SUMMARY OF 4” WAFER DATA Contamination Control Working Group February 26, 2014

SUMMARY OF 4” WAFER DATAContamination Control Working Group

February 26, 2014

Advanced LIGO

4” Wafer & 1” Optic Placement

G1400142-v1 2

Advanced LIGO

Total Wafers Collected

G1400142-v1 3

HAM1

HAM2

HAM3

HAM4

HAM5

HAM6

BSC1BSC2

BSC3

WBSC6*

WBSC9 /

LBSC4

WBSC10

/ LBSC5

Other

0

2

4

6

8

10

12

14

16

18Hanford

Livingston

Num

ber

of w

afer

s

Advanced LIGO


G1400142-v1 4

Horizontal Vertical0

5

10

15

20

25

30

35

40

45Hanford

Livingston

Orientation

Nu

mb

er o

f w

afer

s

Advanced LIGO


G1400142-v1 4

Horizontal Vertical0

5

10

15

20

25

30

35

40

45Hanford

Livingston

Orientation

Nu

mb

er o

f w

afer

s

Need more samples for analysis.

Advanced LIGO

Analysis Progress

• Counting microscope setup altered & upgraded.• Must re-scan older wafers.

G1400142-v1 5

Advanced LIGO

Analysis Progress

• Counting microscope setup altered & upgraded.• Must re-scan older wafers.

G1400142-v1 5

60

12

Any Scan Settings

Scanned Need to scan

42

30

New Scan Settings


Advanced LIGO

Analysis Progress

• Counting microscope setup altered & upgraded.• Must re-scan older wafers. Good start, there’s more work to do.

G1400142-v1 5

60

12

Any Scan Settings


42

30

New Scan Settings


Advanced LIGO

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7

Particle diameter (µm)

Par

ticl

es p

er 0

.1 m

²

• log vs log2 graph

LBSC1 PCLs

G1400142-v1 6

Goal for vertical surfaces

Goal for horizontal surfaces

Advanced LIGO

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

LBSC1 PCLs

G1400142-v1 6

502

Floor below ITMY (Vertical)+Y edge of chamber

344

June – Sept 20131 cycle (pump down & vent)

No work

Advanced LIGO

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

LBSC1 PCLs

G1400142-v1 6

502

Floor below ITMY (Vertical)+Y edge of chamber

344

June – Sept 20131 cycle (pump down & vent)

No work

Floor below ITMY (Vertical)

166200

Floor below ITMY

Sept – Nov 20131 cycle

*Work is unknown*

Advanced LIGO

Mar – June 20130 cycles

Heavy work & foot traffic

LBSC2 PCLs

G1400142-v1 7

276

Floor below BS

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Advanced LIGO



LBSC2 PCLs

G1400142-v1 7

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

276

Floor below BS

June – Sept 20131 cycle

No work

Floor below BS (Vertical)

1,958

Advanced LIGO



LBSC2 PCLs

G1400142-v1 7

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

276

Floor below BS


No work


1,958


*Work is unknown*

Floor below BSFloor below BS (Vertical)

218233

Advanced LIGO



LBSC2 PCLs

G1400142-v1 7

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

276

Floor below BS


No work


1,958


*Work is unknown*


218233

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

-Y edge of chamber

491

-Y edge of chamber

830

Advanced LIGO



LBSC2 PCLs

G1400142-v1 7

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

276

Floor below BS


No work


1,958


*Work is unknown*


218233

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

-Y edge of chamber

491

-Y edge of chamber

830

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

-Y edge of chamber

-Y edge of chamber

276

Floor below BS


1,958


218233 491 830

Advanced LIGO

LBSC3

G1400142-v1 8

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Floor below ITMX (Vertical)+X edge of chamber

402

395

June – Sept 20131 cycle No work


*Work is unknown*

Advanced LIGO

LBSC3

G1400142-v1 8

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Floor below ITMX (Vertical)+X edge of chamber

402

395

June – Sept 20131 cycle No work

Floor below ITMX (Vertical)

153 337

Floor below ITMX


*Work is unknown*

Advanced LIGO

WBSC Chambers

G1400142-v1 9

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Feb – Oct 20131 cycle

Work in adjacent chambers

WBSC1 – Floor below ITMY

230

Oct – Nov 20131 cycle

No work?

WBSC3 – Floor below ITMX

316

April – Oct 20131 cycle

Heavy work over wafer

WBSC2 – Floor below baffle?

598

Advanced LIGO

WBSC Chambers

G1400142-v1 9

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Feb – Oct 20131 cycle

Work in adjacent chambers

WBSC1 – Floor below ITMY

230

Oct – Nov 20131 cycle

No work?

WBSC3 – Floor below ITMX

316

April – Oct 20131 cycle

Heavy work over wafer

WBSC2 – Floor below baffle?

598

Need more samples to determine trends.

Advanced LIGO

LHAM2 History

G1400142-v1 10

Pump down #1(doors close)

Pump down #2

Vent (doors open)

Vent Pump down #3

Vent

Pump down #4

Vent

Advanced LIGO

LHAM2 History

G1400142-v1 10

Aug '12

Sep '1

2

Oct '1

2

Nov '1

2

Dec '1

2

Jan '1

3

Feb '1

3

Mar

'13

Apr '13

May

'13

Jun '1

3

Jul '

13

Aug '13

Sep '1

3

Oct '1

3

Nov '1

3

Pump down #1(doors close)

Pump down #2

Vent (doors open)

Vent Pump down #3

Vent

Pump down #4

Vent

1 cycleMedium work

(PRM, ISS PD array, PR3 gluing)

1 cycleLight work

(IO baffles installed)

1 cycleNo work

Med. work

Medium work


1 cycleMinimal work

1 cycleLight work

(PR2/PR3 baffles)

Advanced LIGO

LHAM2 History

G1400142-v1 10

Aug '12

Sep '1

2

Oct '1

2

Nov '1

2

Dec '1

2

Jan '1

3

Feb '1

3

Mar

'13

Apr '13

May

'13

Jun '1

3

Jul '

13

Aug '13

Sep '1

3

Oct '1

3

Nov '1

3

1 cycleMedium work


1 cycleLight work

(IO baffles installed)

1 cycleNo work

Med. work

Medium work


1 cycleMinimal work

1 cycleLight work

(PR2/PR3 baffles)

First clean – basic wipe down.Estimated ~ 1 hour.

Big clean – multiple wipe downs over a 2 week period.

1-1.5 hrs per chamber. Wiped all horizontal & vertical surfaces, top & inside of ISI, underneath support tubes, etc.

Advanced LIGO

Aug '1

2

Sep '1

2

Oct '12

Nov '1

2

Dec '1

2

Jan '

13

Feb '1

3

Mar

'13

Apr '1

3

May

'13

Jun '

13

Jul '1

3

Aug '1

3

Sep '1

3

Oct '13

Nov '1

3

LHAM2

G1400142-v1 11

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

Advanced LIGO

Aug '1

2

Sep '1

2

Oct '12

Nov '1

2

Dec '1

2

Jan '

13

Feb '1

3

Mar

'13

Apr '1

3

May

'13

Jun '

13

Jul '1

3

Aug '1

3

Sep '1

3

Oct '13

Nov '1

3

LHAM2

G1400142-v1 11

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

² +X end of table, on mass

293

+X end of table, on mass

424

In front of MC1 & MC3

322

+X end of table, on mass *not sealed

188*

Advanced LIGO

Aug '1

2

Sep '1

2

Oct '12

Nov '1

2

Dec '1

2

Jan '

13

Feb '1

3

Mar

'13

Apr '1

3

May

'13

Jun '

13

Jul '1

3

Aug '1

3

Sep '1

3

Oct '13

Nov '1

3

LHAM2

G1400142-v1 11

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m


293


424


322


188*

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

In front of PR3

In front of PR3

In front of PR3In front of PR3

218817280 268

Advanced LIGO

Aug '1

2

Sep '1

2

Oct '12

Nov '1

2

Dec '1

2

Jan '

13

Feb '1

3

Mar

'13

Apr '1

3

May

'13

Jun '

13

Jul '1

3

Aug '1

3

Sep '1

3

Oct '13

Nov '1

3

LHAM2

G1400142-v1 11

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m


293


424


322


188*

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

In front of PR3

In front of PR3


218817280 268

1E+0

1E+1

1E+2

1E+3

1E+4

1E+5

1E+6

1E+7


Par

ticl

es p

er 0

.1 m

²

In front of PR3

In front of PR3


Near PR3, N door (Vertical)NW corner of tableN side of table (Vertical)

218817280 268

105218

192

Advanced LIGO

LHAM2 Story

G1400142-v1 12

Aug '12

Sep '1

2

Oct '1

2

Nov '1

2

Dec '1

2

Jan '1

3

Feb '1

3

Mar

'13

Apr '13

May

'13

Jun '1

3

Jul '

13

Aug '13

Sep '1

3

Oct '1

3

Nov '1

3

Pump down #1(doors closed)

Pump down #2

Vent (doors open)

Vent Pump down #3

Vent

Pump down #4

Vent

1 cycleMedium work

280 - 817

1 cycleLight work

322

1 cycleNo work

293

Med. Work

188*

Medium work

218 - 268

1 cycleMinimal work

105

1 cycleLight work

192 - 218

Advanced LIGO

Summary

• Cleaning as you go works!– Refer to LIGO-G1301249

G1400142-v1 13

https://dcc.ligo.org/LIGO-G1301249

Advanced LIGO

Summary


• Upcoming…– Compiling WHAM data

G1400142-v1 13


Advanced LIGO

Summary


• Upcoming…– Compiling WHAM data– 1” optic counts & damage plan

G1400142-v1 13


Advanced LIGO

Summary


• Upcoming…– Compiling WHAM data– 1” optic counts & damage plan– Trips to LHO to continue CC support– Opportunity for another round of data when ITM’s

open in April at LHO

G1400142-v1 13


Advanced LIGO

Relevant Documents

• LIGO-F1200021 Advanced LIGO Particulate Sample Form (updated)

• LIGO-T1300014 Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Guidelines

• LIGO-E1201096 Contamination Sample Handling – How to receive, use, send, buy, and store samples

G1400142-v1 14

https://dcc.ligo.org/LIGO-F1200021

https://dcc.ligo.org/LIGO-T1300014

https://dcc.ligo.org/LIGO-E1201096

SUMMARY OF 4” WAFER DATA Contamination Control Working Group February 26, 2014

Documents

Transcript of SUMMARY OF 4” WAFER DATA Contamination Control Working Group February 26, 2014