Weir PSFM Zspin side analysis II Dataset:Integrated_FEM_V_S4_Modified.csv Features:Focus Dose Matrix...
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Transcript of Weir PSFM Zspin side analysis II Dataset:Integrated_FEM_V_S4_Modified.csv Features:Focus Dose Matrix...
Weir PSFMWeir PSFMWeir PSFMWeir PSFM
Zspin side analysis II
Dataset: Integrated_FEM_V_S4_Modified.csv
Features: Focus Dose Matrix
TEA Systems Corp.65 Schlossburg St.Alburtis, PA 18011
610 682 [email protected]
www.TEAsystems.com
March 29, 2005
March 2005 Weir PSFM/ Zspin Page -2-TEA Systems Corp. Confidential
Zspin, site in field center
• X & Y Calibration
MeanXoffset 0.0706Yoffset -0.0720Xslope 0.4331Yslope -0.4232X_2_order 0.0184Y_2_order -0.0317X_3_order 0.0001Y_3_order -0.0002Xoffset_sigma 0.0014Yoffset_sigma 0.0013Xslope_sigma 0.0129Yslope_sigma 0.0113X_2_OrderSigma 0.0209Y_2_OrderSigma 0.0183X_3_OrderSigma 0.0799Y_3_OrderSigma 0.0699Xfocus -0.1634Yfocus -0.1712XFsigma 0.0013YFsigma 0.0009
March 2005 Weir PSFM/ Zspin Page -3-TEA Systems Corp. Confidential
Upper left corner
• Y slope is a lot noisier. Could be mask or Archer
MeanXoffset 0.0316Yoffset -0.0400Xslope 0.4808Yslope -0.4700X_2_order -0.0290Y_2_order 0.0387X_3_order -0.0002Y_3_order 0.0000Xoffset_sigma 0.0016Yoffset_sigma 0.0022Xslope_sigma 0.0143Yslope_sigma 0.0196X_2_OrderSigma 0.0233Y_2_OrderSigma 0.0319X_3_OrderSigma 0.0889Y_3_OrderSigma 0.1218Xfocus -0.0657Yfocus -0.0845XFsigma 0.0015YFsigma 0.0022
March 2005 Weir PSFM/ Zspin Page -4-TEA Systems Corp. Confidential
Offset/ full field (mean offset)
March 2005 Weir PSFM/ Zspin Page -5-TEA Systems Corp. Confidential
Offset response
Xreg
=
mean Yreg
+
March 2005 Weir PSFM/ Zspin Page -6-TEA Systems Corp. Confidential
Higher-Order Response
• Variation from Mean response
• Chart (above) shows variation in slope as a function of it’s height on field. More slope variation in top row
TEA Systems Corp. Confidential
ZSPIN Principle: Illustration of systematic errors due to patterning
1st Exposure: reference pattern 2nd Exposure: focus sensitive pattern with pinhole offset
Resulting behavior through focus:
- +0
+-
offset
focus
Black: Individual calibration curve with pinhole alignedBlue and Red: Individual calibration curve with pinhole misalignmentDashed Green: Calibration after combining both calibration curves for any case of misalignment
March 2005 Weir PSFM/ Zspin Page -8-TEA Systems Corp. Confidential
Calibration (assume it’s the Xleft & Xright data)
+-
offset
focus
=Xreg-average
=(Xleft – Xright)/2
ONLY <> if there is a mask-hole mialignment
Simply subtracting is more sensitive to the metrology errors.
Better to add in both curves, negate the values of the 2nd reading and then fit the
curve to the result.Wafer Test Diex Diey X_reg Y_reg Zmean
13.0000 1.0000 1.0000 2.0000 0.2714 -0.2625 0.004513.0000 1.0000 1.0000 2.0000 0.2603 -0.2791 0.132313.0000 2.0000 1.0000 2.0000 0.2960 -0.2717 0.012113.0000 2.0000 1.0000 2.0000 0.2620 -0.2780 0.1409
March 2005 Weir PSFM/ Zspin Page -9-TEA Systems Corp. Confidential
Plotting “all” points
• Best response analysis is to include all points• They’ll be calibrated out anyway
Splitting from:• Local aberration of lens or• Metrology tool (Y-axis noise)• Mask-tool stripe error
“flat” response from:• Local aberration of lens or• Exposure-tool focus stepping error
March 2005 Weir PSFM/ Zspin Page -10-TEA Systems Corp. Confidential
Calibration Summary• Calibration stability
• Focus estimation, one sigma, is only (1.8, 1.3) uncertainty!
[Dose, NA, PCinner, PCouter]:15.0000 0.6000 0.0000 0.3000
Mean Maximum Minimum Range StdErr CountXoffset 0.0510 0.0872 0.0104 0.0768 0.0190 56.0000Yoffset -0.0510 -0.0160 -0.0857 0.0697 0.0186 56.0000Xslope 0.4275 0.4808 0.3960 0.0849 0.0198 56.0000Yslope -0.4167 -0.3815 -0.4700 0.0886 0.0201 56.0000X_2_order 0.0038 0.0511 -0.0407 0.0919 0.0227 56.0000Y_2_order -0.0094 0.0387 -0.0607 0.0994 0.0240 56.0000X_3_order 0.0005 0.0538 -0.0310 0.0849 0.0198 56.0000Y_3_order 0.0003 0.0355 -0.0530 0.0886 0.0201 56.0000Xoffset_sigma 0.0019 0.0032 0.0012 0.0020 0.0004 56.0000Yoffset_sigma 0.0015 0.0022 0.0010 0.0012 0.0003 56.0000Xslope_sigma 0.0173 0.0289 0.0109 0.0180 0.0034 56.0000Yslope_sigma 0.0132 0.0196 0.0088 0.0108 0.0024 56.0000X_2_OrderSigma 0.0281 0.0469 0.0176 0.0292 0.0055 56.0000Y_2_OrderSigma 0.0215 0.0319 0.0143 0.0175 0.0039 56.0000X_3_OrderSigma 0.1075 0.1791 0.0674 0.1117 0.0210 56.0000Y_3_OrderSigma 0.0821 0.1218 0.0548 0.0670 0.0149 56.0000Xfocus -0.1191 -0.0219 -0.2068 0.1848 0.0444 56.0000Yfocus -0.1221 -0.0353 -0.2052 0.1699 0.0438 56.0000XFsigma 0.0018 0.0032 0.0002 0.0030 0.0006 56.0000YFsigma 0.0013 0.0024 -0.0003 0.0027 0.0006 56.0000
Focus & Uncertainty
March 2005 Weir PSFM/ Zspin Page -11-TEA Systems Corp. Confidential
Calibration Residuals
March 2005 Weir PSFM/ Zspin Page -12-TEA Systems Corp. Confidential
X & Y Focus responseX slit Y-Scan
March 2005 Weir PSFM/ Zspin Page -13-TEA Systems Corp. Confidential
Mean Focus response