Semiconductor Physics Overview
Transcript of Semiconductor Physics Overview
Semiconductor Physics Overview
Day 7-8
Jeff Davis
ECE3030
Online Reserve Reading: Streetman, Chapter 3 Energy Bands and Charge Carriers in
Semiconductors, Solid State Electronic Devices, 1990.
Barrier Model for Computation
A B
Modulate Barrier
pass
block
Billiard Balls
Switches
General Barrier
Barrier Model for Computation
Tox
SOURCE DRAIN
Leff
GATE
Vg
source drain
gate
Goal
To understand this idea we must first
understand some key ideas about how
electrons move in a semiconductor!
5
What is a semiconductor?
6
A high level description could be …
• Metals -- Highly conductive to current flow!
• Insulators -- Highly resistive to current flow!
• Semiconductors -- Somewhere in between!
Classifications of Electronic Materials
Doping is a good thing!
7
Classifications of Electronic Materials
Another could be based on bond strengths…
8
Metal Crystal
Semiconductor Crystal
Strong Bonds Metal atoms are ionized..
Electrons free to roam (1022 cm-3)
Classifications of Electronic MaterialsClassifications of Electronic Materials
Results in how conductive a material is…
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†Michael Shur, GaAs Devices and Circuits, 1987 Spring Publisher
“The partially heteropolar [ionic&covalent] bonds in GaAs are stronger than the homopolar [covalent] bonds in Si and Ge. It leads to a smaller amplitude of the lattice vibrations (and as a consequence to higher mobility), higher melting point, and wider energy gaps”†
Classifications of Electronic Materials
The strength of the bonds determines material
properties
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Origin of Allowable Energy Bands…
‘N’ for this figure is the number of
atoms with overlapping electron
wavefunctions
sp3 hybrid orbitals
Carbon (C) 1s22s22p2
Note - at zero temp all
electrons are in the valence
band!
Reference:
Energy split due to Pauli Exclusion Principle once
electron wave functions start to overlap.
Energy Band Theory of Solids
Hybrid Orbitals
sp3 Hybrid Orbitals
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Energy Band Theory of Solids
Ev
Ec
Insulators Semiconductors
e- e- e- e- e-
8.8eV
SiO2
Ev
Ec
e- e- e-
e-
e-
1.12eV
Si
Energy necessary to break the electron from its bond is the bandgap energy.
Ev
Ec
e- e- e-
e-
e-
0.17eV
InSb
Indium
Antimonide“Silicon”
Remember: Metals have no forbidden region!
14
What is an electron volt?
• It is an ENERGY!
• 1eV = 1.6e-19 J
Amount of potential energy given to a electron held at an electrostatic potential
of 1 volt
W = F ⋅ ∆x
W = (−qE) ⋅ ∆x
W = −qV
∆x∆x = −qV
Energy Band Theory of Solids
Ec
0.17eV
InSb
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Why do we like semiconductors?
16
Si
Si
Si
Si
Si
Si
Si
SiSi Si
Si
SiSi Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
SiSi
Si
Si
Si
SiSi
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
SiSi
Si
Si
Si
SiSi
Si
Si
Si
Si
Si Si Si
SiSiSi
Si
Doping SemiconductorsOCCASIONALLY add in other elements to substitute for silicon in x-tal to change
conductivity of material!
“OCCASIONALLY” typically means 1 dopant atom in 1000 Silicon atoms to 1 dopant atom in
100M Silicon atoms
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Doping Semiconductors
Si
Si
Si
Si
SiSi
silicon has
4 valence electrons
4 covalent bonds
P
phosphorus has
5 valence electrons
Si
Si
SiSi P
free electron
n-type dopant
B
boron has
3 valence electrons
Si
Si
SiSi B
“hole”
p-type dopant
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How do we describe x-tal structure?
19
X-tal properties
1. Si thin film transistors
2. Amorphous Si Solar Cells
1. Gate material of MOSFET
2. Polycrystalline solar cells
Most high-quality devices
are made of pure x-tal!
20
Importance of Crystal (x-tal) Structure
• Example – Carbon
– Graphite (conductor)~ 7.837 μ∧-cm
– Diamond (great insulator) ~ 5.45 eV
• We must have a working vocabulary to
describe different x-tal structures
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Unit Cell DefinitionA portion of the crystal that could be used to reproduce the entire x-tal… kind of like
a “rubber stamp”
Examples of unit
cells
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Unit Cell Definition
A unit cell can be used to recreate the entire x-tal lattice!
23
Unit Cell Definition
A unit cell can be used to recreate the entire x-tal lattice!
Is this a unit cell?
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Primitive Unit Cell
The smallest portion of the crystal that could be used to reproduce the entire x-tal.
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3-D Cubic X-tal Cells
(BCC) (FCC)
a = “lattice constant”
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Number of Atoms Per Unit Cell
(BCC) (FCC)
1 2 4
Answer is
covered!
a = “lattice constant”
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Diamond Lattice
One-quarter of diagonal length
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Zinc Blende
Show using rasmol - intro to crystal planes!
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Atomic Density
3
333
224.1
2241.1)82.5(
2
cm
atomse
cellunitofVolume
cellunitperAtomsofNumberDensity
cmecmeacellunitofVolume
cellunitperAtomsofNumber
==
−=−==
=
What is the atomic density of a bcc material with lattice constant 5.2
angstroms?
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X-tal planes
a
a
2a
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a
a
a
X-tal planes
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How do we specify x-tal planes?
Answer: Miller Indices!
I will not go into depth here, but I would like for you to know these
basic x-tal planes in the cubic lattice.
33
How do we produce silicon
x-tals?
34
start with silica
(impure SiO2)
heat silica with
carbon to remove
oxygen
very impure
silicon
Chlorinated
impure siliconliquefied SiCl4
distillation
purification
process
ultra-pure
SiCl4
heat SiCl4 in H2
atmosphere
(SiCl4+2H2�
4HCL+ Si )
ultra-pure
polycrystalline
Silicon
Producing ultra-pure silicon
“silicon tetrachloride”
35
Ingot
Wafer
36300mm wafer
Wafer Boat
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Czochralski Crystal Growth
38
39
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What type of carriers do we have in
a semiconductor?
Conduction Band Completely
Empty
Valence Band Completely full
Band Occupation at T=0K
Ec
Ev
+
Electron free to move in
conduction band
“Hole” free to move in valence
band
Band Occupation at Higher Temperature (T>0 Kelvin)
For (Ethermal=kT)>0
Ec
Ev
+
For (Ethermal=kT)>0
Carrier Movement Under Bias
Direction of
Current Flow
Direction of
Current Flow
Ec
Ev
Electron free to move in
conduction band
“Hole” movement in
valence band
+
Ec
Ev
Electron free to move in
conduction band
“Hole” movement in
valence band
Carrier Movement Under Bias
Direction of
Current Flow
Direction of
Current Flow
For (Ethermal=kT)>0
+
Ec
Ev
Carrier Movement Under Bias
Electron free to move in
conduction band
“Hole” movement in
valence band
Direction of
Current Flow
Direction of
Current Flow
For (Ethermal=kT)>0
Material Classification based on Size of Bandgap:
Ease of achieving thermal population of conduction band determines
whether a material is an insulator, semiconductor, or metal
47
How many carriers do we have in an
UNDOPED semiconductor (i.e.
“intrinsic material”)?
Intrinsic Carrier Concentration
•Intrinsic carrier concentration is the number of electron (=holes)
per cubic centimeter populating the conduction band (or valence
band) is called the intrinsic carrier concentration, ni
•ni= f(T) that increases with increasing T (more thermal energy)
ni~2e6 cm-3 for GaAs with Eg=1.42 eV,
ni~1e10 cm-3 for Si with Eg=1.1 eV,
ni~2e13 cm-3 for Ge with Eg=0.66 eV,
ni~1e-14 cm-3 for GaN with Eg=3.4 eV
At Room Temperature (T=300 K)
Ec
Ev
1.E+00
1.E+01
1.E+02
1.E+03
1.E+04
1.E+05
1.E+06
1.E+07
1.E+08
1.E+09
1.E+10
1.E+11
1.E+12
1.E+13
1.E+14
1.E+15
1.E+16
1.E+17
1.E+18
100 1000 10000
Temperature (K)
Temperature Dependence of Intrinsic Carrier Concentration
ni= N
cN
ve−
Eg
2kT
k = boltzmann constant = 1.38e-23 J/K
Definition of “extrinsic semiconductor”
Example: P,
As, Sb in Si
Extrinsic, (or doped material):
Concept of a Donor “adding extra” electrons
Concept of a Donor “adding extra” electrons: Band diagram
equivalent view
Example: B,
Al, In in Si
Extrinsic, (or doped material):
Concept of an acceptor “adding extra” holes
Concept of an Acceptor“adding extra hole”: Band diagram
equivalent view
Hole Movement
Empty state is located next to the Acceptor
All regions of
material are
neutrally
charged.
+
Hole Movement
Another valence electron can fill the empty state located next to the Acceptor leaving
behind a positively charged “hole”.
+
Hole Movement
The positively charged “hole” can move throughout the crystal (really it is the valance
electrons jumping from atom to atom that creates the hole motion).
+
Hole Movement
The positively charged “hole” can move throughout the crystal (really it is the valance
electrons jumping from atom to atom that creates the hole motion).
+
Hole Movement
The positively charged “hole” can move throughout the crystal (really it is the valance
electrons jumping from atom to atom that creates the hole motion).
+
Hole Movement
Region around
the acceptor
has one extra
electron and
thus is
negatively
charged.
Region
around the
“hole” has
one less
electron and
thus is
positively
charged.
The positively charged “hole” can move throughout the crystal (really it is the valance
electrons jumping from atom to atom that creates the hole motion).
Summary of Important terms and symbols
Bandgap Energy: Energy required to remove a valence electron and allow it to freely conduct.
Intrinsic Semiconductor: A “native semiconductor” with no dopants. Electrons in the conduction
band equal holes in the valence band. The concentration of electrons (=holes) is the intrinsic
concentration, ni.
Extrinsic Semiconductor: A doped semiconductor. Many electrical properties controlled by the
dopants, not the intrinsic semiconductor.
Donor: An impurity added to a semiconductor that adds an additional electron not found in the
native semiconductor.
Acceptor: An impurity added to a semiconductor that adds an additional hole not found in the
native semiconductor.
Dopant: Either an acceptor or donor.
N-type material: When electron concentrations (n=number of electrons/cm3) exceed the hole
concentration (normally through doping with donors).
P-type material: When hole concentrations (p=number of holes/cm3) exceed the electron
concentration (normally through doping with acceptors).
Majority carrier: The carrier that exists in higher population (ie n if n>p, p if p>n)
Minority carrier: The carrier that exists in lower population (ie n if n<p, p if p<n)
Other important terms (among others): Insulator, semiconductor, metal, amorphous, polycrystalline,
crystalline (or single crystal), lattice, unit cell, primitive unit cell, zincblende, lattice constant,
elemental semiconductor, compound semiconductor, binary, ternary, quaternary, atomic density,
Miller indices, various notations, etc...
How do we calculate the electron or hole
concentration in equilibrium for
EXTRINSIC MATERIALS?
Parking Lot Analogy
If we have a lot with 100 spaces and the probability of a
single space being occupied is 25%, on average how many
parking spaces should be occupied.
Change percentage
Change # of parking spaces
If we have a lot with 100 spaces and the probability of a
single space being occupied is 50%, on average how many
parking spaces should be occupied.
If we have a lot with 200 spaces and the probability of a
single space being occupied is 25%, on average how many
parking spaces should be occupied.
Modified Football Stadium Analogy
Valence Seats
Conduction Seats
Forbidden Seats
Valence Seats
Forbidden Seats
Conduction Seats
H If heat energy > Egap
then move to
conduction seats
•Sell enough tickets for valence seats only!
•Hot plate under each seat that is randomly activated in the valence seats!
•What is the number of “Conduction Seats” occupied?
G[H] = Density of seats
G[H] ΔH = # of seats between H and H+ΔH
F[H] = probability that seat at level H is occupied
Modified Football Stadium Analogy
# of fans between H and H+⊗H
= (# seats)*(prob seat is occupied)
=(G[H] ⊗H) F[H]
Conduction Band
Valence Band
E
Forbidden Region
Conduction Seats
Valence Seats
H
Forbidden Region
gc(E) = Density of states (i.e. energy states)
gc(E) ΔE = # energy levels per vol. from E to E+ΔE
f(E) = probability electron at Energy E
electrons conc. between E and E+⊗E
= (# E states density)*(prob E is occupied)
= (gc(E) ΔE ) f(E)
Electron Statistics in Semiconductor
Quantum Mechanics tells us that the number of available states in a cubic cm
per unit of energy, the density of states, is given by:
eVcm
StatesofNumber
unit
EEEEmm
Eg
EEEEmm
Eg
v
vpp
v
c
cnn
c
≡
≤−
=
≥−
=
3
32
**
32
**
,)(2
)(
,)(2
)(
h
h
π
π
Density of States Concept
h = planck’s constant= 6.63e-34 [J-sec]
h = reduced planck’s constant (pronounced “h-bar”)= h/2π
Effective Mass for Different Estimations
We also need to know the
probability that an energy level is
occupied at a given temperature!
Here we combine statistical
thermodynamics and quantum ideas!
Fermi-Dirac Function Origins
Energy Levels
E1
1 2 3 4 g1
n1
number of “particles” at energy E1
positions at energy E1
E2
1 2 3 4 g2
n2
1 2 3 4 g3
n3E3
1 2 3 4 gk
nkEk
W1=
g1g1−1( ) g1 − 2( )...(g1 − (n
1−1))
n1!
# of arrangements at each level
assuming order of balls doesn’t matter!
W2=
g2g2−1( ) g2 − 2( )...(g2 − (n2 −1))
n2!
W3=
g3g3−1( ) g3 − 2( )...(g3 − (n3 −1))
n3!
Wk=
gkgk−1( ) gk − 2( )...(gk − (nk −1))
nk!
S = lnW = ln(W1*W
2*W
3...*W
k)
Fermi-Dirac Function Origins
Wk=
gkgk−1( ) gk − 2( )...(gk − (nk −1))
nk!
S = lnW = ln(W1*W
2*W
3...*W
k)
Here is the question…..
What values of g1, g2, g3,… gk and n1, n2, n3, … nk MAXIMIZE the entropy
under the following constraints:
ni= N
total
i=1
i=k
∑
niEi= E
total
i=1
i=k
∑
Fermi-Dirac Function Origins
Energy Levels
E1
1 2 3 4 g1
n1
E2
1 2 3 4 g2
n2
1 2 3 4 g3
n3E3
1 2 3 4 gk
nkEk ni
gi
=1
1+ e
(Ei−α )
β
The result of this optimization is the
following fundamental relationship.
f (Ei) =
1
1+ e
(Ei−E
F)
kT
“Occupation Probability”
Probability of Occupation (Fermi Function) Concept
The probability of an electron at the Fermi energy is 0.5
Source: Pierre Textbook (Need to include full source)
f (Ei) =
1
1+ e
(Ei−E
F)
kT
At higher temperatures, higher energy states can be occupied, leaving more
lower energy states unoccupied (1-f(E)).
Probability of Occupation (Fermi Function) Concept
Source: Pierre Textbook (Need to include full source)
Expected Electron Concentration
Thus, the density of electrons (or holes) occupying the states in energy between
E and E+dE is:
otherwise
and
and
0
,EE if dEf(E)]-(E)[1g
,EE if dEf(E)(E)g
vv
cc
≤
≥Electrons/cm3 in the conduction
band between Energy E and E+dE
Holes/cm3 in the valence band
between Energy E and E+dE
G[H] = Density of seats
G[H] ΔH = # of seats between H and H+ΔH
F[H] = probability that seat at level H is occupied
# of fans between H and H+⊗H
= (# seats)*(prob seat is occupied)
=(G[H] ⊗H) F[H]
remember….
Expected Electron Concentration
Decreasing (Ec-
Ef) increases
electron
concentration
Decreasing (Ef-
Ev) increases
electron
concentration
Source: Pierre Textbook (Need to include full source)
Intrinsic Energy (or Intrinsic Level)
…Equal numbers of
electrons and holes
Efis said to equal E
i
(intrinsic energy) when
material is intrinsic
NOTE: Eiis approximately mid-bandgap BUT not quite!
Source: Pierre Textbook (Need to include full source)
Additional Dopant States: Changing Ef
Intrinsic:
Equal number
of electrons
and holes
n-type: more
electrons than
holes
p-type: more
holes than
electrons
Source: Pierre Textbook (Need to include full source)
Developing the mathematical model for electrons and holes
The density of electrons is:
∫=bandconductionofTop
bandconductionofBottom
E
Ec
dEEfEgn )()(
∫ −=
bandvalenceofTop
bandvalenceofBottom
E
Ev
dEEfEgp )](1)[(
The density of holes is:
Probability the state is filled
Probability the state is empty
Number of states per cm-3 in energy range dE
Number of states per cm-3 in energy range dE
Note: units of n and p are #/cm3
Source: Pierre Textbook (Need to include full source)
The result of this integration gives:
kTEE
i
kTEE
i
fi
if
enp
and
enn
/)(
/)(
−
−
=
=Ec
Ev
EF
Ei
n-type material
Ec
Ev
EF
Ei
p-type material
Ec
Ev
Ei=EF
intrinsic material
Developing the mathematical model for electrons and holes
Other useful Relationships: n - p product
2
/)(/)(
i
kTEE
i
kTEE
i
nnp
enpandennSince fiif
=
==
−−
Known as the Law of Mass Action
Calculating Electron and Hole
Concentrations in Semiconductors
Developing the mathematical model for electrons and holes
If ND>>N
Aand N
D>>n
i
D
i
D
N
npandNn
2
≅≅
If NA>>N
Dand N
A>>n
i
A
i
A
N
nnandNp
2
≅≅
np = ni
2
Developing the mathematical model for electrons and holes
Example:
An intrinsic Silicon wafer has 1e10 cm-3 holes. When 1e18 cm-3
donors are added, what is the new hole concentration?
n ≅ ND= 10
18 cm−3
p =
ni
2
n=
1010( )
2
1018
cm−3= 100 cm−3
Concept of a Donor “adding extra” electrons: Band diagram
equivalent view
Concept of an Acceptor“adding extra hole”: Band diagram
equivalent view
Temperature Depedance of Carrier Concentration
Extrinsic Temperature Region
n/ND
100 200 300 400 500 600
T(K)
0.5
1.0
1.5
2.0
Freeze Out
Intrinsic T-Region