Single-Chip Mass Flow Controller With Integrated Coriolis Flow Sensor and

Proportional Control Valve

Jarno Groenesteijn, Dennis Alveringh, Maarten Groen, Remco Wiegerink, Joost Lötters

Contents

• Micro Coriolis mass flow sensor

• Micro proportional control valve realized in SOI wafer

• Single-chip mass flow controller

– No external tubing

– Reduces internal volume

• Measurement results

• Conclusion

2

Integrated mass flow controller

3

Micro Coriolis mass flow sensor

J. Groenesteijn et al., Towards nanogram per second Coriolis mass flow sensing, MEMS 2016. 4

Proportional Control Valve Realized in a SOI Wafer

M.S. Groen et al., A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring, JMM, 24 (12), 2014

5

Micro valves in surface channel technology

• Artist impression of the proportional control valve

6

Surface channel technology

7 M. Dijkstra et al., A versatile surface channel concept for microfluidic applications, JMM,2007.

Micro valves in surface channel technology

• Variation in slit density gives varying channel depth

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Fabrication process

9

Fabrication process

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Fabricated integrated mass flow controller

• Fabricated single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

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Printed circuit board

• Chip mounted on a printed circuit board with the two permanent magnets to either side of the chip.

• A glass stylus is used to transfer the displacement from the piezoelectric actuator to the valve plate.

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Measurement set-up

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Measurement results – Flow sensor

• Coriolis flow meter, nitrogen flow (70 mg/h = 1 sccm)

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Measurement results – Micro valve

• Leakage of 15-20% of full-scale due to deformation of valve ring

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Measurement results – Flow controller

• Closed loop flow control, nitrogen flow (35 mg/h = 0.5 sccm)

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Conclusions

• A single chip mass flow controller has been presented consisting of a Coriolis mass flow sensor and a proportional micro valve.

• The mass flow controller can control the flow up to 70 mg/h at an applied pressure of 500 mbar.

• Future work will include reducing the leakage of 15-20% of full-scale due to bending of the valve ring.

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