What is What is Thin Film Deposition?Thin Film Deposition?

Ms. Crystal J. WoodsMs. Crystal J. WoodsEmmett J. Conrad STEM Academy High SchoolEmmett J. Conrad STEM Academy High School

Dallas, TXDallas, TX

Dr. Haiyan Wang, Assistant Dr. Haiyan Wang, Assistant Professor, Electrical and Professor, Electrical and Computer EngineeringComputer Engineering

EducationEducation Ph.D., North Carolina State University, Raleigh, NC, 2002 Ph.D., North Carolina State University, Raleigh, NC, 2002 M.S., Institute of Metal Research, Shenyang, China, 1999 M.S., Institute of Metal Research, Shenyang, China, 1999 B.S., Nanchang University, Nanchang, China, 1998 B.S., Nanchang University, Nanchang, China, 1998 Previous AppointmentsPrevious Appointments Jan.05-Dec.05 - Technical Staff Member, Los Alamos National Laboratory Jan.05-Dec.05 - Technical Staff Member, Los Alamos National Laboratory Jan.03-Dec.04 - Director Funded Postdoctoral Fellow, Los Alamos National Laboratory Jan.03-Dec.04 - Director Funded Postdoctoral Fellow, Los Alamos National Laboratory Research InterestsResearch Interests Nanostructured nitride and oxide thin film heterostructures for microelectronics, optoelectronics, Nanostructured nitride and oxide thin film heterostructures for microelectronics, optoelectronics,

magnetic, high temperature superconductors, solid oxide fuel cells, radiation tolerance and magnetic, high temperature superconductors, solid oxide fuel cells, radiation tolerance and structural applications; structural applications;

High temperature superconductors: coated superconductor scale-up and architectures; flux-High temperature superconductors: coated superconductor scale-up and architectures; flux-pinning mechanisms of nanoparticles and defects pinning mechanisms of nanoparticles and defects

Microstructural characterizations with transmission electron microscopy (TEM), high resolution Microstructural characterizations with transmission electron microscopy (TEM), high resolution TEM, Scanning transmission electron microscopy (STEM) and XRD. TEM, Scanning transmission electron microscopy (STEM) and XRD.

PatentsPatents 8 patents in the areas of thin film architecture and high temperature superconductors 8 patents in the areas of thin film architecture and high temperature superconductors Selected journal publications (105 journal articles and 70 conference proceedings and Selected journal publications (105 journal articles and 70 conference proceedings and

presentations by January 2008)presentations by January 2008) H. Wang, R. Araujo J.G. Swadener, Yongqiang Wang, X. Zhang, E. G. Fu and T. CaginH. Wang, R. Araujo J.G. Swadener, Yongqiang Wang, X. Zhang, E. G. Fu and T. Cagin Ion Ion

Irradiation Effects in Nanocrystalline TiN CoatingIrradiation Effects in Nanocrystalline TiN Coatings, s, Nuclear Instruments Nuclear Instruments

EE33 Research Topic: Thin Research Topic: Thin Film Deposition Film Deposition

(Growth) w/ Dr. Wang(Growth) w/ Dr. Wang Dr. Haiyan Wang, Dr. Haiyan Wang, Assistant Professor, Assistant Professor, Electrical and Electrical and Computer Computer Engineering, TAMUEngineering, TAMU

David Mortimer, David Mortimer, Physics Teacher, Physics Teacher, Del Rio High SchoolDel Rio High School

Crystal J. Woods, Crystal J. Woods, Algebra Teacher, Algebra Teacher, Emmett J. Conrad Emmett J. Conrad STEM Academy High STEM Academy High SchoolSchool

Use of Thin Film DepositionUse of Thin Film Deposition Thin Film Growth or Deposition: It is a Thin Film Growth or Deposition: It is a

thin layer of coating on a substrate or thin layer of coating on a substrate or template. It serves one or multiple template. It serves one or multiple physical purposes including protection, physical purposes including protection, decoration, conducting, reflection, data decoration, conducting, reflection, data storage, insulation, etc.storage, insulation, etc.

Examples: Colorful coatings on cars, Examples: Colorful coatings on cars, golden watches and many others;golden watches and many others;

Corrosion resistive coatings and Corrosion resistive coatings and superhard coatings (petroleum industry, superhard coatings (petroleum industry, chemical factories, etc.);chemical factories, etc.);

Semiconductor industry (Pentium Semiconductor industry (Pentium processors, microchips, memories, iPod, processors, microchips, memories, iPod, etc.);etc.);

““Sunscreen” : a protective coating on Sunscreen” : a protective coating on your skin.your skin.

Thin Film: How does it Thin Film: How does it grow?grow? Kinetic Energy of molecules impact the growth of Thin Film.Kinetic Energy of molecules impact the growth of Thin Film.

Pressure affects the momentum of the molecules.Pressure affects the momentum of the molecules. The energy of the molecules impacts how the molecules find their way to the target, The energy of the molecules impacts how the molecules find their way to the target,

so they can form layers.so they can form layers. The following Parameters will result in a desired epitaxial layer (organized, carefully The following Parameters will result in a desired epitaxial layer (organized, carefully

placed, high quality layer of thin film):placed, high quality layer of thin film): TemperatureTemperature

PressurePressureLaser EnergyLaser EnergyLaser FrequencyLaser FrequencyType of material (Metals)Type of material (Metals)Type of Substrate (Base layer: Type of Substrate (Base layer: Metal or Ceramic)Metal or Ceramic)

Understanding Thin Film GrowthUnderstanding Thin Film Growth Dr. Wang explains thin film Dr. Wang explains thin film

growth as “laying of apples”growth as “laying of apples” A high quality thin film growth A high quality thin film growth

must be layered in an must be layered in an organized pattern. Molecules organized pattern. Molecules must be laid on the target in must be laid on the target in non-disruptive pattern.non-disruptive pattern.

No traffic jams, “no rush hour” No traffic jams, “no rush hour” free flowing traffic.free flowing traffic.

High Quality Growth:

•Ordered foundation

•Same size

•Same pattern

•Right time

•Right condition

Understanding Thin Film Understanding Thin Film GrowthGrowth Atoms must be able to move Atoms must be able to move

around on the substrate until they around on the substrate until they find the right spot. This results in find the right spot. This results in the growth layer.the growth layer.

Understanding Thin Film GrowthUnderstanding Thin Film Growth Congruency is a key component of thin film growth.Congruency is a key component of thin film growth. Similar shapes and/or congruent shapes prevents gaps Similar shapes and/or congruent shapes prevents gaps

or defects in growth layers.or defects in growth layers.

Deposition: What takes place inside Deposition: What takes place inside Chamber?Chamber?

Deposition: What takes place Deposition: What takes place inside Chamber?inside Chamber?

Summer Research: My Exposure of Thin FilmSummer Research: My Exposure of Thin Film

Joon Hwan Lee, Ph.D. CandidateJoon Hwan Lee, Ph.D. Candidate

Research: Transmittance of Light within Thin Film Research: Transmittance of Light within Thin Film

Tools: Spectrophometer, measures transparency of material using wavelengths. Tools: Spectrophometer, measures transparency of material using wavelengths. Wavelengths are used to determine absorption of life. Wavelengths are used to determine absorption of life.

Focus: Compare/Contrast Transmittance when Parameters have been alteredFocus: Compare/Contrast Transmittance when Parameters have been altered

Summer Research: My Exposure of Thin FilmSummer Research: My Exposure of Thin FilmJie (Joyce) Wang, Ph.D. CandidateJie (Joyce) Wang, Ph.D. Candidate

Research: High Temperature SuperconductorResearch: High Temperature Superconductor

Tools: Transmission Electron Microscopy, JEOL JEM-2010 (TEMTools: Transmission Electron Microscopy, JEOL JEM-2010 (TEM))Focus: Compare/Contrast Attachment Layer of Growth when temperature Focus: Compare/Contrast Attachment Layer of Growth when temperature

has been changed . The key is to find nice layers of growth.has been changed . The key is to find nice layers of growth.

Summer Research: My Exposure of Thin FilmSummer Research: My Exposure of Thin Film

Zhenxing Bi, Ph.D. CandidateZhenxing Bi, Ph.D. CandidateResearch: Growth of Vertical Patterns of Thin FilmResearch: Growth of Vertical Patterns of Thin Film

Tools: Transmission Electron Microscopy, JEOL JEM-2010 (TEMTools: Transmission Electron Microscopy, JEOL JEM-2010 (TEM))Focus: Compare/Contrast Thickness and/or Mircostructural Changes when Focus: Compare/Contrast Thickness and/or Mircostructural Changes when

Parameters have been changed. Goal to create high quality vertical Parameters have been changed. Goal to create high quality vertical patterns.patterns.

My experience of Thin Film ResearchMy experience of Thin Film Research

Designing a high quality thin film growth that Designing a high quality thin film growth that demonstrates an organized pattern of the same and/or demonstrates an organized pattern of the same and/or similar shape with various parameters.similar shape with various parameters.

Continue exploring results when different parameters Continue exploring results when different parameters of the thin film process have been changed.of the thin film process have been changed.

High Quality Education

Ms. Woods @ TAMU’s E3 Summer Research Program

E3 Summer Research Program

Thin Film vs. AlgebraThin Film vs. Algebra

High Quality thin film growth

Ordered foundationSame sizeSame patternRight timeRight condition

Patterns producing:

Equations

Linear Functions

Exponential Functions

Scatter Plots

Quadratic Functions

Factoring

Examples of Patterns in Examples of Patterns in AlgebraAlgebra

The powers of 11 also form a sequence: The powers of 11 also form a sequence: 110  =   1110  =   1

111  =   11111  =   11112  =   121112  =   121113  =   1331113  =   1331114  =   14641114  =   14641115  =   161051115  =   161051116  =   1771561116  =   1771561117  =   19487171 117  =   19487171

Examples of Patterns in AlgebraExamples of Patterns in Algebra

Using Patterns of Tiles with Using Patterns of Tiles with Quadratic Functions and FactoringQuadratic Functions and Factoring

Data Used to create Data Used to create FunctionsFunctions

Exponential Functions Linear Functions

Kudos! to my wonderful Kudos! to my wonderful Thin Film Research Team Thin Film Research Team

Jie (Joyce) Wang, Ph.D. Candidate

Roy Araujo, Ph.D. Candidate

Zhenxing Bi, Ph.D. Candidate Sungmee Cho,

Ph.D Candidate

Ick-Chan Kim,

Ph.D. Candidate

Joon Hwan Lee, MS Candidate

Jongsik Yoon, Ph.D. Candidate

Harrison Tsai, MS Candidate

Dr. Haiyan WangDr. Haiyan Wang

Big Thanks to the National Science Foundation!