FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of...

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FORMATION, MORPHOLOGIES, FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC COMPOSITION AND OPTOELECTRONIC PROPERTIES PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE: Introduction Basics of p-Si growth Morphology and structure Chemical Composition Optical properties Electrical properties
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Transcript of FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of...

Page 1: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

FORMATION, MORPHOLOGIES, FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC COMPOSITION AND OPTOELECTRONIC

PROPERTIESPROPERTIES

Vitali Parkhutik

Department of Materials Science, Technical University of Valencia

OUTLINE:

Introduction

Basics of p-Si growth

Morphology and structure

Chemical Composition

Optical properties

Electrical properties

Page 2: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

P-Si IS AN INTERESTING RESEARCH ISSUEP-Si IS AN INTERESTING RESEARCH ISSUE

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NUMBER OF PUBLICATIONS

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IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 3: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

STRUCTURE AND BAND DIAGRAMSTRUCTURE AND BAND DIAGRAM

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 4: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

SET-UP FOR p-Si GROWTHSET-UP FOR p-Si GROWTH

0 200 400 600 800 1000 12000.0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

n+-Si (100), 30 mA/cm

2

An

od

ic V

olt

ag

e,

V (

vs

.Pt)

Time, s

1 part of 48% HF + 1 part of ethanol

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 5: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

ALL THIS IS THE POROUS SILICON ALL THIS IS THE POROUS SILICON

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Pore width, nm Type of pore

2

2-50

>50

Micro

Meso

Macro

Page 6: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Why p-Si is interesting? Why p-Si is interesting?

1. Fundamental theoretical background

1.1. Physics of bulk semicon- ductors and nanocrystals

1.2. Electrochemistry of semi-conductors

1.3. Electrical transport in non-ordered materials

1.4. Optical properties of nano-clustered semiconductors

2. Laboratory training

2.4. Electrical properties of porous silicon (dc and ac conductivity)

3. Applications

3.2.Light-emitting devices

3.1. Stabilization of PS properties

3.3. Chemical sensors

3.4. Biological and medical monitoring

2.1. Formation of porous silicon layers

2.2. Chemical composition of porous silicon

2.3. Optical properties of porous silicon

1.5. Physics of non-lineal dynamic systems

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 7: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Electrones or holes?Electrones or holes?

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Page 8: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

KINETICS OF Si POLARIZATION IN

WATER-CONTAINING ELECTROLYTES

P-Si growth

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Page 9: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

DETERMINATION OF POROSITY

1. Gravimetric method

M0 – Mass of Si sample before anodizingM1 – Mass of Si sample after anodizingM2 – Mass of Si sample after removal pSi layer

20

10

MM

MM

IntroductionBasics growthMorphologyCompositionElectrical Optical

Page 10: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

POROSITY OF p-Si INCREASES WITH THE ANODIC

CURRENT DENSITY

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 11: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Current density alters the type of porosity

Ja=10 mA/cm2

Ja=30 mA/cm2

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 12: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

PORE RADIUS INCREASES WITH

THE ANODIC CURRENT DENSITY

25% HF, 10(1), 80 (2) and 250 mA/cm2 (3)

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 13: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

OUDULATING MACRO-PORES ARE PRODUCED

BY PERIODIC CHANGE OF CURENT DESNITY

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 14: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Doping Etching rateIllumination

during etching

n+

p+

p or n

p

n

Very high

High

Medium

Low

Very low

No influence

No influence

Illuminated

Dark

Dark

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DOPING LEVEL INFLUENCES THE p-Si

GROWTH RATE AND STRUCTURE

Page 15: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

FACTORS INFLUENCING THE p-Si GROWTH:

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

- anodic current density,

- HF concentration,

- Si doping level,

- illumination

Page 16: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

PORE DIRECTIONS ARE FOLLOWING THE CRYSTALLOGRAPHY OF Si WAFER

Page 17: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Highly ordered macro-p-SiHighly ordered macro-p-Si

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Page 18: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Nanowires of Si preserve the crystallinity of

bulk Si

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Page 19: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Size of Si clusters can be determined through fitting Raman scattering data

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Page 20: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Chemical Composition of p-SiChemical Composition of p-Si

SiHx (x=1,2,3)

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SiOx

Page 21: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

A.c. conductivity of p-SiA.c. conductivity of p-Si

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Page 22: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Reflection of light from p-Si Reflection of light from p-Si

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Page 23: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

OPTICAL ABSORPTION IN p-Si

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 24: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Photoluminescence of p-Si

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.

Page 25: FORMATION, MORPHOLOGIES, COMPOSITION AND OPTOELECTRONIC PROPERTIES Vitali Parkhutik Department of Materials Science, Technical University of Valencia OUTLINE:

Confinement effects in Si clustersConfinement effects in Si clusters

IntroductionBasics growthMorphologyCompositionElectrical Prop.Optical Prop.