OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN...
Transcript of OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN...
![Page 1: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/1.jpg)
OFF-state TDDB in High-Voltage GaN MIS-HEMTs
Shireen Warnock and Jesús A. del AlamoMicrosystems Technology Laboratories (MTL)Massachusetts Institute of Technology (MIT)
![Page 2: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/2.jpg)
Purpose
• Further understanding of time-dependent dielectric breakdown (TDDB) in GaN MIS-HEMTs
• Explore TDDB under high-voltage OFF-state conditions: most common state in the operation of a power switching transistor
2
![Page 3: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/3.jpg)
Outline
• Motivation & Challenges
• Initial Results & Breakdown Statistics
• Ultraviolet Light During Recovery & Stress
• Conclusions
3
![Page 4: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/4.jpg)
Motivation
4
GaN Field-Effect Transistors (FETs) promising for high-voltage power applications more efficient & smaller footprint
![Page 5: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/5.jpg)
GaN Reliability Challenges
5
Inverse piezoelectric effectJ. A. del Alamo, MR 2009
![Page 6: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/6.jpg)
GaN Reliability Challenges
6
Inverse piezoelectric effectJ. A. del Alamo, MR 2009
Current collapseD. Jin, IEDM 2013
![Page 7: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/7.jpg)
GaN Reliability Challenges
7
Inverse piezoelectric effectJ. A. del Alamo, MR 2009
Current collapseD. Jin, IEDM 2013
VT instability
![Page 8: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/8.jpg)
GaN Reliability Challenges
8
Inverse piezoelectric effectJ. A. del Alamo, MR 2009
Current collapseD. Jin, IEDM 2013
Gate dielectric reliabilityVT instability
![Page 9: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/9.jpg)
Time-Dependent Dielectric Breakdown• High gate bias → defect generation → catastrophic oxide
breakdown• Often dictates lifetime of chip
9
D. R. Wolters, Philips J. Res. 1985
T. Kauerauf, EDL 2005
Typical TDDB experiments:Si high-k MOSFETs
Gate material melted after breakdown
Si MOSFET
![Page 10: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/10.jpg)
TDDB in GaN MIS-HEMTs
10
G. Meneghesso, SST 2016T.-L. Wu, IRPS 2013S. Warnock, CS MANTECH 2015
• Classic TDDB observed• But: studies to date all on positive gate stress TDDB
→ More relevant for D-mode devices: TDDB under OFF-state
![Page 11: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/11.jpg)
OFF-state Stress• Negative gate bias turns FET off; high bias on drain• Relevant operational condition for GaN power circuits
11
![Page 12: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/12.jpg)
OFF-state Stress• Negative gate bias turns FET off; high bias on drain• Relevant operational condition for GaN power circuits• Electrostatics more complicated than under positive gate stress
12
• TDDB failure can result from peak in electric field during OFF-state• Study devices with no field plates for simplicity
Positive gate stress OFF-state stress
![Page 13: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/13.jpg)
Dielectric Reliability in GaN FETsAlGaN/GaN metal-insulator-semiconductor
high electron mobility transistors (MIS-HEMTs)
13
Goals of this work:- What does TDDB look like in the OFF-state stress condition?- How do transient instabilities (current collapse, VT shift) affect
our ability to observe TDDB?
![Page 14: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/14.jpg)
Initial Results & Breakdown Statistics
14
![Page 15: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/15.jpg)
GaN MIS-HEMTs for TDDB Study
15
• GaN MIS-HEMTs from industry collaboration: depletion-mode
• Gate stack has multiple layers & interfaces
→ Uncertain electric field distribution
→ Many trapping sites
• Complex dynamics involved→ Unstable and fast changing VT→ Current collapse
A. Guo, IRPS 2016
GaN MOSFET
![Page 16: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/16.jpg)
Constant-Voltage OFF-state Stress
16
VGS,stress< 0 V, high VDS,stress
IG=ID damage at drain-side edge of gate
![Page 17: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/17.jpg)
Constant-Voltage OFF-state Stress
17
VGS,stress< 0 V, high VDS,stress
soft breakdown
IG=ID damage at drain-side edge of gate
![Page 18: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/18.jpg)
Constant-Voltage OFF-state Stress
18
VGS,stress< 0 V, high VDS,stress
soft breakdown
IG=ID damage at drain-side edge of gate
![Page 19: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/19.jpg)
Constant-Voltage OFF-state Stress
19
VGS,stress< 0 V, high VDS,stress
soft breakdown
final hard breakdown
tBD
IG=ID damage at drain-side edge of gate
![Page 20: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/20.jpg)
Constant-Voltage OFF-state Stress
20
Pause stress every 50 s and characterize devicestress
• Multiple jumps in stress IG before final breakdown‒ Corresponds to increase in I-V OFF-state leakage
• Significant current collapse
characterization
![Page 21: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/21.jpg)
OFF-state Step-Stress
21
Step VDS,stress: ΔVDS,stress=5 V, each 100 s/step
• Moderate stress: IG=ID decreases during stress step trapping
• High stress: IG increases stress-induced leakage current (SILC)
![Page 22: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/22.jpg)
OFF-state Step-Stress
22
Transfer characteristics in between stress steps
• Very large VT shifts (first positive, then negative) and hysteresis• Progressive increase in current collapse for increasing VDS,stress
![Page 23: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/23.jpg)
OFF-state TDDB Statistics
23
• Statistics do not follow Weibull distribution• Spread over many orders of magnitude
Time to final breakdown (IG=1 mA)
positive gate stress TDDB
S. Warnock, IRPS 2016
![Page 24: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/24.jpg)
Trapping at Drain-end of Channel
24
• Trapping affects electric field• Depends on trap concentration, location, etc. highly random
In OFF-state, large electric field peak at drain-end of channel Severe electron trapping
![Page 25: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/25.jpg)
Ultraviolet Light DuringRecovery & Stress
25
![Page 26: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/26.jpg)
UV Light to Mitigate Trapping
26
Need to separate current collapse, VT shift from permanent degradation
• UV light very effective for de-trapping in GaN• Choose 3.5 eV for TDDB study
D. Jin, IEDM 2013
![Page 27: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/27.jpg)
OFF-state Step-Stress: Recovery with UV
27
• Step VDS,stress: ΔVDS,stress=5 V, each 100 s• Before characterization, shine 3.5 eV UV light for 5 minutes after
each stress step
• No UV during stress expect unchanged stress leakage current
![Page 28: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/28.jpg)
OFF-state Step-Stress: Recovery with UV
28
Transfer characteristics in between stress steps
• Current collapse mitigated• No positive VT shift, only negative NBTI
![Page 29: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/29.jpg)
OFF-state Step-Stress: Stress with UV
29
• Step VDS,stress: ΔVDS,stress=5 V, each step 100 s/step• 3.5 eV UV light during stress, and 5 minutes after (to eliminate residual
trapping)
![Page 30: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/30.jpg)
OFF-state Step-Stress: Stress with UV
30
• Step VDS,stress: ΔVDS,stress=5 V, 100 s/step
• No evidence of trapping for moderate VDS,stress• Clear appearance of SILC at higher voltage• Breakdown at 60 V compared to ~110 V for step-stress in dark
(step-stress in dark)
![Page 31: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/31.jpg)
OFF-state Step-Stress: Stress with UV
31
Transfer characteristics in between stress steps
• Current collapse entirely mitigated• Negative VT shift NBTI
![Page 32: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/32.jpg)
OFF-state Constant-Voltage TDDB Statistics
32
• UV statistics now follow Weibull distribution• Breakdown occurs sooner, even with VDS,stress ~25% less• UV mitigates trapping electric field ↑
Compare TDDB in the dark and with 3.5 eV UV during stress
![Page 33: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/33.jpg)
Conclusions• Investigated OFF-state TDDB in GaN MIS-HEMTs for the
first time• Without UV light:
‒ Current collapse, VT shift‒ Cannot separate transient and permanent effects‒ Non-Weibull breakdown statistics
• With UV light:‒ Current collapse completed mitigated‒ Progressive negative VT shift NBTI‒ UV de-trapping yields higher electric field accelerated
breakdown‒ Breakdown follows Weibull distribution
• Next work: estimate electric field to develop lifetime model
33
![Page 34: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/34.jpg)
Acknowledgements
34
Dr. José Jiménez, IRPS 2017 mentor
![Page 35: OFF-state TDDB in High-Voltage GaN MIS-HEMTs slides.pdf · OFF-state TDDB in High-Voltage GaN MIS-HEMTs. Shireen Warnock and Jesús A. del Alamo. Microsystems Technology Laboratories](https://reader030.fdocuments.in/reader030/viewer/2022040220/5e29e34439c4710fb36c9723/html5/thumbnails/35.jpg)
Questions?
35