Chemical Vapor Deposition of Ruthenium
National Science Foundation Synthesis of Solid Electrolyte (Li x Al y Si z O) via ALD Jane P. Chang, University of California-Los Angeles, DMR 0932761.
Impact of Nanotopography on STI CMP in Future Technologies D. Boning and B. Lee, MIT N. Poduje, ADE Corp. J. Valley, ADE Phase-Shift W. Baylies, Baytech.
EE143 – Ali Javey Section 5: Thin Film Deposition Part 2: Chemical Methods Jaeger Chapter 6.
