Temperature Control EquipmentTemperature Control EquipmentTemperature Control Equipment

Makes cooling water easily available, anytime, anywhere.Makes cooling water easily available, anytime, anywhere.

Count on SMC for all your temperature control needs.

Cooling tower

Equipment is to be used in a laboratory or other small space.

Temperature controlof chamberelectrode

Less tap waterused!

When...

When...

When...

There is no cooling tower.Tap water is being used.

etc.

Machinetools

Measuringdevices

Medical/Pharmaceutical

Physical and chemical/analytical equipment

Semi-conductors

Foodproducts

HRS HRZHRZD HRWHRGC HEC HEBHRG

Thermo-coolerThermo-cooler

Thermo-chillerThermo-chiller

Thermo-conThermo-conThermo-electric

Bath

Thermo-electric

BathChemical

Thermo-conChemical

Thermo-con

HED

Even without a cooling tower, an air-cooled refrigerated chiller can be used to easily supply cooling water.

Cooling water at a consistent temperature can be supplied regardless of the season.

Dripping stops

Equipment is to be used in a laboratory or other small space.

Less tap waterused!

Cooling water at a consistent temperature can be supplied regardless of the season.

Chillers are products that control the temperature of heat sources in customers’ devices and equipment using temperature-controlled circulating fluid. Maintaining a fixed temperature can improve the quality, reliability and service life of devices or equipment.

There is a cooling tower, but high temperatures in summer or low (freezing) temperatures in winter make cooling water temperatures unstable.

Compact types that can be installed under or on top of desks, etc., are available. Use for physical, chemical, and analytical equipment, etc.

Can beused not only for cooling, but also

for heating applications(max. 90°C)

P-E10-5B

A Chiller is equipment to control temperature of customers’ heating sources.Chillers control fluid, such as water, and circulate the fluid to customers’ machine using a pump by controlling the output from a cooling source such as a compressor, or a heating source such as a heater. That’s why this equipment can be also called a circulator.

Temperature sensor

Customer’sheatingsource

Circulating fluid pump

Heating source Cooling source

Circulatingfluid tank

Controller

Chiller (circulator)

Laser machining UV curing device (printing, painting, bonding and sealing) X-ray (digital) instrumentCooling of laserirradiated part

Cooling of UV lamp

Temperature control of X-ray tube and X-ray light sensing part

Electronic microscope Laser marker Ultra sonic wave inspection machineTemperature control of electron-beamirradiated part

Cooling of laser irradiated part

Temperature control of ultrasonic wave laser part

Atomizing device (food and cosmetics) Linear motor Packaging line (sealing of film and paper package)

Temperature control of sampleanddevice

Temperature control of moving coil

Cooling of work pieces for bonding

Cooling of die Temperature control of paint material Cooling of vacuum pump

Shrink fitting machine Gas cylinder cabinet Concentrating equipmentCooling of work pieces

Temperature control inside cabinet

Temperature control of concentration fluid

Cleaning tank Temperature control of chamber electrodeTemperature control of cleaningtank

Light sensing part

X-ray tube

Reagent cooling equipmentTemperature control of reagent

Cooling water

Workpiece

Circulating fluid

Cooling water

Application Examples

Vacuum pump

Temperature control of chamber electrode

Coil

CH1

CH2

Chiller

Here are some of the places chillers are used!!

What’s a Chiller?

DualThermo-chiller

1

Ventilatio

n

Ventilatio

n

Expansion valve

Fan

Evaporator

Facilitywater

Circulatingfluid

Compressor

Condenser(Water-cooled)

(Air-cooled)

Refrigeration cycle

Low-temperature

refrigerant

High-temperature

refrigerant gas

Temperature control ofchamber electrode

Installation close to a wall is possible on both sides.

Generates low temperatures using a refrigeration cycle.

HRG, HRGC, HRS, HRZ, HRZD

Cooling capacity from 1 kW to 15 kW. For a wide range of applicationsRefrigerated Thermo-cooler/Thermo-chiller1

Installing extra cooling towers can be troublesome. The HRG series (air-cooled refrigeration) can be moved easily to wherever you need it, when you need it. Cooling water is supplied from the attached hose.

With casters (Option)

This equipment cools the circulating fluid by performing heat exchange with low-temperature refrigerant gas, using a built-in refrigeration circuit that circulates refrigerant. Large-scale heat exchange can be handled compared with the Peltier type. There are two types of heating sources: high-temperature refrigerant gas, which is generated from the refrigeration circuit, and an electric heater. Both air-cooled and water-cooled types are available, depending on the condenser’s cooling method.

61

5

500

377

61

5

500

377

Economy type HRG Compact type HRS

High-performance type HRZ/HRZD

Makes cooling water easily available, anytime, anywhere.

As a replacement for a cooling towerPump capacity: Max. 62 L/min

Dual Thermo-chiller, HRZD series can control tempera-ture for two systems separately by one chiller.Energy-saving thanks to reduced wiring, piping and labor, and double inverter type.

chamber electrodechamber electrode

CH1

CH2

Footprint reduced by 23%HRZ010 2 units

845

0.66 m2

0.51 m2

HRZD020 1 unit

760 870

600 0.15 m2

reduction

HRG

HRZ

HRZD

Space-saving

DualThermo-chiller

Air-cooledrefrigeration

HRG

Convenient functions Self diagnosis function and check display

31 types of alarm codes

Temperature stability ±0.1°C, temperature range from −20°Cto +90°C. Full array of features and equipment.

A double inverter type is also available, saving energy more effectively through use of a DC inverter compressor and an inverter pump.

Three types of cooling and heating methods (refrigerated, water-cooled,Peltier-type) can be selected for a wide range of applications.

Timer operation functionLow tank level detecting functionPower failure auto-restart functionAnti-freezing operation function

2

Heat exchanger for coolingcirculating fluid

Circulatingfluid

In-plant cooling water circulationfacility such as cooling tower, etc.

This equipment cools the circulating fluid by directly exchanging it with the cooling water in the plant. This can be used at room temperature or higher, and also used when there is a cooling water circulation facility. Large-scale heat exchange can be performed using less energy, and the device has a compact body since a compressor is not required.An electric heater is used for heating.

Heating

Cooling

Peltier device

Thermo-con

Heat source

Peltier device

Facilitywater

Thermo-con

DC power supply

Electronhole flow

Electronflow

Facility water

Circulating fluid

CurrentHeat suction (cooling)

Heat generation (heating)

N P

DC power supply

Electronhole flow

Electronflow

Facility water

Circulating fluid

CurrentHeat generation (heating)

Heat suction (cooling)

N P

A Peltier device is a plate type element, inside which P-type semiconductors and N-type semiconductors are located alternately.Therefore, changing the direction of the current supplied to the Peltier device can achieve heating and cooling operation.Temperature can be controlled very precisely because this method has a fast response and can switch quickly.

Refrigerant-free and energy-saving type using no compressor.

Generates little vibration, and is refrigerant-free and environmentally friendly.Can control the temperature just in front of the heat source using the external temperature sensor.

For temperature control in room temperature area Temperature range setting: 20°C to 90°CWater-cooled2

High-performance type HRW

For high-precision temperature control Temperature stability: ±0.01°C to 0.03°CPeltier-type3

High-precision type HEC

With no compressor, power consumption is drastically reduced.Reduction in power consumption is even greater with inverter type: 0.5 kWh/h.

Suitable for temperature control in room temperature areas not requiring compressor. Reduction in facility water volume (1.2 L/min) thanks to direct heat exchange with circulating fluid.

Features equivalent to HRZ series.

No facility water equipment

Frequent piping changes

Can install the unit easily without facility water equipment.

Can reduce the piping installation labor since facility water piping is not required.

Need to avoid effects of ambienttemperature.

Want to reduce installation space.

Since the unit is water-cooled, the ambient temperature will have little effect.

Can reduce the space since the unit is compact.

Air-cooled

Air-cooled

Water-cooled

Water-cooled

HRW, HECChiller

Energy-saving

Thermo-chiller

Thermo-con

Fan

3

Evaporation of chemicalsfor MOCVD,

temperature control ofdiffusion gas

Thermal test with immersion Temperature control ofvarious samples,

materials and parts

Indirect temperature control ofchemicals and liquids

with high viscosity

Application Examples

This equipment precisely controls the temperature of the fluid in the constant temperature tank.Customers can control the temperature by placing a container in the tank.

Accurately controls the temperature of liquid in the bath.Temperature stability: ±0.01°CTemperature distributionin the bath: ±0.02°C

Circulating fluid

Water, fluorinatedliquid

Water, fluorinatedliquid

GALDEN® FluorinertTM

• Chemicals for MOCVD• Diffusion gas• Various samples, materials and parts• Chemicals and liquids with high viscosity

Facility wateroutlet

Facility water inlet

Controller

Constant temperatureliquid tank

Peltier device

Applications

• Deionized water• Hydrofluoric acid• Ammonia hydrogen peroxide solution, etc.

Chemical Thermo-con

Temperature controller

Fluororesin heat exchanger

Pump

Facility water

Chemical fluid tankor chemical bath

Peltier device (thermo-module)

POWER

AT SEL RET

ON

OFF

THERMO-CON

Fluororesin heat exchanger allows direct temperature control for chemicals!!Industry-leading withstand pressure 0.35 MPa!!

HEBThermoelectric Bath

Chemical Thermo-con HED

Semiconductor Various tests Physical and chemical analysis Various chemical processes

Type of circulating fluid

4

SEMI

®

®

SEMI

SEMI

®

SEMI®

SEMI®

SEMI

New

New

SMC Temperature Control Equipment GuideSMC Temperature Control Equipment Guide

FeaturesSeries Temperature range

High-performance chiller

Thermo-chillerSeries HRW (Water-cooled)

High-performance chiller

Thermo-conSeries HEC

High-precision bath

Thermoelectric BathSeries HEB

Fluororesin temperature control system for chemicals

Chemical Thermo-conSeries HED

High-performance chiller

Thermo-chillerSeries HRW (Water-cooled)(Built-in inverter)

With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.For a wide range of applications such as mold temperature control, laser machine tool, analytical equipment, LCD manufacturing equipment, etc.Ideal for export equipment (single-phase 200 to 230 V)UL standards, CE marking

Economy-type chiller

Thermo-coolerSeries HRG(3-phase power supply)

Economy-type chiller

Thermo-coolerSeries HRGC(Single-phase power supply)

High-performance chiller

Thermo-chillerSeries HRZ

High-performance chiller

Thermo-chillerSeries HRZ(Built-in inverter)

High-performance chiller/Compact type

Thermo-chillerSeries HRS

High-performance chiller

Dual Thermo-chillerSeries HRZD(Built-in inverter)

−30

5°C to 35°C

90

−30

5°C to 35°C

90

−30

−20°C to 90°C

90

−30

20°C to 90°C

90

−30

10°C to 60°C

90

−30

10°C to 60°C

90

−30

5°C to 40°C

90

−30

−15°C to 60°C

90

−30

−20°C to 40°C

90

−30

20°C to 90°C

90

−30

−20°C to 90°C

90

−30

−30°C to 90°C

90

With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.For a wide range of applications such as laser machine tool, analytical equipment, LCD manufac-turing equipment, mold temperature control, etc.

Suitable for semiconductor processing equipment with a wide variety of features such as high temperature stability, wide temperature range, failure diagnosis, external communication, etc. Conforming to various safety standardsConforming to UL, SEMI standards, CE marking

In addition to advanced HRZ series, energy-saving is achieved through use of a DC inverter compressor.A single unit covers a wide temperature range and has a large cooling capacity.Can respond to change of process conditions flexibly, which is suitable for semiconductor equipment with a short innovation cycle. Conforming to UL, SEMI standards, CE marking

Direct heat exchanger for in-plant circulating fluidRefrigerant-freeCan control the temperature over a wide range since a compressor is not required.Suitable for semiconductor processing equipment with a wide variety of features such as high temperature stability, wide temperature range, failure diagnosis, external communication, etc.Conforming to UL, SEMI standards, CE marking

High-precision temperature controller with a Peltier device suitable for applications that require high-precision temperature control.Refrigerant-freeHighly-reliable simple constructionEasy installation in equipment with a compact, low-vibration bodyCompatible with a wide range of power supply voltageConforming to UL standards, CE marking

High-precision temperature control bath with a Peltier deviceRefrigerant-freeCompact and low noiseMinimal up-down temperature distribution with a unique agitation method

Heat exchanger for direct temperature control with a Peltier deviceRefrigerant-freeCompatible with a wide range of chemicals by use of a fluororesin heat exchangerConforming to SEMI standards, CE marking

Fits into the space under a laboratory table with a compact design.615 H x 377 W x 500 D 40 kgAvailable for single-phase 100/115 V, 200 to 230 VUL standards, CE marking

Temperature for two systems can be controlled separately by one chiller.More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.Conforming to SEMI standards, CE marking

Ch

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DiscontinuedProductionInformation

DiscontinuationdatesThereafter, please select the HRS series.

• HRG/HRGC (1 kW/2 kW) End of March 2011• HRG/HRGC (5 kW) End of April 20115

: Standard: Selectable by model or option

Clear water,Deionized water,Ethylene glycol

aqueous solution

Applicablefluid

—

—

Pumpcapacity

5 to 62L/min

5 to 62L/min

6 to 40L/min

5 to 40L/min

10 to 40L/min

10 to 40L/min

10 to 30L/min

1 to 10L/min

3 to 23L/min

Max. coolingcapacity

15 kW

10 kW

30 kW

600 W

140 W

15 kW

5 kW

1.2 kW

750 W

5 kW

9.5 kW x 2

±0.3°C

±0.01°C

±0.01°C

±0.01°C

±0.1°C

±0.1°C

±0.1°C

Temperaturestability

±1.0°C

±1.0°C/±0.5°C

±0.1°C

±0.1°C

Air-cooledrefrigeration,Water-cooledrefrigeration

Clear water,Deionized water,Ethylene glycol

aqueous solution

Clear water,Ethylene glycol

aqueous solution

Fluorinated fluid,Clear water,

Deionized water,Ethylene glycol

aqueous solution

Clear water,Fluorinated fluid

Fluorinated fluid,Clear water,

Deionized water,Ethylene glycol

aqueous solution

Fluorinated fluid,Clear water,

Deionized water,Ethylene glycol

aqueous solution

Clear water

Clear water,Fluorinated fluid

Deionized water,Chemical

Fluorinated fluid,Ethylene glycol

aqueous solution

Air-cooledrefrigeration,Water-cooledrefrigeration

Water-cooledrefrigeration

Water-cooledrefrigeration

Peltier-typeair-cooled

Peltier-typewater-cooled

Peltier-typewater-cooled

Peltier-typewater-cooled

Air-cooledrefrigeration,Water-cooledrefrigeration

Water-cooledrefrigeration

Water-cooledWithout

compressor

Coolingmethod A

utom

atic

wat

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uppl

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atin

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Inver

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N/O

FF c

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arni

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Pum

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RS

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With

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6

Temperature Control Equipment

Related ProductsTemperature Control Equipment

Related ProductsCirculating fluid

outlet

Y-strainer

Relief valve

Customer’sloadingmachine

Customer’sfacilities

Valve

Circulating fluidreturn inlet

Facility wateroutlet

Facility waterinlet

Facility Water Line (water-cooled)

Circulating Fluid Line

2-Color DisplayHigh-Precision Digital Pressure Switch ISE80

Quick Change Filter FQ1

Digital Flow Switch for Water PF3WIntegrated with temperature sensor

Digital Flow Switch for Deionized Water and Chemicals PF2D4-Channel Flow Monitor PF2 200

Industrial Filter/Vessel Series FGD

High-Precision Filter for Fluid FGH

Pressure Sensor for General Fluid PSE56Pressure Sensor Controller PSE200, 300

Pressure Switch

Industrial Filter

Flow Switch

Flow Switch Manage pressure, flow rate, and temperature:digital display makes these aspects “visible”

Pressure SwitchFittings and Tubing

Refer to Best Pneumatics No. 6 for details.

• Stainless diaphragm• IP65• VCR®, Swagelok® compatible fittings can be selected.

• Wetted parts: Stainless steel 316L• IP65• VCR®, Swagelok® compatible fittings can be selected.

Refer to Best Pneumatics No. 7 for details.

• Port size: Rc1/2, 3/4, 1• Filtration flow rate: Max. 30 L/min• No tools required• Takes only 60 seconds for element

replacement.

• Port size: Rc3/8, 1/2, 3/4• Filtration flow rate: Max. 60 L/min

• Port size: Rc3/8 to 1• Filtration flow rate: Max. 30 L/min• HEPO element,

Membrane element

• Set flow rate range(L/min)• 0.5 to 4• 2 to 16• 5 to 40• 10 to 100

• Three-color display,two-screen display

• IP65 compliant• Grease-free

• Set flow rate range(L/min)• 0.4 to 4• 1.8 to 20• 4.0 to 40

• MaterialBody sensor: New PFATube: Super PFA

SeriesT

TUTHTDTL

MaterialNylon

PolyurethaneFEP (fluoropolymer)

Modified PTFE (soft fluoropolymer)Super PFA

O.D.ø4 to ø16ø4 to ø16ø4 to ø12ø4 to ø12ø4 to ø19

S Coupler KK• Applicable tube O.D.: ø3.2 to ø16• Port size: M5 to 25A (3/4)

Stainless Steel 316 One-touch Fittings KQG2

Tubing T

• Applicable tube O.D.: ø3.2 to ø16

Stainless Steel 316 Insert Fittings KFG2• Applicable tube O.D.: ø4 to ø16

Fluoropolymer Fittings LQ• Applicable tube O.D.: ø3 to ø25

S Coupler/Stainless Steel (Stainless Steel 304) KKA• Port size: 6A to 50A (1/8 to 11/2)

Metal One-touch Fittings KQB2• Applicable tube O.D.: ø3.2 to ø16

Refer to Best Pneumatics No. 6 for details.

Pressure Switch: Monitors pressure of the circulating fluid and facility water.

Industrial Filter: Filters the circulating fluid and facility water.

Flow Switch: Monitors the flow rate and temperature of the circulating fluid and facility water.

Fittings and Tubing Refer to Best Pneumatics No. 6 for details.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPANPhone: 03-5207-8249 Fax: 03-5298-5362http://www.smcworld.com© 2011 SMC Corporation All Rights Reserved

Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

1st printing PP printing PR 12450SZ Printed in Japan.D-DN