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INF5490 RF MEMS Documents

INF5490 RF MEMSOverview • Motivation • Micromachining • Modeling • Specific features for RF systems • Q-factor • RF MEMS components –

INF5490 RF MEMS - Forsiden - Universitetet i Oslo · INF5490 RF MEMS • INF5490: Master ... – Course on Cofabrication of MEMS and CMOS, IMEC, Leuven, H08 ... • ”RF MEMS refers Documents

1 INF5490 RF MEMS LN01: Introduction. MEMS in RF Spring 2009, Oddvar Søråsen Department of informatics, UiO 2 Today’s lecture • Background for the course INF5490 •…

INF5490 RF MEMS - UiO Documents

INF5490 RF MEMSSpring 2008, Oddvar Søråsen Department of Informatics, UoO 2 • MEMS functional operation – Transducer principles – Sensor principles

INF5490 RF MEMS - Universitetet i oslo · INF5490 RF MEMS • MEMS (Micro ... MEMS • RF – ”Radio frequency” – High frequencies: MHz, GHz – Used in wireless transmission Documents

1 INF5490 RF MEMS LN01: Introduction MEMS in RF Spring 2012 Oddvar Søråsen Department of informatics UoO 2 Today’s lecture • Background for the course INF54909490 •…

INF5490 RF MEMS - Forsiden - Universitetet i · PDF file1 INF5490 RF MEMS L13: RF MEMS capacitors S2008, Oddvar Søråsen Department of Informatics, UoO Documents

1 INF5490 RF MEMS L13: RF MEMS capacitors S2008, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Passive components in RF circuits – Capacitors,…

INF5490 RF MEMS - Forsiden · INF5490 RF MEMS LN01: Introduction. MEMS in RF . Spring 2012, Oddvar Søråsen . Department of informatics, UoO . 2 Today’s lecture • Background Documents

1 INF5490 RF MEMS LN01: Introduction. MEMS in RF Spring 2012, Oddvar Søråsen Department of informatics, UoO 2 Today’s lecture • Background for the course INF5490/9490…

INF5490 RF MEMS - Forsiden - Universitetet i · PDF file1 INF5490 RF MEMS LN05: RF MEMS switches, I . Spring 2012, Oddvar Søråsen . Department of Informatics, UoO Documents

1 INF5490 RF MEMS LN05: RF MEMS switches, I Spring 2012, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Switches for RF and microwave – Typical…

INF5490 RF MEMS - Forsiden - Universitetet i · PDF file3. INF5490 RF MEMS • MEMS (Micro Electro Mechanical Systems) – A relatively new research activity in the NANO group • Documents

1 INF5490 RF MEMS LN01: Introduction. MEMS in RF Spring 2010, Oddvar Søråsen Department of informatics, UoO 2 Today’s lecture • Background for the course INF5490/9490…

INF5490 RF MEMS - Universitetet i oslo · INF5490 RF MEMS. MEMS. (Micro Electro Mechanical Systems) – A relatively new research activity in the NANO group. • NANO competence: Documents

1 INF5490 RF MEMS LN01: Introduction. MEMS in RF Spring 2010, Oddvar Søråsen Department of informatics, UoO 2 Today’s lecture • Background for the course INF54909490…

INF5490 RF MEMS - Forsiden - Universitetet i Oslo · INF5490 RF MEMS LN02: ... (hydrofluoric acid) – 0.1 ... • Used for making V-grooves • Other anisotropic etch liquids ... Documents

1 INF5490 RF MEMS LN02: MEMS – Fabrication Spring 2011, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Micromachining • Important process steps…

INF5490 RF MEMS · 3 INF5490 RF MEMS • New Master course at Ifi spring 05 – ca 10-15 students/year • MEMS (Micro Electro Mechanical Systems) is a relativ new research activity Documents

1 INF5490 RF MEMS L1: Introduction MEMS in RF Spring 2008 Oddvar Søråsen Department of informatics UiO 2 Today’s lecture • Background for course INF5490 • Course…

INF5490 RF MEMS · RF MEMS switches • A great need exists for having switches with better performance! – ÆMEMS switches: • The first ex. of RF MEMS-components (78Æ) • Many Documents

1 INF5490 RF MEMS L7: RF MEMS switches I S2008 Oddvar Søråsen Department of Informatics UoO 2 Today’s lecture • Switches for RF and microwave – Examples – Performance…

INF5490 RF MEMS - Universitetet i oslo · RF MEMS switches • A great need exists for having switches with better performance! – ÆMEMS switches: • The first ex. of RF MEMS-components Documents

1 INF5490 RF MEMS L7: RF MEMS switches, I S2008, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Switches for RF and microwave – Examples – Performance…

INF5490 RF MEMS - uio.no · materiale • (Electrostrictive transdusere – Mekanisk deformasjon ved elektrisk felt • Magnetostrictive transdusere Documents

1 INF5490 RF MEMS F3: Modellering design og analyse V2007 Oddvar Søråsen Institutt for informatikk UiO 2 Dagens forelesning • MEMS - virkemåte – Transdusere – Sensorprinsipper…

INF5490 RF MEMS - Universitetet i oslo · MEMS processes are also developed ... Modify material properties – Remove material – Add new material – Bonding wafers together. 6. Documents

1 INF5490 RF MEMS LN02: MEMS – Fabrication Spring 2010 Oddvar Søråsen Department of Informatics UoO 2 Today’s lecture • Micromachining • Important process steps…

INF5490 RF MEMS - Universitetet i oslo...3 Passive components in RF circuits • ÆMEMS capacitors and inductors – Relevant as replacements for traditional ”off-chip”passive Documents

1 INF5490 RF MEMS L13: RF MEMS capacitors S2008 Oddvar Søråsen Department of Informatics UoO 2 Today’s lecture • Passive components in RF circuits – Capacitors C…

INF5490 RF MEMS - Universitetet i oslo · Mobile access devices • Human interaction • Portable • Mostly wireless • Battery Sensory swarm ... – Overview of literature given Documents

1 INF5490 RF MEMS LN01: Introduction. MEMS in RF Spring 2011, Oddvar Søråsen Department of informatics, UoO 2 Today’s lecture • Background for the course INF54909490…

INF5490 RF MEMS - Forsiden...Dry-etching, contd. • 1. Vapor-phase etching – Use reactive gases (”vapor”) – Both isotropic and anisotropic etching • 2. Plasma-etching – Documents

1 INF5490 RF MEMS L2: MEMS – Fabrication S2008, Oddvar Søråsen Department of Informatics, UiO 2 Today’s lecture • Micromachining • Important process steps – General…

Forsiden - Universitetet i Oslo - INF5490 RF MEMS · Alternative type: reactive sputtering – Nitrogen or oxygen gas is added, reacts! • Direction ”randomness” can be achieved Documents

1 INF5490 RF MEMS LN02: MEMS – Fabrication Spring 2010, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Micromachining • Important process steps…

INF5490 RF MEMS - Universitetet i oslo · Wet-etching • Isotropic = uniform etching in all directions – HF or blends are usual (hydrofluoric acid) – 0.1 – 100 μm/min etch Documents

1 INF5490 RF MEMS LN02: MEMS – Fabrication Spring 2011, Oddvar Søråsen Department of Informatics, UoO 2 Today’s lecture • Micromachining • Important process steps…

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