A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...
Transcript of A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...
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A WAFER LEVEL PACKAGED FULLY
INTEGRATED HYPERSPECTRAL FABRY-
PÉROT FILTER WITH EXTENDED OPTICAL
RANGE
Peleg Levin
S M L
Human cone cells spectra
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Hyperspectral Imaging
VIS-NIR hyperspectral cube
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Realization - Tunable Fabry-Pérot filters T
ran
sm
issio
n
Wavelength
Glass
Reflective coating Mallinson, 1987 (NIR)
Raley et al., 1992
Blomberg et al., 2009
VTT
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Optical Modeling and Measurements
5V 19V25V
31V 35V 40V42V43V 45V46V47V30V
Coatings design B (simulated)Coatings design A
Optical model: Net-radiation [Santbergen et al., 2013]
Gap change: 200nm Gap change: 400nm
modelexp.
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Application examples
RGB-IR
image
sensor
ObjectTunable
µFPF
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Application examples
RGB-IR
image
sensor
ObjectTunable
µFPF
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Summary
• A VIS-NIR μFPF with unprecedented tunability range.
• Tailored to meet the most demanding performance and
reliability requirements of mobile phone makers.
• Supports a variety of optical coatings for various applications,
(e.g. hyperspectral imaging, remote sensing).
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Thank You !