the ALICE probe card + +

DummyDummy

December 2002December 2002

Microscope upgradeMicroscope upgrade

January 2003January 2003

Tests of the Wafer PKVM14TTests of the Wafer PKVM14T

E. Fioretto

INFN - LNL04/02/2002

SPD Meeting

Microscope upgradeMicroscope upgrade

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

The motorization of the microscope and the new EPROM The motorization of the microscope and the new EPROM release for the control unit have been installed last week release for the control unit have been installed last week before Christmas. before Christmas.

Control software upgradeControl software upgrade

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

ProberBench Version 5ProberBench Version 5 WINDOWS 2000WINDOWS 2000

Contact qualityContact quality

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Needle-printsNeedle-prints

Contact heightContact height

80 80 m below the height of m below the height of first contactfirst contact

ALICE1LHCb Test ProtocolALICE1LHCb Test Protocol

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Tests carried out on each chip :Tests carried out on each chip :

Current consumptionsCurrent consumptions

JTAG functionalityJTAG functionality

DAC testDAC test

Minimum Threshold (Pre_VTH)Minimum Threshold (Pre_VTH)

Threshold scan of all 8192 pixelsThreshold scan of all 8192 pixels

Probe cardProbe card

MB-cardMB-card

MX

I con

troller

MX

I con

troller

JTA

GJT

AG

Pilot

Pilot

PCPC

VMEVME

Tests of the Wafer PKVM14TTests of the Wafer PKVM14T

Only 1 dead pixelOnly 1 dead pixel

Pre_VTH = 201Pre_VTH = 201

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Map of the Wafer PKVM14TMap of the Wafer PKVM14T

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Lot 3Lot 3 Class IClass IClass IIClass IIClass IIIClass III

Chip classificationChip classification

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Class I - Chips for Bump BondingClass I - Chips for Bump Bonding

JTAG and DAC JTAG and DAC OK OK Mean threshold < 30 mV Mean threshold < 30 mV Pixels missing or defect < 1% (82)Pixels missing or defect < 1% (82)I_anal < 350 mA ; I_dig < 270 mA I_anal < 350 mA ; I_dig < 270 mA

Class III - Chips with major Class III - Chips with major defectsdefectsJTAG and DAC JTAG and DAC not passed not passed Mean threshold not found Mean threshold not found No digital outputNo digital outputI_anal > 350 mA ; I_dig > 270 mAI_anal > 350 mA ; I_dig > 270 mA

Class II - Chips with minor defectsClass II - Chips with minor defectsJTAG and DAC JTAG and DAC OK OK Mean threshold > 30 mV Mean threshold > 30 mV Pixels missing or defect > 1% Pixels missing or defect > 1% (82)(82)One or more columns are missingOne or more columns are missingI_anal < 350 mA ; I_dig < 270 mAI_anal < 350 mA ; I_dig < 270 mA

Class PopulationClass Population

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Class Population

55%

16%

29%

Class I Class II Class III

……. more on the Class I. more on the Class I

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

79%

7%

2%4%

4% 4%

16 - 21 22 23 24 27 28

……. more on the Class I. more on the Class I

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Mean NoiseMean Noise

I_digI_dig I_anI_an

72%

21%

7%

Dead pixels > 1%

Mean Threshold > 30 mV

Dead pixels > 1% and mean Thresh. > 30 mV

……. more on the Class II. more on the Class II

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNLChip 74 Chip 74

34%

31%

8%

23%

4%

JTAG DAC No current consumption Chip working partially No output

……. more on the Class III. more on the Class III

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNLChip 73Chip 73

Local Database for the test resultsLocal Database for the test results

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

FileMaker ProFileMaker Pro

What nextWhat next

SPD Meeting

04/02/2003

E. Fioretto

INFN - LNL

Test system validationTest system validation

PetraPetra

Solve the problems related to the use of the Solve the problems related to the use of the

integrated SPD databaseintegrated SPD database

MicheleMichele

New solutions to accelerate the time needed for New solutions to accelerate the time needed for

the chip testthe chip test

Automatic procedure for chip searching Automatic procedure for chip searching

and needle positioningand needle positioning

Next waferNext wafer