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Background Statement for SEMI Draft Document 4683JLine Item Revision to SEMI S2-0715, ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT Delayed Revisions related to Chemical Exposure

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background StatementThis task force was chartered to clarify and review industrial hygiene criteria in § 23.5. This line item is to add explanatory materials for valid air sampling and measurement methods and accredited laboratories.

Please forward a courtesy copy of any comments or negatives against the ballot with your contact information to John Visty at [email protected]. As this is a technical ballot, all votes of reject must be accompanied by specific supporting rationale (called negatives) and sent to SEMI staff or the vote will be considered an abstention vote.

Review and Adjudication InformationTask Force Review Committee Adjudication

Group: S2 Chemical Exposure TF EHS NA TC ChapterDate: Tuesday, November 8, 2016 (tentative) Thursday, November 10, 2016Time & Timezone: 1:00 PM to 2:30 PM (tentative)

US Pacific Time9:00 AM to 6:00 PMUS Pacific Time

Location: SEMI Headquarters3081 Zanker Road

SEMI Headquarters3081 Zanker Road

City, State/Country: San Jose, CA, USA San Jose, CA, USALeader(s): John Visty (Salus) Chris Evanston (Salus)

Sean Larsen (Lam Research)Bert Planting (ASML)

Standards Staff: Kevin Nguyen (SEMI NA)408.943.7997 | [email protected]

Kevin Nguyen (SEMI NA)408.943.7997 | [email protected]

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

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mailto:[email protected]



Safety Checklist for SEMI Draft Document #4683JLine Item Revision to SEMI S2-0715, ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENTDeveloping/Revising BodyName/Type: S2 Chemical Exposure Task ForceTechnical Committee: Environmental, Health and SafetyRegion: North America

LeadershipPosition Last First AffiliationLeader Visty John Salus Engineering InternationalTechnical Editor Larsen Sean Lam Research* Only necessary if different from leaders

Documents, Conflicts, and ConsiderationSafety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee# and Title Manner of ConsiderationSEMI S6-0707 – EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

Align criteria and terminology

Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline# and Title Inconsistency with This Safety Guideline2014 ACGIH TLVs® and BEIs® – Based on the Documentation of the Threshold Limit Values for Chemical Substances and Physical Agents & Biological Exposure Indices The exposure limits in this Safety Guideline

(both as published and as proposed) are more stringent than the limits published in the referenced documents.

OSHA 29CFR 1910.1000 – Toxic and Hazardous Substances, Air ContaminantsThe MAK-Collection for Occupational Health and Safety: Part I: MAK Value Documentations, Volume 25

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical# and Title Nature of Conflict with This Safety GuidelineNONE

Participants and ContributorsLast First AffiliationBarsky Joe TUV Rheinland/????Belk Bill DECONBreder Paul ESTEC SolutionsBrody Steve Product EHS ConsultingClaes Brian Lam ResearchCrane Lauren KLA-TencorCrockett Alan KLA-TencorDeFrain Steve ESTECDerbyshire Pauline TUV SudErgete Nigusu Estec SolutionsFessler Mark TELFrankfurth Mark Cymer/ASMLGalatis Ermias TELGiles Andy Estec Solutions

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Last First AffiliationGreenberg Cliff Nikon PrecisionHamilton Jeff Tokyo ElectronHayford James AMATHobbs Duncan SeagateHolbrook Glenn TUV SUDHughes Stanley Lam ResearchImamiya Ryosuke Dainippon ScreenIshikawa Shigehisa TUV SUD JapanJumper Steve Applied MaterialsKarl Ed Applied MaterialsKlug Wolfgang TUV Rheinland GermanyKryska Paul Lam ResearchLebouitz Kyle SPTSMashiro Supika Tokyo ElectronMaxwell Robert KLA-TencorMills Ken ESTECNambu Mitsuju Tokyo ElectronNarayanan Hari Shankar SeagateNishiguchi Naokatsu Dainippon ScreenNogawa Kaoru Safe TechnoPlanting Bert ASMLPochon Stephan TUV RheinlandRenard Patrick GTATRieger Michael Antea GroupRoberge Steve AxcelisSinor Russel IBMSklar Eric TUV RheinlandSleiman Samir Brooks AutomationTimlin Ernest Global FoundriesYakimow Byron Cymer/ASML

The content requirements of this checklist are documented in Section 15.2 of the Regulations Governing SEMI Standards Committees.

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DRAFTDocument Number: 4683J

Date: 7/29/2016

SEMI Draft Document 4683JLine Item Revision to SEMI S2-0715, ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

Line Item 1: Delayed Revisions Related to Chemical Exposure Criteria

DELAYED REVISIONS X (Effective July 2018)CHEMICAL EXPOSURE CRITERIANOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the global Environmental Health & Safety Technical Committee, but is not immediately effective. The provisions of this material are not an authoritative part of the Document until their effective date. The main body of SEMI S2-0715 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date, providing they do not conflict with portions of the authoritative version other than those that are to be revised or replaced as part of the deferred revision, and are labeled accordingly.

NOTICE: Unless otherwise noted, material to be added is underlined, and all material to be deleted is struck through.

DX-1 Revision to § 5 (Terminology) (OPTIONAL Before Effective Date)DX-1.1 Add the following to ¶ 5.1 (Abbreviations and Acronyms) as shown

5.1.X IOHA — International Occupational Hygiene Association

5.1 X LFL – Lower Flammability Limit

5.1.X NIOSH — National Institute of Occupational Safety and Health – part of United States Centers for Disease Control and Prevention

5.1.X OSHA — Occupational Safety and Health Administration –an agency of United States Department of Labor

5.1.X SOC — substance of concern

DX-1.2 Add the following to ¶ 5.2 (Definitions) as shown

5.2.x validated method — as applied for the purposes of industrial hygiene chemical exposure testing, is a reviewed documented protocol for the collection and analysis of a sample (e.g., NIOSH sampling method 1300). A validated method includes instructions on collection (media, efficiency, volume, flow rate, etc.), sample handling, analytical method, lower sensitivity and method error statistics. Validated methods are published by agencies or industrial hygiene organizations such as NIOSH, OSHA, IOHA or ACGIH.

DX-1.3 Modify 5.2.45 as shown below

5.2.45 lower explosiveflammable limit (LFL) — the minimum concentration of a flammable substance in air through which a flame will propagate. the minimum concentration of vapor in air at which propagation of flame will occur in the presence of an ignition source. Synonyms: lower explosive limit (LEL), lower flammability limit (LFL).

DX-2 Revision to § 23 (Chemicals) (OPTIONAL Before Effective Date)DX-2.1 Modify ¶ 23.5 as shown below.

23.5 During equipment development, the supplier should conduct an assessment that documents conformance to the following airborne chemical control criteria. All measurements should be taken made using recognized methods a method in accordance with § 23.5.1 with documented sensitivities and accuracy. The sample location(s) and conditions should be representative of the reasonably foreseeable, worst-case, personnel breathing zone. A report documenting the survey methods, equipment operating parameters, instrumentation used, method detection limits,

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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calibration data, results, why each industrial hygiene laboratory selected was appropriate and discussion should be availableprovided as part of the S2 report.

DX-2.2 Add paragraphs below between ¶¶ 23.5 and 23.5.1.

23.5.1 Air Sampling Method Selection

23.5.1.1 When available for the substance of concern (SOC) (also known as “analyte”) and concentration being evaluated, one of the following methods should be used: A sample collected by a time-integrated sampling means (e.g., diaphragm pump with a calibrated flowrate or

passive monitor) collected and analyzed per a validated method. Direct reading instrumentation (real-time) as used per the manufacturer’s specification and guidance. Collection of an SOC (analyte) in a sample bag (e.g. Tedlar® air sample bag) or a calibrated (i.e., known sample

collection rate) vacuum canister accepted by an industrial hygiene laboratory for analysis using a validated method.

NOTE xxx: The validated method in 1 st bullet might contain pump calibration information.

NOTE xxx: Manufacturer’s specification and guidance in 2 nd bullet usually include information on calibration, measurement techniques, interferences and analysis limitations.

NOTE xxx: SOCs collected in a vacuum canister or sample bag (3 rd bullet) must be stable (e.g., compatible with container, does not breakdown chemically) in order to be able to forward to an industrial hygiene laboratory without impact to the sample. Contact the industrial hygiene laboratory to determine if the SOC is sufficiently stable.

23.5.1.2 A surrogate material may be used if the SOC has hazardous properties or inadequate detection methods which make the SOC unsuitable for conducting testing in a safe or efficient manner. Use of a surrogate should be conducted in accordance with SEMI S6. If a surrogate is used then the result of the air sample testing should be compared to the SOC OEL / LFL (not the identified surrogate OEL / LFL). An explanation of why the surrogate is used and is still representative of the SOC should be included as part of the S2 report including consideration of the following: Whether the material has an equal or greater vapor pressure or evaporation rate under stated process conditions

for the SOC (e.g., temperature, pressure, relative humidity, air-flow, etc.); Whether air sampling test conditions (as applicable for material properties and use application) are representative

compared to the target SOC. The characteristics of the selected surrogate chemistry may result in a more conservative test or conditions compared to the target SOC.

Whether the sampling method lower detection limit for the surrogate ensures the ability to compare to the SOC OEL.

23.5.1.3[23.5.1.2] If no method is known that meets the criteria for testing in ¶ 23.5.1.1 or ¶ 23.5.1.2, then select an available method with consideration of factors such as the lower detection limit accuracy and cross-sensitivity. An explanation of why the method was selected should be included as part of the S2 report. This clause applies to the ability to measure adequate lower detection levels in order to determine conformance against the criteria detailed in ¶¶ 23.5.3 through 23.5.6 (for example, 1% and 25% of the OEL).23.5.1.4[23.5.1.3] Samples should be analyzed by an industrial hygiene laboratory as required.

DX-2.3 Renumber and modify ¶¶ 23.5.1 through 23.5.4 as shown below. [In compliance with the SEMI Standards Procedure Manual, ¶ 3.4.2.4]

23.5.3 23.5.1 There should be no cChemical emissions to the workplace environment during normal equipment operation should be at the lowest practical level. Conformance to this section can be shown by demonstrating ambient SOC air concentrations to be less than 1% of the applicable Occupational Exposure Limit(s) (OEL(s)) during normal equipment operation. in the worst-case breathing zone. Where a recognized method does not provide sufficient sensitivity to measure 1% OEL, then the lower detection limit of the method may be used to satisfy this criterion. Measurement locations should be representative of the foreseeable worst-case exposure in personnel breathing zones.


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EXCEPTION: Sampling during normal operations for closed process equipment (see SEMI S6 for the definition of closed process equipment), is not required.

NOTE XX: Selection of the lowest applicable OEL based on the target SOC(s) and exposure duration, published by a professional or governmental agency and with consideration of the appropriate OEL category [e.g., time-weighted average (TWA), ceiling (C) and short-term exposure limits (STELs)] is the recommended approach in order to cover all installations and end-user locations. An alternate strategy to selecting the lowest applicable OEL is to select the applicable OEL that relates only to the regions or countries in which the equipment will be used. Two online resources that can help initially identify OELs around the world are:

OSHA annotated Permissible Exposure Limits (PEL) Tables (includes the ACGIH Threshold Limit Values - TLVs) which can be found at https://www.osha.gov/dsg/annotated-pels/ .

GESTIS International Limit Values database which can be found at http://limitvalue.ifa.dguv.de/Webform_gw2.aspx

23.5.4 23.5.2 Chemical emissions during maintenance activities should be minimized at the lowest practical level. Conformance to this section can be shown by demonstrating ambient SOC air concentrations to be less than 25% of the applicable OEL(s), in the anticipated worst-case personnel breathing zone, during maintenance activities. Measurement locations should be representative of the foreseeable worst-case exposure in personnel breathing zones.

23.5.5 23.5.3 Chemical emissions during equipment failures should be minimized at the lowest practical level. Conformance to this section can be shown by demonstrating ambient SOC air concentrations to be less than 25% of the applicable OEL(s), in the anticipated worst-case personnel breathing zone, during a realistic worst-case system failure. Measurement locations should be representative of the foreseeable worst-case exposure in personnel breathing zones .

NOTE 149: The use of direct reading instrumentation under simulated operating, maintenance, or failure conditions is the preferred measurement method. Where used, it is recommended that the sample location(s) be representative of the worst-case, realistic exposure locations(s). It is recommended that the peak concentration be directly compared to the OEL to demonstrate conformance to §§ 23.5.1 through 23.5.3. NOTE 150: It is recommended that integrated sampling methods be used when direct-reading instrumentation does not have adequate sensitivity, or when direct-reading technology is not available for the chemicals of interest. Where integrated sampling is used, it is recommended that the sample duration and locations(s) be representative of the worst-case, realistic, anticipated exposure time and locations. The resulting average concentration is directly compared to the OEL to demonstrate conformance to §§ 23.5.1 through 23.5.3.NOTE 151: Tracer gas testing (see Appendix 1 of SEMI S6 for an acceptable method) may be used when direct-reading instrumentation does not have adequate sensitivity, or when direct-reading technology is not available for the chemicals of interest. Tracer gas testing should be used where testing conditions may be hazardous (e.g., system failure simulation with potential release of hazardous gas to atmosphere). It is recommended that tracer gas testing be used only when an accurate rate of chemical emission can be determined. Where used, it is recommended that the sample location(s) be representative of the worst-case, realistic exposure location(s).

23.5.6 23.5.4 Chemical emissions outside the enclosure during a realistic worst-case system failure should be less than the lower of the following two values: 25% of the lower explosive limit (LEL), or 25% of the OEL. Emissions of flammable or combustible chemistries during normal equipment operations, maintenance activities and reasonably foreseeable, worst-case system failure conditions should be controlled to be less than 25% of the lower flammable limit (LFL) on the exterior of the equipment and at the worst case representative potential ignition sources internal to the equipment, as identified as part of a fire risk assessment.

EXCEPTION: Control of emissions does not prohibit the use of combustion modules (e.g., flammable effluent treatment equipment) that use burning a flammable mixture as part of the intended equipment design and normal operations.

NOTE XX: Controlling flammable vapors to less than 25% of the applicable LFL at potential ignition sources is defined in international fire code (IFC). Refer to SEMI S6 for additional information regarding requirements and tracer gas test methodology for flammable and combustible SOCs.

NOTE XX: Assessment of ignition sources can include consideration of engineering controls such as supplying an inert atmosphere, use of intrinsically safe components or ignition source encapsulation when implemented in conformance with the appropriate standard.


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DX-3 Revision to Related Information 5 (CONTINUOUS HAZARDOUS GAS DETECTION) (OPTIONAL Before Effective Date)DX-3.1 Modify ¶ R5-3 as shown below.

R5-3 The following variables should be taken into consideration when determining the necessity for continuous monitoring:

Chemical toxicity, Warning property/OEL ratio, Delivery pressure, LELLower Flammable Limit (LFL), Flow rate of potential leak, Engineering controls in place, and Concentration.

DX-4 Revision to Related Information 16 (DESIGN PRINCIPLES AND TEST METHODS FOR EVALUATING EQUIPMENT EXHAUST VENTILATION — Design and Test Method Supplement Intended for Internal and Third Party Evaluation Use) (OPTIONAL Before Effective Date)DX-4.1 Modify ¶ R16-6.3.3 as shown below.R16-6.3.3 Enclosures for pyrophoric or flammable gases should be designed to ensure adequately uniform dilution (i.e., prevent “pocketing”) and to prevent accumulation of pyrophoric and flammable gases above 25% of their lower explosiveflammable limit. Uniform dilution can generally be verified through exhaust vapor visualization techniques. Ventilation flow rate should be adequate to maintain concentrations below 25% of the lower explosiveflammable limit for the gas with the lowest LELLFL that is used in the enclosure. This can generally be verified using engineering calculations to verify dilution, and vapor visualization to verify mixing.

< End of Ballot >


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The rest of this document is material that is called out in the procedure manual as part of a ballot, but is not part of the balloted change.


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SEMI S2-0715AENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

This Safety Guideline was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 6, 2015. Available at www.semiviews.org and www.semi.org in July 2015; originally published in 1991; previously published February 2015.

NOTICE: Paragraphs entitled “NOTE” are not an official part of this safety guideline and are not intended to modify or supersede the official safety guideline. These have been supplied by the committee to enhance the usage of the safety guideline.

1 Purpose1.1 This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.

2 Scope2.1 Applicability — This guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.

NOTE 1: The list of section numbers and their titles that were shown in ¶ 2.2 in previous revisions of SEMI S2 have been relocated to the front part of the Document into the Table of Contents.

2.2 Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 This guideline is intended for use by supplier and user as a reference for EHS considerations. It is not intended to be used to verify compliance with local regulatory requirements.

3.2 It is not the philosophy of this guideline to provide all of the detailed EHS design criteria that may be applied to semiconductor manufacturing equipment. This guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.

3.3 This guideline is not intended to be applied retroactively.

3.3.1 Equipment models with redesigns that significantly affect the EHS aspects of the equipment should conform to the latest version of SEMI S2.

3.3.2 Models and subsystems that have been assessed to a previous version of SEMI S2 should continue to meet the previous version, or meet a more recently published version, and are not intended to be subject to the latest version of SEMI S2.

3.4 In many cases, references to standards have been incorporated into this guideline. These references do not imply applicability of the entire standards, but only of the sections referenced.

4 Referenced Standards and Documents4.1 SEMI Standards and Safety Guidelines

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI F5 — Guide for Gaseous Effluent Handling


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SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures

SEMI F15 — Test Method for Enclosures Using Sulfur Hexafluoride tracer Gas and Gas Chromatography – Has Been Moved to SEMI S6

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S3 — Safety Guideline for Process Liquid Heating Systems

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

4.2 ANSI Standards1

ANSI/RIA R15.06 — Industrial Robots and Robot Systems – Safety Requirements

ANSI/ISA S84.00.01 — Application of Safety Instrumented Systems for the Process Industry

4.3 CEN/CENELEC Standards2

CEN EN 775 — Manipulating Industrial Robots – Safety

CEN EN 1050 — Safety of Machinery – Principles of Risk Assessment

CEN EN 1127-1 — Explosive Atmospheres – Explosion Prevention and Protection – Part 1: Basic Concepts and Methodology

4.4 DIN Standards3

DIN V VDE 0801 — Principles for Computers in Safety-Related Systems

4.5 IEC Standards4

IEC 60825-1 — Safety of Laser Products – Part 1: Equipment Classification, Requirements

IEC 61010-1 — Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use – Part 1: General Requirements

IEC 61508 — Functional Safety of Electrical/Electronic/Programmable Electronic Safety-Related Systems

1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax: 202.293.9287. New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023; http://www.ansi.org2 European Committee for Standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue de Stassart 35, B-1050 Brussels, Belgium; http://www.cen.eu3 Deutsches Institut für Normung e.V., Available from Beuth Verlag GmbH, Burggrafenstrasse 4-10, D-10787 Berlin, Germany; http://www.din.de4 International Electrotechnical Commission, 3 rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone: 41.22.919.02.11; Fax: 41.22.919.03.00; http://www.iec.ch


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4.6 IEEE Standards5

IEEE C95.1 — Safety Levels with respect to Human Exposure to Radio Frequency Electromagnetic Fields, 3kHz to 300 GHz

4.7 ISO Standards6

ISO 2415 — Forged Shackles for General Lifting Purposes Dee Shackles and Bow Shackles

ISO 10218-1 — Robots and Robotic Devices – Safety Requirements for Industrial Robots – Part 1: Robot

ISO 13849-1 — Safety of Machinery – Safety-Related Parts of Control Systems – Part 1: General Principles for Design

4.8 NFPA Standards7

NFPA 12 — Standard on Carbon Dioxide Extinguishing Systems

NFPA 13 — Standard for the Installation of Sprinkler Systems

NFPA 72 — National Fire Alarm and Signalling Code

NFPA 497 — Recommended Practice for the Classification of Flammable Liquids, Gases, or Vapors and of Hazardous (Classified) Locations for Electrical Installations in Chemical Process Areas

NFPA 704 — Standard System for the Identification of the Hazards of Materials for Emergency Response

NFPA 2001 — Standard on Clean Agent Fire Extinguishing Systems

4.9 Underwriters Laboratories Standard8

UL 508A — Standard for Industrial Control Panel

4.10 US Code of Federal Regulations9

21 CFR Parts 1000-1050 — Food and Drug Administration/Center for Devices and Radiological Health (FDA/CDRH), Performance Standards for Electronic Products, Title 21 Code of Federal Regulations, Parts 1000-1050

4.11 Other Standards and Documents

ACGIH, Industrial Ventilation Manual10

ASHRAE Standard 110 — Method of Testing Performance of Laboratory Fume Hoods11

Burton, D.J., Semiconductor Exhaust Ventilation Guidebook12

Uniform Building Code™ (UBC)13

Uniform Fire Code™14

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Institute of Electrtical and Electronics Engineers, 3 Park Avenue, 17th Floor, new York, NY 10016-5997, USA; Telephone: 212 419 7900, Fax: 212 752 4929, http://www.ieee.org 6 International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30; http://www.iso.ch7 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, USA. Telephone: 617.770.3000; Fax: 617.770.0700; http://www.nfpa.org8 Underwriters Laboratory, 333 Pfingsten Rd, Northbrook, IL 60062, USA. Telephone: 877.854.3577; Fax: 847.407.1395; http://www.ul.com9 United States Food and Drug Administration/ Center for Devices and Radiological Health (FDA/CDRH). Available from FDA/CDRH; http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/cfrsearch.cfm10 ACGIH, 1330 Kemper Meadow Road, Cincinnati, OH 45240, USA. http://www.acgih.org11 ASHRAE, 1791 Tullie Circle, NE, Atlanta, GE 30329, USA. http://www.ashrae.org12 IVE, Inc., 2974 South Oakwood, Bountiful, UT 84010, USA. http://www.eburton.com13 International Conference of Building Officials, 5360 Workman Mill Road, Whittier, CA 90601-2298, USA. http://www.icbo.org14 International Fire Code Institute, 5360 Workman Mill Road, Whittier, CA 90601-2298, USA. http://www.ifci.org


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5 Terminology

NOTICE: § 5 will be revised upon the July 2018 publication as shown in Delayed Revisions Section 2. The Environmental Health & Safety Global Technical Committee has voted that the revision is OPTIONAL before the Effective Date.5.1 Abbreviations and Acronyms

5.1.1 ACGIH® — American Conference of Governmental Industrial Hygienists (ACGIH is a registered trademark of the American Conference of Governmental Industrial Hygienists.)

5.1.2 ASHRAE — American Society of Heating, Refrigeration, and Air Conditioning Engineers

5.1.3 MPE — Maximum Permissible Exposure

5.1.4 NOHD — Nominal Ocular Hazard Distance

5.2 Definitions

1: Composite reports using portions of reports based upon earlier versions of SEMI S2 and SEMI S10 may require understanding of the SEMI S2-0703 or SEMI S10-1296 definitions for the terms hazard, likelihood, mishap, severity, and risk.

5.2.1 abort switch — a switch that, when activated, interrupts the activation sequence of a fire detection or fire suppression system.

5.2.2 accredited testing laboratory — an independent organization dedicated to the testing of components, devices, or systems; that is recognized by a government or regulatory body as competent to perform evaluations based on established safety standards.

5.2.3 baseline — for the purposes of this document, “baseline” refers to operating conditions, including process chemistry, for which the equipment was designed and manufactured.

5.2.4 breathing zone — imaginary globe, of 600 mm (two foot) radius, surrounding the head.

5.2.5 capture velocity — the air velocity that at any point in front of the exhausted hood or at the exhausted hood opening is necessary to overcome opposing air currents and to capture the contaminated air at that point by causing it to flow into the exhausted hood.

5.2.6 carcinogen — confirmed or suspected human cancer-causing agent as defined by the International Agency for Research on Cancer (IARC) or other recognized entities.

5.2.7 chemical distribution system — the collection of subsystems and components used in a semiconductor manufacturing facility to control and deliver process chemicals from source to point of use for wafer manufacturing processes.

5.2.8 cleanroom — a room in which the concentration of airborne particles is controlled to specific limits.

5.2.9 combustible material — for the purpose of this guideline, a combustible material is any material that does propagate flame (beyond the ignition zone with or without the continued application of the ignition source) and does not meet the definition in this section for noncombustible material. See also the definition for noncombustible material.

5.2.10 equipment — a specific piece of machinery, apparatus, process module, or device used to execute an operation. The term “equipment” does not apply to any product (e.g., substrates, semiconductors) that may be damaged as a result of equipment failure.

5.2.11 face velocity — velocity at the cross-sectional entrance to the exhausted hood.

5.2.12 facilitization — the provision of facilities or services.

5.2.13 fail-safe — designed so that a failure does not result in an increased risk.

2: For example, a fail-safe temperature limiting device would indicate an out-of-control temperature if it were to fail. This might interrupt a process, but would be preferable to the device indicating that the temperature is within the control limits, regardless of the actual temperature, in case of a failure.


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5.2.14 Fail-to-safe equipment control system (FECS) — a safety-related programmable system of control circuits designed and implemented for safety functions in accordance with recognized standards such as ISO 13849-1 (EN 954-1) or IEC 61508, ANSI SP 84.00.01. These systems (e.g., safety Programmable Logic Controller (PLC), safety-related Input and Output (I/O) modules) diagnose internal and external faults and react upon detected faults in a controlled manner in order to bring the equipment to a safe state.

3: A FECS is a subsystem to a (PES) Programmable Electronic System as defined in IEC61508-4 Definitions.

4: Related Information 13 provides additional information on applications of FECS design.

5.2.15 failure — the termination of the ability of an item to perform a required function. Failure is an event, as distinguished from “fault,” which is a state.

5.2.16 fault — the state of an item characterized by inability to perform a required function, excluding the inability during preventive maintenance or other planned actions, or due to lack of external resources.

5.2.17 fault-tolerant — designed so that a reasonably foreseeable single point failure does not result in an unsafe condition.

5.2.18 flammable gas — any gas that forms an ignitable mixture in air at 20C (68F) and 101.3 kPa (14.7 psia).

5.2.19 flammable liquid — a liquid having a flash point below 37.8C (100F).

5.2.20 flash point — the minimum temperature at which a liquid gives off sufficient vapor to form an ignitable mixture with air near the surface of the liquid, or within the test vessel used.

5.2.21 gas cylinder cabinet — cabinet used for housing gas cylinders, and connected to gas distribution piping or to equipment using the gas. Synonym: gas cabinet.

5.2.22 gas panel — an arrangement of fluid handling components (e.g., valves, filters, mass flow controllers) that regulates the flow of fluids into the process. Synonyms: gas jungle, jungle, gas control valves, valve manifold.

5.2.23 gas panel enclosure — an enclosure designed to contain leaks from gas panel(s) within itself. Synonyms: jungle enclosure, gas box, valve manifold box.

5.2.24 harm — physical injury or damage to health of people, or damage to equipment, buildings, or environments.

5.2.25 hazard — condition that has the potential to cause harm.

5.2.26 hazardous electrical power — power levels equal to or greater than 240 VA.

5.2.27 hazardous production material (HPM) — a solid, liquid, or gas that has a degree-of-hazard rating in health, flammability, or reactivity of class 3 or 4 as ranked by NFPA 704 and which is used directly in research, laboratory, or production processes that have as their end product materials that are not hazardous.

5.2.28 hazardous voltage — unless otherwise defined by an appropriate international standard applicable to the equipment, voltages greater than 30 volts rms, 42.4 volts peak, 60 volts dc are defined in this document as hazardous voltage.

5: The specified levels are based on normal conditions in a dry location.

5.2.29 hinged load — a load supported by a hinge such that the hinge axis is not vertical.

5.2.30 hood — in the context of § 22 of this guideline, “hood” means a shaped inlet designed to capture contaminated air and conduct it into an exhaust duct system.

5.2.31 incompatible — as applied to chemicals: in the context of § 23 of this guideline, describes chemicals that, when combined unintentionally, may react violently or in an uncontrolled manner, releasing energy that may create a hazardous condition.

5.2.32 intended reaction product — chemicals that are produced intentionally as a functional part of the semiconductor manufacturing process.

5.2.33 interlock — a mechanical, electrical or other type of device or system, the purpose of which is to prevent or interrupt the operation of specified machine elements under specified conditions.


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5.2.34 ionizing radiation — alpha particles, beta particles, gamma rays, X-rays, neutrons, high-speed electrons, high-speed protons, and other particles capable of producing ions in human tissue.

5.2.35 laser — any device that can be made to produce or amplify electromagnetic radiation in the wavelength range from 180 nm to 1 mm primarily by the process of controlled stimulated emission.

5.2.36 laser product — any product or assembly of components that constitutes, incorporates, or is intended to incorporate a laser or laser system (including laser diode), and that is not sold to another manufacturer for use as a component (or replacement for such component) of an electronic product.

5.2.37 laser source — any device intended for use in conjunction with a laser to supply energy for the excitation of electrons, ions, or molecules. General energy sources, such as electrical supply mains, should not be considered to be laser energy sources.

5.2.38 laser system — a laser in combination with an appropriate laser energy source, with or without additional incorporated components.

5.2.39 lifting accessory — a component (e.g., eyehook, shackle, hoist ring, wire rope, chain, or eyebolt) which is part of a lifting fixture or is attached directly between the lifting device and the load in order to lift it.

5.2.40 lifting device — a mechanical or electro-mechanical structure that is provided for the purpose of raising and lowering a load during maintenance or service tasks, and may be capable of moving the load in one or more horizontal directions.

5.2.41 lifting equipment — lifting devices, lifting fixtures and lifting accessories.

5.2.42 lifting fixture — a mechanical device or an assembly of lifting accessories (e.g., hoisting yoke, wire rope sling, webbing sling, or chain assembly) placed between the lifting device (but not permanently attached to it) and the load, in order to attach them to each other.

5.2.43 likelihood — the expected frequency with which harm will occur. Usually expressed as a rate (e.g., events per year, per product, or per substrate processed).

5.2.44 local exhaust ventilation — local exhaust ventilation systems operate on the principle of capturing a contaminant at or near its source and moving the contaminant to the external environment, usually through an air cleaning or a destructive device. It is not to be confused with laminar flow ventilation. Synonyms: LEV, local exhaust, main exhaust, extraction system, module exhaust, individual exhaust.

5.2.45 lower explosive limit — the minimum concentration of vapor in air at which propagation of flame will occur in the presence of an ignition source. Synonyms: LEL, lower flammability limit (LFL).

5.2.46 maintenance — planned or unplanned activities intended to keep equipment in good working order. See also the definition for service.

5.2.47 mass balance — a qualitative, and where possible, quantitative, specification of mass flow of input and output streams (including chemicals, gases, water, de-ionized water, compressed air, nitrogen, and by-products), in sufficient detail to determine the effluent characteristics and potential treatment options.

5.2.48 material safety data sheet (MSDS) — written or printed material concerning chemical elements and compounds, including hazardous materials, prepared in accordance with applicable standards.

5.2.49 maximum permissible exposure (MPE) — level of laser radiation to which, under normal circumstances, persons may be exposed without suffering adverse effects.

5.2.50 nominal ocular hazard distance (NOHD) — distance at which the beam irradiance or radiant exposure equals the appropriate corneal maximum permissible exposure (MPE).

6: Examples of such standards are USA government regulation 29 CFR 1910.1200, and Canadian WHMIS (Workplace Hazardous Material Information System).

5.2.51 noncombustible material — a material that, in the form in which it is used and under the conditions anticipated, will not ignite, burn, support combustion, or release flammable vapors when subjected to fire or heat. Typical noncombustible materials are metals, ceramics, and silica materials (e.g., glass and quartz). See also the definition for combustible material.


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5.2.52 non-ionizing radiation — forms of electro-magnetic energy that do not possess sufficient energy to ionize human tissue by means of the interaction of a single photon of any given frequency with human tissue. Non-ionizing radiation is customarily identified by frequencies from zero hertz to 3 × 1015 hertz (wavelengths ranging from infinite to 100 nm). This includes: static fields (frequencies of 0 hertz and infinite wavelengths); extremely low frequency fields (ELF), which includes power frequencies; subradio-frequencies; radiofrequency/microwave energy; and infrared, visible, and ultraviolet energies.

5.2.53 non-recycling, deadman-type abort switch — a type of abort switch that must be constantly held closed for the abort of the fire detection or suppression system. In addition, it does not restart or interrupt any time delay sequence for the detection or suppression system when it is activated.

5.2.54 occupational exposure limits (OELs) — for the purpose of this document, OELs are generally established on the basis of an eight hour workday. Various terms are used to refer to OELs, such as permissible exposure levels, Threshold Limit Values, maximum acceptable concentrations, maximum exposure limits, and occupational exposure standards. However, the criteria used in determining OELs can differ among the various countries that have established values. Refer to the national bodies responsible for the establishment of OELs. (Threshold Limit Value is a registered trademark of the American Conference of Governmental Industrial Hygienists.)

5.2.55 operator — a person who interacts with the equipment only to the degree necessary for the equipment to perform its intended function.

5.2.56 parts-cleaning hood — exhausted hood used for the purpose of cleaning parts or equipment. Synonym: equipment cleaning hood.

5.2.57 placed on the market — made physically available, regardless of the legal aspects of the act of transfer (loan, gift, sale, hire).

5.2.58 positive-opening — as applied to electromechanical control devices. The achievement of contact separation as a direct result of a specified movement of the switch actuator through non-resilient members (i.e., contact separation is not dependent upon springs).

5.2.59 potentially hazardous non-ionizing radiation emissions — for the purposes of this guideline, non-ionizing radiation emissions outside the limits shown in Appendix 4 are considered potentially hazardous.

5.2.60 pyrophoric material — a chemical that will spontaneously ignite in air at or below a temperature of 54.4 C (130F).

5.2.61 radio frequency (rf) — electromagnetic energy with frequencies ranging from 3 kHz to 300 GHz. Microwaves are a portion of rf extending from 300 MHz to 300 GHz.

5.2.62 readily accessible — capable of being reached quickly for operation or inspection, without requiring climbing over or removing obstacles, or using portable ladders, chairs, etc.

5.2.63 recognized — as applied to standards; agreed to, accepted, and practiced by a substantial international consensus.

5.2.64 rem — unit of dose equivalent. Most instruments used to measure ionizing radiation read in dose equivalent (rems or sieverts). 1 rem = 0.01 sievert.

5.2.65 reproductive toxicants — chemicals that are confirmed or suspected to cause statistically significant increased risk for teratogenicity, developmental effects, or adverse effects on embryo viability or on male or female reproductive function at doses that are not considered otherwise maternally or paternally toxic.

5.2.66 residual — as applied to risks or hazards: that which remains after engineering, administrative, and work practice controls have been implemented.

5.2.67 risk — the expected magnitude of losses from a hazard, expressed in terms of severity and likelihood.

5.2.68 safe shutdown condition — a condition in which all hazardous energy sources are removed or suitably contained and hazardous production materials are removed or contained, unless this results in additional hazardous conditions.

5.2.69 safety critical part — discrete device or component, such as used in a power or safety circuit, whose proper operation is necessary to the safe performance of the system or circuit.


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5.2.70 service — unplanned activities intended to return equipment that has failed to good working order. See also the definition for maintenance.

5.2.71 severity — the extent of potential credible harm.

5.2.72 short circuit current rating — the maximum available current to which an equipment supply circuit is intended, by the equipment manufacturer, to be connected.

7: Short circuit current rating for an electrical system is typically based on the analysis of short circuit current ratings of the components within the system. See UL 508A and Related Information 2 of SEMI S22 for methods of determining short circuit rating.

5.2.73 sievert (Sv) — unit of dose equivalent. Most instruments used to measure ionizing radiation read in dose equivalent (rems or sieverts). 1 Sv = 100 rems.

5.2.74 standard temperature and pressure — for ventilation measurements, either dry air at 21C (70F) and 760 mm (29.92 inches) Hg, or air at 50% relative humidity, 20C (68F), and 760 mm (29.92 inches) Hg.

5.2.75 supervisory alarm — as applied to fire detection or suppression systems; an alarm indicating a supervisory condition.

5.2.76 supervisory condition — as applied to fire detection or suppression systems; condition in which action or maintenance is needed to restore or continue proper function.

5.2.77 supplemental exhaust — local exhaust ventilation that is used intermittently for a specific task of finite duration.

5.2.78 supplier — party that provides equipment to, and directly communicates with, the user. A supplier may be a manufacturer, an equipment distributor, or an equipment representative. See also the definition for user.

5.2.79 testing — the term “testing” is used to describe measurements or observations used to validate and document conformance to designated criteria.

5.2.80 trouble alarm — as applied to fire detection or suppression systems; an alarm indicating a trouble condition.

5.2.81 trouble condition — as applied to fire detection or suppression systems; a condition in which there is a fault in a system, subsystem, or component that may interfere with proper function.

5.2.82 user — party that acquires equipment for the purpose of using it to manufacture semiconductors. See also the definition for supplier.

5.2.83 velocity pressure (VP) — the pressure required to accelerate air from zero velocity to some velocity V. Velocity pressure is proportional to the kinetic energy of the air stream. Associated equation:

VP = (V/4.043)2 (3)

where:

V = air velocity in m/s

VP = velocity pressure in mm water gauge (w.g.)

U.S. units: VP = (V/4005)2 (4)

where:

V = velocity in feet per second

VP = velocity pressure in inches water gauge (w.g.)

5.2.84 volumetric flow rate (Q) — in the context of § 22 of this guideline, Q = the volume of air exhausted per unit time. Associated equation:

Q = VA (5)

where:

V = air flow velocity


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A = the cross-sectional area of the duct or opening through which the air is flowing at standard conditions.

5.2.85 wet station — open surface tanks, enclosed in a housing, containing chemical materials used in the manufacturing of semiconductor materials. Synonyms: wet sink, wet bench, wet deck.

5.2.86 yield strength — the stress at which a material exhibits a specified permanent deformation or set. This is the stress at which, the strain departs from the linear portion of the stress-strain curve by an offset unit strain of 0.002.15

6 Safety Philosophy

7 General Provisions

8 Evaluation Process

9 Documents Provided to User

10 Hazard Alert Labels

11 Safety Interlock Systems

12 Emergency Shutdown

13 Electrical Design

14 Fire Protection

15 Process Liquid Heating Systems

16 Ergonomics and Human Factors

17 Hazardous Energy Isolation

18 Mechanical Design

19 Seismic Protection

20 Automated Material Handlers

21 Environmental Considerations

22 Exhaust Ventilation

23 Chemicals23.1 The manufacturer should generate a chemical inventory identifying the chemicals anticipated to be used or generated in the equipment. At a minimum, this should include chemicals in the recipe used for equipment qualification or “baseline” recipe, as well as intended reaction products and anticipated by-products. Chemicals on this list that can be classified as HPMs, or odorous (odor threshold <1 ppm) or irritant chemicals (according to their material safety data sheets), should also be identified.

23.2 A hazard analysis (see § 6.8) should be used as an initial determination of chemical risk as well as to validate that the risk has been controlled to an appropriate level.

23.2.1 The hazard analysis, at a minimum, should address the following conditions:

potential mixing of incompatible chemicals;

potential chemical emissions during routine operation;

potential chemical emissions during maintenance activities; and

potential key failure points and trouble spots (e.g., fittings, pumps).

15 Roark’s Formulas for Stress and Strain, Seventh Edition, McGraw-Hill (2002): p. 826.


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23.2.2 All routes of exposure (e.g., respiratory, dermal) should be considered in exposure assessment.

23.3 The order of preference for controls in reducing chemical-related risks is as follows:

23.3.1 Substitution or elimination (see also § 21.2.2);

23.3.2 Engineering controls (e.g., enclosure, ventilation, interlocks);

23.3.3 Administrative controls (e.g., written warnings, standard operating procedures);

23.3.4 Personal protective equipment.

23.4 The design of engineering controls (e.g., enclosure, ventilation, interlocks) should include consideration of (see also Appendix 1):

pressure requirements;

materials incompatibility;

equipment maintainability;

chemical containment; and

provisions for exhaust ventilation (see § 22).

Being Revised

23.5 During equipment development, the supplier should conduct an assessment that documents conformance to the following airborne chemical control criteria. All measurements should be taken using recognized methods with documented sensitivities and accuracy. A report documenting the survey methods, equipment operating parameters, instrumentation used, calibration data, results, and discussion should be available.

23.5.1 There should be no chemical emissions to the workplace environment during normal equipment operation. Conformance to this section can be shown by demonstrating ambient air concentrations to be less than 1% of the occupational exposure limit (OEL) in the worst-case personnel breathing zone. Where a recognized method does not provide sufficient sensitivity to measure 1% OEL, then the lower detection limit of the method may be used to satisfy this criterion.

23.5.2 Chemical emissions during maintenance activities should be minimized. Conformance to this section can be shown by demonstrating ambient air concentrations to be less than 25% of the OEL, in the anticipated worst-case personnel breathing zone, during maintenance activities.

23.5.3 Chemical emissions during equipment failures should be minimized. Conformance to this section can be shown by demonstrating ambient air concentrations to be less than 25% of the OEL, in the anticipated worst-case personnel breathing zone, during a realistic worst-case system failure.

140: The use of direct reading instrumentation under simulated operating, maintenance, or failure conditions is the preferred measurement method. Where used, it is recommended that the sample location(s) be representative of the worst-case, realistic exposure locations(s). It is recommended that the peak concentration be directly compared to the OEL to demonstrate conformance to §§ 23.5.1 through 23.5.3 .

141: It is recommended that integrated sampling methods be used when direct-reading instrumentation does not have adequate sensitivity, or when direct-reading technology is not available for the chemicals of interest. Where integrated sampling is used, it is recommended that the sample duration and locations(s) be representative of the worst-case, realistic, anticipated exposure time and locations. The resulting average concentration is directly compared to the OEL to demonstrate conformance to §§ 23.5.1 through 23.5.3 .

142: Tracer gas testing (see Appendix 1 of SEMI S6 for an acceptable method) may be used when direct-reading instrumentation does not have adequate sensitivity, or when direct-reading technology is not available for the chemicals of interest. Tracer gas testing should be used where testing conditions may be hazardous (e.g., system failure simulation with potential release of hazardous gas to atmosphere). It is recommended that tracer gas testing be used only when an accurate rate of chemical emission can be determined. Where used, it is recommended that the sample location(s) be representative of the worst-case, realistic exposure location(s).

23.5.4 Chemical emissions outside the enclosure during a realistic worst-case system failure should be less than the lower of the following two values: 25% of the lower explosive limit (LEL), or 25% of the OEL.


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23.5.5 The following information should be included in the supporting rationale for the findings related to the above paragraphs in § 23.5.

SOC(s) considered for the evaluation,

Rationale for the sampling method used,

The OEL, type of OEL (for example, Time Weighted Average (TWA), Short Term Exposure Limit (STEL), ceiling) and source of the OEL (for example, ACGIH, German MAK, US OSHA) used in the evaluation,

Whether the testing used the SOC or a surrogate, and

The level of detection achieved during testing.

23.6 Equipment that uses hazardous gases may require continuous detection and, if so, should have sample points mounted in the equipment, or have recommended sampling points identified in the equipment installation instructions. Where the gas supply is part of or controlled by the equipment, the equipment should be able to accept a signal from an external monitoring device and shut down the supply of the gas.

23.7 Appropriate hazard alert labels should be placed at all chemical enclosure access openings.

24 Ionizing Radiation

25 Non-Ionizing Radiation and Fields

26 Lasers

27 Sound Pressure Level

28 Related Documents

Appendix 1 — Design Guidelines for Equipment Using Liquid Chemicals

Appendix 2 — Ionizing Radiation Test Validation

Appendix 3 — Exposure Criteria and Test Methods for Non-Ionizing Radiation (Other Than Laser) and Electromagnetic Fields

Appendix 4 — Fire Protection: Flowchart for Selecting Materials of Construction

Appendix 5 — Laser Data Sheet — SEMI S2

Related Information 1 — Equipment/Product Safety Program

Related Information 2 — Additional Standards That May Be Helpful

Related Information 3 — EMO Reach Considerations

Related Information 4 — Seismic Protection

Related Information 5 — Continuous Hazardous Gas DetectionNOTICE: This Related Information is not an official part of SEMI S2 and was derived from the work of the global Environmental Health & Safety Technical Committee. This Related Information was approved for publication by full letter ballot procedures on October 21, 1999.


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R5-1 Scope — This Related Information provides a list of gases for which continuous monitoring is recommended, and another list of gases for which continuous monitoring may be recommended depending on variables listed below. The list is not intended to be exhaustive (gases that do not appear on the list may need to be continuously monitored).

R5-2 Intent — The purpose of this Related Information is to provide equipment manufacturers with an indication as to what gases are currently continuously monitored by device manufacturers, as guidance for when it may be appropriate to provide an interface (see also § 23).

R5-3 The following variables should be taken into consideration when determining the necessity for continuous monitoring:

Chemical toxicity,

Warning property/OEL ratio,

Delivery pressure,

LEL,

Flow rate of potential leak,

Engineering controls in place, and

Concentration.

Monitoring Recommended Monitoring May Be Recommended

ammoniaarsine

boron trifluoridebromine

carbon dioxidecarbon monoxide

carbon tetrabromidechlorinediborane

dichlorosilanedisilanefluorinegermane

germanium tetrafluorideflammable mixtures containing hydrogen

hydrogen bromidehydrogen chloridehydrogen fluoridehydrogen selenidehydrogen sulfide

methanemethyl chloride

methyl fluoridenitric oxide

nitrogen dioxidenitrous oxide


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Monitoring Recommended Monitoring May Be Recommended

nitrogen trifluorideozone

phosphinesilane

silicon tetrachloridesilicon tetrafluoride

sulfur dioxidetrichlorosilane

tungsten hexafluoride

Related Information 6 — Documentation of Ionizing Radiation (§ 24 and Appendix 2) Including Rationale for Changes

Related Information 7 — Documentation of Non-Ionizing Radiation (§ 25 and Appendix 3) Including Rationale for Changes

Related Information 8 — Laser Equipment Safety Features

Related Information 9 — Laser Certification Requirements by Region of Use

Related Information 10 — Other Requirements by Region of Use

Related Information 11 — Light Tower Color and Audible Alert Codes

Related Information 12 — Surface Temperature Documentation

Related Information 13 — Recommendations for Designing and Selecting Fail-to-Safe Equipment Control Systems (FECS) With Solid State Interlocks and EMO

Related Information 14 — Additional Considerations for Fire Suppression Systems

Related Information 15 — Remote Operations

Related Information 16 — Design Principles and Test Methods for Evaluating Equipment Exhaust Ventilation — Design and Test Method Supplement Intended for Internal and Third Party Evaluation UseNOTICE: This related information is not an official part of SEMI S2 and was derived from the work of the global Environmental Health & Safety Committee. This related information was approved for publication by full letter ballot procedures on May 13, 2009.

R16-1 IntroductionR16-1.1 This related information provides specific technical information relating to § 22. In general, it provides guidelines for:

ventilation design for semiconductor manufacturing equipment, and test validation criteria.

R16-1.2 This related information is intended to be used as a starting point for reference during equipment design.

R16-1.3 This related information is not intended to limit hazard or test evaluation methods or control strategies (e.g., design principles) employed by manufacturers or users. Many different methods may be employed if they provide a sufficient level of protection.


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R16-1.4 This related information is not intended to provide exhaustive methods for determining final ventilation specifications. Other methods may be used where they provide at least equivalent sensitivity and accuracy.

R16-1.5 The exhaust velocities, volume flow rates and pressures listed are derived from a mixture of successful empirical testing and regulatory requirements.

R16-1.6 Test validation criteria are generally referenced from the applicable internationally recognized standard. It is the user’s responsibility to ensure that the most current revision of the standard is used.

Table R16-1 Ventilation

Hood Type Recommended Test Methods Typical Design and Test Exhaust Parameters (See #1)

References

Wet Station Primary: vapor visualization, air samplingSupplemental: capture velocity, slot velocity, tracer gas, air sampling

0.28–0.50 m/s (55–100 fpm) capture velocity for non-heated0.36–0.76 m/s (70–150 fpm) capture velocity for heated110–125% of the laminar flow volume flow rate across the top of the deck

ACGIH Industrial Ventilation ManualAppendix 2 of SEMI S6

Gas Cylinder Cabinets

Primary: face velocity, tracer gasSupplemental: vapor visualization

1.0–1.3 m/s (200–250 fpm) face velocity


Equipment Gas Panel Enclosure

Primary: tracer gas, static pressureSupplemental: vapor visualization

4–5 air changes per minute–1.3 to –2.5 mm (–0.05 to –0.1 inch) H2O static pressure


Diffusion Furnace Scavenger

Primary: face velocity, vapor visualizationSupplemental: tracer gas, air sampling

0.50–0.76 m/s (100–150) fpm face velocityNOTE: Do not use hot wire anemometer.


Chemical Dispensing Cabinets

Primary: static pressureSupplemental: vapor visualization, air sampling where safe, tracer gas where emission rates can be accurately calculated

–1.3 to –2.5 mm (–0.05 to –0.1 inch) H2O static pressure2–3 air changes per minute


Parts-Cleaning Hoods

Primary: face velocity, vapor visualizationSupplemental: tracer gas, air sampling

0.40–0.64 m/s (80–125 fpm) face velocity

ASHRAE Standard 110Appendix 2 of SEMI S6ACGIH Industrial Ventilation Manual

Pump and Equipment Exhaust Lines

Primary: static pressureSupplemental: tracer gas

–6 to –25 mm (–0.25 to –1.0 inch) H2O static pressure125% maximum volume flow rate from pump


Glove Boxes Primary: static pressure, tracer gasSupplemental: vapor visualization, air monitoring

No consensus for a reference at the time of publication of this guideline.


Drying/Bake/Test Chamber Ovens

Primary: static pressure, tracer gasSupplemental: vapor visualization, air monitoring

–1.3 to –2.5 mm (–0.05 to –0.1 inch) H2O static pressure

Appendix 2 of SEMI S6ACGIH Industrial Ventilation Manual

Spin-Coater (cup only)

Primary: vapor visualization, velometrySupplemental: air sampling

(see SEMI S2 §§ 23.5.1–23.5.3) ACGIH Industrial Ventilation Manual

Supplemental Exhaust

Primary: capture velocity, vapor visualization, air sampling

0.50–0.76 m/s (100–150 fpm) capture velocity

ACGIH Industrial Ventilation Manual

#1 All measurements should be within ±20% of average for face velocity, ±10% of average along the length of each slot for slot velocity, and ±10% of average between slots for slot velocity.


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R16-2 Exhaust OptimizationR16-2.1 Exhaust optimization is the use of good ventilation design to create efficient equipment exhaust. The design and measurement methods discussed below confirm that equipment exhaust is acting as the manufacturer intended. This information is not meant to prohibit alternate methods of achieving or verifying good ventilation design. References for ventilation design are included at the end of this related information.

R16-2.2 Design Recommendations

R16-2.2.1 Equipment exhaust design can attempt to reduce inefficient static pressure losses caused by: friction losses from materials; openings, and duct geometries (elbows, duct expansions or contractions); turbulent air flow; fans; internal fittings such as blast gates and dampers; directional changes in airflow.

R16-2.2.2 Other good design principles can include minimizing distance between the source and hood, and reducing enclosure volumes.

R16-2.2.3 For non-chemical issues such as heat from electrical equipment, heat recapture rather than exhaust may be appropriate.

R16-2.2.4 The possible impact of highly directional laminar airflow found in most fabs should be considered when designing equipment exhaust.

R16-2.3 Recommended Equipment Controls — The location of internal blast gates or dampers inside equipment, and their appropriate settings, should be clearly identified. The number of equipment dampers and blast gates should be minimized. Gates/dampers should be lockable or otherwise securable. Static pressure or flow sensors installed on equipment by the manufacturer should have sufficient sensitivity and accuracy to measure exhaust flowrate fluctuations that place the equipment out of prescribed ranges.

R16-2.4 Recommended Measurement/Validation Method — Measurements should be made to identify optimal exhaust levels and confirm that safety and process requirements are being addressed. The manufacturer should be able to identify any critical equipment locations for chemical capture, and quantify appropriate exhaust values. Multiple validation/measurement methods may be needed.

R16-2.4.1 Measurements should be done after equipment components are assembled.

R16-2.4.2 Computer modeling can be done to predict exhaust flow and hazardous material transport in equipment by solving fluid mechanics conservation of energy and mass equations. Modeling can be used in the equipment design stage or to improve existing equipment. Computer models should be verified experimentally, using one or more of the methods discussed below.

R16-2.4.3 Tracer gas testing provides a method to test the integrity of hoods by simulating gas emission and measuring the effectiveness of controls. Testing until there is a failure, and then slightly increasing the flow rate until the test is successful can be used to help minimize air flow specifications.

R16-2.4.4 Chemical air or wipe monitoring can be used to confirm that chemical transport is not occurring into unintended areas of the equipment.

R16-2.4.5 Velocity profiling will confirm expected airflows, the direction of flow, and the effect of distance.

R16-2.4.6 Vapor visualization will confirm expected airflows, the direction of flow, and the effect of distance. Vapor visualization is the observation of aerosols (e.g., aerosols generated by using water, liquid nitrogen, or dry ice) so that exhaust flow patterns can be observed. Smoke tubes or aerosols may also be used, however they can produce contamination.

R16-3 Chemical Laboratory Fume Hoods, Parts Cleaning HoodsR16-3.1 Lab fume hoods and part cleaning hoods are designed to control emission by enclosing a process on five sides and containing the emission within the hood.


R16-3.2.1 Fully enclosed on five sides, open on one side for employee access and process/parts placement and removals.


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R16-3.2.2 Front (employee access side) should be provided with sliding door and/or sash.

R16-3.2.3 Minimize size of the hood based on process size.

R16-3.2.4 Minimize front opening size based on size of process and employee access needs.

R16-3.2.5 Ensure hood construction materials are compatible with chemicals used.

R16-3.3 Control Specifications — Face velocity is the specification generally used with hoods open on only one side.

R16-3.3.1 Generally acceptable laboratory fume hood face velocities range from 0.40–0.60 m/s (80–120 fpm) with no single measurement ±20% of average. 0.64–0.76 m/s (125–150 fpm) is recommended for hoods in which carcinogens or reproductive toxicants may be used.

R16-3.3.2 Air movement in the work area.

R16-3.3.3 An average face velocity of 0.50 m/s (100 fpm) is generally found to be acceptable in most applications.

R16-3.3.4 Face velocities of 0.64–0.76 m/s (125–150 fpm) may be required when a lab hood is installed in an area with laminar air flow.

R16-3.3.5 Face velocity above 0.76 m/s (150 fpm) should be avoided to prevent eddying caused by a lower pressure area in front of an employee standing at the hood.

R16-3.4 Recommended Measurement/Validation Method

R16-3.4.1 The preferred method is measurement of average face velocity and hood static pressure. Measurements are taken with a velometer or anemometer. Multiple measurements are taken in a grid, at least 10–40 per square meter (1–4 per square foot) of open area, in the plane opening of the hood. This allows representative, evenly spaced measurements to be taken (see also open-surface tanks).

R16-3.4.2 Additional confirmation by visualization check of containment using smoke or vapor testing.

R16-3.4.3 ASHRAE Method 110, or equivalent (use appropriate sections), for tracer gas testing of lab hoods may be used as a supplemental verification provided that an accurate emission rate can be defined. (ASHRAE 110 lists 3 tests: “as manufactured,” “as used,” and “as installed.” The “as manufactured” test is the test that is used most frequently.)

R16-4 Wet StationsR16-4.1 Wet stations are slotted hoods designed to capture laminar air flow while also capturing wet process emissions from the work area. Wet stations can be open on the front, top and both sides (it is usually preferable to enclose as much as possible).


R16-4.2.1 Slots should be provided uniformly along the length of the hood for even distribution of airflow.

R16-4.2.2 Additional lip exhaust slots should be provided around tanks or sinks to control emissions.

R16-4.2.3 The plenum behind the slots should be sized to ensure even distribution of static pressure. These slots should be designed to ensure adequate airflow is provided by the side slots, and to minimize turbulence that could reduce exhaust performance.

R16-4.2.4 Velocity along length of slot should not vary by more than 10% of the average slot velocity.

R16-4.2.5 Additional use of end or side panels/baffles can reduce negative impact of side drafts.

R16-4.2.6 Exhaust volume settings should consider laminar air flow volumes and be balanced to minimize turbulence and to ensure capture.

R16-4.2.7 The station design should consider airflow patterns in the operating zone to minimize turbulent horizontal airflow patterns into and across the work deck.

R16-4.2.8 Additional considerations to reduce exhaust demand include providing covered tanks, and recessing tanks below deck level.


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R16-4.3 Control Specifications

R16-4.3.1 Wet station specifications are complicated by the fact that wet stations generally do not have an easily definable face velocity to measure. A number of methods have been used and are all acceptable if used consistently and provided documentation indicates chemical containment meets the 1% of the OEL at distances beyond the plane of penetration at the exterior of the wet station.

R16-4.3.2 Maintain an average capture velocity of 0.33–0.50 m/s (65–100 fpm) immediately above a bath.

R16-4.3.3 Calculate the total exhaust volume requirement by determining the total volumetric flow of laminar air hitting the deck and increasing this value by 20%–25%.

R16-4.3.4 For some wet stations that are partially enclosed from the top, an artificial plane opening (“face”) can be defined where the downward laminar air flow penetrates the capture zone (at “face velocity”) of the wet station. Depending on the hood design and laminar air flow provided, average face velocities can range from 0.20–0.50 m/s (40–100 fpm). The measurement location can greatly influence the measured face velocity; therefore, this method should be supplemented with at least one of the preceding methods for greater accuracy and reproducibility at the user’s facility.


R16-4.4.1 Confirmation of capture using vapor visualization.

R16-4.4.2 Confirmation of laminar flow of make up air into the station using vapor visualization.

R16-4.4.3 Tracer gas testing may be used as supplemental verification, provided an emission rate can be accurately defined.

R16-5 Supplemental ExhaustR16-5.1 Supplemental exhaust, if not designed into the equipment, can be provided by a flexible duct with a tapered hood. This can be placed in the work area to remove potential contaminants before they enter the breathing zone. Supplemental exhaust is frequently used during maintenance or service.


R16-5.2.1 Retractable or movable non-combustible flex ducting for easy reach and placement within 150–300 mm (6–12 inches) of potential emissions to be controlled.

R16-5.2.2 Manual damper at hood to allow for local control (i.e., shut off when not required).

R16-5.2.3 Tapered hood with a plane opening as a minimum. The additional use of flanges or canopies to enclose the process will result in improved efficiency.


NOTE 184: This is one equation that is most commonly used. Other equations may be appropriate; see also ACGIH Industrial Ventilation Manual, and Semiconductor Exhaust Ventilation Guidebook.

R16-5.3.1 A minimum capture velocity of 0.50 m/s (100 fpm) is required at the contaminant generation point for releases of vapor via evaporation or passive diffusion. Ventilation should not be relied upon to prevent exposures to hazardous substances with release velocities (e.g., pressurized gases). For a plane open ended duct without a flange, the air flow required at a given capture velocity can be calculated by:

Q = V(10X2 + A) (R17-1)

where:

Q = required exhaust air flow in m3/s (cfm)

V = capture velocity in m/s (fpm) at distance X from hood

A = hood face area in square meters (square feet)


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X = distance from hood face to farthest point of contaminant release in meters (feet).NOTE: This is only accurate when X is within 1.5 diameters of a round opening, or within 0.25 circumference of a square opening.


R16-5-4-1 Measurement of capture velocity at farthest point of contaminant release. Measurements taken with a velometer or anemometer.

R16-5.4.2 Confirmation by visualization check of capture using vapor capture testing.

R16-6 Equipment Gas Panel EnclosuresR16-6.1 Equipment gas panel enclosures, also known as gas boxes, jungle enclosures, gas jungle enclosures, valve manifold boxes, and secondary gas panel enclosures, are typically six-sided fully enclosed enclosures with access panels/doors on at least one side. These ventilated enclosures are designed to contain and remove hazardous gases from the work area in the event of a gas piping failure or leak. Gas panel enclosures are typically of two types, those requiring no access while gas systems are charged, and those that must be opened during processing while gas systems are charged. There is also a distinct difference in control specifications for those with pyrophorics or other flammables vs. other HPMs, specifically in the control of pocketing.


R16-6.2.1 Compartmentalize potential leak points.

R16-6.2.2 Minimize the total size of the panel and its enclosure.

R16-6.2.3 Minimize size and number of openings.

R16-6.2.4 Minimize static pressure requirements of the enclosure; control has been shown to be achievable with –1.3 to –2.5 mm (–0.05 to –0.1 inch) w.g.

R16-6.2.5 Design for sweep. Minimize the number and size of openings. Seal unnecessary openings (e.g., seams, utility holes).

R16-6.2.6 Where routinely used access doors are required:

Make the access door as small as practical. Place the openings to the enclosure in the access door to minimize air flow requirements. Provide baffles behind the door to direct leaks away from the door and openings. Compartmentalize the enclosure so that access to one area does not affect air flow control in other areas.


R16-6.3.1 Exhaust volumes as low as 4–5 air changes per minute or less can be specified and meet the SEMI S2 criteria in § 23.5 if the design principles listed above are considered when designing equipment and enclosures.

R16-6.3.2 Where there is potential for chemical exposure during access which can be controlled by face velocity, the enclosure should also provide a minimum face velocity of 0.36–0.76 m/s (70–150 fpm) when open. Face velocity should not be relied upon to control emissions from a pressurized fitting.

R16-6.3.3 Enclosures for pyrophoric or flammable gases should be designed to ensure adequately uniform dilution (i.e., prevent “pocketing”) and to prevent accumulation of pyrophoric and flammable gases above their lower explosive limit. Uniform dilution can generally be verified through exhaust vapor visualization techniques. Ventilation flow rate should be adequate to maintain concentrations below 25% of the lower explosive limit for the gas with the lowest LEL that is used in the enclosure. This can generally be verified using engineering calculations to verify dilution, and vapor visualization to verify mixing.


R16-6.4.1 Preferred validation by tracer gas testing per Appendix 2 of SEMI S6.


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R16-6.4.2 Additional confirmation by visualization check of air flow, mixing and sweep using smoke or vapor testing.

R16-6.4.3 Measurement of average face velocity at inlet(s), opening(s), or routinely used access doors. Measurements should be taken with a velometer or anemometer. For larger openings, multiple measurements are taken in a grid, at least 10–40 per square meter (1–4 per square foot) of open area. Useful equation: V = 4.043 (VP/d)0.5, where V = velocity in m/s, VP = velocity pressure in mm H2O, and d = density correction factor (unitless).

R16-7 Equipment Exhaust Ventilation Specifications and MeasurementsR16-7.1 Specifications for equipment exhaust should be provided by the supplier and define:

R16-7.1.1 The control specification or standard for the hood or enclosure (i.e., face velocity or capture velocity if applicable).

R16-7.1.2 The airflow in the duct required to maintain the control volume or flow required. Measurements should be made using the ACGIH pitot traverse method described below.

R16-7.1.3 The location where the Pitot traverse measurement in the duct was made.

R16-7.1.4 Static pressure requirements.

R16-8 Duct Traverse MethodR16-8.1 Because the air flow in the cross-section of a duct is not uniform, it is necessary to obtain an average by measuring velocity pressure (VP) at points in a number of equal areas in the cross-section. The usual method is to make two traverses across the diameter of the duct at right angles to each other. Reading is taken at the center of annular rings of equal area. Whenever possible, the traverse should be made 7.5 duct diameters downstream and 3 diameters upstream from obstructions or directional changes such as an elbow, hood, branch entry, etc. Where measurements are made closer to disturbances, the results should be considered subject to some doubt and checked against a second location. If agreement within 10% of the two traverses is obtained, reasonable accuracy can be assumed, and the average of the two readings used. Where the variation exceeds 10%, a third location should be selected and the two air flows in the best agreement averaged and used. The use of a single centerline reading for obtaining average velocity is a very coarse approximation and is not recommended. If a traverse cannot be done, then the centerline duct velocity should be multiplied by 0.9 for a coarse estimate of actual average duct velocity. Center line duct velocity should not be used less than 5 duct diameters from an elbow, junction, hood opening, or other source of turbulence.

R16-8.2 For ducts 150 mm (6 inches) and smaller, at least 6 traverse points should be used. For round ducts larger than 150 mm (6 inches) diameter, at least 10 traverse points should be employed. For very large ducts with wide variation in velocity, 20 traverse points will increase the precision of the air flow measurement.

R16-8.3 For square or rectangular ducts, the procedure is to divide the cross-section into a number of equal rectangular areas and measure the velocity pressure at the center of each. The number of readings should not be less than 16. Enough readings should be made so the greatest distance between centers is less than 150 mm (6 inches).

R16-8.4 The following data are required:

R16-8.4.1 The area of the duct at the traverse location.

R16-8.4.2 Velocity pressure at each point in the traverse and/or average velocity and number of points measured.

R16-8.4.3 Temperature of the air stream at the time and location of the traverse.

R16-8.4.4 The velocity pressure readings obtained are converted to velocities, and the velocities (not the velocity pressures) are averaged. Useful equation: V = 4.043 (VP/d)0.5, where V = velocity in m/s, VP = velocity pressure in mm H2O, and d = density correction factor (unitless). Some monitoring instruments conduct this averaging internal to the instrument.

R16.8.5 Flow measurement taken at other than standard air temperatures should be corrected to standard conditions (i.e., 21C [70F], 760 mm [29.92 inches] Hg).


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Related Information 17 – Additional Guidance for Safety Functions

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.


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