Download - Cryopump 8 TM150 - PHPK Technologiesphpk.com/pdf/TM150-UHV-v36.pdf · Roughing Flange 1.33" Mini UHV, optional 23/ 8" UHV side port Accessory Flange 1.33" Mini UHV Purge Tube 1.33"

Roughing Flange 1.33" Mini UHV, optional 2 3/8" UHV side port

Accessory Flange 1.33" Mini UHV

Purge Tube 1.33" Mini UHV Flanged tube for optional mounting

Pressure Relief Rupture disc mounted on 1.33" Mini UHV

Helium Connections " Aeroquip fittings

Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector

Specifications

Weight

41 lbs.(18.6 kg)

Crossover

155 Torr Liters

Cooldown Time

60 min to 20K w/CBST3.0 Compressor

Pumping Speed

1,700 Liters/sec.

2,500 Liters/sec.

4,500 Liters/sec.

1,400 Liters/sec.

Type

N2

H2

H2O

Ar

Capacity at 1 10-6 Torr

12 std Liters

1,100 std Liters

Throughputat 20K

11 Torr Liters/sec.870 scc/min.

Overpressure Safety Relief Burst Disc Standard

Operating Orientation Any

Purge Tube Optional

Instrumentation Silicon diode standard

Bakeout Temperature 100C max. For higher temperatures please consult PHPK

System Flange

UHV

OD

10"

ID

7.68"

BC

9.13"

Bolt Holes

24 ea 0.33" DIA

O-Ring

Metal Gasket(supplied)

Interfaces

2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]

Cryopump 8" TM150 (UHV)

(Performance data based on 60-HZ operation)

8" TM150 (UHV)

2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]

7 11/16"

4 5/8"

8" 10" CFCOPPER GASKET 10" OD

2"

31/32"

12 1/16"

7 15/32"

INSTRUMENTFEED-THRU

8" DIA

9 9/16"

8"

1/2" GHeINLET

1/2" GHeOUTLET

ELECTRICALCONNECTOR

1.33" UHVAUX PORT 1.33" UHV

PUMP-OUT PORT1.33" UHV

INSTRUMENTFEED-THRU

BURST DISCMOUNTED ON 1.33" UHV FLANGE

Cryopump 8" TM150 (UHV)