Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
ICE 4010: MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
Lecture #01
Introduction to MEMS
Dr. S. Meenatchi Sundaram
Email: [email protected]
� “MEMS and Microsystems: design, manufacture, and nanoscaleengineering,” 2nd Edition, Tai-Ran Hsu, John Wiley & Sons, Inc., 2008.
� Chang Liu, Foundations of MEMS, 2nd Edition, Prentice Hall, 2012.
� M. Bao, Analysis and Design Principles of MEMS Devices, 1st Edition,Elsevier, 2005.
� S. Beebey, G. Ensell and N. White, MEMS Mechanical Sensors,Boston: Artech House, 2004.
� Stephen D Senturia, Microsystem Design, Springer, 2001.
� An Introduction to MEMS, Prime Faraday Technology Watch – January2002(https://www.academia.edu/5077471/Prime_Faraday_Technology_Watch_ISBN_1-84402-020-7_An_Introduction_to_MEMS_An_Introduction_to_MEMS_Micro-electromechanical_Systems_PRIME_Faraday_Partnership_PRIME_Faraday_Partnership?auto=download)
Reference Books & Materials
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 2
� Micro-Electro-Mechanical Systems (MEMS) is the integration
of mechanical elements, sensors, actuators, and electronics on a
common silicon substrate through micro fabrication technology.
� A technology to create any integrated devices or systems that
combine mechanical and electrical components. These devices
have the ability to sense, control and actuate on a micro scale
and generate effects on macro scale.
� A device that consists of micro machines and microelectronics
where micro machines are controlled by microelectronics.
� A system or a device that has static and movable components
with some dimension on the scale of micron.
What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 3
� By combining IC’s with mechanical parts, MEMS are
complete systems on a chip.
What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal 4
� In the most general form, MEMS consist of mechanicalmicrostructures, microsensors, microactuators andmicroelectronics, all integrated onto the same silicon chip.
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What is MEMS?
Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
6Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
How small are they?
7Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
Micro Flying Robot
8Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
9Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
10Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
World’s Smallest Guitar
11Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
Pressure Sensors
12Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
Low cost coplanar waveguide
13Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
14Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
15Dr. S.Meenatchi Sundaram, Department of Instrumentation & Control Engineering, MIT, Manipal
Visual Examples
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