Vincenzo Guidi Dipartimento di Fisica Università di Ferrara
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Transcript of Vincenzo Guidi Dipartimento di Fisica Università di Ferrara
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Vincenzo GuidiVincenzo Guidi
Dipartimento di FisicaDipartimento di FisicaUniversità di FerraraUniversità di Ferrara
The sensors and semiconductors laboratoryThe sensors and semiconductors laboratory
Dipartimento di Fisica Università di Ferrara - Italy
INFM - INFN
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Activities at the Activities at the Sensors and semiconductors groupSensors and semiconductors group
• Fundamental and applied research on Fundamental and applied research on nanostructured materialsnanostructured materials
• Micromachining of microdevicesMicromachining of microdevices
• Production and characterization of gas sensors Production and characterization of gas sensors and photovoltaic cellsand photovoltaic cells
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Matteo FerroniAlessio GibertiDario GnaniVincenzo GuidiCesare MalagùFederico MontoncelloMarco PigaAlessandro RonzoniMarco StefancichDonato Vincenzi
OverviewOverview
Prof. Giuliano MartinelliAndrea AntoniniFederico BizziLuca BonazziMariangela ButturiMoira BuzzolaniMaria Cristina CarottaBarbara CavicchiAndrea ChiapattiLuigi Crema
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1 1 mmmm
thick thick filmfilm
the the sensorsensor
00 250250 500 500 nmnm00
250250
500500
00 250250 500 500 nmnm
Powder preparationPowder preparationPowder preparationPowder preparation
Thick film Thick film processprocess
Thick film Thick film processprocess
paste paste preparatipreparati
onon
paste paste preparatipreparati
onon
printing printing of the of the
pastepaste
printing printing of the of the
pastepaste
substratsubstratee
substratsubstratee
temperaturtemperature feed-back e feed-back
resistorresistor
platinum platinum heaterheater
gold gold electrodeselectrodes
Chemoresistive gas sensorsChemoresistive gas sensors
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650 650 ooCC 850 850 ooCC
Doping with tantalum (10 at.Doping with tantalum (10 at.% )% )
Doping with tantalum (10 at.Doping with tantalum (10 at.% )% )
TiO2 gas sensing filmsTiO2 gas sensing films
650 650 ooCC 850 850 ooCC
1 1 m m
1.8
1.01.41.82.20204060TaTi-850oCTaTi-650oCTi-650oCTi-850oCCO = 100 ppm wet airCO = 100 ppm wet airCO = 100 ppm wet airCO = 100 ppm wet air
GGg
as
gas/G/G
air
air
GGg
as
gas/G/G
air
air
time time (min)(min)time time (min)(min)
T = 400 T = 400 ooCCT = 400 T = 400 ooCC
1.01.0
1.41.4
2.22.2
2020
4040 606000
1 1 m m 1 1 m m
1 1 m m
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Comparison between conventional and innovative Comparison between conventional and innovative microsensors in CO detectionmicrosensors in CO detection
Time (h)Time (h)
CO
co
nce
ntra
tion
(p
pm
)C
O c
onc
ent
ratio
n (
pp
m)
8:008:00 18:0018:00 8:008:00 18:0018:000:000:00 0:000:001:001:000
0.5
1
1.5
2
2.5
3
3.5 MicrosensorMicrosensor
Conv. instrum.Conv. instrum.
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Monitoring experiments in the frame Monitoring experiments in the frame of a project for of a project for evaluating the evaluating the degradation level of the historical degradation level of the historical buildings in Ferrarabuildings in Ferrara
Air quality assessment in urban environment……Air quality assessment in urban environment……
Palazzo dei Palazzo dei DiamantiDiamanti
11
22
33
44
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Microsensors deposited on a micro hotplateSiO2+Si3N4
Insulating film
Anisotropicetching
SiO2+Si3N4
Polysilicon resistor
Low power consumption Low power consumption because of low thermal because of low thermal conductivity: 30 mW @ conductivity: 30 mW @
400 400 ººC C
Low power consumption Low power consumption because of low thermal because of low thermal conductivity: 30 mW @ conductivity: 30 mW @
400 400 ººC C
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Gas microsensors with hybrid technologyGas microsensors with hybrid technology
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TraditionalTraditionalgas-chromatograficgas-chromatografic
with a capillarywith a capillaryin in fused fused silicasilica
30 cm30 cm
Miniaturized gas-cromatografic Miniaturized gas-cromatografic facility made offacility made of
micromachined silicon micromachined silicon
0,5 mm0,5 mm
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High-concentration photovoltaic solar cellsHigh-concentration photovoltaic solar cells
Mirrors are used to concentrate the radiation of the Sun on high-
efficiency PV cells.
PV cells are fabricated through microlithography
PP NNoxox
P+P+ N+N+
100 100 mm