Transcript of 160kV 35um spot
- 1. pg 1 N ew ! 3D C A D in teraction & M ovies Product
Development for A-Tube Supply ChainSupply Chain Overview
&Overview & OutcomeOutcome Key LearningKey Learningss
Feasibility is goodFeasibility is good
manufacturabilitymanufacturability needs workneeds work SEE: Supply
Chain communication matrix & link immediately to key business
partners and their company info. Cert. of complianceCert. of
compliance Quality AssuranceQuality Assurance paper work andpaper
work and specsspecs
- 2. pg 2 Table of Contents Technical Glass Altair
TechnologyLarson Glass Garland Precision Agilent Lower Level
Material Material Transformation & Assembly Integration SANDT
Applied Physics 11 20 23 5 Thin Film Tech
- 3. pg 3 Introduction LP1 (Lab Proto #1) Retrospective Purpose:
System Requirements: Navigation: Audience: This is a multi-purpose
document and meant to be read at different levels of details based
on the audience. COMMUNICATE There have been a lot of queries
regarding the status of this project and the lab units. Hopefully
this will answer those as well as detail out the key learning's,
progress and next steps in development. CENTRALIZE This is also
intended as a starting point for production documentation. This
pulls together a lot of separate documents & details across the
entire supply chain. COODINATE A lot of effort has been made to
facilitate communication between Agilent and the vendors. Moving
forward, these efforts need to increase as we turn over
deliverables to manufacturing, the supply chain changes, and
improvements are implemented. This is a broad base distribution.
All participants are requested to give feed back either within the
adobe editor or off-line to myself. DEVELOPMENT ENGINEERS This
document is an archive of development and learning across all the
LP units. May this serve as a central point of reference as
resources change. MANAGMENT Management changes throughout the
organization require that they come up to speed on the project at
different levels. This will serve as both a status updates and
business impact capture. SUPPLY CHAIN PARTNERS All S.C. members are
under NDA (non-disclosure agreements) and though this is primarily
an Agilent documentation, I want to include them for feedback and
coordinated efforts moving forward. The document is designed to be
able to navigate to the desired information and level of detail
required for the reader with ease. PDF ONLY Read and / or Print as
a PDF only Bookmarks click the bookmarks icon to navigate by root
tree external to the document Links There are a lot of links within
the text and pictures to direct the reader to associated or
detailed information. Comments click the comment icon to read
inserted comments of others or the reader toolbar icon to inset
comments of your own. You should be prompted to free upgrade to the
appropriate web site for the application you are attempting to use.
For full use of this document I recommend Flash 8.0, Adobe reader
8.1, Microsoft media and/or real player and associated graphic card
to support these.
- 4. pg 4 Executive Summery Supplier Part Process Learning's
Improvements Tech Glass Chemical prep Toluene by itself devitrifies
on the glass Use 3 chem. in order: Toluene, Acetone, IPA Thin Film
QA data Need to acquire along with the parts Crystal Vogel mount
Mechanical design more robust than preliminary tests revealed Work
with vendor to collect data and improve design. Adding Getter to
LP2 & LP5 Adding vented ceramic to LP2 & LP5 Bending pins
to mate header induced unnecessary strain difficult to Spot welding
with the legs interference Design is rated to withstand only 75PSIG
Production HV process will only subject the part to 45PSIG Need to
call out flared end . 1.75" call out of straight wall of glass >
0.1". Larger diameter glass will be used on production protos Will
flare edge to minimize ovality & increase weld / reworkabiliy
Welding Lost Vacuum integrity at 100C at weld point Moving this
process to within Tech Glass Anode machinist issues on 2 rounds of
5 sets Adjusted material thickness and outsourced to another
supplier Cu Pipe will change to 3/8 dia to increase
manufacurability Late delivery set expectations on the front end
across broader audience Increase communication and OF involvement
to drive deadlines. Header assembly Add alignment specification to
print Header assembly Add additional leak check points to discern
of failure is process or material. Old Mini Task pump was
insufficient for process replaced with new unit & added gate
valve Data transfer from NT 4.0 painful Migrated RGA software to
IRP computer Move process to Tech glass Qualify with LP5 created
fixture to assist in electrical interface PS limit was 165kV
Increased to 192kV by eliminating the V limit Need to add ON/OFF
power cycle need to purchase 2 cameras that were removed for
customer support Added Magnification fixture Need to validate SW
/Gui test need to purchase and install x,y motors and controllers
Final Test could not measure spot size indirectly with Genesis
camera's Agilent Tech Bake Out High voltage seasoning KG-400-T-SPCL
Larson Altair Tech Mounting cage New Mount part will have 2 legs
(not 4) and receiving holes are aligned to correct distances FTSP-6
(6 pin header) AP Tech Vacuum integrity Click Icon (left) to go to
KEY Learning's LP! UNIT Performance Functionality Requirement
SPECIFICATION P/F Gun Gun Power perform at 10k hrs Variance 5months
from PO release awaiting for balance of order. 1 instance of
non-conforming gun from AP. Returned with others for repair.
Overall supplier Quality is good. Still gaining ground on learning
the product & process. More tooling and design improvements
will be implemented on PP1-4 units
- 11. pg 11 LP1 Supply Chain Technical Glass Altair
TechnologyLarson Glass W / Monel / Cu Target Threaded SS Gun sleeve
Thin Film Technologies Garland Precision Precision machined OFHC
base Agilent Lower Level Material Material Transformation &
Assembly Integration Processing, Integration, & Test Agilent
LVLD W Plasma sputter deposition FTSP-6 BAKE HV season Integrate
Final Test SANDT System Applied Physics Electron Gun Assembly
KG-400-T-SPCL SST components for gun assembly ImprovingAt RISK GOOD
Supplier Status Pass Pass Pass / lost vacuum Fail/skip N/A Move
mouse over & click part, supplier, & process for details
Braze & TIG weld QA test, integrate, weld, align, assemble
N7280- 67900 X-ay Tube
- 12. pg 12 Supplier Communication Matrix Supplier WEB Address
Contact Position E-mail Phone Technical Glass, Inc.
www.techglass.com 15400 E. Batavia Dr. Aurora, CO 80011 Ron Bihler
Owner, Senior Eng rbihler@techglass.com (303)367-8619 Carol Peters
Purchasing Agent cpeters@techglass.com (303)367-8619 Larson
Electronic Glass www.larsonelectronicgl ass.com 2840 Bay Road
Redwood City, CA 94063 Chuck Kraft Senior Eng gls2mtl@att.net
650-369-6734 Altair Technologies, Inc. http://www.Altair USA.com
980 Hamilton Avenue Menlo Park, Ca, 94025 Jerry Walias Sales
JerryW@altairusa.com (650) 508-8700 x 121 Chris Ferrari Engineer
cferrari@altairusa.com (650) 508-8700 x 123 Curtis Allen President
CurtisA@altairusa.com (650) 508-8700 x110 Applied Physics
Technologies http://www.a-p- tech.com/ 1600 NE Miller Street
McMinnville, Oregon 97128 USA Cory Fast Engineer Cfast@A-P-Tech.com
(503) 434-5550 x207 Florcia Hamilton Purchasing Agent
FHamilton@A-P-Tech.com (503) 434-5550 Kevin Kagarice Research
Scientist KKagarice@A-P-Tech.com (503) 434-5550 William A. Mackie,
Ph.D Owner BMackie@A-P-Tech.com (503) 434-5550 Thin Film
Technologies Inc http://www.thinfilm technology.com/h 153
Industrial Way Buellton, CA 93427 Tom Ives President
tives@thinfilmtechnology.com (805) 688-4949 Bob Stokes Quality
manager bstokes@thinfilmtechnology.com (805) 688-4949 Garland
Precision machining N.A. 4000 Cordelia Ln Soquel, CA 95073 Glen
Garland Owner garland@cruzio.com (831) 462-1314 SANDT
http://www.sandt.com .cn/english/e- p008.htm No 188, Yanghebang Rd,
Songjiang High Tech Park Shanghai, China Jerry Tang President
jtang@aerosino.com +86 21 3763 3098 Joyce Lao Supply chain mng +1
949 351 0588 Joyce Lao Sales agent +1 949 351 0588 Jerry Tang
Engineering jtang@aerosino.com +86 21 373 3098 Jerry Tang RnD eng
liaison jtang@aerosino.com +86 139 173 11806 Yifang Wei Production
Mng +86 21 3763 3088 Hanyun Cai Regulatory agent +86 21 3763 3088
x1201 Agilent Technologies Inc http://www.Agilent .com 900 S taft
rd loveland Colorado 80537 USA Bee Giak OF Planner
bee-gaik_koay@Aglilent.com +6 04 680 2809 Erick Lewark RnD eng
Erick_lewark@agilent.com +1 970 679-2975 Eric Miller RnD eng
Eric_Miller@Agilet.com +1 970 679 3805 Agilent Technologies
Microwave (Malaysia) Sdn Bhd (463532-M) Building 5 Bayan Lepas Free
Industrial Zone,Penang,11900, LIM,KOK- SUNG Regulatory agent
kok-sung_lim@agilent.com +60 4 680-7105 shanmugam Rajamany
Production Mng shanmugam_rajamany@agilent. com +6 04 8197804 RETURN
link
- 13. pg 13 Materials & Design Pin # Scheme Outer pins are
odd# Inner pins are even # 2 outer short leads are 5&6 2 inner
short leads are 1&3 Lead Lengths (in) pin # outer inner 1 0.500
0.000 2 1.125 3.500 3 0.500 0.000 4 1.125 3.500 5 0.500 3.500 6
1.125 3.500 Filament Gnd Filament (+) Getter (+) Focus V (+)
Mechanical mount KG-400-T-SPCL --- LP1 PN KG-400-TF-SPCL new PN (3)
(8250 glass composition) Mechanical mount Performance FTSP- 6
Production PN (7052 glass composition) Cross Section of Design
improvement A B C There were 3 areas of design margin increase. 1
Overall length of header to increase dielectric stand-off
capability. This was reduced as an effect of A (above) 2 Pin
spacing increased to maximize mechanical strength along with
straight Kovar pins 3 Future PP units will use a flared Kovar
welding lip to maintain circularity and ease of weld and re-work.
There were 3 areas of design margin to be addressed and one
critical failure. A I did not call out a spec for the flare
diameter. This was adjusted at Tech Glass but should be noted on
the print to be >1.75 . B There was some indicator of stress
line in the header. This piece is rated to only withstand 75PSI
force, which is the sum difference of the vacuum + external SF6. C-
The glass OD reduces at a critical failure point. Subsequent LP
units have a spec of >.1 future designs will leverage larger
glass. Failure Point Vacuum loss occurred at the Kovar pinglass
interface. Future builds will have more rigorous leak check of this
to identify if the failure is related to assembly or material 1
1After Before 2 3 Pin-6 Getter not incorporated in LP1 Click link
to see QA specs
- 14. pg 14 Photo of HfC provided by:
www.hbci.com/~wenonah/new/cryst als.htm LP units utilize a 4 leg
design. PP units will improve with a integrated 2 leg design
(shown) Design & Build LP1 unit utilized a non- vent Ceramic.
Other LP units will use improved design (shown) Click in box to
activate 3D model. See tool bar to activate explode & rendered
views Enables slide bar controller to explode assembly Show model
tree & views for additional control of parts RETURN link
- 15. pg 15 The chart to the right is a composite from 12 units
Q.A. test data from AP. A 2.5 or 95% CI (confidence interval) was
established for each temperature range test set. These limits then
set the SPC boundaries for expected outputs. Gun 20473 test data is
shown as a green triangle and is within acceptable limits. It did
require much greater power & temperature the expected During
Final Test. Annealing Temp (1) limit and Current run-away Are
displayed as limits for K & W r e s p e c t i v e l y . .
Pretest Performance Post Analysis T vs W 7.70 8.41 9.01 7.12 6.59
1700 1800 1900 2000 2100 2200 2300 2400 2500 6 7 8 9 10 11 12 13 14
Power (W) Temp(K) means QA test data (12 guns) LP1 test data 95% CI
LL 95% CI UL LP1 performance Lineofsight check Drop test directions
X Click link to see QA test data. Four guns returned from HWE were
extracted and repaired with new crystals and a vented Vogel mount
at Applied Physics. These were then tested for both t h e r m a l
& e m i s s i o n characterization at specific t e m p e r a t
u r e s ( s e e performance data below). LP1 (labproto-1) unit was
built with gun serial # 20473. Gun Test fixture at A-P Tech. The
gun was re-tested at A g i l e n t d u r i n g H e a d e r a s s e
m b ly f o r F i l a ment continuity (12 + 5 Ohms) and dielectric
stand-off capability. See Material & QA (quality assurance)
tracking p.30 for more details. At present, production standardized
testing and equipment are b e i n g e x p l o r e d . Annealing
Temp U.C.L Currentrun-awayU.C.L. (1) Journal of Materials
Engineering and Performance Volume 3(2) April 1994 2 Major concerns
were investigated in autopsy: mechanical durability &
degradation of performance due to contaminants in tube. It was
suspected that gun o p e r a t e d a b o v e t h e annealing
temperature of the b a s e m a t e r i a l w i l l compromise the
strength of the Vogel mount assembly. S o a d r o p t e s t w a s
performed along 2 axis repeatedly at heights up to 8. The alignment
was checked visually after each test. No perceptible shifts in
alignment could be detected. There was some corrosion present
across the Carbon and crystal back surfaces but there was no
evidence of any Oxidization, proving the vacuum integrity was good.
Future guns will be checked with an optical pyrometer prior to
Final Testing on s u b s e q u e n t L P u n i t s .
- 16. pg 16 Outlook Item Anode assembly Target assembly Process
& Integrate Machined Cu, Monel, SST Purchased 1.33 CFF Chemical
Clean (Cu target ultrasonic in IPA only) Click link to see QA test
data. Hydrogen Fire CuSil (35/65) Braze TIG weld to glass assembly
Machined W & Monel Provided Cu coated target Vacuum Fire
Nicusil Braze WMonel Cusiltin Braze Cu Monel Leak Check (E-10 pp
torr) Visual Inspect N7280-28034 Coated Cu Target provided by Thin
Film Technologies Anode assembly Target assembly Machined Tungsten
(W) & Monel OFHC 0.5 pipe, SST base, and 1.33CFF Part received
and staged July 23rd. (click e-mail) Click over selected comments
below to see feedback and details.
- 17. pg 17 T h e m a c h i n i s t destroyed 1st set of
material. 2nd set delivered had a surface defect. Not critical to
quality (CTQ) but does not a d h e r e t o t h e surface call out
on the print. . Performance & Delivery Future material will be
provided by an alternate supplier. Units allocated for pp6-9,
machined by Devenus in MY, have been built to print using a thicker
wall and 3/8 OFCH pipe. . D i s t a n c e f r o m Corona guard O.D.
to Glass I.D. is CTQ for dielectric s t a n d - o f f r e q u i r e
m e n t s . Concentricity of parts and TRI (total indicated
run-out) are the contributing factors. LP1 exhibited breakdown at
the point during HV seasoning indicated above. Future iterations
will call out < 0.1 TIR and increase the glass O.D. by 0.25. . M
i n i m u m g l a s s strain is critical for vacuum integrity. This
is visually inspected with a Polariscope. Strain is induced by
either forced fits or non- t e m p e r a t u r e controlled welds .
. LP1 exhibited very low stress by the lack of heavy gradient
lines. Future iterations will be designed with a flared Kovar to
minimize these factors. LP1 exhibited a leak at the weld joint
during bake- Out process. It was sealed with HV torr seal which a l
l o w e d i t t o p r o c e e d b u t reduced the upper limit temp
to 375 C as a result. LP1 used a 45 degree cut on the pipe which is
more susceptible to strain. Future LP units use a 1 bend radius as
shown on LP3. . LP1LP3 Material delivery from Altair has been the
leading factor is schedule slip. The major d e l a y s a p p e a r
t o b e associated to working with lower level vendors, quality
issues, and damage of parts at both machinist and within Altair.
The scope of the assembly, the value added of Altair, and the
material requirements have been reduced to negate these factors in
the future. . LP1 LP3 LP4,5 LP2
- 18. pg 18 Subsidiary of Williams Advanced Materials Air Side
Vacuum Side Electron beam Vacuum Side Air Side Monel Tungsten (W)
Copper (Cu) OFCH grade (Oxygen Free High Conductivity large crystal
>99.99% purity) Target PerformancePre-Test Design Materials Heat
generated from the E- beam (16W) is imparted into a region 0.1".
Larger diameter glass will be used on production protos Will flare
edge to minimize ovality & increase weld / reworkabiliy Welding
Lost Vacuum integrity at 100C at weld point Moving this process to
within Tech Glass Anode machinist issues on 2 rounds of 5 sets
Adjusted material thickness and outsourced to another supplier Cu
Pipe will change to 3/8 dia to increase manufacurability Late
delivery set expectations on the front end across broader audience
Increase communication and OF involvement to drive deadlines.
Header assembly Add alignment specification to print Header
assembly Add additional leak check points to discern of failure is
process or material. Old Mini Task pump was insufficient for
process replaced with new unit & added gate valve Data transfer
from NT 4.0 painful Migrated RGA software to IRP computer Move
process to Tech glass Qualify with LP5 created fixture to assist in
electrical interface PS limit was 165kV Increased to 192kV by
eliminating the V limit Need to add ON/OFF power cycle need to
purchase 2 cameras that were removed for customer support Added
Magnification fixture Need to validate SW /Gui test need to
purchase and install x,y motors and controllers Final Test could
not measure spot size indirectly with Genesis camera's Agilent Tech
Bake Out High voltage seasoning KG-400-T-SPCL Larson Altair Tech
Mounting cage New Mount part will have 2 legs (not 4) and receiving
holes are aligned to correct distances FTSP-6 (6 pin header) AP
Tech Vacuum integrity RETURN link