BioMEMS Device BioMEMS Device Integration, Packaging Integration, Packaging

and Control for and Control for BioMEMS BioMEMS

Rubloff Research Group Accomplishments

BioMEMS Device Integration, Packaging and BioMEMS Device Integration, Packaging and Control for BioMEMS Control for BioMEMS

People involvedJung Jin Park, Xiaolong Luo, Theresa Valentine, Gary Rubloff

Collaborations with Reza Ghodssi, Hyunmin Yi, Greg Payne, Bill Bentley

Links

AccomplishmentMicrofabricated SU8 on a Pyrex wafer

defines the microchannel structure

Patterned gold electrodes define the readily addressable assembly sites

SU8-PDMS junction by pressure provides leak-tight and nonpermanent sealing

Fluidic/electric ports provide transport and electric signal for biochemical assembly

LabView-based control system coordinates liquid transport and electrodeposition

SignificanceIntegrated microfluidic system provides

electric signal and optical access for biochemical assembly

Nonpermanent sealing provides ex situ, post-process analysis

Reusable packaging components

Microfluidic Control System provides systematic operation process

BioMEMS Device Integration, Packaging and BioMEMS Device Integration, Packaging and Control for BioMEMS Control for BioMEMS

PublicationsX. L. Luo, A. T. Lewandowski, H. M. Yi, R. Ghodssi, G. F. Payne, W. E. Bentley and G. W. Rubloff,

“Reproducible Assembly and Catalytic Activity of a Metabolic Pathway Enzyme in Reusable BioMEMS Devices”, Lab on a Chip, Submitted.

J. J. Park, X. L. Luo, H. M. Yi, T. M. Valentine, G. F. Payne, W. E. Bentley, R. Ghodssi and G. W. Rubloff, “Chitosan-mediated in situ biomolecule assembly in completely packaged microfluidic devices”, Lab on a Chip, 2006, 6, 1315-1321.

J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, “Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing“, Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)

PresentationsJ.J. Park, M.A. Powers, X. Luo, R. Ghodssi, and G.W. Rubloff, “BioMEMS Chip and Package

Design for Surface-Controlled Bioreaction Processes”, American Vacuum Society 52nd International Symposium & Exhibition, Boston, MA, October 30-November 4, 2005.

J. J. Park, T. M. Valentine, R. Ghodssi, and G. W. Rubloff, “Integrated Chip and Package Design for Surface-Controlled Bioreaction Processes with Robust, Reusable Fluidic Sealing“, Proceedings of MicroTAS 2005, 9th International Conference on Miniaturized Systems in Chemistry and Life Sciences (2005)

MEMS

• Convey electrical, optical signals

• Huge capability for data processing

• Long shelf time

Biology

• Convey ions, molecules

• Molecular recognition capability for biosensing functions

• Labile (not stable)

BioMEMS

Polymer-based (PDMS)

• Soft lithography

• Cheap and disposable

• Lack of electric/optical accesses

Biopolymer-based (Chitosan)

• Photolithography

• Electric/optical accesses

• Reusable after mild acid wash

• Cheap average-use cost

Biopolymer-based (Chitosan)

• Photolithography

• Electric/optical accesses

• Reusable after mild acid wash

• Cheap average-use cost

Semiconductor-based

• Photolithography

• Expensive, time-consuming

• Electric/optical accesses

Biopolymer-based BioMEMS

• BioMEMS refers to the application of microelectromechanical systems (MEMS) to biology. Current bioMEMS devices are either semiconductor-based or polymer-based, mostly PDMS.

• A biopolymer-based bioMEMS devices are created when chitosan is enlisted. The unique properties of aminopolysaccharide chitosan confer the bioMEMS device with special advantages such as reusability and low average-use cost.

Pyrex

Gold

SU8

Drilled holes in 4” Pyrex

Au deposition and patterning

patterning SU8 microchannel

Electrical I/OFluidic I/O

Pyrex

Compression bolt

Microchannel( 500 m)

Pyrex

Electrode (1 mm x 0.5 mm)

Side wall (400 m x 150 m)

Design Fabrication

BioMEMS Device Design and Fabrication

sidewall

500 m

Microchannel

Electrode

Optical micrograph

SU8 knife edge / PDMS gasket sealing

Microfluidic channel

SU8 Micro-knife-edge

Pyrex 500 m

Testing flow rate: ~ 50 l/min

Compression Sealing

PDMS gasket

SU8/PDMScompression seal

Top sealing plate

Pyrex

Features

• Non-permanent sealing• Fluidic and electrical I/O• Reusable packaging components • Transparency for optical access

Microfluidic Package

PDMS/Top sealing plate

I/O ring

Microfluidic device

Top compression plate

Bottom plate

Fluidic I/O

Electrical I/O

Optical micrograph

Microfluidic channel

Fluidic I/O

Electrical I/O

(a)

Fluidic I/OElectric I/O

Channel

Electrode

(b)

Water, PBS, Chitosan ……

PC with LabView

Flow Control

Electric signal Control

Valve

Micropump

Fluid flow

Counterelectrode

Chitosan

Power supply

Valve

Products or waste

waste

(c)

BioMEMS Device and Control System