Electronic Gases 2019 - TECHCET

Electronic Gases 2019Supply-Chain & Market Analysisa Critical Materials Report™

By Bruce M. AdamsTECHCET CA LLC

May [email protected]

Table of Contents

http://www.techcet.com/

Report ScopeTECHCET’s Critical Materials Report™ on Electronic Gases is a market and supply-chain analysis report on specialty and bulk gas applications as used for semiconductor device manufacturing applications. This year’s report includes details on the Xenon & Neon rare gases market segments. Market dynamics and trends are provided including a 5- year forecast and market shares for both bulk and specialty gases. Important supply-demand issues and charts are shown for on NF3, He, WF6, Ne & Xe. A Summary of key suppliers is provided in the back of the report. A full set of profiles is also included. Please see the Table of Contents, below, or contact TECHCET for more information at [email protected], +1-480-382-8336, x 1

CMC and TECHCET Clients Confidential

2Copyright 2019 TECHCET CA LLC all rights reserved

mailto:[email protected]

Table of Contents - 1Topic Page

1. Executive Overview 16

2. Market Overview 34

3. Electronic Gas Market Overview: 60

a. Electronic Gas Market Growth and Forecast 61

4. Worldwide Electronics Gas Market Share: 63

a. Electronic Bulk and Specialty Gas Market Share 65

b. Electronic Bulk Gas Market Share 68

c. Electronic Specialty Gas Market Share 71

5. Key Specialty Gas Market Dynamics: 76

a. NF3 Market Overview 77

b. Helium Market Overview 88




c. WF6 Market Overview 100

d. Neon Market Overview 108

e. Xenon Market Overview 116

6. Plant/Vehicle Incidents: 120

a. Linde Gas Facility High Pressure Release 121

b. Linde Air Separation Plant Structural Fire 122

c. Linde Hydrogen Tanker Fire 123

d. Air Liquide LOX Tanker Rollover 124

e. Linde Specialty Gas Plant Fluorine Leak 125

f. Air Liquide Facility Fire 126




g. Air Liquide Laboratory Fire 127

h. Air Liquide Oxygen Compressor Failure 127

i. Air Gas (Air Liquide) Fluorine Leak 128

7. Mergers and Acquisitions: 129

a. Linde/Praxair Merger 130

b. DowDupont Split 138

c. Versum / Merck 145

8. Technology/Industry Trends: 147

a. Metal Organic Framework (MOF) Hydride Delivery 148

b. Co vs W in Al Era 156

c. CLF3 Exposure on Carbides and Nitrides 163




9. Environmental and Regulatory Issues 172

10. Gas Supplier Profiles and News 181

a. Air Liquide 182

b. Linde 188

c. TNSC-Matheson 199

d. Versum Materials 206

e. Air Products 211

f. Showa Denko 223

g. SK Materials 228

h. Air Water 231

i. Kanto Denka Kogyo 235




11. Misc Gas Industry News 237

a. Peric Expansion Plans 238

b. Hangzhou Fortune Nitrogen Generator in China 239

c. Messer Group New Carbon Dioxide Plants 240

d. Entegris and Spectrum Materials Partnership 241

e. Kaimeite Gases New Specialty Gas Facility in China 241

f. Specialty Gas International New Spec Gas Facility 242

g. Jiangsu Yoke Technology acquires 90% of Chengdu Kameite Gases and 100% of Jiangsu Xianke Semiconductor Materials

243

h. Henan Xinlianxin Shenleng new CO and CH4 Plants 244

i. Jiangsu Taixing Taijin Forms JV with Taiwanese company for silane products

244




j. Entegris acquires SAES Pure Gas 245

k. Dalian Special Gases New Spec Gas Production Facility 246

l. Baosteel Desires to divest 51% of Baosteel Gases 247

m. Messer Group Senior Management Changes 248

n. Iwatani Targeting China for Future Growth 249

o. Electronic Fluorocarbons new Expansion in PA 250

p. Hyosung Adding new NF3 Capacity in Asia 251

12. Spec Gas Industry Matrix 252

13. Electronic Gas Matrix: 254

a. Hydrides 255

b. Silane Precursors 256

c. Etchants/Chamber Clean 257




d. Deposition/MIsc 258

e. Bulk Gases 259

14. Supplier and Sub-tier Supplier Profiles See separate file



Figures - 1Topic Page

1. Current Market Outlook 36

2. Semiconductor Sales Trends 37

3. Global Purchasing Managers Index 38

4. Electronics and Semiconductors Industries Supply Chain 39

5. GDP Outlook 40

6. Annual Growth Electronics Production 41

7. Global Electronic Systems 42

8. Electronic and IT Segment Outlook 43

9. Automotive Semiconductor Market Growth 46

10. 2019 Semiconductor Growth Outlook 47

11. 2019 Memory Growth Outlook 48




12. Semiconductor Segment Outlook 49

13. Semiconductor Market by Device Segment 50

14. Semiconductor Unit Growth 51

15. 2019 Capital Spending Outlook 52

16. Estimated Capital Spending Outlook by Company 53

17. 200mm Capacity Outlook 54

18. China Semiconductor Market 55

19. Techcet Wafer Start Forecast 58

20. Electronic Gas TAM Forecast 61

21. Bulk and Spec Gas Market Share 2018 65

22. Bulk Gas Market Share 2018 68




23. Specialty Gas Market Share 2018 71

24. NF3 Forecast 78

25. NF3 WW Estimated Capacity Shares - 2018 87

26. Helium Worldwide Supply and Demand 89

27. Global Helium Demand 2018 by Region 94

28. WF6 Forecast 101

29. WF6 WW Estimated Capacity Shares - 2018 107

30. Neon Forecasts 109

31. Twinscan DUV Product Roadmap 112

32. EUVL Insertion Window 115

33. Xenon Forecast 117




34. Air Liquide LOX Tanker Overturned 124

35. Metal Organic Framework (MOF) Hydride Delivery 151

36. SDS and ION-X Loading Capacity Comparison 152

37. Metals Analysis Comparison for Hydride Delivery Systems 153

38. Desorption Efficiency Comparisons of SDS and ION-X 154

39. Co vs W Transistor Contact Capability 159

40. Co vs Cu Line Resistance Comparison 160

41. Co vs W Transistor Contact Resistance 161

42. ClF3 Etching Study Reactor Configuration 165

43. ClF3 Etching of Silicon Nitride Results 168

44. ClF3 Etching of Tantalum Carbide Results 169




45. ClF3 Etching of Aluminum Nitride Results 170

46. Air Liquide Profile 182

47. Linde PLC Profile 188

48. TNSC-Matheson Profile 199

49. Versum Materials Profile 206

50. Air Products Profile 211

51. Air Products New Headquarters Drawing 219

52. Showa Denko Profile 223

53. SK Materials Profile 228

54. Air Water Profile 231

55. Kanto Denka Kogyo Profile 235




56. Specialty Gas Industry Matrix 253

57. Electronic Gas Matrix -- Hydrides 255

58. Electronic Gas Matrix – Silane Precursors 256

59. Electronic Gas Matrix – Etchants/Chamber Clean 257

60. Electronic Gas Matrix –Deposition/Misc 258

61. Electronic Gas Matrix – Bulk Gases 259



GasProfiles Copyright 2019 TECHCET CA LLC all rights reserved C#: GasProfiles-TOC [email protected]

Supplement to TECHCET’s Critical Materials Report™ on Electronic Gases 2019

Gas Supplier Companies Detailed Profiles

Table of Contents

1 Air Liquide (Maker, Purifier, Supplier) ......................................................................... 9

1.1 Air Liquide - Company Overview ............................................................................................. 9

1.2 Air Liquide - Business Segments .............................................................................................. 9

1.3 Air Liquide - Recent Company Specific News and New Product Offerings .............................. 10

1.4 Air Liquide - Regions Served ................................................................................................. 11

1.5 Air Liquide - Financial Overview ........................................................................................... 11

1.6 Air Liquide - Manufacturing Locations, Capabilities, and Certifications ................................. 11

1.7 JVs and Partnerships ............................................................................................................ 12

1.8 Sales Reps ............................................................................................................................ 12

1.9 TECHCET Analyst Assessment ............................................................................................... 12

2 Air Products (Maker, Purifier, Supplier) .................................................................... 13

2.1 AIR PRODUCTS- Company Overview ..................................................................................... 13

2.2 AIR PRODUCTS-Business Segments ....................................................................................... 13

2.3 AIR PRODUCTS- Recent Company Specific News and New Product Offerings ........................ 13

2.4 AIR PRODUCTS - Regions Served .......................................................................................... 15

2.5 AIR PRODUCTS- Key Customers ............................................................................................ 15

2.6 AIR PRODUCTS- Fiscal Year Financial Overview ..................................................................... 15

2.7 AIR PRODUCTS- Manufacturing Locations, Capabilities, and Certifications ............................ 16


2.9 Sales Reps and Distributors .................................................................................................. 16

2.10 TECHCET Analyst Assessment ............................................................................................ 16

3 Air Water (Maker) .................................................................................................... 17

3.1 Air Water Inc. - Company Overview ..................................................................................... 17

3.2 Air Water Inc.-Business Segments ........................................................................................ 17

3.3 Air Water Inc.- Recent Company Specific News (electronics related) .................................... 18


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3.4 Air Water Inc.- Regions Served ............................................................................................. 18

3.5 Air Water Inc.- Fiscal Year Financial – All numbers reported in Fiscal Year ............................ 18

3.6 Air Water Inc.- Manufacturing Locations, Capabilities, and Certifications ............................. 19




4 Dow-DuPont (Maker, Purifier, Supplier) ................................................................... 20

4.1 Dow-DuPont Company Overview ......................................................................................... 20

4.2 Dow-DuPont-Business Segments .......................................................................................... 20

4.3 Dow-DuPont- Recent Company Specific News ...................................................................... 22

4.4 Dow-DuPont - Regions Served ............................................................................................. 23

4.5 Dow-DuPont - Fiscal Year Financial Overview (non-GAAP & Proforma numbers) ................. 23

4.6 Dow-DuPont - Manufacturing Locations, Capabilities, and Certifications ............................. 23

4.7 JVs and Partnerships – DuPont ............................................................................................. 24



5 Electronic Fluorocarbons (Purifier, Supplier) ............................................................. 25

5.1 Electronic Fluorocarbons, LLC- Company Overview ............................................................... 25

5.2 Electronic Fluorocarbons - Business Segments ...................................................................... 25

5.3 Electronic Fluorocarbons - Recent Company Specific News and New Product Offerings ....... 26

5.4 Electronic Fluorocarbons - Regions Served ........................................................................... 26

5.5 Fiscal Year Financial Overview– All numbers to be reported in Fiscal Year ............................ 26

5.6 Electronic Fluorocarbons - Manufacturing Locations, Capabilities, and Certifications ........... 26




6 GAS INNOVATIONS (Maker) ..................................................................................... 27

6.1 GAS INNOVATIONS- Company Overview .............................................................................. 27

6.2 GAS INNOVATIONS-Business Segments ................................................................................ 27

6.3 GAS INNOVATIONS- Recent Company Specific News and New Product Offerings ................. 27

6.4 GAS INNOVATIONS - Regions Served ................................................................................... 27

6.5 GAS INNOVATIONS- Fiscal Year Financial Overview .............................................................. 28

6.6 GAS INNOVATIONS- Manufacturing Locations, Capabilities, and Certifications ..................... 28


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7 Hangzhou Fortune (Maker, Purifier, Supplier) ........................................................... 29

7.1 Hangzhou Fortune-Company Overview ................................................................................ 29

7.2 Hangzhou Fortune--Business Segments ................................................................................ 29

7.3 Hangzhou Fortune--Recent Company Specific News and New Product Offerings .................. 29

7.4 Hangzhou Fortune--Regions Served ...................................................................................... 30

7.5 Hangzhou Fortune--Financial Overview ................................................................................ 30

7.6 Hangzhou Fortune--Manufacturing Locations, Capabilities, and Certifications ...................... 30


7.8 Sales Reps ............................................................................................................................ 30


8 Hyosung Corporation (Maker) .................................................................................. 31

8.1 Hyosung Corporation- Company Overview ........................................................................... 31

8.2 Hyosung Corporation - Business Segments ........................................................................... 31

8.3 Hyosung Corporation-Recent Company Specific News and New Product Offerings ............... 31

8.4 Hyosung Corporation - Regions Served ................................................................................. 32

8.5 Hyosung Corporation - Fiscal Year Financial Overview .......................................................... 32

8.6 Hyosung Corporation - Manufacturing Locations, Capabilities, and Certifications ................. 32

8.7 JVs and Partnerships - Hyosung ............................................................................................ 33



9 Kaimeite (Maker, Purifier, Supplier) ......................................................................... 34

9.1 Kaimeite-Company Overview ............................................................................................... 34

9.2 Kaimeite - Business Segments .............................................................................................. 34

9.3 Kaimeite - Recent Company Specific News and New Product Offerings ................................ 34

9.4 Kaimeite - Regions Served .................................................................................................... 35

9.5 Kaimeite - Key Customers ..................................................................................................... 35

9.6 Kaimeite - Financial Overview .............................................................................................. 35

9.7 Kaimeite - Manufacturing Locations, Capabilities, and Certifications .................................... 35


9.9 Sales Reps ............................................................................................................................ 36


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10 Kanto Denka (Maker, Purifier, Supplier) ................................................................... 37

10.1 Kanto Denka Kogyo Co., Ltd. - Company Overview ........................................................... 37

10.2 Kanto Denka Kogyo Co., Ltd. - Business Segments ............................................................. 37

10.3 Kanto Denka - Recent Company Specific News and New Product Offerings ...................... 38

10.4 Kanto Denka - Regions Served .......................................................................................... 38

10.5 Kanto Denka - Key Customers .......................................................................................... 38

10.6 Kanto Denka - Fiscal Year Financial Overview – All numbers reported by Fiscal Year ........ 38

10.7 Kanto Denka - Manufacturing Locations, Capabilities, and Certifications .......................... 39

10.8 JVs and Partnerships ......................................................................................................... 39

10.9 Sales Reps and Distributors ............................................................................................... 39


11 Linde (Maker, Purifier, Supplier) ............................................................................... 40

11.1 Linde- Company Overview (given that the merger w/ Praxair legally closed as of 31 October, 2018, information on the two companies will be reported here separately) ..................... 40

11.2 Linde-Business Segments .................................................................................................. 40

11.3 Linde- Recent Company Specific News and New Product Offerings ................................... 42

11.4 Linde - Regions Served ..................................................................................................... 44

11.5 Linde- Fiscal Year Financial Overview (combined financials) .............................................. 44

11.6 Linde- Manufacturing Locations, Capabilities, and Certifications ....................................... 45


11.8 Sales Reps and Distributors (Sales Offices) - Linde ............................................................. 46


12 Praxair (now a wholly owned subsidiary of Linde) .................................................... 47

12.1 Praxair- Company Overview .............................................................................................. 47

12.2 Praxair-Business Segments ................................................................................................ 47

12.3 Praxair- Recent Company Specific News and New Product Offerings ................................. 48

12.4 Praxair - Regions Served ................................................................................................... 49

12.5 Praxair- Key Customers ..................................................................................................... 49

12.6 Praxair- Fiscal Year Financial Overview ............................................................................. 50

12.7 Praxair- Manufacturing Locations, Capabilities, and Certifications .................................... 50


12.9 Sales Reps and Distributors - Praxair ................................................................................. 51


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13 Linggas (Tianjin) Limited (Purifier, Supplier) ............................................................. 52

13.1 Linggas-Company Overview .............................................................................................. 52

13.2 Linggas - Business Segments ............................................................................................. 52

13.3 Ling gas - Recent Company Specific News and New Product Offerings ............................... 52

13.4 Linggas - Regions Served ................................................................................................... 53

13.5 Key Customers .................................................................................................................. 53

13.6 Linggas - Financial Overview ............................................................................................. 53

13.7 Linggas - Manufacturing Locations, Capabilities, and Certifications ................................... 53


13.9 Sales Reps ......................................................................................................................... 54


14 NIACET (Maker, Purifier) .......................................................................................... 55

14.1 NIACET- Company Overview ............................................................................................. 55

14.2 NIACET-Business Segments ............................................................................................... 55

14.3 NIACET- Recent Company Specific News and New Product Offerings ................................ 55

14.4 NIACET - Regions Served .................................................................................................. 55

14.5 NIACET- Fiscal Year Financial Overview ............................................................................. 55

14.6 NIACET- Manufacturing Locations, Capabilities, and Certifications .................................... 56




15 NUMAT (Maker) ....................................................................................................... 57

15.1 NUMAT Company Overview .............................................................................................. 57

15.2 NUMAT-Business Segments .............................................................................................. 57

15.3 NUMAT- Recent Company Specific News and New Product Offerings ............................... 58

15.4 NUMAT - Regions Served ................................................................................................. 58

15.5 NUMAT- Key Customers .................................................................................................... 58

15.6 NUMAT- Fiscal Year Financial Overview ............................................................................ 58

15.7 NUMAT- Manufacturing Locations, Capabilities, and Certifications ................................... 58




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16 Peric-718, The 17th Institute of China Ship Building Industry Company (CSIC) (Maker, Purifier, Supplier) ............................................................................................................ 59

16.1 Peric-718-Company Overview ........................................................................................... 59

16.2 Peric-718-Business Segments ............................................................................................ 59

16.3 Peric-718-Recent Company Specific News and New Product Offerings .............................. 60

16.4 Peric-718-Regions Served .................................................................................................. 60

16.5 Peric-718-Financial Overview ............................................................................................ 60

16.6 Peric-718-Manufacturing Locations, Capabilities, and Certifications .................................. 60


16.8 Sales Reps - Peric .............................................................................................................. 62


17 Showa Denko K.K. (Maker, Purifier, Supplier) ........................................................... 63

17.1 Showa Denko K.K. - Company Overview ........................................................................... 63

17.2 Showa Denko K.K. – Business Segments ............................................................................ 63

17.3 Showa Denko K.K. - Recent Company Specific News and New Product Offerings .............. 64

17.4 Showa Denko K.K. - Regions Served ................................................................................. 64

17.5 Showa Denko K.K. - Fiscal Year Financial Overview .......................................................... 64

17.6 Showa Denko K.K. - Manufacturing Locations, Capabilities, and Certifications ................. 65




18 SK Materials (Maker, Purifier, Supplier) .................................................................... 67

18.1 SK materials - Company Overview .................................................................................... 67

18.2 SK materials - Business Segments ...................................................................................... 67

18.3 SK materials - Recent Company Specific News and New Product Offerings ....................... 67

18.4 SK materials - Regions Served .......................................................................................... 68

18.5 SK materials - Key Customers ........................................................................................... 68

18.6 SK materials - Fiscal Year Financial Overview ................................................................... 68

18.7 SK materials - Manufacturing Locations, Capabilities, and Certifications .......................... 68





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19 Spec Gas International Holdings(SGIH) / Europe-China Electric Materials Co., Ltd (ECEM) – (Maker) ............................................................................................................ 70

19.1 Company Overview ........................................................................................................... 70

19.2 SGIH/ ECEM - Business Segments ...................................................................................... 70

19.3 SGIH/ ECEM - Recent Company Specific News and New Product Offerings ........................ 71

19.4 SGIH/ ECEM - - Regions Served ......................................................................................... 71

19.5 SGIH/ ECEM - Financial Overview ...................................................................................... 71

19.6 SGIH/ ECEM - Manufacturing Locations, Capabilities, and Certifications ........................... 71

19.7 SGIH/ ECEM - JVs and Partnerships ................................................................................... 71

19.8 Sales Reps ......................................................................................................................... 71


20 Sumitomo Seika Chemicals Co., Ltd. (Maker, Purifier) ............................................... 72


20.2 Sumitomo Seika Chemicals Co., Ltd. - Business Segments .................................................. 72

20.3 Sumitomo Seika - Recent Company Specific News and New Product ................................ 73

20.4 Sumitomo Seika - Regions Served ..................................................................................... 73

20.5 Sumitomo Seika - Fiscal Year Financial Overview – Fiscal Year ......................................... 73

20.6 Sumitomo Seika - Manufacturing Locations, Capabilities, and Certifications .................... 73

20.7 JVs and Partnerships - Sumitomo Seika ............................................................................ 74

20.8 Sales Reps and Distributors - Sumitomo Seika .................................................................. 74

20.9 TECHCET Analyst Assessment - Sumitomo Seika .............................................................. 74

21 Taiyo Nippon Sanso Corporation / Matheson Gases (Maker, Purifier, Supplier) ........ 75

21.1 Taiyo Nippon Sanso Corporation (TNSC)- Company Overview ........................................... 75

21.2 TNSC-Business Segments (put all biz segments and description, not just electronics) ........ 76

21.3 Electronic gas products offered: ........................................................................................ 76

21.4 TNSC- Recent Company Specific News and New Product Offerings .................................... 76

21.5 TNSC - Regions Served ...................................................................................................... 77

21.6 TNSC- Key Customers ........................................................................................................ 77

21.7 TNSC- Fiscal Year Financial Overview – All numbers to be reported in Fiscal Year ............. 77

21.8 TNSC- Manufacturing Locations, Capabilities, and Certifications ....................................... 78


21.10 Sales Offices, Reps and Distributors .................................................................................. 79



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22 VERSUM (Maker, Purifier, Supplier) .......................................................................... 81


22.2 VERSUM - Business Segments – 100% electronics focused ................................................ 81

22.3 VERSUM- Recent Company Specific News and New Product Offerings .............................. 82

22.4 VERSUM - Regions Served ................................................................................................ 82

22.5 VERSUM- Key Customers .................................................................................................. 82

22.6 VERSUM- Fiscal Year Financial Overview ........................................................................... 83

22.7 VERSUM- Manufacturing Locations, Capabilities, and Certifications .................................. 83




23 Wonik Materials Co. Ltd. .......................................................................................... 85

23.1 Wonik Materials - Company Overview .............................................................................. 85

23.2 Wonik Materials - Business Segments ............................................................................... 85

23.3 Wonik Materials - Recent Company Specific News and New Product Offerings ................. 87

23.4 Wonik Materials - Regions Served ..................................................................................... 87

23.5 Wonik Materials - Key Customers ..................................................................................... 87

23.6 Wonik Materials - Fiscal Year Financial Overview .............................................................. 87

23.7 Wonik Materials - Manufacturing Locations, Capabilities, and Certifications (electronics related) 87

23.8 JVs and Partnerships - Wonik Materials ............................................................................ 89

23.9 No Sales Reps and Distributors Listed ............................................................................... 89


Note: All Manufacturing Locations and Capabilities listed are for electronic materials & related plants only. Other locations and capabilities may exist outside of what is listed here.

Readers Note: The information provided in this document represents the interpretation and analysis of information generally available to the public or released by responsible agencies or individuals. Data was obtained from sources considered reliable. However, accuracy or completeness is not guaranteed.

Electronic Gases 2019 - TECHCET

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