Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

ICE 4010: MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

Lecture #01

Introduction to MEMS

Dr. S. Meenatchi Sundaram

Email: meenasundar@gmail.com

� “MEMS and Microsystems: design, manufacture, and nanoscaleengineering,” 2nd Edition, Tai-Ran Hsu, John Wiley & Sons, Inc., 2008.

� Chang Liu, Foundations of MEMS, 2nd Edition, Prentice Hall, 2012.

� M. Bao, Analysis and Design Principles of MEMS Devices, 1st Edition,Elsevier, 2005.

� S. Beebey, G. Ensell and N. White, MEMS Mechanical Sensors,Boston: Artech House, 2004.

� Stephen D Senturia, Microsystem Design, Springer, 2001.

� An Introduction to MEMS, Prime Faraday Technology Watch – January2002(https://www.academia.edu/5077471/Prime_Faraday_Technology_Watch_ISBN_1-84402-020-7_An_Introduction_to_MEMS_An_Introduction_to_MEMS_Micro-electromechanical_Systems_PRIME_Faraday_Partnership_PRIME_Faraday_Partnership?auto=download)

Reference Books & Materials

Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 2

� Micro-Electro-Mechanical Systems (MEMS) is the integration

of mechanical elements, sensors, actuators, and electronics on a

common silicon substrate through micro fabrication technology.

� A technology to create any integrated devices or systems that

combine mechanical and electrical components. These devices

have the ability to sense, control and actuate on a micro scale

and generate effects on macro scale.

� A device that consists of micro machines and microelectronics

where micro machines are controlled by microelectronics.

� A system or a device that has static and movable components

with some dimension on the scale of micron.

What is MEMS?

Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 3

� By combining IC’s with mechanical parts, MEMS are

complete systems on a chip.

What is MEMS?

Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 4

� In the most general form, MEMS consist of mechanicalmicrostructures, microsensors, microactuators andmicroelectronics, all integrated onto the same silicon chip.

5

What is MEMS?

Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

6Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

How small are they?

7Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

Micro Flying Robot

8Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

9Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

10Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

World’s Smallest Guitar

11Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

Pressure Sensors

12Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

Low cost coplanar waveguide

13Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

14Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples

15Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal

Visual Examples