Economic Feasibility of Micro-Electronic Mechanical Systems (MEMS)

When Will the Market Growth for MEMS (Micro-

Electronic Mechanical Systems) Accelerate?

5th Session in MT5009

Jeffrey Funk

Division of Engineering and Technology Management

National University of Singapore

For information on other technologies, see http://www.slideshare.net/Funk98/presentations

Session Technology

1 Objectives and overview of course

2 When do new technologies become economically feasible?

3 Two types of improvements: 1) Creating materials that

better exploit physical phenomena; 2) Geometrical scaling

4 Semiconductors, ICs, electronic systems

5 MEMS and Bio-electronic ICs

6 Lighting, Lasers, and Displays

7 DNA sequencing and Nanotechnology

8 Human-Computer Interfaces

9 Superconductivity and Solar Cells

10 Deepavali, NO CLASS

This is Fifth Session of MT5009

Objectives

What are the important dimensions of performance for

MEMS and electronic systems?

What are the rates of improvement?

What drives these rapid rates of improvement?

Will these improvements continue?

What kinds of new electronic systems will likely emerge from

the improvements in MEMS?

What does this tell us about the future?

As Noted in Previous Session, Two main

mechanisms for improvements

Creating materials (and their associated processes) that better

exploit physical phenomenon

Geometrical scaling

Increases in scale

Reductions in scale

Some technologies directly experience improvements while

others indirectly experience them through improvements in

“components”

A summary of these ideas can be found in

1) What Drives Exponential Improvements? California Management Review, May 2013

2) Technology Change and the Rise of New Industries, Stanford University Press, January 2013

Both are Relevant to MEMS

Creating materials (and their associated processes) that better

exploit physical phenomenon

Materials created for MEMS with better characteristics for specific

applications

Geometrical scaling

Increases in scale: larger wafers/production equipment

Reductions in scale: small feature sizes for MEMS. This is most important driver

of improvements for MEMS

Some technologies directly experience improvements while

others indirectly experience them through improvements in

“components”

Better MEMS lead to better electronic systems

Outline

What is MEMS and what are the applications?

MEMS and Moore’s Law (Benefits of scaling)

Challenges for MEMS

Example of micro-gas analyzers

Example of MEMS for Ink Jet Printer

Example of MEMS for filters and other components for mobile

phone chips

Improvements in MEMS make new forms of electronic systems

possible

Conclusions

Increasingly Detailed View

of a Micro-Engine

Source: http://www.memx.com/

Micro-engine Gear Train Multi-level springs that

that are part of Micro-Engine

Side view of springs

Ratchet Mechanism Actuator Torsional Acutator

Early Optical Switch Clutch Mechanism Anti-reverse mechanism

http://www.memx.com/

Accelerometer

less detail

more detail

Inertial Sensor

(includes

accelerometer

and gyroscope)

less detail

more detail

Source: Yole, July 2013

Source: 2011

International

Technology

Roadmap

for Semiconductors

Other sensors include: position, motion,

pressure (altitude

measurement), temperature,

magnetic field (electronic compass),

humidity, light (image) and audio sound

(microphone) The integration path towards

the Inertial Measurement Unit (IMU) is to

join 3-axis accelerometers, 3-axis gyro-

scopes, 3-axis magnetometers (compass),

and a pressure sensor

(altimeter). This is referred to as a 10

degree of freedom (DOF) multimode

sensor.

Source: MEMS Technology Roadmapping, Michael Gaitan, NIST Chair, iNEMI and ITRS

MEMS Technology Working Groups Nano-Tec Workshop 3, 31 May 2012

Outline

MEMS and Moore’s Law

Challenges for MEMS

phone chips

possible

Conclusions

Figure 2. Declining Feature Size

1960 1965 1970 1975 1980 1985 1990 1995 2000

Gate Oxide

Thickness

Junction Depth

Feature length

Source: (O'Neil, 2003)

Source: AStar

http://www2.imec.be/content/user/File/MtM%20WG%20report.pdf

Another Way to Look at “More than Moore (MtM)”

Source: Clark Ngyuen, August and September 2011 Berkeley lectures

Accelerometer

Another Way to Look at “More than Moore”

Early Application:

Limitations of Scaling for Accelerometers

Since displacement is proportional to size of mass in

accelerometer

Smaller mass leads to weaker sensitivity to displacement

Thus smaller features (e.g., springs) are bad

This led to pessimistic view towards MEMS

Solution for MEMS-based accelerometers

Integrate transistors with MEMS device to compensate for the poor

sensitivity of MEMS-based accelerometers

put transistors close to the MEMS device in order to reduce

parasitic capacitance

Nevertheless, improvements were made to accelerometers in the form of smaller size chips. Source:

Trends and frontiers of MEMS, Wen H. Ko; Cs: sensing capacitance

Source: MEMS Technology Roadmapping, Michael Gaitan, NIST Chair, iNEMI and ITRS MEMS Technology Working Groups Nano-Tec

Workshop 3, 31 May 2012

But then other Applications Began to Emerge

Gyroscopes

Micro-fluidics

Digital mirror device

Optical switches

These applications benefited a lot from smaller sizes! Emphasis

changed

from “adding transistors” to “reducing feature size”

from “integration of transistors and mechanical functions” to chips

with only mechanical functions/devices

Source: Ngyuen, Berkeley lecture

CastAR, a projected augmented reality system that displays

3D projections right in front of you. The frames of the glasses

contain micro-projectors that cast 3D images that change perspective depending on your orientation.

Benefits of Size Reduction: MEMS (2)

Feature sizes are currently much larger than those on ICs (40 years behind)

MEMS: around or less than one micron

ICs: 22 nanometers (0.02 microns)

Partly because

devices are different (e.g., much overlap of layers)

processes (e.g., wet vs. plasma etching) are slightly different……

As feature sizes get smaller, we can expect large changes in our world

Current feature sizes of 0.5 to 1.0 microns for MEMS and thus industry is

like ICs were in 1980

Improvements in MEMS will probably have similar impact as ICs have had

since 1980

Source: Nyugen’s Berkeley lectures and

http://www.boucherlensch.com/bla/IMG/pdf/BLA_MEMS_Q4_010.pdf

High Surface Area is Important for

many Applications

Example Applications: filtration, separation,

sunlight collection, surface charge storage or

catalysis

Highly regular fractal structures lead to high surface

areas.

The procedure uses the built-in capability of the crystal

lattice to

form self-similar octahedral structures with minimal

interference of the constructor. The silicon fractal can be

used directly

or as a mold to transfer the shape into another material.

Moreover, they can be dense, porous, or like a wireframe.

demonstrate, after four levels of processing, that the initial

number of octahedral structures is increased by a factor of

http://nextbigfuture.com/search?updated-max=2013-06-23T07:23:00-

07:00&max-results=7&start=28&by-date=false

Outline

Challenges for MEMS

phone chips

possible

Conclusions

http://semimd.com/blog/2011/12/06/silicon-foundries-to-expand-into-mems-business/

Bottom Line: development costs are very high so

applications must have very high volumes

Integrated Circuits

(CMOS)

Materials Roughly the same for each

application

Different for each

application

Processes Roughly the same for each

application (CMOS)

Different for each

application

Equipment Roughly the same for each

application

Different for each

application

Masks Different for each application. But

common solutions exist! ASICs

(application specific ICs),

Microprocessors

Different for each

application and thus high

volumes are needed

Solutions?

Can we identify a set of common materials, processes and

equipment that can be used to make many types of MEMS?

Using common materials, processes and equipment involve

tradeoffs

Use sub-optimal ones for each application

But benefit overall from economies of scale; similar things occurred

with silicon-based CMOS devices

One obvious option

Can we make MEMS with materials, processes, and equipment used

to fabricate CMOS ICs?

Or should we look for a different set of materials, processes and

equipment?

Since 2006,

Akustica designs and

manufactures

MEMS microphones

using its unique and

patented CMOS

MEMS technology

http://akustica.com/technology.asp

Emergence of foundries

reflects the emergence

of somewhat common

materials and equipment

Source: http://itersnews.com/?p=30549

Still Many Challenges and Questions

Do these foundries make multiple types of MEMS using the

same materials, processes and equipment?

If so, how many types of MEMS are made using the same types

of materials, processes and equipment?

How can we characterize the progress in this area?

Can this progress be quantified to help us understand the

extent to which the market for MEMS may accelerate in the

near future?

Outline

Challenges for MEMS

phone chips

possible

Conclusions

Gas Chromatography

Gases must be separated, analyzed, and purified for a wide

variety of applications

These include laboratories, factories, water treatment

plants, fish farms, and many more

Separation, which is the first step in any analysis is usually

called gas chromatography and involves columns that are

made of glass or other materials

MEMS enables much smaller gas chromatographs

Source: Clark Ngyuen, August and September 2011 Berkeley lectures; ppb: parts per billion;

ppt: parts per trillion

Outline

Challenges for MEMS

phone chips

possible

Conclusions

Ink Jet Printers

While their hardware costs are much lower than those of

laser printer (perhaps 1/10)

the annual cost of their cartridges can be much higher than the cost

of their hardware

e.g., higher maintenance costs due to clogging,

they print much more slowly than do laser printers

Gradually changing because MEMS reduces the amount of

ink and thus the time for printing and the frequency of

installing a new cartridge

Fires ink drops of between less than 1 pico-liter

and these drops can be made smaller. The smaller

drops increase resolution, allowing faster drying,

and reduce ink consumption

Ink Jet Printers can also be used to Print

Biological Materials Ink jet printing can be used to print all the components that make up

a tissue (cells and matrix) to generate structures analogous to tissue (bio printing)

Smaller feature sizes on these MEMS enable better resolution of tissue

1 pico liter volumes have 10 micron feature sizes, which is about the size of a cell

Need the right material, bio-reactor, and the ejection of the bio-material may adversely impact on the cell

This can also be done with 3D printers, but are they experiencing rapid rates of improvement?

Sources: Brian Derby, Printing and Prototyping of Tissues and Scaffolds, Science 338, 16 Nov 2012, p 921. Thermal Inkjet Printing in Tissue Engineering and Regenerative Medicine, Xiaofeng Cui, Thomas Boland, Darryl D. D’Lima, and Martin K. Lotz

Outline

Challenges for MEMS

phone chips

possible

Conclusions

Mass is function of length (L), width (W), and h (height); Q is amplification factor,

V is voltage; d is distance between bottom of beam and underlying material

Scaling of Mechanical Resonator

Operates slightly different from guitar string

Calculations show that frequency rises as 1/L2

Replacing anchored beam with free-free beam and reducing L

(length) to 2 microns, W and H to nano-dimensions, causes

frequency to rise to above 1 GHz

Inexpensive mechanical resonators can replace electrical filters

Which also enables the use of multiple filters and thus communication

at many frequency bands (and thus cognitive radio)

There is no theoretical limit to reducing sizes and thus increasing

frequencies

Source: EE C245/ME C218: Introduction to MEMS, Lecture 2m: Benefits of Scaling I

Making Resonators with semiconductor processes/equipment

But calculations show that disks scale better than do beams or springs

(t = inner

radius)

Multiple Disks Provide Better Performance

Source: Clark Ngyuen, August and September 2011 Berkeley lectures; RF BPF: radio frequency bypass filter

RF = radio frequency; SAW = surface acoustic wave: VCO: voltage controlled oscillators

Other Discrete Components can also be Replaced by Smaller

MEMS components

Another

application

for MEMs

phones,

devices

Outline

Challenges for MEMS

phone chips

possible

Conclusions

Improvements in MEMS make new

forms of electronic systems possible

Some systems were discussed in the previous session

Others include

Oil and Gas Drilling, Internet of Things

3D scanners, printers, holographic displays, eye-tracking devices

autonomous vehicles for land, undersea, in space, and other applications

More big data analysis

better health care and management of buildings, dams, bridges,

power plants……..

Improvements in other components such as lasers are needed before these systems become economically feasible

Fracking and Modern Day Drilling

Drilling has changed……….

Better sensors, ICs, control

monitors, joy sticks, other

controls, and horizontal drilling

Along with chemical based

slurries that are pumped into the

ground to break up shale

The US will probably be a net

energy exporter in a few yearshttps://www.rigzone.com/training/insight.asp?insight_id=292&c_id=24

Pre-Fab Housing from DIRTT

http://www.dirtt.net/

No screws, nails, snap fits

change dimensions of one part, automatically changes

dimensions on other parts through better CAD

Uses ICE software, borrowed from video games

Direct connection with manufacturing

Quick installation

No wastage

Easy to reconfigure designs and rooms

Internet of Things

Everything is being connected to the Internet

New forms of sensors including MEMS-based sensors are making

the Internet of Things possible

Smaller modems help

Intel Builds World’s

Smallest 3G modemhttp://www.bbc.com/news/technology-28939873

Intel Builds World’s

Smallest 3G modem

Internet of Things?

http://www.bbc.com/news/technology-28939873

Cost of Autonomous Vehicles (e.g., Google Car) Falls as Improvements

in MEMS and Other “Components” Occur

Source: Wired Magazine, http://www.wired.com/magazine/2012/01/ff_autonomouscars/3/

Better MEMS, ICs, Cameras, GPS, Lasers Making Autonomous Vehicles Economically Feasible

1 Radar: triggers alert when something

is in blind spot

2 Lane-keeping: Cameras recognize lane

markings by spotting contrast between road

surface and boundary lines

3 LIDAR: Light Detection and Ranging system

depends on 64 lasers, spinning at upwards of 900

rpm, to generate a360-degree view

4 Infrared Camera: camera detects

objects

5 Stereo Vision: two cameras build a

real-time 3-D image of the road ahead

6 GPS/Inertial Measurement: tells us

location on map

7 Wheel Encoder: wheel-mounted

sensors measure wheel velocity

ICs interpret and act on this data

What an Autonomous Vehicle Sees

When Will AVs Become Economically

Feasible?

Cost of “Google Car” is $150,000 of which most is for electronic components (e.g., about $70,000 is for LIDAR)

Current rates of improvement are 30%-40%

If costs drop 25% a year, cost of electronics will drop by 90% in ten years

What about dedicating roads or lanes in roads to AVs?

Would this reduce the technical requirements of the cars and thus make them cheaper?

Cars could rely more on wireless communication than on sensors

AVs could move very quickly thus reducing travel time, no more traffic jams!

http://www.theguardian.com/technology/2013/jun/02/autonomous-cars-expensive-google-

Roads dedicated to AVs can have higher speeds and

thus higher Fuel Efficiencies

Other Advantages of Roads Dedicated

to Autonomous Vehicles

Less congestion

Less traffic tickets and police officers

Fewer crashes, accidents, deaths, ambulances,

insurance expenditures

Denser cities and thus lower energy expenditures

Sources: see next slide

Sources from last slideA highly popular article on Slashdot and Reddit Futurologymakes note that the Google driverless car has not gotten a traffic ticket after driving 700,000 miles. Local government revenue in the USA was $1.73 trillion in 2014. So the traffic tickets make up 0.38% of the local government revenue.

Self driving cars could save $500 billion in the USA from avoided crashes and traffic jams and can boost city productivity by 30% of urban GDP after a few decades enabling larger and denser cities. So traffic tickets are 1.2% of the $500 billion from avoided crashes and traffic jams in the US. It is even less worldwide with more crashes and traffic jam costs. It is 0.15% of the 30% of urban GDP. In 2010, there were an estimated 5,419,000 crashes, killing 32,885 and injuring 2,239,000 in the United States. According to the National Highway Traffic Safety Administration (NHTSA), 33,561 people died in

motor vehicle crashes in 2012, up 3.3 percent from 32,479 in 2011. In 2012, an estimated 2,362,000 people were injured in motor vehicle crashes, up 6.5 percent from 2,217,000 in 2011. In 2012, the average auto liability claim for property damage was $3,073; the average auto liability claim for bodily injury was $14,653. In 2012, the average collision claim was $2,950; the average comprehensive claim was $1,585. The Centers for Disease Control and Prevention says in 2010 that the cost of medical care and productivity losses associated with motor vehicle crash injuries was over $99 billion, or nearly $500, for each licensed driver in the United States. All car crash costs in the USA are estimated at $400 billion per year. In 2013, worldwide the total number of road traffic deaths remains unacceptably high at 1.24 million per year

Traffic Congestion $100 billion cost in the USAIn the USA, using standard measures, waste associated with traffic congestion summed to $101 billion of delay and fuel cost. The cost to the average commuter was $713 in 2010 compared to an inflation-adjusted $301 in 1982 Sixty million Americans suffered more than 30 hours of delay in 2010 1.9 billion gallons of fuel were wasted because of traffic congestion Traffic congestion caused aggregate delays of 4.8 billion hours. Transport 2012.org puts

a 200 billion Euro price tag on congestion in Europe (approximately 2% of GDP). Central America also has its traffic woes. Let’s not forget other countries. On the weekend, Panama found that the price of congestion for business and the community was somewhere between $500 million-$2 billion annually. According to the Asian Development Bank, road congestion costs economies 2%–5% of gross domestic product every year due to lost time and higher transport costs.

More traffic density and Larger, More Productive City populations can boost GDP by 30%

Google told the world it has developed computer driving tech that is basically within reach of doubling (or more) the capacity of a road lane to pass cars. Pundits don’t seem to realize just how big a deal this is – it could let cities be roughly twice as big, all else equal. Seminal work by Ciccone and Hall

(1996) assessed the impacts of density on productivity in the US, and found that doubling employment density, and keeping all other factors constant, increased average labor productivity by around 6%. Subsequent work by Ciccone (1999) found that in Europe, all other things being equal, doubling employment density increased productivity by 5%. A third paper (Harris and Ioannides, 2000) applies the logic directly to metropolitan areas and also finds a 6% increase in productivity with a doubling of density. More recent work by Dan Graham (2005b, 2006) examines the relationship between increased effective density (which takes into account time travelled between business units) and increased productivity across different industries. Graham finds that across the whole economy, the urbanisation elasticity (that is, the response of productivity to changes in density) is 0.125. This means that a 10% increase in effective density, holding all other factors constant, is associated with a 1.25% increase in productivity for firms in that area. Doubling the density of an area would result in a 12.5% increase in productivity. Economist Robin Hanson noted that doubling the population of

any city requires only about an 85% increase in infrastructure, whether that be total road surface, length of electrical cables, water pipes or number of petrol stations. This systematic 15% savings happens because, in general, creating and operating the same infrastructure at higher densities is more efficient, more economically viable, and often leads to higher-quality services and solutions that are impossible in smaller places. Interestingly, there are similar savings in carbon footprints — most large, developed cities are ‘greener’ than their national average in terms of per capita carbon emission. Road capacity could be boosted by 4 times using robotic cars. This could be another 30% boost to productivity.

http://nextbigfuture.com/2014/05/for-self-driving-car-future-traffic.html#more

Drones

Transportation of medical and other supplies with propeller driven drones that use batteries and a distributed network of charging stations

How about using solar power for drones that provide satellite services (economist, the west wind blows afresh, August 30, 2014) Easier to launch than satellites

Lower altitudes reduces cost of optics

How about underwater drones, perhaps for managing fish farms http://edition.cnn.com/2013/11/06/tech/innovation/underwater-drones/index.html?hpt=te_t1

“Big Data” Analysis was Discussed in Session 3

What kinds of software and hardware will emerge that enable more

extensive data analysis of output from

Particle accelerators, telescopes

DNA sequencing equipment,

other types of scientific and medical equipment

What kinds of mathematical models will be the basis for this

hardware and software so as to make predictions, rather than

pursue more efficient algorithms

better translations

better predictions of flu trends, inflation, health problems, loan

defaults, rising food prices, and even social problems such as riots or

terrorism

Big Data: A Revolution That Will Transform How We Live, Work, and Think, Viktor Mayer-Schonberger, Kenneth Cukier

Sensors Enable More Types of “Big Data”

Analysis and System Control

Higher resolution camera chips

Better MEMS (micro-electronic mechanical systems)

Better camera chips, ICs and other sensors enable better process control and better collection of data, extending the Internet to more devices

What types of hardware and software will emerge that will enable better traffic management

Traffic sensors, smart cards, better fare management

Predictive analytics with better computers

Navigation systems with better ICs and MEMS

Goal should be to dramatically reduce public and private vehicle breakdowns and accidents

These systems may have larger impact on energy usage than will

improvements in batteries

Sensors will enable new systems and improvements to existing systems

Mobile Phones Enable Greater Access and

Control of Sensors

Wireless Access and Control of Sensors Environmental (temperature, pressure, gas content)

Physiological (heart rate, brain wave, blood pressure)

For vehicular and human traffic and many types of infrastructure (factories, buildings, dams, bridges, power plants)

The phone may become a major collection, analysis, and control point for data Control and program the thermostat, lighting, and other appliances in

Rent bicycles, vehicles and other things to increase capacity utilization and reduce energy usage

Outline

Challenges for MEMS

phone chips

possible

Conclusions

Conclusions and Relevant Questions for

Your Group Projects (1)

Some types of MEMS greatly benefit from reductions in scale

Finding these MEMS is a big challenge

Part of this challenge is understanding the types of phenomena that

benefit from reductions in scale

For MEMS that benefit from reductions in scale

expect further improvements as additional reductions are achieved

Since most MEMS are still fabricated with feature sizes of microns or in

some cases tenths of micrometers, we are still far from minimum

feature sizes found on ICs of about 20 nanometers

This suggests that large improvements in MEMS can still be expected

for many applications

Conclusions and Relevant Questions for

Your Group Projects (2)

Another challenge is identifying a set of common materials, processes and equipment that can be used to make many types of MEMS

Can we identify a set of common materials, processes and equipment that can be used to make many types of MEMS

What kind of progress is being made in this area?

What are the major types of materials, processes and equipment that are used in the fabrication of bio-electronic ICs?

Is a convergence occurring in the use of materials, processes, and equipment

Appendix

MEMS design tools

Create individual 2-D layers, stack them on top of each other,

and create complex 3-D devices

• Design tools (e.g., 3D process simulator) enable

designers to visualize their creations before they are

Similar to CAD tools for ICs

Improvements in ICs lead to better CAD tools

Design libraries have been developed which enable designers to

create complex designs from multiple standard components

Similar to standard cell libraries with ICs

Source: http://www.memx.com/design_tools.htm

Design Library Process simulator

http://www2.imec.be/content/

user/File/MtM%20WG%20report.pdf

http://www.google.com.sg/imgres?q=laboratory+on+a+chip+market+size&hl=en&biw=1280&bih=933&tbm=isch&tbnid=AkXuNv_HgBmSrM:&

imgrefurl=http://pubs.rsc.org/en/content/articlehtml/2008/lc/b811169c&docid=JN9ixr33C73xUM&imgurl=http://www.rsc.org/ej/LC/2008/

b811169c/b811169c-

f2.gif&w=391&h=649&ei=fTd1UOiAOM3PrQeNuYDwAQ&zoom=1&iact=hc&vpx=695&vpy=90&dur=1862&hovh=289&hovw=174&tx=85&ty=

135&sig=111839047613402311162&page=2&tbnh=144&tbnw=87&start=30&ndsp=36&ved=1t:429,r:15,s:30,i:213

Source: Boucher-Lensch

Associates LLC

MEMS Technology,

2nd Edition

But Packaged Size will Always be Much Bigger than Minimum

Feature Size…..

Source: Technology Watch

http://www.lboro.ac.uk/departments/mm/research/

IPM-KTN/pdf/Technology_review/mems-recent-

developments-future-directions.pdf

Source: Technology Watch http://www.lboro.ac.uk/departments/

mm/research/IPM-KTN/pdf/Technology_review/mems-recent-

developments-future-directions.pdf

Source: http://www.isuppli.com/MEMS-and-Sensors/MarketWatch/Pages/MEMS-Market-

Rebounds-in-2010-Following-Two-Year-Decline.aspx

Source :

http://www.memsindustrygroup.org/fil

es/MEMSTrends_April2012_iMN.pdf

Source :

http://www.memsindustryg

roup.org/files/MEMSTrends

_April2012_iMN.pdf

Economic Feasibility of Micro-Electronic Mechanical Systems (MEMS)

Business

Transcript of Economic Feasibility of Micro-Electronic Mechanical Systems (MEMS)

Mems (micro electro mechanical systems)

Partial Di erential Equations of Electrostatic MEMS › wp-content › uploads › 2018 › 10 › ... · Micro-Electromechanical Systems (MEMS) combine electronics with micro-size

MEMS design and Micro-fabrication Lab

G210 Micro heading-Lock MEMS Gyro

development of micro-diesel injector nozzles via mems

Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS ... of Faculty Development Program on ME… · on Micro-Electro-Mechanical Systems (MEMS Sensor) Report MEMS

MEMS for pico- to micro-satellites [7208-24] Shea PW2009... · MEMS for pico- to micro-satellites ... projects on the ... planned for 2019 may well use MEMS-based micro-propulsion.

Feasibility Study of a MEMS SOI Capacitive Accelerometer

Introduction to MEMS and Micro devices for Photonics · 2018. 10. 15. · MEMS proof - of-concept › MEMS back-end services › MEMS manufacturing › MEMS & Micro Devices services

MEMS base Micro heater Design

MEMS-based solid propellant micro-rocket with micro ... · MEMS-based solid propellant micro-rocket with micro-igniter on ... Figure 1 Design of the planar solid propellant ... material

MEMS Micro-actuators enabling new and unforeseen ... · Accelerometer Gyroscope Inertial module Pressure sensor 2015 Micro Mirrors ... • MEMS Sensors and Actuators at ST: ... •

Mems (Micro Electrical Mechanical System) in Space

MEMS Fabrication S.APPA RAO. Overview What are MEMS? MEMS: Micro-Electro-Mechanical Systems => ‘smalltech’ MEMS Applications MEMS fabrication process.

Micro Electro Mechanical Systems (MEMS) - Lecture 06

Micro Electro Mechanical Systems MEMS” …aecouncil.com/2015_AEC_W.5_MEMs_Qualification_Update.pdfMicro Electro Mechanical Systems “MEMS” Subcommittee Workshop ... Mechanical

Micro Electro Mechanical Systems (MEMS) - Lecture 05

Applying Micro-Electro-Mechanical Systems (MEMS ...moscatiello.net/MEMS-DFCSrev1.pdf · Applying Micro-Electro-Mechanical Systems (MEMS) Technology To Digital Flight Controls (Preliminary,

MEMS-based solid propellant micro-rocket with micro ... · MEMS-based solid propellant micro-rocket with micro-igniter on thin membrane for ... mechanical and thermal characteristics:

Micro Electro Mechanical System: MEMS