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Transcript of A First Look at NT9080 Webinar Slides 100408
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Introduction to the NT9080
April 2010
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2010 Veeco Instruments Inc. NT9080 Surface Metrology System2
Webinar OverviewWebinar Overview
Optical Profiler History
Technology Overview
White Light Interferometry PSI
VSI
NT9080 Introduction and Overview
NT9080 Applications
Summary
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Optical Profiler History
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2010 Veeco Instruments Inc. NT9080 Surface Metrology System4
Veeco Optical-Industrial MetrologyVeeco Optical-Industrial Metrology
Founded as WYKO Optical Inc.
December 1982
Grew from UA Optical Sciences Headquartered in Tucson,
Arizona
Located in the heart of OpticsValley
Merged with Veeco July, 1997 Technology Leadership
Over 60 patents
3 R&D 100 Awards
6 Photonics Circle of ExcellenceAwards
10 generations of WLI products!
The Veeco facility in Tucson, AZ
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The ContourGT Product FamilyThe ContourGT Product Family
GT-K1 GT-X8
Increasing Functionality and Automation
GT-X3
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Technology Overview
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What is White Light Interferometry?What is White Light Interferometry?
Digitized Intensity
Data
Beamsplitter
Detector Array
Illuminator
MicroscopeObjective
Translator
Mirau
Interferometer
LED
Sources
Field
Stop
Aperture
Stop
Sample
Dichroic
Mirror
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Typical Interferometer DiagramTypical Interferometer Diagram
The expanded beamThe expanded beam
exiting from the lightexiting from the light
source is divided by asource is divided by a
Beamsplitter into twoBeamsplitter into twobeamsbeams
One beam is reflectedOne beam is reflected
from the Referencefrom the Reference
Mirror, and the other oneMirror, and the other one
from the Samplefrom the Sample
These two beams areThese two beams are
recombined by therecombined by the
Beamsplitter to interfereBeamsplitter to interfere
The imaging lensThe imaging lens
images the interferogramimages the interferogram
onto the CCD cameraonto the CCD camera
CCDCCD
Sample
ReferenceMirror
Beamsplitter
Test arm
Reference arm
Optical Path Difference (OPD) Difference in optical path lengths that beamstravel in Reference and Test arms
When OPD=0, the brightest fringes are in focus
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Interference Lines are Similar to
Contour Map Lines
Interference Lines are Similar to
Contour Map Lines On a map each dark line
represents a fixedelevation
The spacing in thisimage is 100
Spacing is set by themapmaker
On an interferogrameach line also representsa fixed elevation
Spacing is 1/2 the
wavelength of the light(usually 300nm)
Spacing is set byphysics!
100
300nm
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Two Measurement Modes on the NT9080Two Measurement Modes on the NT9080
Phase ShiftingInterferometry (PSI) Uses monochromatic illumination
and calculates the phase of thesinusoidal fringes
Phase is converted to surfaceheight
Sub-nm noise, 135nm steps or
below Vertical Scanning
Interferometry (VSI) Uses broad spectrum illumination
and calculates the point of best
fringe contrast Best contrast point indicates the
relative surface height Few nm noise, 10mm steps
possible
Data Pits on Compact Disk (PSI)
Gravure Printing Roll (VSI)
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Phase Shifting Interferometry (PSI)Phase Shifting Interferometry (PSI)
PSI Operation Grab Intensity Frames
at 90 degree phase
shifts Calculate Phase Unwrap Phase Calculate Height
31
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yxyxHeight
==
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yxIyxITanyx
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31
241
=
PSI Characteristics
Measure very smooth objectswith high precision
Uses monochromatic (green)light for best fringes
Vertical resolution
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PSI Lowest Noise Floor TechniquePSI Lowest Noise Floor Technique
Subtraction of 2 sequentialmeasurements of SiC Mirrorwith 64 averages on NT9080
0.02nm Ra, 0.7nm PV
Single measurement of SiCmirror with 64 averages onNT9080
0.14nm Ra, 0.2nm deepscratches can be seen
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PSI SummaryPSI Summary
Lowest noise floor
Fastest measurement mode
Limited surfaces can be measured Pixel-to-pixel steps and slopes up to ~135nm height can be
measured
Surfaces must be optically smooth (
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Vertical Scanning Interferometry (VSI)Vertical Scanning Interferometry (VSI)
Rough surfaces, vertical range >135nm to 10mm Utilizes white light
Sees a few fringes where part is in focus
Vertical resolution about 3nm Measurement time depends on scan lengths,
typically 5 to 30 seconds
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Operation of Optical Profiler in White
Light Vertical Scanning
Operation of Optical Profiler in White
Light Vertical Scanning
VSI
Step HeightStandard
Objective isscanned through
focus
Peak of fringecontrast is located
and logged
Height map ofsurface is generated
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VSI SummaryVSI Summary
Versatile measurementtechnique for most anysurface characterization Near-universal measurement mode!
Up to 10mm vertical featurescan be measured
Camera saturation is tolerated More light means more data
feedback
Slower than PSI
3nm noise floor maydominate measurementsof smoother samples
Human Bone Sample
Micro-gear etched in Si
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Making a Surface Measurement is EasyMaking a Surface Measurement is Easy
Place your sample onthe NT9080 samplestage No surface
preparation is required Choose the correct
objectivemagnification for thejob
From 1 to 100x Focus on the sample Choose the proper
measurement mode Set the illumination
level Measure!
Results are justseconds away
Ask for a demo today! Were glad to demo via web
on at your facility We can measure samples at
our facility and provide anapplication report tailored foryour measurement needs
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Introducing: The NT9080
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NT9080 OverviewNT9080 Overview
The NT9080 is an easy-to-use,bench-top 3D surface mappinginstrument that providesdedicated metrology capability
at a cost-effective price forR&D, production, or QA/QCapplications
The NT9080 provides a goodoptical metrology entry point
for 3D non-contact surfacecharacterization, particularly forcustomers who are traditionally2D-based system users
The NT9080 is geared toward
customers who require noautomation capability and havelimited purpose, dedicatedmeasurement requirements
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The NT9080 is Designed to be a
Dedicated Metrology Platform
The NT9080 is Designed to be aDedicated Metrology Platform
1. Fixed 0.55X or 1.0x field of view lens
Fixed FOV lenses multiply themagnification of the selected objective
2. Single Objective Adapter or 4 PositionManual Turret
Add up to 4 objectives and rotate any intoposition manually
3. Manual Z-Axis Focus Easy to use focus knob allows for quick
adjustment of the z-axis
4. Manual 4 Stage
A variety of fixtures can be attached tothe system to properly hold samples
5. Manual Tip-Tilt
Remove tilt in the system for bestmeasurements
5
2
4
1
3
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NT9080 Provides Excellent Performance
and Capability
NT9080 Provides Excellent Performanceand Capability
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Unsurpassed Control & AnalysisSoftwareUnsurpassed Control & AnalysisSoftware
Vision32 industry-leading software
2D and 3D dataanalyses
Over 200 analysis and
visualization tools Unmatched standard
toolkit and application-specific analyses
Access control forproductionenvironments
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NT9080 Applications
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Non-Contact 3D Profiling has MajorAdvantages Over Stylus ProfilometryNon-Contact 3D Profiling has MajorAdvantages Over Stylus Profilometry
Stylus is inherently a two-dimensional technique
WLI is a extremely fast ascompared to stylusprofilometry
Stylus touches the surface!
Minimum feature sizesdetected are determined by
size of stylus tip used
Accurate Ra measurementmust be orthogonal to surfacegrain
Schematic showing the limitations of the stylus due to
the tip size (K J Stout et al 1993)
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Why Ra is Not EnoughWhy Ra is Not Enough
Many engineered surfacesstill call out AverageRoughness (Ra) as thepass/fail criteria
Ra is a 2D measurement andtherefore limited in explainingsurface characteristics
Different height distributionscan exhibit very similar Rafigures leading to misleadingdata conclusions
A more accurate analysis is a3D measurement whichremoves ambiguity and addsdata density
Profiles showing the same Ra with differing heightdistributions. (Surface Texture Analysis TheHandbook,L Mummery 1992)
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Example: Ra cant identify a passingsurfaceExample: Ra cant identify a passingsurface
Problem: Brake Rotor Ra meets specification for bothsurfaces below. One works and one fails rapidly.
Solution: Specify the surfaces with 3D textureparameters like Sdq
Ra: In spec
Sdq: In spec
Ra: In spec
Sdq: High
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Solar Cell Roughness and EfficiencySolar Cell Roughness and Efficiency
Correlatesurfaceroughness
parameters tocell efficiency
0.1796mw/mm 0.1552mw/mm 0.1319mw/mm
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Solar Cell Conductor Trace AnalysisSolar Cell Conductor Trace Analysis
The NT9080s large FOVprovides for a more accuratetopographical image of the Ag
trace
Obtain a more complete
understanding of the Ag tracein less time
Optimize material usage Increase efficiency Decrease costs Volume = 1,648,000 um^3
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Solar Cell Scribing and IsolationSolar Cell Scribing and Isolation
Edge isolation to prevent from shortingbetween front and back surface efficiency improvement
Laser-scribed trench analysis for depth,width to ensure complete isolation
Current leakage is a major source ofefficiency loss
Key metrics: Cleanliness Depth Width Ability to capture edge roughness
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Precision Machining: Wear VolumePrecision Machining: Wear Volume
Quantifymaterialcharacteristics
with wearstudies andquantifymaterial
removal interms ofvolume
Calculatevolume aboveand below thewear scar
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Precision Machining: Wear VisualizationPrecision Machining: Wear Visualization
The regions of wear on asurface are identified andquantified using analyses
such as Bearing Ratio Peak areas that erode first are
quantified
Load bearing surface is
identified Valley areas that would contain
lubricant are quantified
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Surface Roughness MeasurementsSurface Roughness Measurements
Characterizesurfaces from super-smooth to extremely
rough 3D S-parameters
providedirectionality,
periodicity, peaksvs. troughs, etc. Implements new ISO
standard algorithmsand filtering
Quantify stiction andfriction Cylinder wall roughness
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Precision Machining: CorrosionPrecision Machining: Corrosion
Examine surfacefinishes for rate ofcorrosion overlonger time periods
Evaluate surfacespatial frequencychanges with Power
Spectral Density(PSD) analysis
Selectively removeand visualize spatialfrequencies withadvanced digitalfiltering
Y PSD of surface finish
1
10
100
1000
10000
10 100 1000
Spatial Frequency (1/mm)
PSD(mmn
mUncorroded7 hours corroded
14 hours corroded
21 hours corroded
Individual measurements taken a 7 hour intervals
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Corrosion areas detected usingMultiregion AnalysisCorrosion areas detected usingMultiregion Analysis
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Printing ApplicationsPrinting Applications
Paper SurfaceRoughness
Lithography PlateRoughness
Printed GlucoseTester dimensions
and volume
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Medical MeasurementsMedical Measurements
Heart Stent (Inner Surface) Razor Blade Edge Angle
Syringe Surface
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Summary
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The Family of Veeco 3D Optical ProfilersThe Family of Veeco 3D Optical Profilers
The NT9x00 and ContourGTFamily of White Light OpticalProfilers
Low noise floor Up to 92m/sec VSI scans
Large vertical range (10mm)
Self-Calibration Capabilities
High lateral resolution (
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Veeco: Your Metrology SolutionsProviderVeeco: Your Metrology SolutionsProvider
Confocal Metrology: The VCMseries
3D imaging of surfaces withnanometer scale vertical resolution
White Light Interferometers: TheNT and ContourGT Families
3D profiling with angstrom scalevertical resolution
Stylus Profilers: The Dektakseries
Contact based 3D step height withangstrom z-height resolution
Atomic Force Microscopes
Atomic level resolution
Dektak 150 NT-9800
Icon AFMVCM-200A
All Veeco Metrology Systems data can be analyzed with Veecos Vision software platform for display and analysis
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Worldwide Service and SupportWorldwide Service and Support
Worldwide In-Region Service &Support
Quick response, no languagebarriers
Worldwide Inventory of SpareParts in Regions
Drastically reduces instrumentdown-time
Customer Care and Call Centers
Live in APAC
Coming soon to North America andEurope
Dedicated Service Quality Team
Ensures customer satisfactionmeets highest standards
Y W ld id 3D S f M t lYour Worldwide 3D Surface Metrology
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Your Worldwide 3D Surface MetrologyPartner and Community LeaderYour Worldwide 3D Surface MetrologyPartner and Community Leader
Greg Maksinchuk, Product Manager, VeecoInstruments, Inc. --- [email protected]
Recorded Webinars:
www.veeco.com/Profiler-Webinar-Archives
Upcoming Webinars:
www.veeco.com/Profiler-Webinars
WEBINAR INFORMATION
www.veeco.com/NT9080
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THANK YOU!