Download - Digital Flow Control System - taiyo-ltd.co.jp Flow Contr… · Digital Flow Control System Digital Flow Control System Product Conﬁguration/Handling Instructions…VM2 Digital Flow

Digital Flow

Control S

ystem

Digital Flow Control System

Product Configuration/Handling Instructions…VM2

Digital Flow Switches…VM12 Digital Flow Sensors…VM20

Digital Flow Meters…VM24

Flow Sensors EFS2…VM32 Flow Switches EFS3…VM36

Leak Detectors……VM28

KO837450

Discontinued

KO837450

線

KO837450

線

Digital FlowControl System


2VM Digital Flow

Control SystemDigital Flow

Control S

ystem3

VM

min

DFM2-1000

Digital Flow Switch

Digital Flow Switch＋Digital Flow MeterCombination for reading flow rate and transmitting interlock signal when flow rate is insufficient

Note) When a Digital Flow Switch is used as a sensor

DFS3－1002DFS3－5002DFS3－1000DFS3－2000DFS3－2500DFS3－1200DFS3－1500DFS3－5000

＋（DFM2－1000）（（

Flow rate level

Type

Detection method

Model

Material of body

Low Medium Large

Plastic bodyMagnetic proximity/

iron proximity

DFS3−1002/5002

Polyacetal (glass-filled)

Plastic body(standard type)

Magnetic proximity/iron proximity

DFS3−1000/5000


Metallic body

DFS3−1200

BC6 (nickel-plated)

Magnetic proximity

Stainless steel body

DFS3−1500

SCS14

Metallic body

DFS3−2000

BC6 (nickel-plated)


DFS3−2500

SCS14

min

DFM2-1000

Digital Flow Sensor＋Digital Flow Meter

DFT－1000 DFM2－1000

Combination only for reading flow rate

●Various vacuum machines, such as vacuum deposition units●Semiconductor manufacturing machines●Spot welding machines (including chip drop detectors)●Laser beam machines●Electronic microscopes●X-ray●Water treatment plants●Atomic power plants●Others

Application Examples

Explanation of Operation

Trimmer

Green

Power supply

NC: Contact B

COMMON

NO: Contact A

Frequency output (＋)

Frequency output (ー)

Red

LED

Trimmer

Green

Power supply

OUT-HIGH

OUT-LOWOUT-COM

Frequency output (＋)

Frequency output (ー)

Red

LED

Regulator Regulator

Peripheral setter

Peripheralcomparator

Delay circuit

Relay output type Open collector output type

The rotor rotates at a speed in proportion to the liquid flow rate. The rotations of the rotor are detected by the sensor on the body side and converted to electric pulse signals. Unlike electromotive sensors using coils, the digital type sensor constantly gives rectangular waves with a uniform crest value irrespective of the rotor speed.The pulse period is compared with the period preset with the trimmer, and, when the period exceeds the setting (the flow late becomes lower than the setting), an alarm is output, and the output lamp (red) lights. To prevent output of unnecessary alarms caused by flow rate ripple and instantaneous interruption, the delay circuit shown in the figure is used to output an alarm only when the period is kept more than the setting for 500 ms.

Peripheral setter

Delay circuit

Peripheralcomparator

Product Confi guration Product Confi guration



4VM Digital Flow


Control S

ystem5

VM

DFS3

Red：＋24 V DC

Black：0 V

Gray：Earth・・・・・Grounding

Brown：Relay b contact

Green：Relay a contact

Yellow：Relay common

Alarm output

Blue：Frequency output (＋)

White：Frequency output (－)

Flow rate signalConnected to Digital Flow Meter DFM2

alarm

freq.

DFS3REG.

F

alarm

freq.

White：100 V AC

Black：100 V AC

Green：Earth・・・・・Grounding

Black：Relay b contact

Green：Relay a contact

Yellow：Relay common

Alarm output

Red：Frequency output (＋)


Red：＋24 V DC

Black：0 V

Gray：Earth・・・・・Grounding

Brown：OUT－HIGH

Green：OUT－LOW

Yellow：OUT－COM

Alarm output

Blue：Frequency output (＋)


DFS3

alarm

freq.

DFS3

REG.

F

alarm

freq.

White：100 V AC

Black：100 V AC

Green：Earth・・・・・Grounding

Black：OUT－HIGH

Green：OUT－LOW

Yellow：OUT－COM

Alarm output

Red：Frequency output (＋)


●Use the flow switch within the specified ambient temperature range keeping the working fluid within the specified temperature range. If it is used at an improper temperature, the rotor magnet may decrease in magnetic force, output switching failure may occur, and the switch life may be reduced.

●Use the flow switch within the specified flow rate range. The flow rate range varies depending on the fluid viscosity and temperature. Therefore, it is recommended to cause an abnormal flow rate on the actual equipment to set the trimmer.●If there are air bubbles in the flow switch or the fluid, the rotor speed will be higher than usual, and the flow rate at which an alarm is output will change. Pipe the flow switch appropriately to keep the inside of the switch filled with water by, for example, raising the piping on the downstream side of the switch.Flush the piping in advance to remove dust and foreign particles from the inside.

●If the working fluid contains rust, metallic particles, dust or other polishing substances, fit a filter on the upstream side of the flow switch. When a magnetic proximity type flow switch is used, iron particles in the fluid will adhere to the rotor magnet, and the switch may malfunction.●Check the supply voltage of the flow switch to be used and the load voltage and current specifications. If the voltage or current is improper, the flow switch may malfunction or be damaged.

●When a plastic body type flow switch is used in a place where the switch may be exposed to heat cycles or heat shock, use piping adapters. When connecting pipes directly on the plastic body, keep the tightening torque in a range from 5 to 10 N･m.

●When wiring the flow switch, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the Digital Flow Switch or load during wiring work.●Check the supply voltage of the Digital Flow Switch to be used and the load voltage and current specifications. If the voltage or current is improper, the Digital Flow Switch may malfunction or be damaged.

●Take care not to apply bending, tensile or torsional load to the cable. Doing so may break the cable.●If the distance of the cable to the destination is long, secure the cable at intervals of 20 cm to prevent looseness of the cable. If the cable is loose, someone may catch his foot on the cable, thereby breaking it.

●When the cable is laid on the ground, it may be stepped on directly or put under equipment and may be broken or short-circuited. Protect it with a metallic conduit or the like.

●Do not bundle the cable together with the high-voltage wires of other electric devices or power source cables. Do not lay the cable close to these wires, cables or power sources. Noises from the high-voltage wires, power sources or power source cables will enter the Digital Flow Switch cable and cause the Digital Flow Switch and load to malfunction. It is recommended to protect the cable with a shield tube or the like.Do not shield the power cable of the 100-VAC type switch together with its signal cable.●The earth wire is designed to protect the Digital Flow Switch from power supply line noise and power supply overvoltage. It is recommended to perform class 3 grounding.

Relay output type●DC

●AC

●AC

Open collector output type●DC

DFS3 Series Digital Flow SwitchesNotes on use Wiring procedures

Notes on wiring




●When wiring the flow switch, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the Digital Flow Switch or load during wiring work.●Connect a load to each output contact. If a power supply is directly connected without a load, the contact may be melted down or burnt out.●Avoid using the switch with the alarm output relay kept outputting for a long time (e.g. to detect abnormal increase in flow rate). If it is used in such a manner, the temperature rise of the output relay coil may accelerate corrosion of the contact. In such a case, it is recommended to select an open collector output type switch.●Use the output contacts within the contact capacity range. If the maximum contact capacity is exceeded during use, nonconformities, such as contact abnormal wear, breaking failure, meltdown and burnout, may be caused.

●When the output contacts are used on a minute current circuit, conducting failure is easily caused due to adsorption of oxides and carbides to the contacts. For a minute current circuit, it is recommended to select an open collector output type switch.

●Never configure a circuit on which overcurrent or contact burnout may occur when the three output contacts, NC, NO and COM, are short-circuited.

●When connecting an induction load, such as a DC relay, using an output contact, take surge absorption measures, such as a diode. When the induction load circuit is opened, back excitation voltage of several hundred to several thousand volts is generated, and electricity is discharged from the contact. Organic substances in the air are decomposed by this discharge, and oxides and carbides are generated on the contact, thereby causing contact failure. In addition, transfer of contact is caused, and the contact may be locked.

●When using a protective element, it is necessary to install the element close to the load or contact. If it is located far from the load or contact, it may not exert a sufficient effect. Install it within 50 cm from the load or contact.

●If the lead wire connecting an output contact and a load is more than 10 m long or a contact is connected to an AC input type PLC (programmable controller) or a capacitive load (capacitor, etc.), rush current is generated when the output is turned on. Provide a protective circuit as shown in the drawing.

As standard for capacitor: 0.5 to 1 (μF) for current of 1 mAAs standard for resistance: 0.5 to 1 (Ω) for contact current of 1 V

Use a diode whose reverse breakdown voltage is higher by 10 times or more than the circuit voltage and whose forward current is higher than the load current.

Select the cut-off voltage, Vc, to meet the following condition. In the case of AC, it is necessary to multiply the voltage by √2.Max. contact voltage＞Vc＞supply voltage×1.5

●If a protective circuit as shown above is not provided, the internal electric circuit of the Digital Flow Switch may be damaged by rush current.

R：rush current limiting resistance

R＝Use as large a resistance as possible within the range allowed by the circuit on the load side.

Note) If the resistance is too large, the load may not operate.Connect the resistance as close to the sensor as possible. (Within 2 m)

L：choke coilL＝equivalent to about 2 mHNote) Connect the

resistance as close to the sensor as possible. (Within 2 m)

●If the Digital Flow Switch is used in an atmosphere with moisture and a load which is apt to generate arcs is connected to the output contact, metallic parts in the output relay may be corroded, thereby causing operation failure. Use the switch at an ambient humidity of 85%RH or less (at an ambient temperature of 20℃).●Do not switch a large load and a minute load with one output relay. Particles scattered from the contact when the large load is switched may adhere to the switching contact of the minute load and affect the contact operation.

●When a semiconductor is driven by an output contact, it may response to bounce or chattering of the contact. In such a case, it is recommended to select an open collector output type switch.

●When the contact A of the output relay is used, the contact is closed while the actual flow rate is less than the set flow rate.●The output relay is driven while the actual flow rate is lower than the set flow rate. Therefore, if power is disconnected for some reason, the output contact is set to the same state as when the actual flow rate is higher than the set flow rate. When designing the system, take this into consideration.

Output contact

NC NOCOM

Load

Output contact

NC NOCOM

Small loadLarge loadInduction load, capacitive load, etc.

Resistive load of several mA or less, etc.

DFS3

DC・AC

DFS3Inductionload

DC

DFS3

DC・AC

DFS3

Within 2 mResistanceR

ACExternal power supply

PLC

COM

DFS3

Within 2 m

L

ACExternal power supply

PLC

COM

DFS3

Within 2 m 10 m or more or capacitive loadResistanceR

Load

AC・DC

DFS3

Within 2 m 10 m or more or capacitive load

LLoad

AC・DC

Relay output typeNotes on use of output relay Notes on contact protection

Inductionload

Inductionload

Handling Instructions Handling Instructions



6VM Digital Flow


Control S

ystem7

VM

●When wiring the flow switch, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the Digital Flow Switch or load during wiring work.●Do not use the Digital Flow Switch out of the working voltage range (max. allowable voltage is 50 V DC). If voltage higher than the working voltage range is applied or AC power is applied to the switch, internal elements may be damaged or burnt out.

Connection with PLC (programmable controller)●When the PLC has a built-in power supply

●When several Digital Flow Switch outputs are connected in parallel to a load (e.g. to input to a PLC on an OR circuit), check for Digital Flow Switch output leakage current.The load may operate due to the leakage current.

　Leakage current per output: ⅠCEO≦0.1 mA （VCEO=80V　Ta＝25℃）

●When several Digital Flow Switch outputs are connected in series to a load (e.g. to input to a PLC on an AND circuit), check for Digital Flow Switch output residual voltage.The load may not operate due to the output residual voltage.

　Output residual voltage per output: VCEO≦0.8 V　　　　　　　　　　　　　　　（ ⅠC=10mA　Ta＝25℃）

The resistance shall be as high as the load resistance, and the capacitor value shall be determined by experiment.

Select a diode whose reverse breakdown voltage is 5 to 10 times higher than the circuit voltage and whose forward current is higher than the circuit current.

Determine the barrister cut-off voltage, Vc, under the following condition:Supply voltage＜Vc＜80 V

●When an induction load, such as a DC relay, is connected, take surge absorption measures, such as a diode. The back excitation voltage generated on the load when the output is turned off may damage the output element of the Digital Flow Switch.

　Note) For details, read carefully the instruction manual for the PLC.

●When the PLC does not have a built-in power supply

　Note) For details, read carefully the instruction manual for the PLC.

●Do not short-circuit the load.Internal elements may be damaged or burnt out.

●Take care not to wire the power supply in reverse polarity.Internal elements may be damaged or burnt out.

●Wire the power supply with a load. If the power supply is directly connected without a load, internal elements may be damaged or burnt out.

Open collector output type

DFS3Load

AC power supply

DFS3

Short-circuiting of load

＋－

DFS3

＋－

Improper polarity

DFS3No load

＋－

Input terminalInternal power supplyDCCOM

PLC

DFS3

Input terminalDC power supply COM

PLC

DFS3

DFS3＋－

DFS3＋－

DFS3＋－

Notes on use of open collector output type switch

Notes on protection of output circuitLoad

Load

Inductionload

Inductionload

Inductionload

●Select a required flow rate range from the flow ranges A and B, and screw the supplied plug into the unnecessary range port.

　Note) DFS3-2000 and 2500 do not have range selectors.

■Fitting the piping adapter set (DF-AP)　Screw the piping adapter completely until the adapter contact surface gets into close contact with the body side face.

　Tightening torque: 15 to 20 N･m　〈DFS3－1000・5000〉

　Notes)・This figure shows how to fit the adapter when the range A is used.The piping adapter can be fitted to A and B.

・Fit the plug in accordance with the plug fitting procedures.

●Before connecting the pipes, flush them. Take care that sealing tape cuttings, dust and rust do not enter the pipes.

Note) When connecting the pipe to the piping adapter, use a sealing tape, and tighten the pipe to a torque of 5 to 10 N･m. (Wrap two layers or less of the sealing tape.)

■Fitting the piping adapter set for low flow rate (DF-FW2)●To pipe a low-flow rate type switch, insert the supplied nozzle on the IN side in the flowing direction of the range A, fit the sealing O-ring, and screw the low-flow piping adapter.

　Tightening torque: 5 to 10 N･m●The piping adapter supplied with the low-flow type switch shall be fitted together with the sealing O-ring on the OUT side in the flowing direction of the range A only when required.

　Tightening torque: 5 to 10 N･m　Note) The adapter with V grooves in the hexagon surfaces is the

low-flow piping adapter. If the low-flow piping adapter and the piping adapter are fitted to wrong positions, the liquid may leak, or the port may be broken. Fit them carefully.

　〈DFS3－1002・5002〉

　Notes)・This figure shows how to fit the adapters for feeding water in the arrow direction.　・Fit the plug in accordance with the plug fitting procedures.

Notes)・If the low-flow nozzle has not been fully inserted, the low-flow piping adapter cannot be screwed in completely. Insert the low-flow nozzle surely.

・Screw the adapter completely until the adapter contact surface gets into close contact with the body side surface.


Note) When piping the low-flow piping adapter and piping adapter, use a sealing tape, and tighten the pipes to a torque of 5 to 10 N･m. (Wrap two layers or less of the sealing tape.)

Example）●When the set flow rate is 1 ℓ/min (steady flow rate is 2 ℓ/min) and the primary pressure is 0.2 MPa, select the range A, and fit the plug to the range B port.

●When the set flow rate is 3 ℓ/min (steady flow rate is 6 ℓ/min) and the primary pressure is 0.1 MPa, select the range B, and fit the plug to the range A port.

Notes）●When fitting the plug to DFS3-1000 or 5000, use the supplied sealing O-ring. The plug is made of plastic. Tighten it to a torque of 3 to 4 N･m.

●When fitting the plug to DFS3-1200 or 1500, use a sealing tape.

Caution: Do not use any plug other than the supplied one.

Range ARange B

Sealing O-ring

Plug

Range ARange BPlugUse sealing tape.

Piping adapter

Plug

Sealing O-ring

Plug

Sealing O-ring

Piping adapter

Range A

Range B

Flowing direction

Low-flow nozzle

Low-flow piping adapter

V groove for discrimination

Piping adapter

Plug

Sealing O-ring

Plug

Sealing O-ring

O-ring for nozzle

DFS3－1000DFS3－5000

DFS3－1200DFS3－1500

Plug fitting procedures

Piping adapter fitting procedures

Tightening Torque Table Unit：N・m

Part to be tightened

Direct piping to plastic body

Fitting of plastic plug

Fitting of piping adapter

Fitting of low-flow piping adapter

Piping to piping adapter

Fitting of plastic body, M5×0.8

Tightening torque range

5 to 103 to 4

5 to 10

1.2 to 1.8

Note 1)

Note 1) For the plastic body type switch, it is recommended to use the piping adapters. (Wrap two layers or less of the sealing tape.)




8VM Digital Flow


Control S

ystem9

VM

The body can be installed in any direction. When installing, observe the following instructions.

①To suspend the Digital Flow Switch with steel piping

Note) If DFS3-100＊ or 500＊ having a plastic body is installed in this manner, the ports may be damaged. It is recommended to fit the piping adapter DF-AP (accessory).

②To screw one side onto steel piping and connect a plastic tube to the other side

Note) If DFS3-100＊ or 500＊ having a plastic body is installed in this manner, the ports may be damaged. It is recommended to fit the piping adapter DF-AP (accessory).

③To secure the body on a plate and connect plastic tubes

Note) Tighten the mounting screws to a torque of 1.2 to 1.8 N･m. (DFS3-100＊/500＊)

●Never remove the cover. (If the cover is removed by the user and the switch is disabled, the repair is not covered by warranty.)●Insert the supplied rotor cap opener into the rotor cap groove, and turn it counterclockwise. Then, the rotor cap, rotor and rotor pin can be easily disassembled.●When reassembling, apply a thin layer of grease to the rotor cap O-ring zone except DFS3-1500 and 2500. Silicone grease or Teflon grease is recommended. When applying grease to DFS3-1500 or 2500, use grease suitable for the fluid used.●If the rotor magnet is covered with iron particles when the switch is disassembled, use a cleaner suitable for the fluid used. If the magnet is left covered with the particles, the sensor may not detect the magnet.

Note) Strap the rotor cap opener near the flow switch so that it can be readily used.

Rotor pin

Rotor

Rotor cap

Rotor cap opener

BodyCover

List of Parts in Contact with LiquidName Rotor cap Rotor Rotor pin

DF－RCP

●

●

●

－

●

－

●

●

DF－RCS

－

－

－

●

－

●

－

－

DF－RP

●

●

●

－

●

－

－

－

DF－RF

－

－

－

●

－

●

－

－

DF－RS

－

－

－

－

－

－

●

●

DF－PS

●

●

●

●

●

●

●

●

Model

DFS3－1000

DFS3－1002

DFS3－1200

DFS3－1500

DFS3－2000

DFS3－2500

DFS3－5000

DFS3－5002

Material Polyethersulfone SUS316 Polyacetal ETFE Polyacetal Aluminaceramic

Body installation procedures Disassembling procedures

For the wiring procedures, see the Handling instructions for the Digital Flow Meters.

●Take care not to apply bending, tensile or torsional load to the cable. Doing so may break the cable.●If the distance of the cable to the destination is long, secure the cable at intervals of 20 cm to prevent looseness of the cable. If the cable is loose, someone may catch his foot on the cable, thereby breaking it.●When the cable is laid on the ground, it may be stepped on directly or put under equipment and may be broken or short-circuited. Protect it with a metallic conduit or the like.●Do not bundle the cable together with the high-voltage wires of other electric devices or power source cables. Do not lay the cable close to these wires, cables or power sources. Noises from the high-voltage wires, power sources or power source cables will enter the Digital Flow Sensor cable and cause the Digital Flow Sensor and load to malfunction. It is recommended to protect the cable with a shield tube or the like.

●Select a required range from the flow ranges A and B, and screw the supplied plug into the unnecessary range port.


Red：＋10.8 to 26.4 V Connect to DC power supply.Black：－0 V

White：Frame GND

Yellow：Sensor output（＋）

Green：Sensor output（－）

）

7ON

1 2

8 9 101112

1 2 3 4 5 61 2 3

Green

Power supply

Yellow Red Black

200 V ACPower supply

Range switching

100 V AC

0.5 to 5ℓ/min, DIP SW1 ON2.5 to 25ℓ/min ,DIP SW1 OFF

Procedures for wiring with Digital Flow Meter

〈Digital Flow Sensor DFT1000〉　　　〈Digital Flow Meter DFM2-1000〉

Connection with PLC (programmable controller)●When the PLC has a built-in power supply

Piping

Plug

Plug

O-ring

Yellow（＋）Input terminal

Input terminal

Internal power supply

Internal power supply

PLC

PLC

COM

COM

30 V DC MAX

30 V DC MAX

Green（－）

Yellow（＋）

Green（－）

＋

＋

－

－

Note) For details, carefully read the instruction manual for the PLC to be used.


Note) For details, carefully read the instruction manual for the PLC to be used.

DFT Series Digital Flow SensorsWiring procedures

Procedures for connecting with a device other than Digital Flow Meters

Piping method

●When wiring the flow sensor, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the Digital Flow Sensor during wiring work.

Notes on wiring

Tightening Torque Table Unit: N･m









5 to 10

3 to 4

5 to 10

1.2 to 1.8

Note 1）


Example）●When the set flow rate is 1 ℓ/min (steady flow rate is 2 ℓ/min) and the primary pressure is 0.2 MPa, select the range A, and fit the plug to the range B port.

Example）●When the set flow rate is 3 ℓ/min (steady flow rate is 6 ℓ/min) and the primary pressure is 0.1 MPa, select the range B, and fit the plug to the range A port.

Notes） When fitting the plug, use the supplied sealing O-ring. The plug is made of plastic. Tighten it to a torque of 3 to 4 N･m.




10VM Digital Flow


Control S

ystem11VM

●Use the flow sensor within the specified ambient temperature range keeping the working fluid within the specified temperature range. If it is used at an improper temperature, the rotor magnet may decrease in magnetic force, and the sensor life may be reduced.

●Use the flow sensor within the working flow rate range.

●If there are air bubbles in the flow sensor or the fluid, the rotor speed will be higher than usual. Pipe the flow sensor appropriately to keep the inside of the sensor filled with water by, for example, raising the piping on the downstream side of the sensor.

●Flush the piping in advance to remove dust and foreign particles from the inside.If the working fluid contains rust, metallic particles, dust or other polishing substances, fit a filter on the upstream side of the flow sensor.Iron particles in the fluid will adhere to the rotor magnet, and the sensor may malfunction.

●When a plastic body type flow switch is used in a place where the switch may be exposed to heat cycles or heat shock, use piping adapters. When connecting pipes directly on the plastic body, keep the tightening torque in a range from 5 to 10 N･m.

Note）１. If the steel pipe is excessively long, a moment is applied to the flow sensor body, and the ports may be damaged. In such a case, it is recommended to fit the piping adapter DF-AP (accessory).

Note）１. If the steel pipe is excessively long, a moment is applied to the flow sensor body, and the ports may be damaged. In such a case, it is recommended to fit the piping adapter DF-AP (accessory).

Note） Tighten the mounting screws to a torque of 1.2 to 1.8 N･m.

①When the flow sensor is suspended with steel pipes

PlatePlate

②To screw one side onto steel piping and connect a plastic tube to the other side

③To secure the body on a plate and connect plastic tubes

１）

２）

●Never remove the cover. (If the cover is removed by the user and the sensor is disabled, the repair is not covered by warranty.)

●Insert the supplied rotor cap opener into the rotor cap groove, and turn it counterclockwise.

Then, the rotor cap, rotor and rotor pin can be easily disassembled.●When reassembling, apply a thin layer of grease to the rotor cap O-ring zone. Silicone grease or Teflon grease is recommended.

Cover

Rotor

Rotor cap

Rotor pin

Installing method

Disassembling procedures

Notes on use

Tightening Torque Table Unit： N・m









5 to 10

3 to 4

5 to 10

1.2 to 1.8

Note 1）


●Before actually using the flow meter, thoroughly read the instruction manual supplied with the product and the instruction manual for the device (DFS3 or DFT) to be used in combination with the flow meter.

●For the procedures for calibrating the meter indication, see the instruction manual supplied with the product.

●Take care not to apply bending, tensile or torsional load to the cable. Doing so may break the cable. For the minimum bending radius, contact the cable manufacturer.

●If the distance of the cable to the destination is long, secure the cable at intervals of 20 cm to prevent looseness of the cable. If the cable is loose, someone may catch his foot on the cable, thereby breaking it.

●When the cable is laid on the floor, it may be stepped on directly or put under equipment and may be broken or short-circuited. Protect it with a metallic conduit or the like.

●Do not bundle the cable together with the high-voltage wires of other electric devices or power source cables. Do not lay the cable close to these wires, cables or power sources. Noises from the high-voltage wires, power sources or power source cables will enter the cable and cause the Digital Flow Meter to indicate incorrect values.

●It is recommended to protect the cable with a shield tube or the like. (Do not shield the power cable for this product together with its signal cable.)

●Use the flow meter in an indoor environment.●Avoid using it in a place where combustible gas is generated, in an atmosphere with organic solvents (methyl alcohol, thinner, benzene, etc.) or chemicals, such as strong alkaline and strong acid substances, or in a place subject to splashes of water or oil, much dust or severe vibration or impact.

●If it is used in an environment where a large amount of static electricity is generated, install the static electricity source as far from the meter body as possible. Failure to do so may cause operation failure.●Use a rigid panel in consideration of the meter body weight and the cable weight.

●To install the meter, use the supplied fitting. Secure the body putting the panel between the body flange and the fitting. (Tighten the fitting screws to a torque of approx. 0.5 N･m.)

●For the external dimensions of the flow meter installed on the panel and the panel cut size, see the “Outline Drawing.”

●Wire the meter correctly in accordance with the <Connection Diagram>.

●To connect the terminals, it is recommended to use crimp-style terminals. Use crimp-style terminals equivalent to those shown below.

●Before wiring, disconnect the power from the equipment. Failure to do so may expose the worker to electric shock. Also, other electric devices or the Digital Flow Meter may be damaged.

7.5 mm or less

7.5 mm or less

For M3.5

Place of installation

Notes on wiring

DFM2 Series Digital Flow Meters


Digital Flow SwitchDFS3　Digital Flow Control System

DFS312VM

Digital Flow SwitchDigital Flow

Control S

ystem　DFS3

DFS3 13VM

SpecificationsFlow rate level

Type

Detection method

Model

Material of body

Working fluid

Port size

Pressure range

Proof test pressure

Ambient temperature

Fluid temperature

Flow rate range

Reading accuracy

Hysteresis

Alarm output response time

Installing direction

Flowing direction

Number of output points

Rated power supply

Low Medium Large

Cable

Plastic body


DFS3−1002/5002


Plastic body (Standard type)


DFS3−1000/5000


Metallic body

DFS3−1200

BC6 (Nickel-plated)

Magnetic proximity


DFS3−1500

SCS14

Metallic body

DFS3−2000

BC6 (Nickel-plated)


DFS3−2500

SCS14

Water

Rc3/8 Rc3/4

0 to 1.0 MPa

1.5 MPa

0 to ＋50℃（No condensing）0 to ＋70℃（No freezing）

0.2 to 2.5ℓ/min

±20％fs

Flow rate range Ａ： 0.5 to 5ℓ/min, Flow rate range Ｂ： 2.5 to 25ℓ/min

±5％fs

12 to 120ℓ/min

5％ or less 7％ or less

Approx. 500 ms

Free

Both directions

1c contact Relay output×1 point or open collector output×2 points (1 point for each of OUT-HIGH and OUT-LOW)

24 V DC or 100 V AC

Notes)●Use the flow switch within the flow rate range.●The values shown in the table apply to cases of measurement of flow rate of tap water (20℃). The flow rate range varies depending on the viscosity of the fluid to be measured.

Electric Specifications (Common)Supply voltage

Allowable voltage range

Power consumption

24 V DC

700 m W or less

VCTF 8-core,

0.3 mm², 1 m

100 V AC

±10％3 VA or less

Power supply: VCTF 3-core, 0.5 mm², 1 mSignal: VCTF 5-core, 0.5 mm², 1 m

Type

Load current

Photocoupler output

50 V DC

4 mA or less (output residual voltage 0.5 V or less)

Rated control capacity(at resistive load)

Max. allowable power (at resistive load)

Max. allowable voltage

Max. applicable current

Min. applicable load

Insulation resistance between contacts

Withstand voltage between contacts

Electrical life

Output Specifications (Relay output)

Contact structure


Load current

Output Specifications (Open collector output)

Type

1c×1(Relay is driven when flow rate becomes lower than setting.)

30 V DC 5A/250 V AC 5A

150 W（DC）/1250 VA（AC）

125 V DC/300 V AC

5 A

5 V DC 10mA

1000 MΩ or more on 500-VDC insulation resistance tester

1000 V AC/for 1 min

100,000 times or more (at rated load, switching frequency of 30 times/min)

Photocoupler×2 (OUT-HIGH/OUT-LOW)OUT-HIGH: On when flow rate is more than settingOUT-LOW: ON when flow rate is less than setting

50 V DC

10 mA (output residual voltage 0.8 V or less)

Frequency output

●In addition to the conventional models, stainless body models for high flow rates are added.●Power relay output models with increased contact capacity and open collector output models are added.●Improved noise resistance

Note) The predictive function used in DFS2 is not provided for this DFS3 Series.

Various models of rotor type Digital Flow Switches are newly launched.


±10％(absolute max. rating 30 V DC)

Model❶

Type❷

Flow rate❸

Supply voltage❹

Output sp

ec❺

Pipin

g adapter❻

Cable

length❼ ❽

Flow r

ate sp

ecified

for

order f

or com

binatio

n

DFS3 － 10 0 －0 24 V DC T A L － 25

Symbol101215202550

Flow rateMediumMediumMediumLargeLargeMedium

Material of bodyPlasticMetal

Stainless steelMetal

Stainless steelPlastic

DetectionMagnetMagnetMagnetMagnetMagnetIron

525120

5 ℓ(0.5 to 5 ℓ)25 ℓ(2.5 to 25 ℓ)120 ℓ(12 to 120 ℓ)

Note) Enter only when placing an order for a combination of flow switch and DFM2.

L1 m (standard)3 m (semi-standard)

APiping adapters unnecessaryWith piping adapters

TRelay outputOpen collector output

2Medium or high flow rateLow flow rate (with low-flow piping adapter)

0

Note)　 low flow rate” can be specified only for the plastic bodies.

Note) Only plastic bodies are provided with piping adapters.

24 V DC100 V AC

2

Configuration Table

● How to order

Model

DFS3−1000

DFS3−5000

DFS3−1002

DFS3−5002

DFS3−1200

DFS3−1500

DFS3−2000

DFS3−2500

Type

Plastic body (medium flow rate)

Plastic body (low flow rate)

Metallic body (medium flow rate)

Stainless steel body (medium flow rate)

Metallic body (high flow rate)

Stainless steel body (high flow rate)

Magnetic proximity type

Iron proximity type







Power supply

100 V AC

◯ ◯ ◯

△ △ △ △

△

△

△

△

△

△

△

△

△

24 V DC

Cable length

1 m 3 m

◯

◯

◯

◯

◯

◯

◯

◯

◯: Standard product　△: Semi-standard product

How to order a combination of flow switch and Digital Flow Meter DFM2

DFM2－1000－ 25

525120

5 ℓ(0.5 to 5 ℓ)25 ℓ(2.5 to 25 ℓ)120 ℓ(12 to 120 ℓ)

Note) Enter only when placing an order for a combination of flow switch and DFM2.

流　　量

SERIAL NO.

ℓ/min

流　　量

SERIAL

NO.

流　　量SERIAL NO.

Calibration nameplate

Accessories（parts for plastic body type DFS3-1000 and 5000）

Semi-standard productThe item enclosed by broken line needs not to be entered, if unnecessary.

●Piping adapter set（For prevention of breakage of ports of DFS3-1000 and 5000）Part number: DF-APContents: Piping adapter (material: copper alloy/C3604B): 2 pcsSealing O-ring (P-10A): 2 pcs

●Low flow piping adapter set（Set for converting medium-flow type DFS3-1000 or 5000 to low-flow type）Part number: DF-FW2Contents: Piping adapter (material: copper alloy): 1 pc

Low flow piping adapter (material: copper alloy/C3504B): 1 pcLow flow nozzle (material: copper alloy/BC6): 1 pcSealing O-ring (P-10A): 2 pcsO-ring for nozzle (1AS-6): 1 pc

Note) For DFS3-1200 and 1500, contact us.


DFS314VM


Control S

ystem　DFS3

DFS3 15VM

0.5 2.5 5 10 12 15 20 250

10

20

30

40

50

60

70

80

90

DFS3－1000, 1200, 1500, 5000（medium flow rate type）

10 20 30 40 50 60 70 80 90 1001101201301400

10

20

30

40

50

60

70

80

90

DFS3－2000, 2500（large flow rate type）

0.2 1.0 2.0 2.50

10

20

30

40

50

60

70

80

90

Trimmer setting scale (%)



Flow rate (ℓ/min) Set flow rate range (specification)0.2 to 2.5 ℓ/min

Flow rate (ℓ/min) Set flow rate range (specification)12 to 120 ℓ/min

DFS3－1002, 5002（low flow rate type）

Range ARange A

Range BRange B

A

Flow setting procedures

■When setting with a flow meter①Reduce the flow rate in the piping to the set flow rate.②Then, turn the flow rate setting trimmer on the front panel of the flow switch with a slotted screwdriver to switch the LED from green to red.■When setting without a flow meterUse the following graphs when determining an approximate flow rate without using a flow meter.Example: To output an alarm using DFS3-1000 when the flow rate is about 10 ℓ/min or less

The intersection of the line of the set flow rate of 10 ℓ/min and the line of flow rate range B is A. Read the percentage specified for the point A, 35%.Set the flow switch trimmer to 35%, and an alarm will be output when the flow rate is approx. 10 ℓ/min or less.

Trimmer Setting Scale-Flow Characteristic Graphs (fluid: tap water at 20℃)

Flow rate (ℓ/min) Set flow rate range (specification)Flow rate range A: 0.5 to 5 ℓ/minFlow rate range B: 2.5 to 25 ℓ/min

0.5 5 15 250

0.1

0.3

Flow rate（ℓ/min）

DFS3－1000・1200・1500・5000（medium flow rate type）

2.5 10 20

0.2

Primary pressure：0.3 MPa

10 40 90 1400

0.1

0.3


DFS3－2000・2500（large flow rate type）

20 70 120

0.2


30 60 11050 80 130100

0.5 2.00

0.05

0.20

Secondary pressure（MPa）




DFS3－1002・5002（low flow rate type）

1.0

0.15


1.5 2.5

0.10

A

Range ARange A

Range BRange B

Flow Rate-Pressure Loss Characteristic Curves (fluid: tap water at 20℃)

The flow rate-pressure loss characteristic curves shown left are used to determine the pressure loss of DFS3 Series Digital Flow Switches.Example : Determine the pressure loss

caused when water is fed at 20 ℓ/min using the flow rate range B of DFS3-1000, 1200, 1500 or 5000.

Answer : The intersection of the line of the flow rate of 20 ℓ/min and the flow curve is A.

Read the value of the secondary pressure at the point A.Where,(Pressure loss)＝(primary pressure)－(secondary pressure)Therefore, ＝0.3 MPa－0.25 MPa ＝0.05 MPaAccordingly, to feed water at a flow rate of 20 ℓ/min, the pressure difference between the upstream and downstream sides of the flow switch is 0.05 MPa.This indicates that the primary pressure (pump discharge pressure) must be 0.05 MPa or more. However, actually, determine the pump discharge pressure based on the pressure loss on the whole piping.Note) The characteristics vary

depending on the viscosity and temperature of the fluid used.

How to read the graph


DFS316VM


Control S

ystem　DFS3

DFS3 17VM

Power cable

Signal cable

19 20

12 13 14 15 16 17 1815 16 17 1812 13 14

Flow rate setting trimmer

2-LED typeIn normal state: GreenIn alarm state: Red ❷ ❸ ❻ ❺ ❹ ❶ ❽ ❾10 ❼11

❷

Power cable

Signal cable

19 20

12 13 14 15 16 17 1812 13 14 15 16 17 18

Flow rate setting trimmer

2-LED typeIn normal state: GreenIn alarm state: Red ❷ ❸ ❻ ❺ ❹ ❶ ❽ ❾10 ❼11 ❷

DFS3－1000・1200・1500・5000

DFS3－2000・2500

DFS3－1500

DFS3－2500

24 V DC 100 V AC

24 V DC 100 V AC

List of Parts in Contact with Liquid

No Name

❶❷❸❹❺❻❼

Body

Rotor cap

Rotor cap gasket

Rotor

Rotor pin

Rotor cap bearing

Rotor bearing

Name

DFS3−1000・5000


ＤＦＳ3−1200

Bronze casting (nickel-plated)

Polyether sulfone

Nitrile rubber

Polyacetal

ＤＦＳ3−1500

Stainless steel：SCS14

Stainless steel：SUS316

ETFE

ETFE

Alumina ceramic

Alumina ceramic

Alumina ceramic

ＤＦＳ3−2000

Bronze casting (nickel-plated)

Polyether sulfone

Nitrile rubber

Polyacetal

ＤＦＳ3−2500

Stainless steel：SCS14

Stainless steel：SUS316

ETFE

ETFE

Weight Table

Model Type

Power supply

Unit： g

24 V DC

Cable, standard（1 m）

DFS3−1000

DFS3−1200

DFS3−1500

DFS3−2000

DFS3−2500

DFS3−5000

DFS3−1002

DFS3−5002






Iron proximity type


Iron proximity type

Approx. 410

Approx. 1100

Approx. 1100

Approx. 1400

Approx. 1300

Approx. 410

Approx. 540

Approx. 540

Cable length（3 m）

Approx. 550

Approx. 1250

Approx. 1250

Approx. 1550

Approx. 1450

Approx. 550

Approx. 700

Approx. 700

100 V AC

Weight to be added when

piping adapters are fittedCable, standard（1 m）

Approx. 500

Approx. 1200

Approx. 1200

Approx. 1500

Approx. 1400

Approx. 500

Approx. 650

Approx. 650

Cable length（3 m）

Approx. 800

Approx. 1500

Approx. 1500

Approx. 1800

Approx. 1700

Approx. 800

Approx. 950

Approx. 950

＋Approx. 120

ー

ー

ー

ー

＋Approx. 120

ー

ー

Parts ListNo Name Material

❽Hall IC (magnetic proximity type)

High-frequency oscillating switch (iron proximity type)

Magnet (magnetic proximity type)

Iron (iron proximity type)

Cover gasket

Cover

Trimmer cap

Trimmer cap gasket

　　　　　－

　　　　　－

　　　　　－

　　　　　－

Nitrile rubber

Cold rolled steel

Synthetic resin

Nitrile rubber

10111213

❾

No Name Material

14151617181920

Trimmer

Screw gasket

Screw

Cable gland

Cabtyre cable

Cable gland

Cabtyre cable

　　　　　－

　　　　　－

　　　　　－

　　　　　－

VCTF 1 m

　　　　　－

VCTF 1 m


Metallic body (medium flow rate)

Stainless steel body (medium flow rate)

Metallic body (high flow rate)

Stainless steel body (high flow rate)





DFS318VM


Control S

ystem　DFS3

DFS3 19VM

Unit: mm Unit: mm

58

25.52

8565

2-M5×0.8 depth 6(Mounting screws)

2-LED type In normal state (green) In alarm state (red)

Flow rate setting trimmer (270°)

φ459

13

12.5

76 2110 25 41 3

6.5

31.5

24.5

Flow rate range A 2－Rc3/8

Flow rate range B 2－Rc3/8

Cable(VCTF 8-core, 0.3 mm², 1 m long)

2-M5×0.8 depth 6(Mounting screws)

6585123

2

9

25.5

58

Piping adapter 2-M5×0.8 depth 6(Mounting screws)

6585123

2

9

25.5

58

Low-flow piping adapterLow-flow nozzlePiping adapter


To feed water in arrow direction

6.5

3.531.5

24.5

22Cable(VCTF 5-core, 0.5 mm², 1 m long)


19R3/8 Rc3/8

HEX24

19R3/8 Rc3/8


HEX24

DFS3－1000・1200・1500・5000－24 V DC＊

Dimensions when piping adapter set (DF-AP) is attachedDFS3－1000・5000－24 V DC＊A＊

Dimensions when low flow piping adapter set (DF-FW2) is attachedDFS3－1002・5002－24 V DC

DFS3－1000・1200・1500・5000－100 V ACDFS3－1500－24 V DC

Low flow piping adapter (accessory)Piping adapter(accessory)

Note) The appearance is different, but the outer dimensions are the same as shown above.


Note) For the low flow type, use the flow rate range A.

67.5

35

8565

2-M6×1 depth 8(Mounting screws)

2-LED typeIn normal state (green)In alarm state (red)

Flow rate setting trimmer (270°)

φ4517

83 216 36 41 3

6.531.5

24.5

2－Rc3/4 Cable(VCTF 8-core, 0.3 mm², 1 m long)

6.5

3.531.5

24.5



22

DFS3－2000・2500－24 V DC＊

DFS3－2500－24 V DC＊ DFS3－2000・2500－100 V AC＊


Digital Flow SensorDFT　Digital Flow Control System

DFT20VM

Digital Flow SensorDigital Flow

Control S

ystem　DFT

DFT 21VM

Specifications

Note) These ranges apply to tap water of 20℃. The working temperature range varies depending on the viscosity and temperature of the fluid used.

Model

Item

Working fluid

Working pressure range

Proof test pressure

Note) Working flow rate range

Reading accuracy

Ambient temperature

Fluid temperature


Flowing direction

Weight

Water

0 to 1.0 MPa

1.5 MPa

Flow rate range A: 0.5 to 5 ℓ/min

Flow rate range B: 2.5 to 25 ℓ/min

±5％FS（0 to ＋70℃）

0 to ＋50℃（No condensing）

0 to ＋70℃（No freezing）

Free

Both directions

Approx. 280 g

DFT−1000

Electrical Specifications

Accessories●Piping adapter set（Prevention of cracking of plastic body ports）Part number: DF-APContents: Piping adapter (material: copper alloy/C3604B): 2 pcsSealing O-ring (P-10A): 2 pcs

Supply voltage

Consumption current

Type

VoltageOutput

Current

Cable

10.8 to 26.4 V DC

15 mA

Photocoupler output

0 V to 30 V

4 mA or less

VCTF 5-core, 0.5 mm², 1 m long

Flow Characteristic Curves (fluid: tap water)

0.3

0.2

0.1

0 0.5 2.5 5 10 15 20 25

Secondary pressure MPa

Flow rate range A

Flow rate range BA

Primary pressure： 0.3 MPa How to read the graphUse the flow characteristic curves to determine the pressure loss of DFT Series Digital Flow Sensors.Example : Determine the pressure loss caused when water

is fed at 20 ℓ/min using the flow rate range B.Answer : The intersection of the line of flow rate of

20 ℓ/min and the flow curve is A. Read the secondary pressure value at the point A.

Where, (pressure loss)＝(primary pressure)－(secondary pressure)Therefore,＝0.3 MPa－0.25 MPa＝0.05 MPaAccordingly, when water is fed at 20 ℓ/min, the pressure difference between the upstream and downstream sides of the flow sensor is 0.05 MPa. This indicates that the primary pressure (pump discharge pressure) must be 0.05 MPa or more. However, actually, determine the pump discharge pressure based on the pressure loss on the whole piping.

Flow rate (ℓ/min)

●When combined with a Digital Flow Meter, the sensor enables to directly read the instantaneous flow rate as a digital value and facilitates measurement from a distance.●The flowing state can be visually checked.●The working flow rate range can be switched to two ranges, 0.5 to 5 ℓ/min and 2.5 to 25 ℓ/min.●The sensors can be disassembled without disconnection of pipes.

Flow sensors for converting instantaneous flow rate of liquid to electric pulse signal

❶❷❸ ❹❺❻❼ ❽ ❾ 10 11

12 13

DFT－1000

NameNo． Material Qty.

Parts List

Drawing of Principle

Rotor pin

Rotor cap gasket

Rotor cap

Body

Rotor

Hall IC

Magnet

Alumina ceramic

Nitrile rubber

Polyether sulfone (bearing: alumina ceramic)

Polyacetal＋glass

Polyacetal (bearing: alumina ceramic)

　　　　　　－

　　　　　　－

1

1

1

1

1

1

3

❶

❷

❸

❹

❺

❻

❼

NameNo． Material Qty.

Cover gasket

Cover

Cable gland

Cable

Screw gasket

Screw

Nitrile rubber

Cold rolled steel

　　　　　　－

　　　　　　－

　　　　　　－

　　　　　　－

1

1

1

1 m

4

4

❽

❾

10

11

12

13

Magnet

＋10.8 to 26.4 V0 V

GND

Output

＋

Rotor

Hall IC

Regulator

Photocoupler

Explanation of OperationThe rotor rotates at a speed in proportion to the liquid flow rate. A permanent magnet is molded in the rotor. The hall IC on the body side detects the magnetism and converts the rotor rotation to an electric pulse signal.Unlike electromotive sensors using coils, the digital type hall IC constantly gives rectangular waves with a uniform crest value irrespective of the rotor speed. This pulse is insulated by the photocoupler and output to the outside.

Digital Flow SensorDFT　Digital Flow Control System

DFT22VM

Unit: mm

225.5

58

65

85

6.524.5

31.5

φ45 913

12.5

3212510

2156

CableVCTF 5-core, 0.5 mm², 1 m long( 　 )

2-M5×0.8 depth 6 (Mounting screws)

Flow rate range A 2ーRC3/8

Flow rate range B 2ーRC3/8

DFT－1000

Note) For the dimensions of the sensor provided with the piping adapters, see the dimensional drawing of DFS3 Series.

0

100

200

0.5 2.5 5 10 20 25 30

Flow rate (ℓ/min)Working flow rate range (specification)Flow rate range A： 0.5 to 5ℓ/minFlow rate range B： 2.5 to 25ℓ/min

Frequency（Hz）

Frequency-Flow Characteristic Graph (fluid: tap water at 20℃)

Flow rate range B

Flow rate range A

Digital Flow MeterDFM2　Digital Flow Control System

DFM224VM

Digital Flow MeterDigital Flow

Control S

ystem　DFM2

DFM2 25VM

Specifications

Note) For the procedures for changing each setting, see the instruction manual supplied with the product.

Model

Item

Display

Display range

Counting method

Decimal pointDisplayed value calibrating method

Displayed flow rate range (ℓ/min)

Setting of auto-zero time

Pulse input (INI)

Set inhibit input (KPT)

Setting memory

Supply voltage

External power supply

Power consumption

Working ambient temperature

Working ambient humidity

Storage ambient temperature

Weight

Accessories

Applicable devices

Red segment LED, 10×5.5 (height×width), mm

0 to 99999, display of up to 5 digits

Period measurement operation method

Display of 0 to 4 digits after decimal point, arbitrarily settable

Scaling change with front panel key

0.2 to 2, 0.5 to 5, 2.5 to 25, 12 to 120

Settable in range from 1 to 9 sec in 1-sec units

Storing method: Storage by nonvolatile element (NV-RAM)

Storage period: Approx. 10 years

100 V/200 V AC, 90 to 120 ％　50/60 Hz

24 V DC±10％　80 mA

Approx. 8.5 AV

－10 to ＋50℃（No freezing）

35 to 85％RH（No condensing）

－25 to ＋85℃（No freezing）

Approx. 450 g (incl. accessories)

Panel mounting bracket/screw

All models of Digital Flow Switches, Digital Flow Sensors

DFM2−1000

●The flow rate can be easily read on the LED display with a character height of 10 mm.●A compact front panel in DIN standard size of 72×72 is used.(The mounting dimensions are the same as those of DFMSeries.)

●The flow rate range can be changed by operating the switch.

The flow meter receives an output pulse from a Digital Flow Switch or a Digital Flow Sensor and digitally displays the instan-taneous flow rate of liquid.

Input resistance : 10 kΩ (pull up to 24 V DC), negative logic operation

Input current : 2 mA or less

Operating voltage : ON voltage＝2 V or less

OFF voltage＝5 V or more

Pulse width : 50 µs or more for H and L

Input resistance : 10 kΩ (pull up to 24 V DC), negative logic operation

Input current : 2 mA or less

Operating voltage : ON voltage＝2 V or less (Settings cannot be changed.)

OFF voltage＝5 V or more (Settings can be changed.)

How to order a set of devices (to be calibrated before shipment)

●100-VAC models can be calibrated.Note) Devices having the same serial numbers are

combined and calibrated.The calibration nameplates are applied to the positions shown right. Combine the devices having the same serial number.

In the following cases, the user must calibrate the set of devices.1.When a fluid other than water is used2.When the measurement range is changed after purchasing3.When only a Digital Flow Meter is purchased

ModelFlow rate range 0.5 to 5 /min

DFM2−1000−5Digital Flow Meters

Digital Flow Switches

Digital Flow Sensors DFT−1000−5

DFS3−1000−24 V DC−5

DFS3−1200−24 V DC−5

DFS3−1500−24 V DC−5

DFS3−5000−24 V DC−5

2.5 to 25 /min

DFM2−1000−25

DFT−1000−25

DFS3−1000−24 V DC−25

DFS3−1200−24 V DC−25

DFS3−1500−24 V DC−25

DFS3−5000−24 VDC−25

12 to 120 /min

DFM2−1000−120

－

DFS3−2000−24 V DC−120DFS3−2500−24 V DC−120

ℓ/min流　　量

SERIAL NO.



●Digital Flow Meter ●Digital Flow Switch●Digital Flow Sensor


Digital Flow MeterDFM2　Digital Flow Control System

DFM226VM

Digital Flow MeterDigital Flow

Control S

ystem　DFM2

DFM2 27VM

Unit: mm

DFM2-1000

SETM

（　/min）

DFM2-1000

（　/min）

1 2 3

7 8 9 10 11 12

4 5 6

ON

1 2

68＋0.7　0

68＋0.7　0

Panel cut sizeWhen the dust cover is opened

When the dust cover is closed

72

72

68

1038.528 111.5

68

105.5Panel thickness: 1 to 5 3Fitting

Fitting screw

Digital Flow Switch (24 V DC)Digital Flow Sensors

Photocoupler Input circuit

Power supply for sensor 24 V DC 80 mA

Arithmetic circuit Digitaldisplay unit

Pre-scaler settingkey switch

Range settingDIP switch

＋24V

10kΩ

100 V AC200 V AC

Inhibition of pre-scaler setting

Outline Circuit Diagram

Dimensional Drawings

■Explanation of operationWhen the output frequency of the Digital Flow Switch or Digital Flow Sensor is input into the DFM2, the frequency is calculated according to the frequency division ratio and the decimal point position set with the pre-scaler setting key switch (on the front panel), and the instantaneous flow rate is displayed on the digital display unit.

7ON

1 2

8 9 101112

1 2 3 4 5 61 2 3

White

Power supply200 V AC

Blue Red Black


Range switching0.5 to 5ℓ/min, DIP SW1 ON2.5 to 25ℓ/min, DIP SW1 OFF12 to 120ℓ/min, DIP SW1 OFF

Red ：＋24 V Connect to DC power supply.Black ：－0 V

White ： Frequency output（－）

Blue ： Frequency output（＋）

Yellow ： Relay common

Yellow Relay commonGray ： Earth………Connection of earth line

Gray Earth………Connection of earth line

Select one of the contacts, and connect the selected contact together with the yellow line to the equipment control panel (alarm).

Green ： Relay a contact

Brown ： Relay b contact

Green Relay a contactBrown Relay b contact

Combination to give interlock signal when flow rate is insufficientDigital Flow Switch＋Digital Flow MeterDFS3－1000・1200・1500・5000・2000・2500－24 V DC＋DFM2－1000

Combination only for reading flow rateDigital Flow Sensor＋Digital Flow MeterDFT－1000＋DFM2－1000

●When the relay contact a is used, the contact is closed while the flow rate is lower than the set flow rate.

●When the relay contact a is used, the contact is closed while the flow rate is lower than the set flow rate.

DFS3－1000・1200・1500・5000・2000・2500－100 V AC＋DFM2－1000

White ：　　100 V AC

Black ：　　


Red ： Frequency output（＋）


Green ： Earth………Connection of earth line

7ON

1 2

8 9

1 2 3 4 5 61 2 3

White



Red


Yellow Relay common

Green Earth………Connection of earth line

Black Relay b contact

White

Red ：＋10.8 to 26.4 V Connect to DC power supply of Digital Flow Meter.Black ：－0 V

White ： Frame GND…Connection of earth line

Yellow ： Sensor output（＋）

Green ： Sensor output（－）

7ON

1 2

8 9

1 2 3 4 5 61 2 3

Green


Yellow Red Black


〈Connection Diagram〉

Select one of the contacts, and connect the selected contact together with the yellow line to the equipment control panel (alarm).

Range switching0.5 to 5ℓ/min, DIP SW1 ON2.5 to 25ℓ/min, DIP SW1 OFF12 to 120ℓ/min, DIP SW1 OFF

Green Relay a contact Select one of the contacts, and connect the selected contact together with the yellow line to the equipment control panel (alarm).

Range switching0.5 to 5ℓ/min, DIP SW1 ON2.5 to 25ℓ/min, DIP SW1 OFF

101112

101112

BlackSelect one of the contacts, and connect the selected contact together with the yellow line to the equipment control panel (alarm).

Green ： Relay a contact

Black ： Relay b contact

Leak DetectorsLD1　Digital Flow Control System

LD128VM

Leak DetectorsDigital Flow

Control S

ystem　LD1

LD1 29VM

Type

Detecting method

Model

Material of body

Working fluid

Port size

Pressure range

Proof test pressure

Ambient temperature

Fluid temperature

Flow rate range

Reading accuracy

Hysteresis



Flowing direction

Number of output points

Rated power supply

Leak detecting current

Weight

Water

Rc3/8 (with piping adapter)

0 to 1.0 MPa

1.5 MPa



2.5 to 25 ℓ/min

±5％fs

5% or less

Approx. 500 ms

Free

Both directions (Upper: primary side Lower: secondary side)

1c contact, relay output×1 point (common to insufficient flow rate and leak)

24 V DC

Leak of approx. 3% or more can be detected by setting the min. leak detection level (at 25 ℓ/min).

Approx. 1300 g


LD1-1000-24 V DC

Iron proximity type

LD1-5000-24 V DC

Notes) ●Use the flow switch within the flow rate range.●The values shown in the table apply to cases of measurement of flow rate of tap water (20℃). The flow rate range varies depending on the viscosity of the fluid to be measured.

Plastic body


Specifications

●Sensing of difference in flow rate between IN and OUT sides.●Leak of approx. 3% can be detected by setting the min. leak detection level (at a flow rate of 25 ℓ/min).●Highly reliable switches resistant to noises from spot welding machines, etc.●The detecting method can be selected from magnetic proximity and iron proximity types depending on the intended use.

Leak detectors evolved from DFS3 Series Digital Flow Switches

Electrical Specifications Output SpecificationsSupply voltage

Allowable voltage range

Power consumption

Cable

24 V DC

±10% (absolute max. rating 30 V DC)

2 W or less

VCTF 8-core, 0.3 mm², 1 m long


Max. applicable current

Min. applicable load

Insulation resistance between contacts

Withstand voltage between contacts

Electrical life

Contact structure1c×1

（common to flow rate and leak, relay is driven when setting is exceeded）

Max. allowable power (at resistive load)

Rated control capacity (at resistive load)

110 V DC/125 V AC

1 A

10 µA 10 mV DC

1000 MΩ or more on 500-VDC insulation resistance tester

750 V AC for 1 min

100,000 times or more (rated load, switching frequency of 20 times/min)

● How to order

●The cable is 1 m long.●The detector will be delivered with the piping adapters connected.

LD1 － 10 00－24 V DC－ RMo

del❶

Type❷

Supply voltage❸

Wirin

g direction❹

Symbol1050

Detection methodMagnetic proximity typeIron proximity type

None：R

Left (standard)Right (semi-standard)

＊Direction as viewed from the front

Type


Load current

Frequency

output

Photocoupler output

50 V DC

4 mA or less (output residual voltage 0.5 V or less)

30 V DC 1 A/125 V AC 0.5 A

30 W（DC）/62.5 VA（AC）

Leak DetectorsLD1　Digital Flow Control System

LD130VM

Leak DetectorsDigital Flow

Control S

ystem　LD1

LD1 31VM

Unit: mm

The flow rate difference between IN and OUT of the cooling unit is monitored through LD1 to detect leak between IN and OUT of LD1. It gives an alarm also when the flow rate is insufficient.

While the flow rate through the upper part of LD1 is used as the master flow rate, the flow rate through the lower part of LD1 is used for regular flow rate monitoring. Accordingly, the flow rate can be monitored irrespective of flow rate drop and piping resistance due to contamination in the cooling unit and piping to be checked for leak. When the inside of the piping is cleaned, the upper part of LD1 can be used as a reserved line.

LD1 monitors the difference between the inlet flow rate and outlet flow rate of a cooling unit and outputs an alarm when a difference between the flow rates is detected. Therefore, it is not affected by flow rate fluctuation on the primary side and is able to stop only the line where leak has occurred. It outputs an alarm also when the primary flow rate is dropped by water pump trouble.

By the conventional method of detecting leak in a cooling unit, the flow switch on a normal line often output an alarm due to flow rate fluctuation on the primary side caused by leak from one point. To avoid this, it was required to reduce the alarm flow rate setting to an excessively lower value.

Explanation of operation and application examples

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURNMIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURNCooling unit

IN

OUT

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURN

IN

OUT

!!Leak alarm!!

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURN

IN

OUT

!!Low rate drop alarm!!

Cooling unit

Cooling unit

Primary

side

Cooling unit

Cooling unit

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURN

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURN

MIN

10

MAX

3040 50 60

70

80

90

20 DFS3

MIN

10

MAX

3040 50 60

70

80

90

20 DFS3

When water is fed to LD1, the rotors rotate in proportion to the flow rate. The rotor speeds are detected by the upper and lower sensors.Theoretically, the rotor speeds detected by the upper and lower sensors are the same. If the speeds differ due to instrumental error, the speeds are corrected by the internal circuit, and the flow rate difference is monitored.

Cooling unit Cooling unit

Cooling unit

Cooling unit

→

Secondary side←

Primary

side→

Secondary side←


Wiring Procedures

143

4-φ765


Piping adapterRc3/8HEX24

Mounting holesMounting pitchRear view

1.2

75

38

67

45φ

9098.8

Surface

54 28.2 8.868 22.5

85

80

34.5

160

（123）Flow alarm setting trimmer

In normal state (green)In alarm state (red)

FLOW ALARM LED

In normal state (green)In alarm state (red)

LEAK ALARM LED

Leak alarm setting trimmer91

Secondary side

Primary side

MIN

10

MAX

FLOW/INDICATOR

FLOW

3040 50 60

70

80

90

20

%

67 8 10

LEAK/INDICATOR

1520305075100

5

LEAK

SUPPLY0

RETURN

LD1Red ：＋24 V DC

Black ： 0 V

Gray ： NC

Brown ： Relay NC contact

Green ： Relay NC contact


blue ： Frequency output（＋）


Alarm output

Flow rate signalConnect to Digital Flow Meter DFM2.

ALARM

FREQ

＊For the handling procedures, see the instruction manual.

Flow Sensor EFS2EFS2　Digital Flow Control System

EFS232VM

Flow Sensor EFS2Digital Flow

Control S

ystem　EFS

2EFS2 33

VM

Unit: mm

Product conforming to RoHS

Main Body Specifications

Magnetic proximity

EFS2−M＊−＊

Iron proximity

EFS2−F＊−＊

Magnetic proximity

EFS2−F＊

Iron proximity

EFS2−F＊

Polyacetal

Water

Rc3/8

0 to 1.0 MPa

1.5 MPa



Output Specifications

Frequency output

Alarm output

Alarm contact

Photocoupler

30 V DC Load current: 4 mA or less

Photocoupler

Max. allowable voltage: 30 V DC

Load current: 10 mA

Adjustable type

Higher than set flow rate: Signal ON

Lower than set flow rate: Signal OFF

EFS2-＊PS (frequency, switch output)

Analog output4 to 20 mA DC

Load impedance　10 Ω to 300 Ω

EFS2-＊A (current output)

Model Number

EFS2 M PS－－

Note) When the current output is selected, a trimmer is not provided.

ＰＳ Frequency, switch output Ａ Current output (DC: 4 to 20 mA)

Ｍ Magnetic proximity type Ｆ Iron proximity type

NoneRLLR

Standard typeLow flow rate type (from right to left)Low flow rate type (from left to right)

Flow rate level

Detection method

Model

Material of body

Working fluid

Port size


Proof test pressure

Ambient temperature

Fluid temperature

Flow rate range

Reading accuracy

Repeatability



Flowing direction

Weight

Electrical SpecificationsCommon electrical specifications

24 V DC ±10％

1.5 W or less

Power supply

Power consumption

Model❶

Detect

ion me

thod❷

Output sp

ec❸

Flow type❹

○Wiring Procedures

○EFS2－＊PS

○EFS2－＊A

Red ： 24 V DC

Black ： 0 V

Green ： Frequency output（＋）


Brown ： Switch（＋）

Yellow ： Switch（－）

freq.

switch

Red ： 24 V DC

Black ： 0 V

Green ： Analog output（＋）

White ： Analog output（－）Output ON resistance10 to ３００ Ω

RL

±5％FS

±2％

700 ms or less

Free

0.5 to 3ℓ/min 2.5 to 25ℓ/min

One direction

Approx. 270 g

Both directions

Approx. 250 g

Low flow rate type Standard type

●Compact type flow sensors●Two detecting methods, magnetic proximity type and iron proximity type, are available.●The sensors can be maintained easily without disconnection of pipes.●They can be installed in any posture. Straight run of pipe is not required.●The skeleton body enhances the visibility of the LED.●Applicable to low flow rates (semi-standard)

Small-size high-performance skeleton body flow sensors


54

321

987

6

82.5（Low flow rate type）

79（Standard type）(19)

55

25.5

φ45

2510.5

Cable0.3 m long

22.5

67

3152

63

12.5

2-M4 depth 5

2－Rc3/8Piping ports

Flow rate adjusting trimmer

Yellow ： Switch（－）Brown ： Switch（＋）White ： Frequency output（－）

Black ：０ＶGreen ： Frequency output（＋）

Red ：２４ＶＤＣ Red ：２４ＶＤＣ

Black ：０Ｖ

Green ： Analog output（＋）

White ： Analog output（－）Output ON resistance１０ to ３００ Ω

CableEFS2－＊PS（frequency, switch output） EFS2－＊A（analog output）

CIC　6-core　0.18 mm2　0.3 m VCTF　4-core　0.3 mm2　0.3 m

48 54.5

5

35

（φ17）

Performance Curves

Relationship between flow rate and frequency Relationship between flow rate and current

Flow rate (ℓ/min)

（standard）（low flow rate）

1501401301201101009080706050403020100

20

15

10

5

0

Frequency （Ｈｚ）

Current (mA)

00

50.5

101.0

151.5

202.0

252.5

303.0

Flow rate (ℓ/min)


00

50.5

101.0

151.5

202.0

252.5

303.0

Magnetic proximityMagnetic proximity（standard）（standard）

Magnetic proximity（standard）Iron proximityIron proximity

（standard）（standard）Iron proximity（standard）

Iron proximityIron proximity（low flow rate）（low flow rate）Iron proximity（low flow rate）

標準標準standardstandardstandard

low flow ratelow flow ratelow flow rate

EFS2－＊PS（frequency, switch output） EFS2－＊A（current output）

Magnetic proximityMagnetic proximity（low flow rate）（low flow rate）Magnetic proximity（low flow rate）

KO837450

Discontinued

KO837450

Discontinued

Flow Sensor EFS2EFS2　Digital Flow Control System

EFS234VM

Flow Sensor EFS2Digital Flow

Control S

ystem　EFS

2EFS2 35

VM

Setting procedures and fluid

Relationship between Trimmer and Flow Rate

Trimmer setting

30

25

20

15

10

5

0

3.0

2.5

2.0

1.5

1.0

0.5

0

Standard

0 1 2 3 4 5 6 7 8 9

Low

Standard

Low

0 0.50

0.05

0.15

0.2

0.25

0.1

1 1.5Flow rate (ℓ/min)

Relationship between flow rate and pressure (low flow rate)Pressure loss (MPa)

2 2.5 3 3.50 5

0

0.01

0.02

0.04

0.05

0.07

0.06

0.08

0.03

10 15Flow rate (ℓ/min)

Relationship between flow rate and pressure loss (standard)Pressure loss (MPa)

20 25

Relationship with Pressure Loss

○Use EFS2 within the set flow rate range. The set flow rate range varies depending on the fluid viscosity and temperature. Therefore, it is recommended to cause an abnormal flow rate on the actual equipment to set the trimmer.

○EFS2 is designed to measure the flow rate of water. If it is used for measurement of another fluid, the accuracy cannot be assured.○Never use it for flammable fluids.○If foreign particles may enter the fluid, install a filter on the primary side. If foreign particles adhere to the rotor of EFS2, correct measurement cannot be made.

○Before feeding a fluid, check the pressure reducing valve and flow rate adjusting valve. If pressure or flow higher than the rated value is applied to EFS2, its body may be damaged.

●When a flow meter is available (or when abnormal change in flow rate can be caused)①Reduce the flow rate in the piping to the set flow rate.②Then turn the flow rate setting trimmer of EFS2 to turn the LED red.

●When a flow meter is not available①Find the set flow rate on the vertical axis in the trimmer setting-flow rate characteristic graph, and find the setting scale value corresponding to the flow rate on the horizontal axis.

②Turn the flow rate setting trimmer on the side surface of EFS2 to set the trimmer to the value found in the graph.Note）①It is necessary to sufficiently predict the flow

rate fluctuation in the normal state to prevent occurrence of unnecessary alarms.

Setting procedures and fluid ＜Flow rate setting procedures＞

Flow rate (ℓ/min)

WARNING

●When wiring the flow sensor, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the flow sensor or load during wiring work.

●Check the supply voltage of the flow sensor to be used and the load voltage and current specifications. If the voltage or current is improper, the flow sensor may malfunction or be damaged.

●Take care not to apply bending, tensile or torsional load to the cable. Doing so may break the cable.●If the distance of the cable to the destination is long, secure the cable at intervals of 20 cm to prevent looseness of the cable. If the cable is loose, someone may catch his foot on the cable, thereby breaking it.●When the cable is laid on the ground, it may be stepped on directly or put under equipment and may be broken or short-circuited. Protect it with a metallic conduit or the like.

●Do not lay the cable close to the high-voltage wires of other electric devices or power sources. Do not bundle the cable together with power source cables. Noises from the high-voltage wires, power sources or power source cables will enter the flow sensor cable and cause the flow sensor and load to malfunction. It is recommended to protect the cable with a shield tube or the like.

●When wiring, check the wire colors. Incorrect wiring results in breakage, fault and malfunction of the flow sensor. Check the wire colors on this instruction manual prior to wiring.

For EFS2-＊PS●When an induction load, such as a DC relay, is connected, take surge absorption measures, such as a diode. The back excitation voltage generated on the load when the output is turned off may damage the output element of the flow sensor.




Wiring

●Never install this sensor in a piping zone which may be used as a scaffold. If excessive load is applied to the sensor, it may be damaged.

●Check that the device operates normally prior to use. After installing, repairing or maintaining it, conduct appropriate function inspection and leak check, and make sure that it has been correctly installed. If the user modifies it or removes the cover, the repair is not covered by warranty.●When installing it, take care not to drop or hit it or apply excessive impact to it. Even if the flow sensor body is not damaged, internal components may be damaged, and the sensor may malfunction.

●Install the flow sensor in a place where it will not be affected by vibration or impact.

Installation

●When piping the flow sensor, observe the tightening torque. If any pipe is tightened to a torque exceeding the specified torque range, the flow sensor may be damaged. If any pipe is tightened to a torque less than the specified torque range, the connected threaded portion may be loosened.

<Tightening torque range: 15 to 20 N･m >●When piping the flow sensor, never put a spanner on the plastic part. Doing so can damage the flow sensor. Put a spanner to the piping adapter (brass part).●Design and pipe the system so that the detecting flow path is kept filled with the liquid, for example, by raising the piping on the downstream side of the flow sensor. Particularly, when the sensor is installed vertically, feed the liquid in the upward direction. If there are air bubbles in the flow sensor or the fluid, the rotor speed will be higher than usual, the flow rate will change, and the output signal will be disturbed.●Before connecting the pipes, flush them. Take care that sealing tape cuttings, dust and rust do not enter the pipes.

●If the pipe size is sharply reduced in the piping zone or there is a throttle, such as a valve, on the primary side, cavitation occurs in the piping, and the flow rate cannot be measured correctly. Therefore, such measures shall be taken on the secondary side of the flow sensor.

●Do not apply thrust load to the piping zone.●Do not remove the piping adapters. If they are removed, they cannot be reused.

Piping

When EFS2-＊PS is used●Before wiring, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the flow sensor or load during wiring work.

●Do not use it out of the working voltage range (max. allowable voltage is 50 V DC). If voltage higher than the working voltage range or AC voltage is applied to the sensor, internal elements may be damaged or burnt out.

●Do not short-circuit the load. Internal elements may be damaged or burnt out.

●Take care not to wire the power supply in reverse polarity. Internal elements may be damaged or burnt out.


Notes on use of open collector output type sensor

Notes on protection of output circuit

ＥＦＳ２Inductionload

＋－

ＥＦＳ２＋－

ＥＦＳ２＋－

ＥＦＳ２Load

AC power supply

ＥＦＳ２


＋－

ＥＦＳ２

＋－

Improper polarity

ＥＦＳ２

No load

＋－

WARNING

WARNING

CAUTION

CAUTION

Inductionload

Inductionload

Load

Load

KO837450

Discontinued

KO837450

Discontinued

Flow SwitchEFS3EFS3　Digital Flow Control System

36VM

Flow Switch EFS3Digital Flow

Control S

ystem　EFS

337VM

Unit: mm

Product conforming to RoHS

LEDGreen

LEDYellow

LEDRed

The lamp lights when the flow rate exceeds

the upper limit setting. At this time, the

upper limit setting contact turns on.

This lamp lights when the flow rate becomes

lower than the lower limit setting. At this

time, the lower limit setting contact turns on.

This lamp is on while the flow rate is higher than

the lower limit setting and lower than the upper

limit setting. At this time, all contacts are off.

Main Body Specifications

Magneticproximity

EFS3－M－＊

Ironproximity

EFS3－F－＊

Magneticproximity

EFS3－M

Ironproximity

EFS3－F

Polyacetal

Water

Rc3/8

0 to 1.0 MPa

1.5 MPa



Output SpecificationsPhotocoupler

30 V DC Load current: 4 mA or less

Photocoupler

Max. allowable voltage: 30 V DC

Load current: 10 mA

How to order

EFS3 M－－

Ｍ Magnetic proximity typeＦ Iron proximity type

NoneRLLR

Standard typeLow flow rate type (from right to left)Low flow rate type (from left to right)

Flow rate level

Detection method

Model

Material of body

Working fluid

Port size


Proof test pressure

Ambient temperature

Fluid temperature

Flow rate range

Reading accuracy

Repeatability



Flowing direction

Weight

Electrical SpecificationsCommon electrical specifications

24 V DC±10％

1 W or less

Power supply

Power consumption

Part Numbers of AccessoriesRotor

DF-RP

DF-RS

Rotor pin

DF-PS

Rotor cap

DF-RCPEFS3-M

EFS3-F

Model❶

Detect

ion me

thod❷

RL

Flow type❸

±5％FS

±2％

500 ms or less

Free

0.5 to 3ℓ/min 2.5 to 25ℓ/min

One direction

Approx. 320 g

Both directions

Approx. 300 g

Low flow rate type Standard type Frequency output

Alarm output

Alarm output

●Conforming to CE marking●Changes in flow rate can be monitored for two points, the lower and upper limits.●The display block consists of a display and LED lamps.●Two detecting methods, magnetic proximity type and iron proximity type, are available.●The switches can be installed in any posture. Straight run of pipe is not required.●Metallic adapters for piping are provided as standard accessories.●Low flow rate type switches are standardized.

Small-size high-performance skeleton body flow switches compactly integrated with digital display function

Dimensional DrawingsCableEFS3－＊

CIC　6-core　0.18 mm2　1 m

Explanation of Operation

67

25.5

5579

25

（86）

5

22.5

φ45

35

48

692-Rc3/8

5582.5（RL: From right to left）

（RL: From right to left）

（LR: From left to right）

●Low flow rate type ●Standard type

82.5（LR: From left to right）

White ：ＣＯＭ（－）Green ： Frequency output（＋）Yellow ：ＯＵＴ－ＬＯＷ（＋）

Black ：０ＶBrown ：ＯＵＴ－ＨＩＧＨ（＋）

Red ：２４ＶＤＣ

OUT

OUT

IN

IN

UP

DOWN

SET

MODE1

MODE2

EFS3

EFS3

FLOW SWITCH

Note) The above drawings show the outline of ESF3-M-RL.In the case of ESF3-M-LR, the fluid flows in the reverse direction, and the dimensions of the adapter protrusions are reversed.

When water is fed to EFS3 Series flow switch, the rotor rotates. The rotor rotation is converted to an electrical signal to measure the flow rate.○Frequency output (See the graph.)　The rotor rotation is converted to an electric pulse signal, and the signal is output.

Input terminalInternal power supplyDC

COM

PLC

EFS3

Input terminalDC power supply COM

PLC

EFS3

Green ： Frequency output（＋）

White ： COM（－）

Yellow ： OUT-LOW（＋）

Brown ： OUT-HIGH（＋）

Black ： 0 Ｖ

Red ： 24 V DC

●Wiring proceduresWhen EFS3-＊ is used●When the PLC has a built-in power supply

Note) For details, read carefully the instruction manual for the PLC.


Note) For details, read carefully the instruction manual for the PLC.

○Connection with PLC (programmable controller)

●When several flow switch outputs are connected in series to a load (e.g. to input to a PLC on an OR circuit), check for flow switch output leakage current. The load may operate due to the leakage current.　Leakage current per output:　ＩCEO≦0.1 mA

（VCEO＝80 V　Ｔa＝25℃）

●When several flow switch outputs are connected in series to a load (e.g. to input to a PLC on an AND circuit), check for flow switch output residual voltage. The load may not operate due to the output residual voltage.　Output residual voltage per output:　VCEO≦0.8 V

（Iｃ＝１０ mA　Ｔa＝25℃）


38VM

Flow Switch EFS3Digital Flow

Control S

ystem　EFS

339VM

Performance Curves

Relationship between flow rate and frequency

Flow rate (ℓ/min)


150

140

130

120

110

100

90

80

70

60

50

40

30

20

10

0

Frequency（Ｈｚ）

00

50.5

101.0

151.5

202.0

252.5

303.0

Magnetic proximityMagnetic proximity（（sstandard）tandard）

Magnetic proximity（standard）

Iron proximityIron proximity（（sstandard）tandard）Iron proximity（standard） Magnetic proximityMagnetic proximity

（low flow rate）（low flow rate）Magnetic proximity（low flow rate）

Iron proximityIron proximity（low flow rate）（low flow rate）Iron proximity（low flow rate）

EFS3－＊PS（Frequency, switch output）

0 0.50

0.05

0.15

0.2

0.25

0.1

1 1.5Flow rate (ℓ/min)

Relationship between flow rate and pressure (low flow rate)Pressure loss (MPa)

2 2.5 3 3.50 5

0

0.01

0.02

0.04

0.05

0.07

0.06

0.08

0.03

10 15Flow rate (ℓ/min)

Relationship between flow rate and pressure loss (standard)Pressure loss (MPa)

20 25

Relationship with Pressure Loss

１．Name

Indicator specifications and setting procedures

UP DOWN SET

MODE1 MODE2

EFS3EFS3 FLOW SWITCH

Mode confirmationlamps

Operation buttons

Standard

Mode 1

Mode 2

Mode 3

Default

15.0

10.0

All LED lamps are on.

Mode

Low flow rateMode

Mode 1

Mode 2

Mode 3

Default

2.0

1.0

All LED lamps are on.

2. Defaults of parameters

Standard type Low flow rate typeMode

Mode 3

Initial mode

Mode 1

Mode 2

Function

Output forced switching

Instantaneous flowrate is displayed.

Alarm setting 1Upper limit

Alarm setting 2Lower limit

Default

ON

15.0 ℓ/min

10.0 ℓ/min

Setting range

─ ─

─

0.2 to 25.0 ℓ/min

0.1 to 24.9 ℓ/min

3. Explanation of parameters

Note 1: The flow rate can be set to up to 25 ℓ. However, use the flow switch at a flow rate of up to 3 ℓ/min.

Mode

Mode 3

Initial mode

Mode 1

Mode 2

Function

Output forced switching

Instantaneous flowrate is displayed.

Alarm setting 1Upper limit

Alarm setting 2Lower limit

0.2 to 3.0 ℓ/minNote 1

0.1 to 2.9 ℓ/minNote 1

Default

ON

2.0 ℓ/min

1.0 ℓ/min

Setting range

─ ─

─

・SET key: Use to select a mode.・MODE confirmation lamp: Indicates the current mode.　　MODE１: Alarm setting 1 (upper limit setting)　　MODE２: Alarm setting 2 (lower limit setting)　　MODE３: Output switching　　　　　　 (All MODE1 and MODE2 confirmation lamps turn on.)UP key: Use to increase the setting.　　　　　　　In MODE3, it turns on the output.DOWN key: Use to decrease the setting.　　　　　　　In MODE3, it turns off the output.

Procedures for changing parameter setting〇Upper limit setting proceduresPress the SET button.The mode will change to the upper limit setting mode. (MODE1 lamp will turn on.)The upper limit setting will appear on the display. (The default is 15.0.)

Every pressing the UP button increments the setting by 0.1.(Pressing the DOWN button decrements the setting by 0.1.)

Keep pressing the UP button, and the setting will continue to increase.(Keep pressing the DOWN button, and the setting will continue to decrease.)To turn on the signal at 17 ℓ, set the value on the display to 17.0.

After setting, press the SET button.Then, the upper limit setting is complete.

〇Forced switching modeForced switching modePress the SET button three times, or press the SET button after the completion of setting of the lower limit, and the mode will change to the forced switching mode. (The MODE1 and MODE2 lamps will turn on.)Just after the mode is changed, the display is in the state shown in ①.Press the SET button, and the mode will return to the instantaneous flow rate display mode.

Flow rate

Alarm setting 1/Overflow（15ℓ/min） Alarm setting 2/Underflow（10ℓ/min）

LED

0 to 9 Switch

OFFＯＮRed

10 to 14 Switch

OFFOFF

Yellow

15 to 25 Switch

ONOFF

Green

〇Example of setting

①When this display is shown, all signals are on.When the DOWN button is pressed in this state, the display will change to “OF.F.”

　＊The overflow setting key cannot be set to a value less than the underflow setting.　＊The underflow setting key cannot be set to a value more than the overflow setting.

②When this display is shown, all signals are off.Press the UP button, and the display will change to “－－.－.”

〇Lower limit setting proceduresPress the SET button twice, or press the SET button after the completion of setting of the upper limit, and the mode will change to the lower limit setting mode. (The MODE2 lamp will turn on.)The lower limit setting will appear on the display. (The default is 12.0.)

Note) If the upper limit has been set to 12 or less, a value smaller than the upper limit by -0.1 will be displayed.)　　Example) When the upper limit setting is 5.0, the lower limit setting is 4.9.Every pressing the UP button increments the setting by 0.1.(Pressing the DOWN button decrements the setting by 0.1.)

Keep pressing the UP button, and the setting will continue to increase.(Keep pressing the DOWN button, and the setting will continue to decrease.)To turn on the signal at 5 ℓ, set the value on the display to 5.0. After setting, press the SET button.Then, the lower limit setting is complete.


40VM

●When wiring the flow switch, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the flow switch or load during wiring work.

●Check the supply voltage of the flow switch to be used and the load voltage and current specifications. If the voltage or current is improper, the flow switch may malfunction or be damaged.

●Take care not to apply bending, tensile or torsional load to the cable. Doing so may break the cable.●If the distance of the cable to the destination is long, secure the cable at intervals of 20 cm to prevent looseness of the cable. If the cable is loose, someone may catch his foot on the cable, thereby breaking it.

●When the cable is laid on the ground, it may be stepped on directly or put under equipment and may be broken or short-circuited. Protect it with a metallic conduit or the like.

●Do not lay the cable close to the high-voltage wires of other electric devices or power sources. Do not bundle the cable together with power source cables. Noises from the high-voltage wires, power sources or power source cables will enter the flow switch cable and cause the flow switch and load to malfunction. It is recommended to protect the cable with a shield tube or the like.

●When wiring, check the wire colors. Incorrect wiring results in breakage, fault and malfunction of the flow switch. Check the wire colors on this instruction manual prior to wiring.

Wiring

Installation

Piping

When EFS3-＊ is used●Before wiring, disconnect the power from the equipment on the electric circuit to be connected. Failure to do so may expose the worker to shock hazard or damage the flow switch or load during wiring work.

Notes on use of open collector output type switch

Notes on protection of output circuit

ＥＦＳ3＋－

ＥＦＳ3＋－

ＥＦＳ3＋－

ＥＦＳ3

ＥＦＳ3＋－

ＥＦＳ3

＋－

ＥＦＳ3＋－

WARNING

WARNING

WARNING

CAUTION

When EFS3-＊ is used●When an induction load, such as a DC relay, is connected, take surge absorption measures, such as a diode. The back excitation voltage generated on the load when the output is turned off may damage the output element of the flow switch.




Inductionload

Inductionload

Inductionload

CAUTION

●Do not use the flow switch out of the working voltage range (max. allowable voltage is 50 V DC). If voltage higher than the working voltage range or AC voltage is applied to the switch, internal elements may be damaged or burnt out.

●Do not short-circuit the load. Internal elements may be damaged or burnt out.

●Take care not to wire the power supply in reverse polarity. Internal elements may be damaged or burnt out.


Load

AC power supply


Improper polarity

No load

Load

Load

●Never install this switch in a piping zone which may be used as a scaffold. If excessive load is applied to the switch, it may be damaged.

●Check that the device operates normally prior to use. After installing, repairing or maintaining it, conduct appropriate function inspection and leak check, and make sure that it has been correctly installed. If the user modifies it or removes the cover, the repair is not covered by warranty.●When installing it, take care not to drop or hit it or apply excessive impact to it. Even if the flow switch body is not damaged, internal components may be damaged, and the switch may malfunction.●Install the flow switch in a place where it will not be affected by vibration or impact.

●When piping the flow switch, observe the tightening torque. If any pipe is tightened to a torque exceeding the specified torque range, the flow switch may be damaged. If any pipe is tightened to a torque less than the specified torque range, the connected threaded portion may be loosened.

<Tightening torque range: 15 to 20 N･m>●When piping the flow switch, never put a spanner on the plastic part. Doing so can damage the flow switch. Put a spanner to the piping adapter (brass part).●Design and pipe the system so that the detecting flow path is kept filled with the liquid, for example, by raising the piping on the downstream side of the flow switch. Particularly, when the switch is installed vertically, feed the liquid in the upward direction. If there are air bubbles in the flow switch or the fluid, the rotor speed will be higher than usual, the flow rate will change, and the output signal will be disturbed.


●If the pipe size is sharply reduced in the piping zone or there is a throttle, such as a valve, on the primary side, cavitation occurs in the piping, and the flow rate cannot be measured correctly. Therefore, such measures shall be taken on the secondary side of the flow switch.

●Do not apply thrust load to the piping zone.●Do not remove the piping adapters. If they are removed, they cannot be reused.