MULTISCALE SIMULATION OF FUNCTIONALIZATION OF SURFACES USING ATMOSPHERIC PRESSURE DISCHARGES * Ananth N. Bhoj a) and Mark J. Kushner b) a) Department of.
ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner.
WAFER EDGE EFFECTS CONSIDERING ION INERTIA IN CAPACITIVELY COUPLED DISCHARGES* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department.
Study of Plasma Meniscus and Beam Halo in Negative Ion Sources Using 3D3VPIC model Shu Nishioka Faculty of Science and Technology, Keio Univ. 1 st year.
Study of Plasma Meniscus and Beam Halo in Negative Ion Sources Using 3D3VPIC model
MULTISCALE SIMULATION OF FUNCTIONALIZATION OF SURFACES USING ATMOSPHERIC PRESSURE DISCHARGES *
Observation of high kinetic energy density jets in the Earth’s magnetosheath E. Amata 1, S. P. Savin 2, R. Treuman 3, G. Consolini 1, D. Ambrosino, M.F.
ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS:
Observation of high kinetic energy density jets in the Earth’s magnetosheath
