The MARCO Standard Nuclear Microprobe System• The MARCO Standard Nuclear Microprobe System offers:...
Transcript of The MARCO Standard Nuclear Microprobe System• The MARCO Standard Nuclear Microprobe System offers:...
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 1
The MARCO Standard NuclearMicroprobe System
• The MARCO Standard NuclearMicroprobe System offers:– State of the art technology for ion beam
analysis with focused probes– High performance data acquisition and
analysis– Operator convenience– Flexible design for a wide range of analysis
modes, now and in the future
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 2
Nuclear Microscopy
Ion Source
Condenser Lens
Sample
Data Display
Objective Lens
Bending Magnet
• Nuclear microscopy has much in common withconventional electron or optical microscopy
• MeV ions– penetrate deeply into the specimen– many analysis modes– trace elements– crystallinity– charge induction– stoichimetry measurements– standardless analysis– ion tomography– geology, medicine, technology
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 3
Nuclear Microprobe LaboratoriesWorldwide
• MARCO has extensive experience withthe manufacture and installation ofadvanced systems worldwide
Made inMelbourne
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 4
Nuclear Microprobe KeyComponents
• The MARCO Standard System isbased on the second generationnuclear microprobe in theMicroanalytical Research Centre,School of Physics, University ofMelbourne.
MA-200Aperture
collimators
MA-710 Beam steerer &MA-100 Object collimators MA-400 Probe
forming lens
Microscope
MA-600 x-raydetector
SSBs
Ion pumps
MA-860Samplestage
goniometerMA-10 Low
vibrationmounting
Fromaccelerator
1 m
MA-800Scanner
Turbo pump
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 5
Nuclear Microprobe AnalysisModes with the MARCO Standard
System
Technique Acronym ScatteringPhenomenonS = Sample,I = ion
Sample Property Imaged TypicalElementalsensitivity
Particle Induced X-ray Emission
PIXE S(I,x-ray)S Trace and major elements in top 10-20µm of sample
10 to 100 ppm
RutherfordBackscatteringSpectrometry
RBS S(I,I)S Surface layers of heavy elements on thinfilms from 200nm to 10 µm in thickness
1%
Nuclear ReactionAnalysis
NRA S(I,I’)S’ Light elements in heavy matrix Down to fewppb
Elastic RecoilDetection
ERDA S(I,S)I Light elements in surface µm 1%
Particle Inducedgamma ray emission
PIGE orPIGME
S(I,γ-ray)S’ Light elements in heavy matrix 1% or better
Ion-induced ElectronMicroscopy
IEM S(I,e)S Surface topography Low
Channeling ContrastMicroscopy
CCM <S>(I,I)<S> Crystallinity, orientation,substitutionality of heavy elements inlight matrix
1 %
ScanningTransmission IonMicroscopy
STIM S(I,I)S Areal density of samples thin enough totransmit the beam (up to 50 µm)
n.a.
Channeling ScanningTransmission IonMicroscopy
CSTIM <S>(I,I)<S> Crystallinity, beam damage in samplesthin enough to transmit the beam (up toabout 50 µm)
n.a.
IonMicrotomography
IMT S(I,I)S 3D structure and density of samples upto 50 µm thick
10 %
Ionoluminescence IL S(I,light)S Oxidation state of transition metals,presence of trace rare earths, radiativedefects and other properties of the bandgap
Can be ppb
*PIGME and IL requireoptional detectors
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 6
MARCO Standard SystemConfiguration
Accelerator At least 4 pA/(mrad2µm2MeV)
Object diaphragm 5 to 200 µm diameter
Aperture diaphragm 50 µm to 3 mm diameter
Object – Aperture distance 7250 mm
Aperture – Specimen distance 1200 mm
Aperture – Scan coils distance 300 mm
Probe forming lens system Russian antisymmetric quadruplet of magnetic
quadrupole lenses
Lens bore radius 6 mm
Turns per pole 15
Lens 1 and 4 length 30 mm
Lens 2 and 3 length 60 mm
Lens spacing 35 mm
Working distance (last lens to specimen), WD 150 to 500 mm
Demagnification at shortest WD 26
X-ray detector (A, Ω, θ) Si(Li) 30 mm2, 33 msr, 135o
Particle detectors (A, Ω, θ) PIPS 450 mm2, 126 msr, 135o
PIPS 100 mm2, 30 msr, 145o
Annular 300 mm2, 97 msr, 175o
Additional forward detectors as required
Typical parameters for analysis High current techniques Low current techniques
Object diameter 100 µm 5 µm
Aperture diameter 1 mm 50 µm
Beam convergence angle 0.16o 0.013o
Beam current for 2 MeV He+ 200 pA ~2 fA
Beam current for 3 MeV H+ 360 pA ~5 fA
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 7
Gate valve
Monitor cup (F3) XY steerer
F4 F2
Selector wheel
Diaphragm drum
Monitor cup
Selector wheel
Cooling
Viewer
Monitor cuplocating screws
MA-100MARCO Object Box
• Circular diaphragms: 300 - 10 µmdiameter, conveniently selected byferrofluidic feedthrough on watercooled copper carousel
• Water cooled monitor Faraday cup(F3) with 500 mm aperture
• Second Faraday cup (F4) with beamviewer
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 8
Selector wheel
Gate valve
Viewer & Faraday cup
MA-200MARCO Aperture box
• Circular diaphragms: 50µm - 4mmdiameter, conveniently selected byferrofluidifc feedthrough
• Used for limiting beam divergenceentering probe forming lens system
• Includes Faraday cup and beamviewer
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 9
Probe forming lenses
Microscope & camera
Pumps
XY scan coils
Goniometer
Chamber
MA-400MARCO quadruplet lens system
&MA-500 Specimen Chamber
• Precision magnetic quadrupole lenseswith hyperbolic pole tip
• Precision lens alignment• Optional retractable cradle for
operation with high energy or heavyions
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 10
MA-500Specimen Chamber
• Stainless steel for UHV - clean operation• Re-entrant ports for front or rear viewing
optical microscopes (MA-1000microscope package)
• Provision for x-ray detectors at 135o or90o
• Back or forward scattered particledetectors
Re-entrant microscopeport & light
SiLi port
Specimen
SSB detectors
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 11
MA-400MARCO quadruplet lens system
• Russian anti-symmetric quadrupletconfiguration
• Symmetric demagnification, shallowconvergence angle
• Can focus ion beams with a magneticrigidity up to 8 (8 MeV H+) withoutcooling
• Up to 12 with forced air cooling
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 12
MA-450MARCO/CSIRO Quintuplet system
• An alternative to the MA-400 lenssystem
• 5 lenses of advanced designincorporating pole extensions and yokecut-outs
• Offers high demagnification and shortworking distance
From work done in collaborationwith Dr Chris Ryan, CSIRO.
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 13
MA-800Data Acquisition System
• Total Quantitative Scanning Analysis(TQSA) full event-by-event mode, up to4k x 4k pixels
• Up to 4 detectors, up to 8k channels• MicroDas ADC computer interface• Unix or Windows interface• Extremely robust• High count rates - over 20kHz from each
detector
MicrodasUnit
LabPC+Card
ScanAmplifier
Scan Coils
ADC Units
Y
X
Y
X
Controlcomputer
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MA-810MpSys data acquisition software
• Versatile data control for all users• Powerful command line programming
capabilities as well as graphical userinterface
Spectrumextraction fromregion of interest
Mapping fromfeatures in theenergy spectrum
Full interactivecontrol overcolour pallettewith colour tool
Menus for controlover data displayoptions
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Application: Biomedicine
• Heavy metals in anti-AIDS drug treatedcells by Proton Induced X-rayEmission (PIXE)
Phosphorous (P) Cobalt (Co) Tungsten (W)
Phosphorous showslocation of 10mmdiameter cells.
Cobalt and tungstenmaps shows successfuldelivery of drug into cell.
From work done by Dr Marian Cholewa,MARC, in collaboration with the FairfieldInfectious Diseases Hospital, Melbourne.
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 16
Application: Geology
• Trace element distributions in Auminerals by PIXE
• Lattice location studied by ionchanneling
500x500 µm2
scan size
From work done in collaborationwith Dr Chris Ryan, CSIRO
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 17
Application: Growth defects insemiconductor substrates
• HgCdTe epitaxial layers for IRphotodetectors in fibre-opticcommunication systems
• Defects studied by ion channeling
Optical photo
CCM deep CCM surface
CdTe L x-ray Hg M x-ray
25 µm
From work done in collaborationwith Dr Patrick Leech, Telstra RL.
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 18
Application: Charge transport andrecombination in solar cells
• Ion Beam Induced Charge (IBIC)injects charge through the surface intothe electrically active regions ofelectronic devices
• Charge collection from device mapselectrically active regions and showsrecombination
• This example shows a polycrystallinesilicon solar cell
optical IBIC
1 mm
From work done by LachlanWitham, MARC
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Application: Surface contaminationin synthetic diamond
• CVD Diamond appeared green to eye• 3 MeV H PIXE reveals significant trace
element contamination• C-RBS reveals surface texture
MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 20
MARCO Standard systemGuide Prices (Australian dollars - March 2000)
• MA-10 low vibration girder AUD$33,100• MA-100 Object box AUD$37,060• MA-200 Aperture box AUD$20,280• MA-400 Quadruplet Lens system AUD$125,300• MA-500 Specimen chamber AUD$23,700• MA-600 Detector package AUD$179,300• MA-700 Pump and Vacuum package AUD$199,400• MA-800/810 Data acquisition system AUD$48,000• MA-900 Hall effect lens power supplies AUD$30,500• MA-1000 Optical microscope package AUD$16,900Total System• MA-2000 MARCO standard system AUD$713,000• Options
– MA-710 Beam angle matching steerer AUD$7,500– MA-720 Auxiliary Faraday cup and viewer AUD$5,500– MA-750 External Beam AUD$43,400– MA-850 Specimen stage automation AUD$35,300– MA-860 Channeling goniometer AUD$20,000– MA-450 High excitation quintuplet (replaces MA-400) AUD$140,300
More information:email us on:
[email protected] write to the address on the next page.
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MARCO contact details
• Microanalytical Research CentreSchool of Physics,University of MelbourneParkville, 3010AUSTRALIA
• Ph: + 61 3 8344 5376• Fax: + 61 3 9347 4783• email: [email protected]• web: http://www.ph.unimelb.edu.au/marco
• Materials Analysis using aNuclear Microprobe byBMH Breese, DN Jamiesonand PJC King.
• Published by John Wiley,NY, 1996
• 428 pages, colour diagrams
More information on NuclearMicroprobes