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Simple piezoresistive pressure sensor. Simple piezoresistive accelerometer.
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Millipedememory
Reconfigurable RF MEMS Bandpass Filter
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Electrostatic actuators: from the GEO experience to the 2 nd generation requirements Harald Lück Perugia, 21.9.2005.
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Advanced LIGO Commissioning Overview Stanford LVC Meeting, August 27, 2014 Peter Fritschel.
mems
Simple piezoresistive pressure sensor
