Voltage Sag Immunity Testing for Semiconductor Tool ......voltage sag disturbances throughout the...
2
stringent Samsung Power Vaccine, have become the de facto “performance standards” by which immunity to power corruption is typically measured. These standards define what level of voltage sag a tool should be able to tolerate while continuing to function properly. SEMI F47 standards testing certifies that a tool can continue to perform through a 50% sag for 12 cycles, 70% sag for 30 cycles, and 80% sag for 60 cycles, in a 60 Hz system. This testing covers 90% of the most commonly observed voltage sag disturbances throughout the world. The more stringent Samsung Power Vaccine test is a full 1000 ms with 100% of nominal voltage loss. PSL’s IPC can recreate these sag conditions on the tools at up to 200 Amps, continuous. Testing allows semiconductor tool manufacturers Application Note Voltage Sag Immunity Testing for Semiconductor Tool Manufacturers The semiconductor industry requires tool manufacturers to be certified for voltage sag immunity according to SEMI F47, Samsung Power Vaccine, and other standards. PSL developed the Industrial Power Corruptor (IPC) to very precisely recreate voltage sag conditions for semiconductor tools, and offers testing services, and expertise to help pass certification, ensuring immunity, and tool robustness. Figure 1: PSL engineers use the IPC to test for voltage sag immunity Industrial plants in the U.S. experience approximately 20 power disturbances every year. In emerging economy countries, power quality events are more numerous and severe. Many of the semiconductor fabrication plants (fabs) that use production tools are located in countries that have elevated power quality issues. Power quality disturbances can impact the fabrication process and cause production defects that can result in massive losses of time, resources, and money. The most common disturbance, by far, is a voltage sag. Sags are reduction in voltage amplitude (below 90% of the nominal level), which typically last between a few milliseconds (ms), to a few seconds. Semiconductor fabs require tools that can ride through required and recommended sags. Testing and certification guarantee that if a sag event occurs, and is within the tolerance limits shown in Figure 3, a tool will be certified. Two industry- wide standards, SEMI F47 and the even more
Transcript of Voltage Sag Immunity Testing for Semiconductor Tool ......voltage sag disturbances throughout the...
stringent Samsung Power Vaccine, have become the de facto “performance standards” by which immunity to power corruption is typically measured. These standards define what level of voltage sag a tool should be able to tolerate while continuing to function properly. SEMI F47 standards testing certifies that a tool can continue to perform through a 50% sag for 12 cycles, 70% sag for 30 cycles, and 80% sag for 60 cycles, in a 60 Hz system. This testing covers 90% of the most commonly observed voltage sag disturbances throughout the world. The more stringent Samsung Power Vaccine test is a full 1000 ms with 100% of nominal voltage loss. PSL’s IPC can recreate these sag conditions on the tools at up to 200 Amps, continuous.Testing allows semiconductor tool manufacturers
Application Note
Voltage Sag Immunity Testing for Semiconductor Tool Manufacturers
The semiconductor industry requires tool manufacturers to be certified for voltage sag immunity according to SEMI F47, Samsung Power Vaccine, and other standards. PSL developed the Industrial Power Corruptor (IPC) to very precisely recreate voltage sag conditions for semiconductor tools, and offers testing services, and expertise to help pass certification, ensuring immunity, and tool robustness.
Figure 1: PSL engineers use the IPC to test for voltage sag immunity
Industrial plants in the U.S. experience approximately 20 power disturbances every year. In emerging economy countries, power quality events are more numerous and severe. Many of the semiconductor fabrication plants (fabs) that use production tools are located in countries that have elevated power quality issues.
Power quality disturbances can impact the fabrication process and cause production defects that can result in massive losses of time, resources, and money. The most common disturbance, by far, is a voltage sag. Sags are reduction in voltage amplitude (below 90% of the nominal level), which typically last between a few milliseconds (ms), to a few seconds.
Semiconductor fabs require tools that can ride through required and recommended sags. Testing and certification guarantee that if a sag event occurs, and is within the tolerance limits shown in Figure 3, a tool will be certified. Two industry-wide standards, SEMI F47 and the even more
to strike a balance between increasing voltage sag immunity and increasing equipment cost before going to the fabs. Knowing how a tool reacts to well-defined power corruptions in the field facilitates design enhancements that allow the tool to ride through power quality events in the field. Certification of a semiconductor fab tool is often required before that tool can be purchased by a semi manufacturer. A tool delivery acceptance can be delayed if it is not SEMI F47 certified, resulting in the loss of potential revenue and reputation for the tool manufacturer.
Figure 2: PSL’s Industrial Power Corruptor
“PSL has been great to work with for F47 testing. They provided information up front to help us prepare the equipment and facilities prior to testing, which saved actual time on the tool. The technicians/engineers have been friendly and flexible while on-site. The certificates/reports are detailed and professional and have appeased customers concerns and requests regarding F47. I would definitely recommend PSL!!!”
Tara Smithers ASM America (September 2017)
Figure 3: SEMI F47 voltage sag ride-through capa-bility curve. The green area defines what a fabrica-tion tool must withstand to be SEMI F47 compliant.
APP NOTE: F47 - Oct 23, 2017 v1.0
Power Standards Lab980 Atlantic Ave | Alameda, CA 94501, USA
Tel ++1-510-522-4400 | Fax ++1-510-522-4455 [email protected] | www.powerstandards.com a Power Survey company
Semiconductor Equipment Materials International (SEMI), the Institute of Electrical and Electronic Engineers (IEEE), and the International Electrotechnical Commission (IEC) are international organizations that set industry standards for electrical power and power quality conformity.
Alex McEachern, PSL’s founder, is the chairman of SEMI, the IEC working group, and a Fellow of
the IEEE. He helped create the SEMI F47 standards and the IPC to test equipment against those standards to support testing. The IPC is the only mobile device on the market that can recreate the power quality events defined by SEMI F47, and the Samsung Power Vaccine. PSL’s testing engineers have completed thousands of certifications throughout the world, utilizing that experience to advise semiconductor fabs on the best way to obtain voltage sag immunity. Only PSL certifications are universally recognized by all semiconductor fabs worldwide.
