Post on 18-Jan-2016
BioMEMS Device BioMEMS Device Integration, Packaging Integration, Packaging
and Control for and Control for BioMEMS BioMEMS
Rubloff Research Group Accomplishments
BioMEMS Device Integration, Packaging and BioMEMS Device Integration, Packaging and Control for BioMEMS Control for BioMEMS
People involvedJung Jin Park, Xiaolong Luo, Theresa Valentine, Gary Rubloff
Collaborations with Reza Ghodssi, Hyunmin Yi, Greg Payne, Bill Bentley
Links
AccomplishmentMicrofabricated SU8 on a Pyrex wafer
defines the microchannel structure
Patterned gold electrodes define the readily addressable assembly sites
SU8-PDMS junction by pressure provides leak-tight and nonpermanent sealing
Fluidic/electric ports provide transport and electric signal for biochemical assembly
LabView-based control system coordinates liquid transport and electrodeposition
SignificanceIntegrated microfluidic system provides
electric signal and optical access for biochemical assembly
Nonpermanent sealing provides ex situ, post-process analysis
Reusable packaging components
Microfluidic Control System provides systematic operation process
BioMEMS Device Integration, Packaging and BioMEMS Device Integration, Packaging and Control for BioMEMS Control for BioMEMS
PublicationsX. L. Luo, A. T. Lewandowski, H. M. Yi, R. Ghodssi, G. F. Payne, W. E. Bentley and G. W. Rubloff,
“Reproducible Assembly and Catalytic Activity of a Metabolic Pathway Enzyme in Reusable BioMEMS Devices”, Lab on a Chip, Submitted.
J. J. Park, X. L. Luo, H. M. Yi, T. M. Valentine, G. F. Payne, W. E. Bentley, R. Ghodssi and G. W. Rubloff, “Chitosan-mediated in situ biomolecule assembly in completely packaged microfluidic devices”, Lab on a Chip, 2006, 6, 1315-1321.
J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, “Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing“, Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)
PresentationsJ.J. Park, M.A. Powers, X. Luo, R. Ghodssi, and G.W. Rubloff, “BioMEMS Chip and Package
Design for Surface-Controlled Bioreaction Processes”, American Vacuum Society 52nd International Symposium & Exhibition, Boston, MA, October 30-November 4, 2005.
J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, “Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing“, Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)
MEMS
• Convey electrical, optical signals
• Huge capability for data processing
• Long shelf time
Biology
• Convey ions, molecules
• Molecular recognition capability for biosensing functions
• Labile (not stable)
BioMEMS
Polymer-based (PDMS)
• Soft lithography
• Cheap and disposable
• Lack of electric/optical accesses
Biopolymer-based (Chitosan)
• Photolithography
• Electric/optical accesses
• Reusable after mild acid wash
• Cheap average-use cost
Biopolymer-based (Chitosan)
• Photolithography
• Electric/optical accesses
• Reusable after mild acid wash
• Cheap average-use cost
Semiconductor-based
• Photolithography
• Expensive, time-consuming
• Electric/optical accesses
Biopolymer-based BioMEMS
• BioMEMS refers to the application of microelectromechanical systems (MEMS) to biology. Current bioMEMS devices are either semiconductor-based or polymer-based, mostly PDMS.
• A biopolymer-based bioMEMS devices are created when chitosan is enlisted. The unique properties of aminopolysaccharide chitosan confer the bioMEMS device with special advantages such as reusability and low average-use cost.
Pyrex
Gold
SU8
Drilled holes in 4” Pyrex
Au deposition and patterning
patterning SU8 microchannel
Electrical I/OFluidic I/O
Pyrex
Compression bolt
Microchannel( 500 m)
Pyrex
Electrode (1 mm x 0.5 mm)
Side wall (400 m x 150 m)
Design Fabrication
BioMEMS Device Design and Fabrication
sidewall
500 m
Microchannel
Electrode
Optical micrograph
SU8 knife edge / PDMS gasket sealing
Microfluidic channel
SU8 Micro-knife-edge
Pyrex 500 m
Testing flow rate: ~ 50 l/min
Compression Sealing
PDMS gasket
SU8/PDMScompression seal
Top sealing plate
Pyrex
Features
• Non-permanent sealing• Fluidic and electrical I/O• Reusable packaging components • Transparency for optical access
Microfluidic Package
PDMS/Top sealing plate
I/O ring
Microfluidic device
Top compression plate
Bottom plate
Fluidic I/O
Electrical I/O
Optical micrograph
Microfluidic channel
Fluidic I/O
Electrical I/O
(a)
Fluidic I/OElectric I/O
Channel
Electrode
(b)
Water, PBS, Chitosan ……
PC with LabView
Flow Control
Electric signal Control
Valve
Micropump
Fluid flow
Counterelectrode
Chitosan
Power supply
Valve
Products or waste
waste
(c)
BioMEMS Device and Control System