Slot Valve

SEMICONDUCTORRectangular Gate Valve

Non-Standard

51mm x 420mm

1.0xE-6 Pa ~ 1.2xE5 Pa(abs)

< 1.0xE-10 Pa*㎥/sec

< 1.0xE-10 Pa*㎥/sec

Welded Bellows

Double Acting

OD Ø6

0.5 MPa

N/A

N/A

2,000,000

2,000,000

1,000,000

1,000,000

≤ 120℃

≤ 60℃

Non lubrication

PFPE Grease

AL6061

AL6061

AL6061

STS304

AL6061,STS304

AM350

STS316L

FKM

FKM

Anodizing

Anodizing

Fitting Standard

Gate Size(mm)

Pressure Range

Helium Leak Rate

Feed Through

Pneumatic Actuator Type

Air Connection

Air Pressure

Air Less Lock

Life Cycles

Temperature

Lubrication

Materials

Surface Treatment

Open

Close

Mechanism

Bellows

O-Ring(Seal)

lubrication

Body

Actuator

Vacuum Inside

Mechanism

Valve Body

Gate(Seat)

Bonnet

Shaft(Stem)

Mechanism(Cylinder)

Bellows

Bellows End Piece

Vacuum Seal

Pneumatic Seal

Valve Body

Gate(Seat)

External

Internal