A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

9
1 A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL FABRY - PÉROT FILTER WITH EXTENDED OPTICAL RANGE Peleg Levin

Transcript of A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

Page 1: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

1

A WAFER LEVEL PACKAGED FULLY

INTEGRATED HYPERSPECTRAL FABRY-

PÉROT FILTER WITH EXTENDED OPTICAL

RANGE

Peleg Levin

Page 2: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

S M L

Human cone cells spectra

Page 3: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

3

Hyperspectral Imaging

VIS-NIR hyperspectral cube

Page 4: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

4

Realization - Tunable Fabry-Pérot filters T

ran

sm

issio

n

Wavelength

Glass

Reflective coating Mallinson, 1987 (NIR)

Raley et al., 1992

Blomberg et al., 2009

VTT

Page 5: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

5

Optical Modeling and Measurements

5V 19V25V

31V 35V 40V42V43V 45V46V47V30V

Coatings design B (simulated)Coatings design A

Optical model: Net-radiation [Santbergen et al., 2013]

Gap change: 200nm Gap change: 400nm

modelexp.

Page 6: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

6

Application examples

RGB-IR

image

sensor

ObjectTunable

µFPF

Page 7: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

7

Application examples

RGB-IR

image

sensor

ObjectTunable

µFPF

Page 8: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

8

Summary

• A VIS-NIR μFPF with unprecedented tunability range.

• Tailored to meet the most demanding performance and

reliability requirements of mobile phone makers.

• Supports a variety of optical coatings for various applications,

(e.g. hyperspectral imaging, remote sensing).

Page 9: A WAFER LEVEL PACKAGED FULLY INTEGRATED HYPERSPECTRAL ...

9

Thank You !