SEMION | SYSTEM

“The Semion retarding field

energy analyser is a plasma

diagnostic tool to allow users

adjust in real time their plasma

input parameters to find the

optimum ion energy distribution,

ion flux and bias voltage (VDC)

for their application”

SEMION | SYSTEM

The Semion Single Sensor

measures the energy of ions

arriving at a surface from a

single sensor location.

The Semion Multi Sensor

system also determines

plasma uniformity using by

taking measurements at

multiple locations.

SEMION | SYSTEM

Plasma ParametersIon Energy Distribution

Ion Flux

Negative Ions

Temperature

Bias Voltage (Vdc)

Measurement FunctionalityTime Averaged • Time Resolved • Time Trend

Hardware

Electronics and Software0-2500eV • Fully automated software

Sensor Holder150mm, 200mm, 300mm, 450mm and custom

Button ProbeReplaceable sensors

Vacuum FeedthroughAvailable with KF, CF or custom vacuum connectors

SEMION | SYSTEM

Installation Setup

Semion ElectronicsGenerator Match Plasma Reactor

Computer

Semion Sensor

SEMION | SYSTEM

How the Retarding Field

Energy Analyser Works

The first grid prevents the plasma entering

the ion energy analyser

The second grid is biased with a negative

potential to repel any electrons

A third grid is biased with a positive potential

sweep. This creates a potential barrier for

the positive ions

The fourth grid is biased negatively relative to

the collector. This repels secondary electrons

A collector plate collects the current of

positive and negative ions which cross the

potential barrier set by the third grid

SEMION | SYSTEM

Typical Results

Ion Energy as a Function of PowerAs the power is increased the energies increase

and the peaks begin to spread due to higher

grounded or bias voltage and the transit time of

the ions across the sheath.

Ion Energy as a Function of PressureAs the pressure increases the energies decrease

due to collisions in the sheath leading to lower

average energies.

SEMION | SYSTEM

Applications

As a crucial tool for optimising plasma conditions, the Semion Retarding

Potential Analyser includes the ability to quantify the flux and energy of ions

impacting a surface.

The Semion System can be used in the following applications:Dusty Plasma

Plasma Etching

HiPIMS Plasma

Ion Beam Plasma

PECVD

Space Plasma

Plasma Sputtering

SEMION | SYSTEM

For further information on the Semion System visit

impedans.com/semion-multi-sensor

To request a quote visit

www.impedans.com/contact

Chase House

City Junction Business Park

Northern Cross

Malahide Road

Dublin 17

Ireland

Ph: +353 1 842 8826

Fax: +353 1 891 6519

Web: www.impedans.com

Email: info@impedans.com