Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS ... of Faculty Development...

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Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS Sensor) Report MEMS sensors have been dominating the consumer products such as mobile phones, music players and other portable devices. With India planning for Smart Cities, sensors and their design would be very important for data acquisition and monitoring. Designing sensors has become ubiquitous with any small electronic gadget. IntelliSuite is the industry-leading tool set for MEMS layout design, advanced process simulation, FEA, parametric analysis, system simulation, packaging analysis.

Transcript of Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS ... of Faculty Development...

Page 1: Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS ... of Faculty Development Program on ME… · on Micro-Electro-Mechanical Systems (MEMS Sensor) Report MEMS

Faculty Development Program

on Micro-Electro-Mechanical

Systems (MEMS Sensor) Report

MEMS sensors have been dominating the consumer products such as mobile phones, music players and

other portable devices. With India planning for Smart Cities, sensors and their design would be very

important for data acquisition and monitoring. Designing sensors has become ubiquitous with any small

electronic gadget. IntelliSuite is the industry-leading tool set for MEMS layout design, advanced process

simulation, FEA, parametric analysis, system simulation, packaging analysis.

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About GTU

Gujarat Technological University (International Innovative University), commonly

referred as GTU, is a state wide institution affiliating many engineering, pharmacy, and

management colleges and varsities across the western Indian districts of Gujarat. GTU

has been working jointly with industries through GTU Innovation Sankuls (Every

college is a member of the Sankuls in its area). It has been working with the students

through the GTU Innovation Clubs, Open Source Technology Clubs, IPR, CiC3, and

S4 Extension Centers etc. To foster innovative ideas and to explore new horizons in

the field of Engineering, Community Innovation & Co-Creation Centre organizes

various workshops, hackathon’s, challenges and Faculty Development Programs.

The Programme

Community Innovation and Co-Creation Centre (CiC3) has announced Faculty

Development Program on Design and Simulation of MEMS Sensor (Micromirror,

Accelerometer & Microphone).

MEMS sensors have been dominating the consumer products such as mobile phones,

music players and other portable devices. With India planning for Smart Cities, sensors

and their design would be very important for data acquisition and monitoring.

Designing sensors has become ubiquitous with any small electronic gadget. IntelliSuite

is the industry-leading tool set for MEMS layout design, advanced process simulation,

FEA, parametric analysis, system simulation, packaging analysis.

With users in over 30 countries, IntelliSense is the largest MEMS software vendor with

its own in-house fabrication facility. IntelliSense also provides a global One Stop

MEMS Solution for universities, blue-chip companies and start-ups with its custom

design, consulting and fabrication services.

The 3 day workshop was for students and faculty in the departments of Electronics and

Communication Engineering, Instrumentation Engineering, Telecommunication

Engineering, Mechanical Engineering, Electrical and Electronics Engineering,

Biomedical Engineering and allied branches.

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Introduction

Microelectromechanical systems (MEMS) integrate mechanical and electrical

components and have feature sizes ranging from micrometers to millimeters. They may

be fabricated using methods similar to those used to construct integrated circuits and

they have the potential of providing significant cost advantages when batch fabricated.

Their size also makes it possible to integrate them into a wide range of systems. Feature

sizes may be made with size on the order of the wavelength of light, thus making them

attractive for many optical applications. Microsensors (e.g., accelerometers for

automobile crash detection and pressure sensors for biomedical applications) and micro

actuators (e.g., for moving arrays of micro mirrors in projection systems) are examples

of commercial applications of MEMS.

Microelectromechanical systems (MEMS) are micrometer-scale devices that integrate

electrical and mechanical elements. They have been used in diverse applications, from

display technologies to sensor systems to optical networks. MEMS are attractive for

many applications because of their small size and weight, which allow systems to be

miniaturized.

The sensors in MEMS gather information from the environment through measuring

mechanical, thermal, biological, chemical, optical, and magnetic phenomena. The

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electronics then process the information derived from the sensors and through some

decision making capability direct the actuators to respond by moving, positioning,

regulating, pumping, and filtering, thereby controlling the environment for some

desired outcome or purpose. The advantages of semiconductor IC manufacturing such

as low cost mass production, reliability are also integral to MEMS devices.

The size of MEMS sub-components is in the range of 1 to 100 micrometers and the

size of MEMS device itself measure in the range of 20 micrometers to a millimeter.

The event was commenced with the welcome note by Dr. Apurv Raval Deputy director

GTU. The dignitaries of the FDP were included Dr. Geetha Prakash, Mr. Sripadaraja

K.. Mr. Mitesh Solanki, Ms. Tosha Shukla, Ms. Rutika Ghariya Assistant Professor

Gujarat Technological University. The workshop was started right after the inaugural

address by Dr. Apurv Raval, Deputy Director of Gujarat Technological University. All

the dignitaries expressed their views while explaining the importance of the FDP and

MEMS sensor.

Day 1, Dr. Geetha Prakash explained about importance of Micro Electro-Mechanical

Systems, why need MEMS sensor, Application of MEMS sensor in different domain:

Automotive domain, Consumer domain, Industrial domain, Military, Biomedical,

Some of the advantages of MEMS devices.

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This vision of MEMS whereby microsensors, microactuators and microelectronics and

other technologies, can be integrated onto a single microchip is expected to be one of

the most important technological breakthroughs of the future. This will enable the

development of smart products by augmenting the computational ability of

microelectronics with the perception and control capabilities of microsensors and

microactuators. Microelectronic integrated circuits can be thought of as the "brains" of

a system and MEMS augments this decision-making capability with "eyes" and "arms",

to allow microsystems to sense and control the environment. Sensors gather

information from the environment through measuring mechanical, thermal, biological,

chemical, optical, and magnetic phenomena.

The electronics then process the information derived from the sensors and through

some decision making capability direct the actuators to respond by moving,

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positioning, regulating, pumping, and filtering, thereby controlling the environment for

some desired outcome or purpose. Furthermore, because MEMS devices are

manufactured using batch fabrication techniques, similar to ICs, unprecedented levels

of functionality, reliability, and sophistication can be placed on a small silicon chip at

a relatively low cost. MEMS technology is extremely diverse and fertile, both in its

expected application areas, as well as in how the devices are designed and

manufactured. Already, MEMS is revolutionizing many product categories by enabling

complete systems-on-a-chip to be realized.

Mr. Sripadaraja K explained about design of a capacitive accelerometer from initial

system-level design exploration, through fabrication processing and device-level

analysis. He also explained analyze the accelerometer, developed and discuss the

benefits of IntelliSuite when it comes to MEMS-based accelerometer design. Begin the

design exploration in SYNPLE, the schematic-based simulator. Analyses can be

performed very quickly in this tool, making it ideal for the initial design stages. From

the mask layout automatically generate a 3D meshed model to be used for finite

element analysis.

Day 2, Dr. Geetha Prakash explained about importance of Optical Sensors. Optics and

photonics are among these research fields impacted by MEMS techniques. Optical

MEMS has created a new fabrication paradigm for optical devices and systems.

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These micro optical devices and systems are inherently suited for cost effective wafer

scale manufacturing as the processes are derived from the semiconductor industry. The

ability to steer or direct light is one of the key requirements in optical MEMS. The

displays were the main driving force for the development of micromirror arrays.

Portable digital displays are common places and head mount displays are now

commercially available.

Mr. Sripadaraja K explained about design and fabrication technology like surface

micromachining, bulk micromachining, and molding, Micromodel Extraction,

Simulation in SYNPLE and Micro Mirror array Simulation and Visualization.

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He also explained on-chip actuation of microsystems has been a particularly

challenging aspect of MEMS development. Common macro-level actuation

approaches, such as hydraulics, pneumatics, electric motors, internal combustion

engines and turbines, are either too difficult to fabricate at the micro level or do not

work well at that scale. Electrostatic attraction is one approach that has been widely

used for actuation of microsystems. While electrostatic actuation is suitable for many

applications, some systems require either lower voltages or higher output forces.

Electrostatic and thermal actuation approaches are described in more detail.

Day 3, Dr. Geetha Prakash explained about importance of Optical Sensor microphone.

The application of MEMS (Micro Electro-Mechanical Systems) technology to

microphones has led to the development of small microphones with very high

performance. MEMS microphones offer high SNR, low power consumption, good

sensitivity, and are available in very small packages that are fully compatible with

surface mount assembly processes. MEMS microphones exhibit almost no change in

performance after reflow soldering and have excellent temperature characteristics.

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She also explained MEMS microphones use acoustic sensors that are fabricated on

semiconductor production lines using silicon wafers and highly automated

processes. Layers of different materials are deposited on top of a silicon wafer and

then the unwanted material is then etched away, creating a moveable membrane and a

fixed backplate over a cavity in the base wafer. The sensor backplate is a stiff

perforated structure that allows air to move easily through it, while the membrane is a

thin solid structure that flexes in response to the change in air pressure caused by sound

waves.

Mr. Sripadaraja K explained about design and fabrication process, Process flow sheet

in IntelliFab, Material properties, Boundary Conditions, sensitivity and Measurement

of capacitance.

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Valedictory Session

Valedictory session of the program was graced by the presence of Dr. Mihir Shah

(Professor, LD College of Engineering, Ahmedabad). He took eager interest in the

MEMS sensor designed & developed by students and faculty members during the

workshop and appreciated their dedication & effort. He also motivated students to keep

looking for opportunities where they can utilize their learning and can get chance to

implement what is demonstrated during the three days of workshop.

Reported By

Mitesh Solanki

Assistant Professor

GTU Sensor Lab, CiC3, GTU