Research &Development

Solway

Open company «Solway» was created in 2011 by Russian specialists in the �eld of electrochemistry and physico-chemical engineering in Moscow. The company works to develop high technology devices in engineering science for magni�cation of knowledge and its implementation in practice.

Technology of cleaning and destructionof a surface of semiconductor plates

Problems

Today there are many problems of cleaning of a surface of semiconductors:

technically complex and expensive equipment with high power consumption;

signi�cant time required for cleaning and structuring a surface;

the use of expensive, toxic and hazardous chemicals (surfactants, alkalis, acids);

10% of marriage of plates after are sharp also cleanings of a surface.

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Demand / market

0,5%

The volume of all market(PAM)

Volume of the target market(TAM)

Volume it is realistican achievable segment

(SAM)

Market size in the world

400 bn $

90 bn $

30 bn $

150 m $

Market of the equipmentof cleaning of a surface

of semiconductor plates

Annually producers of semiconductorsspend for the equipment

of cleaning and new technologies

Volume it is realistic an achievableshare of the market (in a year)

Demand / market

800

1000

600

400

200

2010

billi

on, $

2015 2020

0

IndiumChinaRussia

OthersUSAEurope

Competitor

Leading suppliers of the equipment for semiconductor productions

Сompany Headquarters Market share

Applied Materials USA 15,0 %

Tokyo Electron Japan 11,9%

ASML Netherlands 10,2%

KLA-Tencor Corp. USA 5,1%

Lam Research USA 5,0%

Nikon Japan 4,0%

Advantest Japan 3,6%

Novellus Systems USA 2,7%

Dainippon Screen Japan 2,6%

ASM International Netherlands 2,3%

Solution

highly e�cient, environmentally friendly and safe for semiconductor cleaning from the organic, metal contaminants and removing thephotoresist.;

the price is one equipment lower, in comparison with the applied analogs;

use of the high concentration ozone more 200mg/L;

chemicals are used ТОС=0, with possible regeneration of the ful�lled solutions for the purpose of repeated use and utilization of without additional processing;

reduction of the rejected semiconductor plates for 80% аnd reduction of costs of production of the �nal product.

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Oxidizer

Fluorine

Hydroxyl (ОН-)

Oxygen atom

Ozone

Hydrogen peroxide

Hypochlorous acid

Chlorine

Oxidizing potential, V

3,06

2,80

2,42

2,07

1,77

1,49

1,36

Ozone

Ozone is natural gaseous substance, it often is present at environment. The ozone layer protects our planet from the ultra-violet sunlight. Ozone can be created in low concentration at thunderstorm or under bright sun in summer. It is often thought be an air pollutant, but this is incorrect.

Ozone is an e�ective pollution-free oxidizing agent. Especially valuable feature of ozone is that after its disintegration no undesirable substances remain in environment, the only product is oxygen. Ozone is very strong oxidizing agent. From stable substances only �uorine is stronger, chlorine is much less active.

Energy consumption of electrolyzer – 0.3 kWh;

Total energy consumption, - less than 1 kW (cooling system, pumps and the management block);

Power supplies are carried out from source U = 12 V that allows to operate electrolyzer in the «�eld» conditions, e.g. applying solar batteries or wind power without use of inverted recti�ers providing save of energy, eliminating loss in transformers from industrial current sources 220/110 V;

Produced oxygen-ozone intermixture is of high purity. In the UV-spectrum the only one absorption band at λ = 240-255 nm (Hartley ozone band), was observed.

This installation is of small sizes - less than 1/8 м3.

For operation of this installation the integral cooling system which works on Pelte elements of high ecological compatibility is created. This system, however, is insu�ciently e�ective on power consumption and it can be exchanged with the traditional.

Installation for 10 liters/hourof ozone-oxygen mixture generation

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Flow diagram

1 2

насос

утилизация

Рефрежератор

озонатор

О2 + О3

О2 + О3

H + H +

активирующиедобавки

+ О2 + О3

активирующиедобавки

озонатор * 3

О2 + О3

О2 + О3 H +

Patents

№ 2486287 Patent: Process of slice surface cleaning and pickling solutions recovery

№ 2495512 Patent: Process of slice surface cleaning

№ 2507313 Patent: Electrolyzer for generation of hydrogen and ozon-oxygen mixture

Business model

Contractors

Assemblyand testing

Сhannels advances - o�ine, partners, industry shows and conferences,publications in technical and scienti�c journals.

Channels of sales

Licensing

Current status and plan schedule

Entry into the market

Entry into the market of the Russian Federation is carried out on readiness of a prototype and its installation on production of semiconductors in the test mode;

We enter the North American market after successful presentation of the equipment and introduction of technology in Russia;

We enter the European market having got experience of successful sales at the previous stages.

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Idea

2011 2012-2014 2015-2016

creationof a laboratory

samplepatent

applicationthe certi�cate

is receivedcreation

of a prototypeinstallation

of a prototype

developmentof a laboratory sample

approbationof technology

takeout a patent

Investmentson a prototype

negotiationswith the enterprises

entry intothe market

Key project team members

Leadership, project coordi-nation, sales. Development and implementation of pro-jects. Cooperation in the �eld of microelectronics, solar energy in Canada, England, Germany, Techni-cal University of Chemnitz.

Maxim Zarezov

Experience in the micro-electronics, solar energy, energy systems. Coopera-tion in the �eld of micro-electronics, solar energy systems in Canada, Eng-land, Germany, Cyprus, Switzerland, Ukraine.

Anton Mantuzov

The development and industrial implementation of innovative technological solutions and electronic materials. Оrder, import of advanced technological equipment. Cooperation in the �eld of microelectron-ics and solar energy in Canada, England, Germany, Technical University of Chemnitz.

Victor Mantuzov

The implementation of scienti�c management of semiconductor structures formation and decontami-nation by highly concen-trated ozone and magnetic �eld. Dr. Sci., Physics and Mathematics. Cooperation in the areas of water trea-ment in Germany.Dr. Sci., Physics and Math-ematics.

Vladimir Klochikhin

Contacts

Maxim Zarezov CEO

+ 7 (903) 668-6516

Anton Mantuzov Deputy Director

+ 7 (909) 150-5703

E-mail: solway.npp@gmail.com