Cryopump 8 TM150 - PHPK Technologiesphpk.com/pdf/TM150-UHV-v36.pdf · Roughing Flange 1.33" Mini...
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Roughing Flange 1.33" Mini UHV, optional 2 3 /8" UHV side port Accessory Flange 1.33" Mini UHV Purge Tube 1.33" Mini UHV Flanged tube for optional mounting Pressure Relief Rupture disc mounted on 1.33" Mini UHV Helium Connections ½" Aeroquip fittings Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector Specifications Weight 41 lbs. (18.6 kg) Crossover 155 Torr Liters Cooldown Time 60 min to 20K w/CBST3.0 Compressor Pumping Speed 1,700 Liters/sec. 2,500 Liters/sec. 4,500 Liters/sec. 1,400 Liters/sec. Type N 2 H 2 H 2 O Ar Capacity at 1 ×10 -6 Torr 12 std Liters 1,100 std Liters Throughput at 20K 11 Torr Liters/sec. 870 scc/min. Overpressure Safety Relief Burst Disc Standard Operating Orientation Any Purge Tube Optional Instrumentation Silicon diode standard Bakeout Temperature 100°C max. For higher temperatures please consult PHPK System Flange UHV OD 10" ID 7.68" BC 9.13" Bolt Holes 24 ea 0.33" DIA O-Ring Metal Gasket (supplied) Interfaces © 2016 PHPK Technologies 2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected] www.phpk.com Cryopump 8" TM150 ( UHV ) (Performance data based on 60-HZ operation)
Transcript of Cryopump 8 TM150 - PHPK Technologiesphpk.com/pdf/TM150-UHV-v36.pdf · Roughing Flange 1.33" Mini...
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Roughing Flange 1.33" Mini UHV, optional 2 3/8" UHV side port
Accessory Flange 1.33" Mini UHV
Purge Tube 1.33" Mini UHV Flanged tube for optional mounting
Pressure Relief Rupture disc mounted on 1.33" Mini UHV
Helium Connections " Aeroquip fittings
Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector
Specifications
Weight
41 lbs.(18.6 kg)
Crossover
155 Torr Liters
Cooldown Time
60 min to 20K w/CBST3.0 Compressor
Pumping Speed
1,700 Liters/sec.
2,500 Liters/sec.
4,500 Liters/sec.
1,400 Liters/sec.
Type
N2
H2
H2O
Ar
Capacity at 1 10-6 Torr
12 std Liters
1,100 std Liters
Throughputat 20K
11 Torr Liters/sec.870 scc/min.
Overpressure Safety Relief Burst Disc Standard
Operating Orientation Any
Purge Tube Optional
Instrumentation Silicon diode standard
Bakeout Temperature 100C max. For higher temperatures please consult PHPK
System Flange
UHV
OD
10"
ID
7.68"
BC
9.13"
Bolt Holes
24 ea 0.33" DIA
O-Ring
Metal Gasket(supplied)
Interfaces
2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
Cryopump 8" TM150 (UHV)
(Performance data based on 60-HZ operation)
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8" TM150 (UHV)
2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
7 11/16"
4 5/8"
8" 10" CFCOPPER GASKET 10" OD
2"
31/32"
12 1/16"
7 15/32"
INSTRUMENTFEED-THRU
8" DIA
9 9/16"
8"
1/2" GHeINLET
1/2" GHeOUTLET
ELECTRICALCONNECTOR
1.33" UHVAUX PORT 1.33" UHV
PUMP-OUT PORT1.33" UHV
INSTRUMENTFEED-THRU
BURST DISCMOUNTED ON 1.33" UHV FLANGE
Cryopump 8" TM150 (UHV)
