TriAxis Series Thin Film Deposition Systems
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TriAxis Series Thin Film Deposition Systems Semicore’s TriAxis systems utilize a cost-effective “open platform” design that is easily configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. The TriAxis offers unequaled versatility by being the first to offer all three axes of sputter deposition arrangements (up, down or horizontal) in a single platform. A comprehensive list of standard options is available to configure the TriAxis to suit your specific requirements. Complete Solutions for Standard and Custom Vacuum Deposition 5027 Preston Avenue • Livermore, California 94551 • 925-373-8201 www.semicore.com New from SEMICORE • Unequaled Versatility • 3-Axis Sputtering • Comprehensive Options • Cost Effective
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Semicore’s TriAxis systems utilize a cost-effective “open platform” design that is easily configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. The TriAxis offers unequaled versatility by being the first to offer all three axes of sputter deposition arrangements (up, down or horizontal) in a single platform. A comprehensive list of standard options is available to configure the TriAxis to suit your specific requirements.
Transcript of TriAxis Series Thin Film Deposition Systems
TriAxis Series Thin Film Deposition Systems
Semicore’s TriAxis systems utilize a cost-effective “open platform” design that is easily configured to suit a variety of thin film deposition applications, typically for R&D or small batch production. The TriAxis offers unequaled versatility by being the first to offer all three axes of sputter deposition arrangements (up, down or horizontal) in a single platform. A comprehensive list of standard options is available to configure the TriAxis to suit your specific requirements.
Complete Solutions for Standard and Custom Vacuum Deposition
5027 Preston Avenue • Livermore, California 94551 • 925-373-8201 www.semicore.com
New from SEMICORE
• Unequaled Versatility• 3-Axis Sputtering
• Comprehensive Options• Cost Effective
TriAxis FEATURES & OPTIONSVACUUM CHAMBER 18 or 24 inch diameter - scaled to match the specific application.
ALUMINUM DOOR WITH VIEWPORT (standard)PUMPINGTurbomolecular or cryogenic.
LOAD LOCKManual or automatic transfer, high vacuum pumping, up to 200 mm capacity.
PROCESS CONTROL Manual touch screen using the ISC controller or recipe controlled, PC based process automation.
MONITORINGCrystal monitoring, optical monitoring and special data gathering software for in-situ measurement of film deposition.
SUBSTRATE FIXTURES Single, multiple, planetary or custom substrate fixtures.SUBSTRATE HOLDERSHeated, cooled or biased, rotating substrate holder.
ION SOURCEPre-cleaning, IBAD - assisted deposition, milling.
TriAxis DEPOSITION TECHNIQUESMAGNETRON SPUTTERING RF, DC, or Pulsed-DC.
ELECTRON BEAM EVAPORATIONTHERMAL EVAPORATION
ORGANIC EVAPORATION For OLED/PLED and organic electronics.
GLANCING ANGLE DEPOSITION (GLAD)CATHODIC ARC PLASMA DEPOSITIONPULSED LASER DEPOSITION (PLD)
Complete Solutions for Standard and Custom Vacuum Deposition
5027 Preston Avenue • Livermore, California 94551 • 925-373-8201 www.semicore.com
