Settling Time of Opamp

download Settling Time of Opamp

of 7

Transcript of Settling Time of Opamp

  • 8/11/2019 Settling Time of Opamp

    1/7

    IEEE JOURNAL OF SOLID-STATECIRCUITS, VOL. SC-17, NO. 1, FEBRUARY 1982

    Analysis of the Settling Behavior of an

    Operational Amplifier

    C.. CHUANG, STUDENTMEMBER,IEEE

    ,4bstruct-

    The settling behavior of a pole-splitting compensated oper-

    ational amplifier is analyzed using a second-order two-pole transfer

    function. It is shown that although the slewing period of the amplifier

    is well approximated by the commonly used formula for slew rate, the

    settling behavior after the dewing period can only be fully explained

    using a second-order two-pole transfer function.

    Simple criteria

    relating the circuit parameters to the damping ratio of a second-order

    feedback system are given. Analytical expressions for the amplifier

    responses and settling times are derived. The analysis is justitled by

    clme correspondence with computer simulations.

    I. INTRODUCTION

    HE settling time of an operational amplifier is a direct

    measure of the ability of the amplifier to deliver a large

    input signal either step inputs or high-frequency sinusoidal

    signals) [1] , [2] . Settling time is an important parameter in

    many applications, such as A/D and D/A converters, and is

    defined as the time taken for the output of the amplifier to

    settle to within 0.1 or 0.01 percent of its final value after the

    application of an input step. The settling time consists of two

    distinct periods [1]. The first period is the slewing period

    resulting from the limited available current of the input stage

    to charge the compensation capacitor. During the slewing

    period, the amplifier acts in a nonlinear fashion and the output

    makes the transition from the original value to the vicinity of

    the new value. After the slewing period, the amplifier starts

    to settle to the final value in a quasi-linear fashion. Circuit

    approaches such as input stage transconductance reduction

    [3] and doublet pole-zero pair) compression [4] have been

    used to reduce the settling time. However, little has been

    done on the analysis of the settling behavior of an operational

    amplifier. Kamath et al. [5] analyzed the effects of the doublet

    on the frequency response and settling time of the operational

    amplifier. As in most analyses [1], [2], a single dominant-

    pole transfer function is assumed.

    It is well known that when the amplifier starts to settle in

    the quasi-linear region, the output may have underdamped

    overshoot followed by damped sinusoidal), critically damped,

    or overdamped exponentially approaching the final value)

    response,

    depending on circuit parameters. In high-speed

    operational amplifiers, the slewing time can be very short,

    and this second period can dominate the settling time of the

    Manuscript received April 29, 1981; revised September 7, 1981. This

    work was supported in part by the National Science Foundation under

    Grant ENG-78-22193.

    The author is with the Department of Electrical Engineering and

    Computer Sciences and the Electronics Research Laboratory, Univer-

    sity of California, Berkeley, CA 94720.

    ~c

    v

    Fig. 1. Simplified small-signal equivalent circuit for pole-splitting

    compensated two-stageoperational amplifier.

    amplifier. A second-order two-pole) transfer function has to

    be considered to fully explain the settling behavior in this

    quasi-linear region.

    This paper analyzes the settling behavior of a pole-splitting

    compensated [6] operational amplifier. The slewing period is

    analyzed first and the result reduces to the familiar single

    dominant-pole approach under certain approximations. Simple

    criteria relating the circuit parameters to the damping ratio of

    a linear second-order feedback system that determines whether

    the response is underdamped, critically damped, or over-

    damped are then given. Analytical expressions for the ampli-

    fier response and settling time in each case are derived. These

    expressions can be used to quickly estimate the amplifier per-

    formance.

    Finally, computer simulation results are given to

    validate the analysis.

    II. BASIC MODEL FOR CALCULATION OF TRANSIENT

    RESPONSE

    We assume that the amplifier can be well approximated by a

    two-stage configuration with only two high impedance nodes

    as illustrated in Fig. 1 [2], [6]. Each of the two stages is

    assumed to be characterized by a transconductance, load resis-

    tance, and load capacitance.

    We also assume that the circuit

    is compensated by a single pole-splitting capacitor CC.

    It has been shown [2] , [6] that the transfer function can be

    approximated by

    vi

    s

    =

    O

    1-:

    a s) =

    s) 1+ ) k)

    where

    ~o = ( nlZ?l)( 2~2)

    1

    1 = 1 +gmzRz)Rlcc

    1)

    2)

    3)

    0018-9200/82 /0200-0074 00.75 01982 IEEE

  • 8/11/2019 Settling Time of Opamp

    2/7

    CHUANG: SETTLING BEHAVIOROF AN OPERATIONALAMPLIFIER

    ~

    Fig. 2. Operational amplifier model for analysis of the transient response

    in voltage follower configuration.

    4)

    = if Cc, C2 >> Cl)

    5)

    and

    gm2

    Z1 = y.

    (6)

    c

    We further assume that the right half plane zero has been

    eliminated by circuit techniques such as inserting a source

    follower to drive the right end of the compensation capacitor

    from the output of the second stage [7] or inserting a nulling

    resistc}r in series with the compensation capacitor [8] . The

    transfkr function can therefore be written as

    v~ s) =

    a s

    =

    VI

    s

    ,+42+4

    (7)

    \ u,/ \ W,j

    This transfer function is adequate for small-signal linear

    analysis of the amplifier. However, when a large step is applied

    to the amplifier input, the amplifier responds in a grossly non-

    linear fashion during the slewing period and a linear analysis is

    unjustifiable. A model similar to the one used by Kamath

    et al.

    [5] which represents the situation in a practical amplifier

    is shown in Fig. 2. The input stage is modeled as shown with

    a mm imum available current 10 and a transfer characteristic

    slope of gml for values of IVII less than 10 /gml. The whole

    amplifier is connected in a voltage follower configuration.

    Consider the situation when a step of magnitude V is applied

    to the input. In general,

    v>>

    I J

    gm ~

    (8)

    and V is large enough to cause current limiting in the input

    stage. This is the slewing period of the amplifier, and the

    feedback loop is effectively open during this period. When

    the output voltage approaches within 10 /gml of

    V,

    the differ-

    ential input stage enters the linear region and the whole circuit

    settles to its final value with the feedback loop closed [5].

    III. ANALYSIS

    A. Slewing Period

    During the slewing period, the input stage is limiting and

    ll(s) = -

    a. /gm~

    vi(s) =11(s)

    (1+ ) (l+ )

    9)

    75

    lo)

    Taking the inverse Laplace transform, we have

    H

    oIo

    vi t)=

    1

    1- L e-wt + f e-r .

    m 1

    U2 - CJI

    J2 - A l

    11)

    Notice that C.J2>> al so that e-f is a fast-decaying term.

    We can approximate Vo(t) by

    Vo(t) =

    H

    [1 - e-u]. 12)

    At time

    t= T.,

    the output reaches

    V- (10/gml )

    and the whole

    amplifier starts to settle as a linear feedback amplifier with the

    initial condition

    I.

    VO(TJ = V-

    ()

    10

    v l-

    gm 1

    gmlv

    The time T,, obtained by solving 12), is given by

    13)

    14)

    A much simpler expression results if we make the approxima-

    tion

    e

    WTS==1- COITS

    15)

    before solving 12) for

    T..

    Then

    )

    =~ V-L L

    m

    aocol

    16)

    Since

    m

    aotil =

    cc

    17)

    6) can be written as

    T_

    R )=J-:)

    I. [Cc SR

    18)

    where

    SR II)ICC

    (19)

    is the familiar slew rate of an operational amplifier [1], [2], [6].

    1Two initi~ conditions are required in a detailed analysisof a second-

    order state-variable feedback system. However, it can be shown that

    the approximation involved in neglectingthe initial condition for V2at

    t = T,~s equivalent to the approximation 1 + gm1R2 ) ~ gm2R2.

  • 8/11/2019 Settling Time of Opamp

    3/7

    IEEE JOURNAL OF SOLID-STATECIRCUITS, VOL. SC-17,NO. 1, FEBRUARY 1982

    B. Linear ReBon

    For t> T~, the amplifier operates linearly and the feedback

    loop is closed. The transfer function becomes

    ~ s) _ 4)

    A s)=-

    v-~(s) 1+ a(s)

    )

    .

    2

    l+ao in

    .

    82 +-2&.Jns - -0;

    ()

    aO

    2

    l+ao

    r-

    = [(s+ &un) + (an {~)]

    (20)

    where

    Q; = (1 +ao)w1w2

    ~aoc.d1cd2

    (21)

    a )

    (if Cc, C2 >> Cl) (22)

    2@n =(UI +tiz)

    (23)

    and the initial condition at t= TJ is given by (13).

    The closed-loop transfer function in (20) has poles at

    S=-gLdn*dmc

    Jn.

    (24)

    The nature of the closed-loop response depends almost com-

    pletely on the damping ratio ~ [9]. The value of tin simply

    adjusts the time scale.

    If& is less than 1 (underdamped), the

    closed-loop poles are complex conjugates; if & is equal to 1

    (critically damped), both closed-loop poles are equal to -con;

    and if ~ is greater than 1 (overdamped), both closed-loop poles

    are real and negative.

    To relate the damping ratio ~ to circuit parameters, notice

    that from (21) and (23),

    ~=

    +- 6++ -+)

    1

    =

    (u, + (.02)

    2< +ao)6-r1ti2

    JJz

    2=

    (25)

    JZm

    (if CC,C , >> Cl).

    (26)

    24=

    .

    Hence, the conditions ~ 1 correspond, approximately, to

    We will treat the three cases separately.

    Case

    I- Underdamped, ~

    1

    1

    1

    1

    I

    I

    *t

    T, tp

    TSET

    ~~

    Sl ewmg Pmod

    Set tl , n g ,n Li near Reg,on

    T,

    T~L

    Fig. 3 . Typical underdamped (O< g < 1) response of a vol tage follower

    for a step input .

    With the intial condition given by (13), it can be shown that

    for t>

    T,

    ~ y ]

    (){

    vii(t)= Q

    l+ao

    N.1

    ){

    )

    0

    a.

    ~

    v 1- * .-EU(-T)

    l+ao

    }

    . sin [tin{= (t-

    T.)+ ~] , t> T. (29)

    where

    d-

    ~ = tan-l

    E

    (30)

    Here the actual frequency of oscillation in radians per second

    is known as the damped frequency ad and is given by

    [

    =

    (1 +ao)co1ti2 - W1 ~ti2)2 2

    1

    [

    2

    u~

    =

    aoti1ti2 -

    4

    (31)

    [

    )1

    gm2

    1 2

    ~gmlgmz___

    cc C2

    4 C2

    (if CC, C2 >> Cl).

    (32)

    A typical oscillatory response is shown in Fig. 3 and pertinent

    characteristics of the curves are labeled. These are discussed

    below.

    The period of oscillation

    Td

    associated with the damped fre-

    quency cod is

    (33)

  • 8/11/2019 Settling Time of Opamp

    4/7

    CHUANG: SETTLING BEHAVIOROF AN OPERATIONAL AMPLIFIER

    Normalized percent overshoot.

    Po

    lO/gm,V

    100

    50

    L

    00

    05

    10

    .

    Fig. 4. Normalized percent overshoot as a function of the damping

    ratio ~for the underdamped case.

    The time to the maximum, or peak, value of the output is

    tp.

    The maximum value of V.(t) maybe found by taking the

    derivi~tive of VO

    (t)

    with respect to

    t

    and equating the result to

    zero. If this is done, it can be found that dVo

    (t)/dt

    s zero

    when

    ()

    =,~=T n >

    2

    rz=o, l,2, . (34)

    ~d

    The peak value of V.(t)occurs when n = 1 or

    and is given by

    (35)

    .o(t)mm=(~).{l+ [l-~ -~)]

    WA

    ( )v{l+&ex& J}

    (36)

    The percent overshoot (PO) is 100 times the peak value of

    Vo(t)

    minus the final value, divided by the final value. From

    (36), the percent overshoot is simply

    p,,.,()()

    ~.*(1----J ]

    ,XP -J J

    IOO(fi)ex- J

    (37)

    The percent overshoot (normalized with respect to 10 /gml V)

    for a range of values of ~ i s shown in Fig. 4.

    The settling time

    T,et

    is defined as the time required for the

    response to remain within 0.1 percent of its final value. Since

    the magnitude of the sinusoidal portion of (29) is always less

    than or equal to 1, for convenience the settling time can be

    apprc,ximated as the time beyond which the overshoot (or

    undershoot) is less than 0.001 or

    JQ--exp

    (-d )

    > Cl),

    gm

    ~~

    slewing

    settling time in

    period

    linear region

    (40)

    Case11Critically Damped, ~=1:

    In this case, both closed-

    IOODpoles are equal to - con and the respose with initial condi-

    tion (13) can be shown to be

    ()

    i(t)= ~

    V[l - e

    - (t-TJ

    l+ao

    ()

    I.

    - Un(t - Ts)e

    - (WS)] + 1 _

    gmt

    [e

    _Un(r-~~) + ~n(t - T~)e

    -con(t-T~)

    (*) {l-* e-wn(-Ts) ]

    +@n(t - T~)e

    wn(t-Ts)]}, t> T..

    (41)

    The settling time is therefore determined by

    gjv

    e

    -un ~~et~s

    ~n(T,e, - TJ e

    -n(Te-T)]=

    0.001

    (42)

    or

    [1 4T,.t -

    ]e

    Wiz( et~s) _ g?rrv

    _.

    100010

    (43

    The settling time for this case can be determined through

    graphical solution of (43). In practice, as the damping ratio

    approaches 1 from either above or below, it becomes more

    and more difficult to establish the actual damping ratio by

    input-output measurement of the closed-loop system.

    Case 111Overdamped, ~ >1: In this case, the closed-

    loop transfer function has two real negative poles located at

    ,=-gankwnd~.

    (44)

    The response for

    t>

    T~

    with initial condition (13) can be

    shown to be

    ( ){

    ()

    .

    vi(t) ~ ~ v 1-

    grnlv

    l+ao

    2-

    [(g+m)

    . exp(-c+(t -

    T.)( - ~)) - ( - ~)

    }

    exp(-on(t -

    TJ(& +~))] , t> Ts.

    (45)

  • 8/11/2019 Settling Time of Opamp

    5/7

    IEEE JOURNAL OF SOLID STATE CIRCUITS VOL. SC 17 NO. 1 FEBRUARY 1982

    Note that the exp (- tin(t - Ts)(g ~ ~)) term is the

    slowly- decaying term. The settling time can therefore be deter-

    mined approximately from

    1

    .

    exp (- tin(T~et - T~)(~ - ~)) = 0.001. (46)

    Solving for

    T~et,we

    have

    \

    ?

    slewing

    settling time in linear region

    period

    (47)

    IV, COMPUTERSIMULATION

    Direct measurements and experimental verification of the

    circuit behavior described above are djfficult to perform in

    practice because most modern operational amplifiers have

    unity-gain compensation included on the monlithic chip and

    the effects of different parameters in the circuit are difficult

    to isolate.

    To validate the analysis, a computer simulation using the

    SPICE 2 [10], [11], circuit-analysis program has been per-

    formed on a basic CMOS two-stage operational amplifier [8].

    The circuit configuration is shown in Fig. 5 and the pertinent

    parameters are as follows:

    10 =9.11 X 10-6 A

    gml = 2.03 X 10-5 A/V

    gmz = 1.82X 10-4 A/V

    1

    Rn=-n

    gm

    a. =

    5248

    Cz = 5.0 pF.

    (48)

    The compensation capacitor Cc is varied from 1.0 to 4.5 pF,

    giving rise to a damping ratio ranging from 0.53 to 1.19. The

    results of the computer simulation and the analysis for the

    transient response with a -2.5 V input step applied to the

    CMOS operational amplifier in a unity-gain voltage follower

    configuration are shown in Fig. 6(a) for comparison. The

    graphs of Fig. 6(a) are then shown in expanded scales in Fig.

    6(b) and (c) to allow observation of the overshoot, damped

    oscillatory behavior, and 0.1 percent settling time. The close

    correspondence between the analysis and the computer simu-

    lation is evident.

    V.

    DISCUSSION

    As can be seen from the above amdysis, the slewing period of

    an operational amplifier is well approximated by the familiar

    formula (19) for slew rate.

    On the other hand, the settling

    behavior of the amplifier after the slewing period can only

    9rn

    9m2

    0.0

    R,

    c

    cc

    .m

    ~

    Blasdng current source of the f[rst stage

    =911x 10-e A

    Transconductonce of the f rst stage

    =203 x10-

    A/V

    Tronsconductance of the second stage

    =182 x10-4 A/V

    Open loop voltage ga[n

    =5248

    Nulllng res, s tor : ~ Q

    Load

    cxpac fence =

    OpF

    Comp ens ati on c ap ac bt or , v ar ied t o c han ge d ar np ,n g r atmc

    Fig. 5. Configuration of a basic CMOS two-stage operational amplifier

    and pertinent parameters used in the computer simulation.

    be fully explained using a second-order (two-pole) transfer

    function.

    The normalized 0.1 percent settling time in the

    linear region [(39) and (47)], which we denote as tin

    T~L, is

    plotted as a function of the damping ratio ~ with the quan-

    tity 10/gml V as a parameter in Fig. 7. It can be seen that (47)

    is very accurate for values of greater than 1.1. When the

    damping ratio . approaches 1 from above, the exp (- tin(f -

    TJ( +~)) term in (45) becomes more and more sig-

    nificant in determining the settling time. As this term is of

    opposite sign to the exp (- Un(t -

    T~)( - ~))

    term,

    the actual settling time is shorter than that given by (47). The

    range for which is greater than 1.5 is seldom of any interest

    because of the requirement of a huge compensation capacitor

    and the resulting long slewing and settling times. In general,

    for a fwed step size

    V,

    if we decrease the ratio gm~/10 while

    keeping the unity-gain frequency aotil constant (or equiva-

    lently, keeping the gun constant), the slewing period T~will

    decrease, while the settling time in the linear region

    T~L

    will

    increase. A logarithmic plot of

    T~,T~L,

    and

    T~et

    versus 10/gm~V

    in the underdamped case for CC = 1.0 pF is shown in Fig. 8.

    It can be seen that the total settling time Tset decreases as we

    increase 10/gml V due to the decrease in T~, but only up to

    (approximately) the point where T, has become smaller than

    T=.

    For larger values of 10/gn,

    V,

    no further decrease of the

    total settling time is found because of the slowly increasing

    value of

    T L.

    VI.

    CONCLUSION

    We have analyzed the settling behavior of a pole-splitting

    compensated operational amplifier using a second-order (two-

    pole) transfer function. Criteria relating the circuit parameters

    to the damping ratio of a second-order feedback system have

    been given and analytical expressions for amplifier responses

    and settling times were derived. Computer simulation justified

    the validity of the analysis. The results should prove very

    useful in estimating amplifier performance.

  • 8/11/2019 Settling Time of Opamp

    6/7

    CHU,4NG: SETTLING BEHAVIOROF AN OPERATIONALAMPLIFIER

    79

    Vo volts)

    1

    -3.0

    l

    Analysis

    ---

    Simul at ion SPICE 2)

    L

    2.5

    10/gmi

    [~

    d ?[ ?./ - {

    L INEAR REGION

    =0.449V

    2 o

    -

    v

    1.5

    /

    /

    /

    / /

    I///

    I1lIX

    /

    -1.0

    ; , ,/ ,/

    /, ,/

    11 /,/

    0.5

    /1 /,

    ] j /,,~

    1

    00

    0.5

    Vo volts:

    2.6

    2.5

    2,4

    2.3

    .

    1

    I

    1

    1.0 1.5

    2.0

    T]me pee)

    a

    Analysis

    --- Snmulatkan SPICE 2)

    b

    1

    I

    Vo volts)

    2.51

    Analysts

    ---- S[mulatmn SPICE 2)

    I

    srf

    ..___-l

    ..77 -. -

    2.50 _____+

    -; L\_

    1-.- -- /L_

    __________

    0 1 @

    ;;

    20.1/.

    2.481

    1

    I 1 I

    o

    0.5

    I.0

    I.5

    2.0

    Time ~sec)

    c

    Fig. 6. Comparison of the analyzed and computer simulated transient

    responses of the amplifier in voltage follower configuration. a Linear

    voltage scale. b , c Expanded voltage scale.

  • 8/11/2019 Settling Time of Opamp

    7/7

    80

    IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. SC-17, NO. 1, FEBRUARY 1982

    wnT,L

    1

    35 -

    30 -

    25 -

    20 -

    15

    10 -

    5

    Normal ued 0. 1% Set tl{ng T me 1. L,near Regi on

    I

    UNDERDAMPED+

    Eq (39)

    m

    urveo/gmlv

    0.025

    2

    0,050

    3

    0,100

    4

    0.200

    5

    0.400

    + OVEROAMPED

    Eq. (47)

    Exact7 from

    Eq. (45)

    I

    00

    I

    0.5

    1.0 I .5

    %

    (oQmpl.g

    RotIo)

    Fig. 7. Normalized 0.1 percent settling time in the linear region as a

    function of the damping ratio ~.

    Tim:( sec)

    \

    T~ Eq. (14)

    5.0 \

    --.

    T,L . Eq. (39 )

    \,

    -- h=TS TSL

    Eq.39)

    \

    \

    \.

    \

    \.\

    1.0

    ~.

    =. =._._,_-

    /--

    ---

    /-

    ,,-

    0. 0 :

    0.01

    1 1

    0.01

    0. I I .0 Io/gm,v

    Fig. 8. Logarithmic plot of T , T L, and T~et versus lo/gml V in the

    underdamped case for Cc = 1.0 pF. The rest of the parameters are

    as shown in Fig. 5.

    ACKNOWLEDGMENT

    The author gratefully

    of Prof. R. M. White.

    appreciated.

    acknowledges the help and support

    The comments of the reveiwers are

    [1]

    [2]

    [3]

    [4]

    [5]

    [6]

    [7]

    [8]

    [9]

    [10]

    [11]

    REFERENCES

    P. R. Gray and R. G. Meyer, Recent advances in monolithic

    operatiomd amplifier design,

    IEEE Trans. Circuits Syst .

    vol.

    CAS-21, pp. 317-327, May 1974.

    J. E. Solomon,

    The monolithic op-amp: A tutorial study:

    IEEE J. Solid State Circuits VOLSC 9 pp. 314-332, Dec. 1974.

    J. C. Schmoock, An input transconductance reduction technique

    for high-slew rate operational amplifiers, IEEE J. Solid State

    Circuits vol. SC-10, pp. 407-411, Dec. 1975.

    R. J. Apfel and P.R. Gray, A fast-settling monolithic operational

    amplifier using doublet compression techniques, IEEE J. Solid

    State Circuits vol. SC 9 pp. 332-340, Dec. 1974.

    B. Y. Kamath, R. G. Meyer, and P. R. Gray, Relationship be-

    tween frequency response and settling time of operational ampli-

    iiers~

    IEEE J. Solid State Circuits VOLSC 9

    pp. 347-352, Dec.

    1974.

    P. R. Gray and R. G. Meyer,

    Analysis and Design of Analog

    Integrated Circuits. New

    York: Wiley, 1977.

    Y. P. Tsividis and P. R. Gray, An integrated NMOS operat ional

    amplifier with internal compensation, IEEE J. Sol id State Cir

    cuits vol. SC-11, pp. 748-753, Dec. 1976.

    P. R. Gray, Basic MOS operational amplif ier des ignAn over-

    view, in Arrirlog MOS Integrated Circuits P. R. Gray, D. A.

    Hodges, and R. W. Brodersen, Eds. New York: IEEE Press,

    1980, pp. 28-49.

    R. C. Dorf, Modern Control Systems 2nd ed. Reading, MA:

    Addison-Wesley, 1974.

    L. W. Nagel , A computer program to simulate semiconductor

    circuits, Electron. Res. Lab., Univ. California, Berkeley, Memo.

    ERL-M520, May 1975.

    E. Cohen, Program reference for SPICE 2, Electron. Res. Lab. ,

    Univ.California, Berkeley,Memo.ERL-M592,June 1976.

    a Research Assistant in

    C. T. Chuang (S78)

    was born in Taiwan on

    January 11, 1953. He received the B. S.E.E.

    degree from National Taiwan Universi ty, Tai-

    pei, Taiwan, in 1975.

    From 1975 to 1976 he was a Teaching Assis-

    tant in the Department of Electr ical Engineer-

    ing, National Taiwan University, Taipei. From

    1976 to 1977 he was with Department of Elec-

    trical Engineering, University of South Carolina,

    Columbia, doing research on thermal analysis

    for silicon web ~owth. Since 1977 he has b~en

    the Electronics Research Laboratory. University

    of California, Berkeley, where he is currently working tow;d the Ph.D.

    degree . His main research interest is in the area of solid-state devices,

    integrated circuits, and microwave acoustics.