Engineering Science for Microsystem Design

7/22/2019 Engineering Science for Microsystem Design

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Why?

Fundamental principles of

physics,chemistry and biology

Closely related to design,manufacture andpackaging of microsystems


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ATOMIC STRUCTURE OF MATTER


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ATOMIC STRUCTURE OF

MATTER

Q:What defines the different properties of

elements?

Some familiar terms

Nucleus

Electrons

Atomic number

Example:


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Rules Applicable to atomic structure In the periodic table,each element contains a

specific number of protons,and no two elements

have the same number of protons

Electrons with the same number of electrons at theouter orbit have similar properties

Elements are stable with eight electrons in the outer

orbit

Atoms seek to combine with other atoms to createthe stable condition of a full orbit


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IONS AND IONIZATION

Ion and types

Ionization-two methods By electrolysis process

By electron beams

Schematic diagram of ionization by electron beams

Hydrogen and helium are the popular ion sources

Ionization energy


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MOLECULAR THEORY AND

INTERMOLECULAR FORCES

Molecules

Made up of bonds that can be compressed or stretched

on force or actuation

Eg:Sulphuric acid molecule


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Lattice

Bonding forces in lattice:Intermolecular

forces


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Stiction in thin films in surfacemicromachining

the static friction that has to be overcome toenable relative motion of stationary objects incontact

Serious factor-Van der Waals force


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Variation of intermolecular forces with separation Electrostatic nature of forces

Pulling molecules apart prompt the increase of attractionforce to overcome the inherent cohesion

Further separation-rapid decrease of attraction Variation-1/d to 1/d^6


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MOLECULAR THEORY ANDINTERMOLECULAR FORCES


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THANK YOU

Engineering Science for Microsystem Design

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