ECE 510 S. Prasad Slide:1Lecture1
Bio-microelectrical mechanical systems (BioMEMS) and
NanobiotechnologyDr. Shalini Prasad
Electrical and Computer Engineering
Biomedical Microdevices and Nanotechnology Laboratory
http://www.ece.pdx.edu/~prasads
ECE 510 S. Prasad Slide:2Lecture1
Fact or Fiction
• Requires advanced knowledge of biology-FALSE
• Cannot perform well in class without pre-requisites in processing-FALSE
• Application oriented and targeted towards current industry applications- TRUE
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Course Outline1. Introduction to Bio-MEMS and Nanobiotechnology
2. Silicon Microfabrication
3. “Soft” Fabrication Techniques
4. Polymer Materials and Microfluidics
5. Sensor Principles
6. Detection and Measurement Methods
7. Drug delivery systems
8. Micro-Total Analysis Systems (µµµµTAS) / Emerging Applications
9. Nanotechnology Applications
Courtesy: S.S. Saliterman
ECE 510 S. Prasad Slide:4Lecture1
Course Outcomes•Ability to analyze and implement microfabrication of silicon, glass and polymer devices•Ability to apply concepts of microfluidics and electrokinetics to micro and nano devices •Ability to develop sensors, actuators and drug delivery systems •Ability to analyze the concepts relating to micro total analysis systems and lab on a chip devices •Ability to implement the concepts of detection and measurement systems. •Ability of integrating nanotechnology with sensing and delivery systems
ECE 510 S. Prasad Slide:5Lecture1
Resources1. Fundamentals of Microfabrication, The science of miniaturization
Marc. J. Madou, CRC Press, 2nd Ed
ISBN: 0-8493-0826-7
2. Bionanotechnology: Lessons from Nature
David. S. Goodsell Wiley-Liss (1st Ed, 2004) ISBN: 047141719X
3. Springer Handbook on Nanotechnology
Bharat Bushan, Springer; 1st Ed 2004 ISBN: 3540012184
4. Nanomedicine Vol 1: Basic Capabilities
Landes Bioscience (1999) ISBN: 15 70596808
5. Silicon VLSI Technology - Fundamentals, Practice and ModelingPlummer, Deal and Griffin( 2000), Prentice Hall, ISBN: 0130850373
6. Microsystem Engineering of Lab-on-a-chip DevicesO. Geschke, H. Klank, and P. Telleman, John Wiley & Sons, 2nd Edition, 2004, ISBN:
3527307338
7. Microsystem Technology in Chemistry and Life SciencesA. Manz, H. Becker, Springer, 1999, ISBN: 3540655557.
Class notes and Handouts
8. Fundamentals of Bio-MEMS and Medical MicrodevicesS.S. Saliterman, Wiley Interscience,2006, ISBN: 081945977-
9. NanobiotechnologyEdited by: C.M. Niemeyer and C.A. Mirkin, Wiley-VCH, ISBN: 3-527-30658-7
Journal Papers:Literature Survey: MEMS/Biotechnology/Nanotechnology Journals
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Contact Information
Instructor: Dr. PrasadOffice: FAB 160-11Office hours: Th and F 1-2 pm Email: [email protected]
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Assessment
• Presentation 40% Selection of a research topic preparation of the research report, and oral presentation 1 and 2
• Mid term 30%
• Final Exam: 30%
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Class Schedule• Week 1 (Apr. 2-8)
– Introduction to BioMEMS and Nanobiotechnology
– Silicon Microfabrication
• Week 2 (Apr. 9-15)
– Silicon Microfabrication
– “Soft” Fabrication Techniques
• Week 3 (Apr. 16-22)
– Polymer materials and Microfluidics
• • Week 4 (Apr. 23-29)
– Polymer Materials and Microfluidics
– Sensor Principles
• • Week 5 (Apr. 30-May 6)
– Midterm
– Pre-presentation
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Class Schedule• Week 6 (May 8-14)
– Sensor Principles
– Detection and Measurement Methods
• Week 7 (May 15-21)
– Drug delivery systems
– Micro-Total Analysis Systems (µTAS)
• Week 8 (May 22-28)
– Emerging Applications
– Nanotechnology Applications
• Week 9 (May 29-June 4)
– Based on academic calendar May 28th –University closed
– Review
• Week 10 (Jun. 5-11)
– Final presentations
– Final Exam
ECE 510 S. Prasad Slide:10Lecture1
Research Topic
• Choose one from 4 listed
• Email by Wednesday
• Topic-Broad
• Identify one specific application
• Identify current state of the technology
• Identify the problems
• Propose a possible solution for the application
ECE 510 S. Prasad Slide:11Lecture1
Research Topic- Example
• MEMS based devices
– MEMS Actuator
– Comb actuator
– Control flow in systems
– Different types of control
– Electrostatic control
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Presentations• Two-One 10 minute and another 20 minute
• Short- Back ground summary for identification of applications
• Long-Comprehensive
• Research Report- Based on Journal of Biosensors and Bioelectronics , look at URL for sample. Report max length: 1500words
• There needs to be a solution proposed
• Plagiarism will automatically result in a F for the report
• Look at PSU policy on plagiarism
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Exam Policy
• No make up exam will be administered
• In case of an emergency you will have to
provide documented proof for a re-exam
• Exam is closed book
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“Micro” Realm
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“Nano” Realm
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Moore’s Law“The number of components (e.g., transistors) on a chip roughly doubles every 18 months”.
Figure reproduced from Moore's 1965 Electronics Magazine article, shows his findings. This trend suggested that processing power would rise exponentially and at a fast rate, leading to a computing revolution.
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From IC’s to MEMS and NEMS
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•Electronics are fabricated using integrated circuit (IC) process sequences
•The micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.
•MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip.
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Definition of MEMS
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MEMS Market
Total MEMS Revenue 2001-2006:
source: In-Stat/MDR
MEMS market: The MEMS market is expanding quickly, and expected to triple within 4 years. When much of the MEMS market so far has come from the automotive industry, experts see the share of Bio-MEMS as emerging market with a market share currently around 16%
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What are Bio-MEMS?
• BioMEMS-or biomedical microelectromechanical systems, has emerged as a subset of MEMS devices
• From the engineering perspective, micro- (and even nano-) technology is rapidly becoming the engineering of the future.
• From the application perspective BioMEMSdevices span a wide range of important questions in environment, healthcare and defense
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Fabrication
• Traditional MEMS based fabrication techniques incorporated with micro-fluidic physics, surface science of silicon, glass polymer and ceramics
• Surface modification for biocompatibility
• “top down” vs “bottom-up”
• Packaging constraints
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Structure
• Bio/Nano Devices have at least one dimension
in the nm to micron scale
• In-vitro systems vs In-vivo systems
• “Smart systems” or “ Lab-on-a-chip” systems
• Open ended –sensors and actuators, closed
loop systems-autoregulation
• Miniaturization-lower manufacturing costs,
reproducibility, small sample size, high
throughput , precise control and reagent use
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BioMEMS- Processes and
Applications
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Silicon Microfabrication
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Silicon Wafer Microfabrication
Courtesy: Saliterman, BioMEMS and Medical Micro devices Spie publications
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“Soft” Micro fabrication Methods
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Microarray Chip Fabrication
Courtesy: Affeymetrix
ECE 510 S. Prasad Slide:32Lecture1
Microfluidics and Transport
Processes
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Micro fluidic Devices
Courtesy: Micronit
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Transport Processes
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Micro needles and Micro pipettes
Courtesy: Micronit
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Electrokinetics
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Sensors
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Specialized Sensors
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Micro Total Analysis Systems (µTAS) and Lab-on-a-chip Devices (LOC)
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Detection Schemes
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Measurement Systems
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Use of Nanotechnology
• Nanomaterial: Improved surface area to volume
• Control over electrical, physical, mechanical and chemical properties
• Integration o f top down to bottom up fabrication
• Extremely controlled systems on a chip
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Future Technologies
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Environmental Applications
•Commercial prototypes for novel ultra-
sensitive and reliable biosensors for the
detection and monitoring of phosphate and
nitrate in water and sediment samples, as
well as sulfite in wine, beverage and food
samples.
•Develop a simple stick-type probe (similar
to a pH electrode), which can readily be used
in-field, in the laboratory, and also in industry.
Water Monitoring
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Healthcare Applications
GeneChip®
Courtesy: Affymetrix
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DNA Probe Array
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Drug delivery Systems
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Drug Delivery Chip
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Tissue Engineering
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Minimally Invasive Techniques
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Military Applications
• Biosensors are being pursued by the military as field-portable, real-time instruments to detect and identify pathogenic microorganisms from complex food materials
• A number of detection technologies are being investigated and validated with food matrices to includeelectrochemiluminescence, electrochemical, fluorescence, and chemiluminescence based systems.
Food Monitoring
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Military Applications
• It operates on the technology of ion mobility spectrometers, photo ionization detectors, semiconductor gas sensors and electrochemical cells
•The AIRSENSE Gas-Detector-Array GDA2 is a battery-operated, hand-held measuring instrument designed for the detection and identification within seconds of hazardous agents such as Toxic Industrial Compounds (TICs) and Chemical Warfare Agents (CWAs).
Air Monitoring
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Biocompatibility and ISO 10993
Biological Evaluations
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