Design, Fabrication, and Characterization of a CMOS...

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Javad Ghasemi, Md. Mottaleb Hossain, Prof. Payman Zarkesh-Ha, Prof. Steven Brueck, and Prof. Majeed Hayat University of New Mexico Relevant Research / Products Design, Fabrication, and Characterization of a CMOS- Compatible Plasmonic Photodetector Project Project goals goals: Design and fabrication of a novel readout circuit (ROIC) CMOS-compatible PD array is used to be cost effective Incorporates nano-plasmonic technology for the sensing capability Avalanche photodiode (APD) structures employed to have more gain Applications Applications: Ultra-narrowband color sensor Direction detection Visible light communication Adaptive lighting systems Project Overview Project Code(S2.1.5) Future work An interface electronic circuit is needed Utilize the new detector for light intensity, color, and angle detection Narrowband optical filter using plasmonic detector with spectral resolution of 20 nm Avalanche enhancement of at least 50 Publications: Publications: Lee, S.C., Krishna, S.; Brueck, S.R.J. "Plasmonic- Enhanced Photodetectors for Focal Plane Arrays", Photonics Technology Letters, IEEE, July15, 2011, Volume: 23 , Issue: 14, Pp: 935- 937 Products Products Research Results Spectral sensitivity TCS3200 from AMS/TAOS Not sensitivity enough Directional sensitivity Currently, no commercial optical angle sensor in the market Distance measurement GP2Y0A700K0F from SHARP Microelec. Do not measure angular distance Light Intensity sensor MAX44009 from MAXIM No color or angle detection CMOS PDs with Different sizes, every other covered with Plasmonic structure Above is the wafer with shallow junction photodetectors fabricated at MTTC - UNM. Nanoparticle plasmonic structures fabricated at Prof. Brueck’s lab PN junction is shallow to be more compatible with plasmonic structure on the top Project’s ERC Role Societal Benefits Acknowledgements The authors acknowledge the help of Alexander Neumann in plasmonic structure design and David Murrell, in configuring the characterization setup. This work is supported by the NSF under grant No. EEC- 0812056. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Monitor spectrum of light to provide more healthy light to the persons in the room for the conditions e.g., time of day Frequent analysis of the spectrum of light in the workplace or home Verify against approved health guidelines for lighting Avalanche enhancement of at least 50 Integrate the new plasmonic/avalanche detector into a commercial smart space Light Flow Modeling Human Factors & Interfaces Adaptive Sampling & Control Modeling Communications Testbed -Lighting Industries -Health Care Industries -Communications Industries -Prototypes -Design Standards -Integration Protocols STAKEHOLDERS Advanced Luminaires Biochemical Sensors Communication Transceiver & Protocol Efficient Full Spectrum Lighting Display Illumination Fusion Healthy Room Data Room BARRIERS - System Cost - Lighting Designer acceptance - Light/RF Wireless standards integration - Clinical Impacts BARRIERS - Color and intensity uniformity maintenance - Stray light impact on sensor SNR - Lack of source/sensor communications protocols -Biochem-identification & discrimination Biochemical Sensing Testbed Adaptive Lighting Testbed Communications Testbed BARRIERS - Inefficient LEDs (except Blue) - Limited bandwidth of sources - Lack of color discriminating sensors - Lack of monolithic optoelectronic integration Technology Integration Technology Base Opto Electronic Device Design Nano LED Technology Photonic Crystal Optics Color-selective High Speed Sensors III-Nitride Epitaxy High Efficiency Phosphors Plasmonic Structures Knowledge Base Level 3: Systems Level 2: Enabling Technologies Level 1: Fundamental Knowledge SYSTEM REQUIREMENTS Technology Elements Fundamental Insights System Performance Feedback Subsystems & Protocols Performance Feedback Materials & Devices Products & Outcomes Requirements Interactions Interactions with with other other ERC ERC projects projects: S2.1.1 Light sensors with integrated communications S2.1.4 Design and modeling of CMOS compatible APDs and plasmonic detectors T1.2.5 Improving building energy efficiency through VLC control interface Health, Safety, and Well Health, Safety, and Well-being being Increased Productivity Increased Productivity Healthy lighting, both in terms of spectrum and intensity, can increase individuals’ productivity Outdoor lighting conditions can be mimicked in the office regardless of weather condition Picture above is SEM images of the plasmonic structure over the photodetectors Picture above shows the IV curves of a plasmonic photodiode with various light wavelengths Complete spectral response measurement is currently underway Still few issues in the process Need to optimize the fabrication of the plasmonic devices

Transcript of Design, Fabrication, and Characterization of a CMOS...

Page 1: Design, Fabrication, and Characterization of a CMOS ...mottaleb77/common/documents/S2.1.5_NSF...Relevant Research / Products Design, Fabrication, and Characterization of a CMOS-Compatible

Javad Ghasemi, Md. Mottaleb Hossain, Prof. Payman Zarkesh-Ha, Prof. Steven Brueck, and Prof. Majeed Hayat

University of New Mexico

Relevant Research / Products

Design, Fabrication, and Characterization of a CMOS-

Compatible Plasmonic Photodetector

�� ProjectProject goalsgoals::

� Design and fabrication of a novel readout

circuit (ROIC)

� CMOS-compatible PD array is used to be

cost effective

� Incorporates nano-plasmonic technologyfor the sensing capability

� Avalanche photodiode (APD) structuresemployed to have more gain

�� ApplicationsApplications:

� Ultra-narrowband color sensor

� Direction detection

� Visible light communication

� Adaptive lighting systems

Project Overview

Project Code(S2.1.5)

Future work

� An interface electronic circuit is needed

� Utilize the new detector for light

intensity, color, and angle detection

� Narrowband optical filter using plasmonic

detector with spectral resolution of 20 nm

� Avalanche enhancement of at least 50

�� Publications:Publications:

� Lee, S.C., Krishna, S.; Brueck, S.R.J. "Plasmonic-

Enhanced Photodetectors for Focal Plane Arrays",

Photonics Technology Letters, IEEE, July15, 2011,

Volume: 23 , Issue: 14, Pp: 935- 937

�� ProductsProducts

Research Results

Spectral

sensitivity

TCS3200

from

AMS/TAOS

Not

sensitivity

enough

Directional

sensitivity

Currently, no commercial optical

angle sensor in the market

Distance

measurement

GP2Y0A700K0F

from SHARP

Microelec.

Do not

measure

angular

distance

Light Intensity

sensor

MAX44009

from MAXIM

No color or

angle

detection

CMOS PDs with Different

sizes, every other covered

with Plasmonic structure

� Above is the wafer with shallow junction

photodetectors fabricated at MTTC - UNM.

� Nanoparticle plasmonic structures fabricated atProf. Brueck’s lab

� PN junction is shallow to be more compatible

with plasmonic structure on the top

Project’s ERC Role

Societal Benefits

Acknowledgements

The authors acknowledge the help of Alexander Neumann inplasmonic structure design and David Murrell, in configuring thecharacterization setup.

This work is supported by the NSF under grant No. EEC-0812056. Any opinions, findings, and conclusions orrecommendations expressed in this material are those of the

author(s) and do not necessarily reflect the views of the NationalScience Foundation.

Monitor spectrum of light to provide more

healthy light to the persons in the room for

the conditions e.g., time of day� Frequent analysis of the spectrum of

light in the workplace or home

� Verify against approved health guidelines

for lighting

� Avalanche enhancement of at least 50

� Integrate the new plasmonic/avalanche

detector into a commercial smart space

Light Flow ModelingHuman Factors &

Interfaces

Adaptive Sampling &

Control Modeling

Communications

Testbed

-Lighting Industries

-Health Care Industries

-Communications

Industries

-Prototypes

-Design Standards

-Integration Protocols

STAKEHOLDERS

Advanced Luminaires Biochemical SensorsCommunication

Transceiver & Protocol

Efficient Full

Spectrum Lighting

Display

Illumination Fusion

Healthy

RoomData Room

BARRIERS

- System Cost

- Lighting Designer acceptance

- Light/RF Wireless standards

integration

- Clinical Impacts

BARRIERS

- Color and intensity uniformity

maintenance

- Stray light impact on sensor SNR

- Lack of source/sensor

communications protocols

-Biochem-identification &

discrimination

Biochemical Sensing

Testbed

Adaptive Lighting

Testbed

Communications

Testbed

BARRIERS

- Inefficient LEDs (except Blue)

- Limited bandwidth of sources

- Lack of color discriminating

sensors

- Lack of monolithic optoelectronic

integration

Technology Integration

Technology Base

Opto Electronic

Device Design

Nano LED

Technology

Photonic Crystal

Optics

Color-selective High

Speed Sensors

III-Nitride EpitaxyHigh Efficiency

PhosphorsPlasmonic Structures

Knowledge Base

Level 3: Systems

Level 2: Enabling Technologies

Level 1: Fundamental Knowledge

SY

ST

EM

R

EQ

UIR

EM

EN

TS

Technology Elements

Fundamental Insights

System

Performance

Feedback

Subsystems &

Protocols

Performance

Feedback

Materials &

Devices

Products & Outcomes Requirements

�� InteractionsInteractions withwith otherother ERCERC projectsprojects::

� S2.1.1 Light sensors with integrated

communications

� S2.1.4 Design and modeling of CMOS

compatible APDs and plasmonic detectors

� T1.2.5 Improving building energyefficiency through VLC control interface

Health, Safety, and WellHealth, Safety, and Well--beingbeing

Increased ProductivityIncreased Productivity

� Healthy lighting, both in terms of

spectrum and intensity, can increase

individuals’ productivity� Outdoor lighting conditions can be

mimicked in the office regardless of

weather condition

� Picture above is SEM images of the plasmonic

structure over the photodetectors

� Picture above shows the IV curves of a

plasmonic photodiode with various light

wavelengths

� Complete spectral response measurement is

currently underway

� Still few issues in the process

� Need to optimize the fabrication of the

plasmonic devices